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3831026
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Information
Patent Grant
3831026
References
Source
Patent Number
3,831,026
Date Filed
Not available
Date Issued
Tuesday, August 20, 1974
50 years ago
CPC
H01J49/107 - Arrangements for using several ion sources
H01J49/06 - Electron- or ion-optical arrangements
H01J49/28 - Static spectrometers
H01J49/30 - using magnetic analysers
H01J49/326 - with magnetic and electrostatic sectors of 90 degrees
H01L28/92 - made by patterning layers
US Classifications
250 - Radiant energy
257 - Active solid-state devices
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