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8829475
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Patent Grant
8829475
References
Source
Patent Number
8,829,475
Date Filed
Not available
Date Issued
Tuesday, September 9, 2014
9 years ago
CPC
H01J37/3174 - Particle-beam lithography
H01J2237/30483 - Scanning
H01J2237/31776 - Shaped beam
H01J2237/31793 - Problems associated with lithography
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