3824121

Information

• Patent Grant
• 3824121

• References
• Source

• Patent Number

  3,824,121

• Date Filed

  Not available

• Date Issued

  Tuesday, July 16, 1974
  50 years ago

• CPC

  • C30B29/06 - Silicon
  • C01B33/02 - Silicon
  • C23C16/24 - Deposition of silicon only
  • C30B25/02 - Epitaxial-layer growth
  • H01J9/20 - Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored Applying coatings to the vessel
  • Y10S148/027 - Dichlorosilane
  • Y10S148/122 - Polycrystalline

• US Classifications

  • 423 - Chemistry of inorganic compounds
  • 117 - Single-crystal, oriented-crystal, and epitaxy growth processes
  • 148 - Metal treatment
  • 427 - Coating processes
  • 438 - Semiconductor device manufacturing: process