3843916

Information

• Patent Grant
• 3843916

• References
• Source

• Patent Number

  3,843,916

• Date Filed

  Not available

• Date Issued

  Tuesday, October 22, 1974
  50 years ago

• CPC

  • B82Y10/00 - Nano-technology for information processing, storage or transmission
  • B82Y40/00 - Manufacture or treatment of nano-structures
  • H01J37/3045 - Object or beam position registration
  • H01J37/3056 - for microworking
  • H01J37/3175 - Projection methods
  • H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01J2237/31779 - from patterned photocathode
  • Y10S148/006 - Apparatus
  • Y10S148/016 - Catalyst
  • Y10S148/106 - Masks, special
  • Y10S438/943 - Movable

• US Classifications

  • 318 - Electricity: motive power systems
  • 148 - Metal treatment
  • 250 - Radiant energy
  • 356 - Optics: measuring and testing
  • 438 - Semiconductor device manufacturing: process