3657545

Information

• Patent Grant
• 3657545

• References
• Source

• Patent Number

  3,657,545

• Date Filed

  Not available

• Date Issued

  Tuesday, April 18, 1972
  53 years ago

• CPC

  • G03F7/70691 - Handling of masks or wafers
  • G02B21/0016 - Technical microscopes
  • Y10S438/943 - Movable
  • Y10S438/975 - Substrate or mask aligning feature

• US Classifications

  • 250 - Radiant energy
  • 356 - Optics: measuring and testing
  • 430 - Radiation imagery chemistry: process, composition, or product thereof
  • 438 - Semiconductor device manufacturing: process