8829475

Information

• Patent Grant
• 8829475

• References
• Source

• Patent Number

  8,829,475

• Date Filed

  Not available

• Date Issued

  Tuesday, September 9, 2014
  10 years ago

• CPC

  • H01J37/3174 - Particle-beam lithography
  • H01J2237/30483 - Scanning
  • H01J2237/31776 - Shaped beam
  • H01J2237/31793 - Problems associated with lithography