3915764

Information

• Patent Grant
• 3915764

• References
• Source

• Patent Number

  3,915,764

• Date Filed

  Not available

• Date Issued

  Tuesday, October 28, 1975
  49 years ago

• CPC

  • C30B23/02 - Epitaxial-layer growth
  • C30B23/002 - Controlling or regulating
  • Y10S148/049 - Equivalence and options
  • Y10S148/056 - Gallium arsenide
  • Y10S148/065 - Gp III-V generic compounds-processing
  • Y10S148/122 - Polycrystalline
  • Y10S148/158 - Sputtering
  • Y10S252/951 - for vapor transport
  • Y10S438/925 - Fluid growth doping control

• US Classifications

  • 204 - Chemistry: electrical and wave energy
  • 117 - Single-crystal, oriented-crystal, and epitaxy growth processes
  • 148 - Metal treatment
  • 252 - Compositions
  • 438 - Semiconductor device manufacturing: process