3765763

Information

• Patent Grant
• 3765763

• References
• Source

• Patent Number

  3,765,763

• Date Filed

  Not available

• Date Issued

  Tuesday, October 16, 1973
  51 years ago

• CPC

  • B23Q41/06 - Features relating to organisation of working of machines
  • H01L21/67276 - Production flow monitoring
  • H01L21/67715 - Changing the direction of the conveying path
  • H01L21/6776 - Continuous loading and unloading into and out of a processing chamber

• US Classifications

  • 355 - Photocopying
  • 118 - Coating apparatus
  • 700 - Data processing: generic control systems or specific applications