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3841930
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Information
Patent Grant
3841930
References
Source
Patent Number
3,841,930
Date Filed
Not available
Date Issued
Tuesday, October 15, 1974
50 years ago
CPC
H01L21/3081 - characterised by their composition
H01J9/233 - Manufacture of photo-electric screens or charge-storage screens
H01J29/455 - formed on a silicon substrate
H01L27/00 - Devices consisting of a plurality of semiconductor or other solid state components formed in or on a common substrate
Y10S438/942 - Masking
Y10S438/977 - Thinning or removal of substrate
US Classifications
216 - Etching a substrate: processes
257 - Active solid-state devices
430 - Radiation imagery chemistry: process, composition, or product thereof
438 - Semiconductor device manufacturing: process
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