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3909304
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Information
Patent Grant
3909304
References
Source
Patent Number
3,909,304
Date Filed
Not available
Date Issued
Tuesday, September 30, 1975
49 years ago
CPC
H01L27/0826 - Combination of vertical complementary transistors
H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
H01L21/74 - Making of localized buried regions
Y10S148/007 - Autodoping
Y10S148/017 - Clean surfaces
Y10S148/037 - Diffusion-deposition
Y10S148/051 - Etching
Y10S148/085 - Isolated-integrated
Y10S148/145 - Shaped junctions
Y10S148/151 - Simultaneous diffusion
Y10S438/92 - Controlling diffusion profile by oxidation
US Classifications
438 - Semiconductor device manufacturing: process
148 - Metal treatment
257 - Active solid-state devices
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