3905162

Information

• Patent Grant
• 3905162

• References
• Source

• Patent Number

  3,905,162

• Date Filed

  Not available

• Date Issued

  Tuesday, September 16, 1975
  49 years ago

• CPC

  • H01L21/02016 - Backside treatment
  • B24B1/00 - Processes of grinding or polishing Use of auxiliary equipment in connection with such processes
  • B28D5/00 - Fine working of gems, jewels, crystals
  • H01L21/302 - to change their surface-physical characteristics or shape
  • Y10S117/913 - Graphoepitaxy or surface modification to enhance epitaxy
  • Y10S148/138 - Roughened surface
  • Y10S438/938 - Lattice strain control or utilization
  • Y10S438/974 - Substrate surface preparation

• US Classifications

  • 451 - Abrading
  • 117 - Single-crystal, oriented-crystal, and epitaxy growth processes
  • 148 - Metal treatment
  • 257 - Active solid-state devices
  • 438 - Semiconductor device manufacturing: process