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3634150
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Information
Patent Grant
3634150
References
Source
Patent Number
3,634,150
Date Filed
Not available
Date Issued
Tuesday, January 11, 1972
53 years ago
CPC
C30B25/18 - characterised by the substrate
H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Y10S117/915 - Separating from substrate
Y10S148/026 - Deposition thru hole in mask
Y10S148/043 - Dual dielectric
Y10S148/049 - Equivalence and options
Y10S148/052 - Face to face deposition
Y10S148/085 - Isolated-integrated
Y10S148/105 - Masks, metal
Y10S148/106 - Masks, special
Y10S148/135 - Removal of substrate
Y10S148/145 - Shaped junctions
Y10S148/15 - Silicon on sapphire SOS
Y10S148/164 - Three dimensional processing
Y10S438/945 - Special
US Classifications
117 - Single-crystal, oriented-crystal, and epitaxy growth processes
148 - Metal treatment
257 - Active solid-state devices
438 - Semiconductor device manufacturing: process
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