Patent Application
20210286263
The present invention relates to an actinic ray-sensitive or radiation-sensitive resin composition, a resist film, a pattern forming method, and a method for manufacturing an electronic device.
Since the advent of a resist for KrF excimer laser (248 nm), a pattern forming method utilizing chemical amplification has been used in order to compensate for a decrease in sensitivity due to light absorption. For example, in a positive tone chemical amplification method, first, a photoacid generator included in the exposed area decomposes upon irradiation with light to generate an acid.
Then, in a post-exposure baking (PEB) step and the like, a solubility in a developer changes by, for example, changing an alkali-insoluble group contained in a resin included in an actinic ray-sensitive or radiation-sensitive resin composition to an alkali-soluble group by the catalytic action of an acid thus generated. Thereafter, development is performed using a basic aqueous solution, for example. As a result, the exposed area is removed to obtain a desired pattern.
For miniaturization of semiconductor elements, the wavelength of an exposure light source has been shortened and a projection lens with a high numerical aperture (high NA) has been advanced, and currently, an exposure machine using an ArF excimer laser having a wavelength of 193 nm as a light source is under development.
Under these circumstances, various configurations have been proposed as actinic ray-sensitive or radiation-sensitive resin compositions.
For example, JP2015-024989A discloses an acid generator including a salt represented by Formula (I) as a component used in a resist composition.
The present inventors have conducted studies on the resist composition described in JP2015-024989A, and have thus found that it is necessary to further improve the line width roughness (LWR) performance of a pattern formed using the resist composition.
An object of the present invention is to provide an actinic ray-sensitive or radiation-sensitive resin composition that is capable of forming a pattern having excellent LWR performance.
In addition, another object of the present invention is to provide a resist film and a pattern forming method, each using the actinic ray-sensitive or radiation-sensitive resin composition, and a method for manufacturing an electronic device, using the pattern forming method.
The present inventors have conducted intensive studies to accomplish the objects, and as a result, have found that the objects can be accomplished by the following configurations.
[1] An actinic ray-sensitive or radiation-sensitive resin composition comprising:
[2] The actinic ray-sensitive or radiation-sensitive resin composition as described in [1],
[3] The actinic ray-sensitive or radiation-sensitive resin composition as described in [2],
[4] The actinic ray-sensitive or radiation-sensitive resin composition as described in [2] or [3],
[5] The actinic ray-sensitive or radiation-sensitive resin composition as described in [4],
[6] The actinic ray-sensitive or radiation-sensitive resin composition as described in [4] or [5],
[7] The actinic ray-sensitive or radiation-sensitive resin composition as described in any one of [4] to [6],
[8] The actinic ray-sensitive or radiation-sensitive resin composition as described in any one of [1] to [7],
[9] The actinic ray-sensitive or radiation-sensitive resin composition as described in any one of [1] to [8], further comprising a resin C that is different from the resin A and the resin B,
[10] The actinic ray-sensitive or radiation-sensitive resin composition as described in any one of [1] to [9],
[11] The actinic ray-sensitive or radiation-sensitive resin composition as described in any one of [1] to [10], further comprising a solvent,
[12] A resist film formed of the actinic ray-sensitive or radiation-sensitive resin composition as described in any one of [1] to [11].
[13] A pattern forming method comprising:
[14] A method for manufacturing an electronic device, comprising the pattern forming method as described in [13].
According to the present invention, it is possible to provide an actinic ray-sensitive or radiation-sensitive resin composition that is capable of forming a pattern having excellent LWR performance.
Hereinafter, the present invention will be described in detail.
In the present specification, (meth)acrylate represents acrylate and methacrylate, and (meth)acryl represents acryl and methacryl.
In the present specification, an acid dissociation constant (pKa) represents pKa in water, and specifically a value determined using the following software package 1 by computation from a value based on a Hammett's substituent constant and database of publicly known literature values. Any of the pKa values described in the present specification indicates values determined by computation using the software package.
Software Package 1: Advanced Chemistry Development (ACD/Labs) Software V 8.14 for Solaris (1994-2007 ACD/Labs).
On the other hand, the pKa can also be determined by a molecular orbital computation method. Examples of a specific method therefor include a method for performing calculation by computing H+ dissociation free energy in an aqueous solution based on a thermodynamic cycle. With regard to a computation method for H+ dissociation free energy, the H+ dissociation free energy can be calculated by, for example, density functional theory (DFT), but various other methods have been reported in literature and the like, and are not limited thereto. Further, there are a plurality of software applications capable of performing DFT, and examples thereof include Gaussian 16.
As described above, the pKa in the present specification refers to a value determined by computation from a value based on a Hammett's substituent constant and database of publicly known literature values, using the software package 1, but in a case where the pKa cannot be calculated by the method, a value obtained by Gaussian 16 based on density functional theory (DFT) shall be adopted.
In the present specification, examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.
[Actinic Ray-Sensitive or Radiation-Sensitive Resin Composition]
The actinic ray-sensitive or radiation-sensitive resin composition of an embodiment of the present invention (hereinafter also referred to as a “resist composition”) includes:
It should be noted that the resin B1 to the resin B3 include no repeating unit including an ion-bonding group.
In addition, the resin B1 to the resin B3 are not included in the resin A.
In the present specification, the “resin B1” is a resin including a fluorine atom and having polarity that increases by the action of an acid among the “resins having polarity that increases by the action of an acid” included in the resist composition. The “resin B2” is a resin including a fluorine atom and having polarity that increases by the action of an alkali. The “resin B3” is a resin including a fluorine atom and having polarity that increases by the action of either of an acid and the action of an alkali. The resin B1 to the resin B3 are preferably included in a content of 20% by mass or less with respect to a total solid content in the resist composition. On the other hand, the “resin A” is preferably a resin included in a content of more than 20% by mass with respect to the total solid content in the resist composition. Furthermore, the “solid content” is intended to mean components excluding the solvent in the composition, and any of components other than the solvent are regarded as the solid content even in a case where they are liquid components.
In addition, in a case where the resin A in the resist composition is provided for a pattern forming method using an exposure light source as an ArF light source, the resin A preferably includes no fluorine atom.
Recently, the present inventors have conducted studies on the photoacid generator included in the above-mentioned resist composition of JP2015-024989A, and thus, they have clarified that a photoacid generator including a polyvalent salt structure (for example, a divalent salt structure) in the molecule is easily aggregated with other components in the resist composition due to the salt structure in the resist composition, in the same manner as with a photoacid generator represented by General Formula (I) used in JP2015-024989A, and as a result, the LWR performance of a pattern thus formed is deteriorated.
The present inventors have conducted intensive studies on the findings, and have thus clarified that in a case where the resist composition includes a compound (corresponding to a photoacid generator including a polyvalent salt structure in the molecule) selected from the group consisting of a compound (I) to a compound (III), each of which will be described later, and the resin B, the aggregation in the resist composition is suppressed and the LWR performance of a pattern thus formed can be improved.
Although mechanism of the action is not clear, it is presumed that the compatibility between the compound selected from the group consisting of the compound (I) to the compound (III) and other components in the resist composition was improved by the action of the resin B.
Hereinafter, the resist composition of the embodiment of the present invention will be described in detail.
The resist composition of the embodiment of the present invention may be either a positive tone resist composition or a negative tone resist composition. In addition, the resist composition may be either a resist composition for alkaline development or a resist composition for organic solvent development.
The resist composition of the embodiment of the present invention is typically a chemically amplified resist composition.
Hereinbelow, first, various components of the resist composition of the embodiment of the present invention will be described in detail.
[Acid-Decomposable Resin (Resin A)]
The composition of the embodiment of the present invention includes a resin (hereinafter also referred to as an “acid-decomposable resin” or a “resin (A)”) having a polarity that increases through decomposition by the action of an acid.
That is, in the pattern forming method of an embodiment of the present invention which will be described later, typically, in a case where an alkaline developer is adopted as the developer, a positive tone pattern is suitably formed, and in a case where an organic developer is adopted as the developer, a negative tone pattern is suitably formed.
The resin (A) usually includes a repeating unit having a group having a polarity that increases through decomposition by the action of an acid (hereinafter also referred to as an “acid-decomposable group”), and preferably includes a repeating unit having an acid-decomposable group.
<Repeating Unit Having Acid-Decomposable Group>
The acid-decomposable group is a group that decomposes by the action of an acid to produce a polar group. The acid-decomposable group preferably has a structure in which the polar group is protected by an eliminable group that leaves by the action of an acid. That is, the resin (A) has a repeating unit having a group that decomposes by the action of an acid to produce a polar group. A resin having this repeating unit has an increased polarity by the action of an acid, and thus has an increased solubility in an alkaline developer, and a decreased solubility in an organic solvent.
As the polar group, an alkali-soluble group is preferable, and examples thereof include an acidic group such as a carboxyl group, a phenolic hydroxyl group, a fluorinated alcohol group, a sulfonic acid group, a phosphoric acid group, a sulfonamide group, a sulfonylimide group, an (alkylsulfonyl)(alkylcarbonyl)methylene group, an (alkylsulfonyl)(alkylcarbonyl)imide group, a bis(alkylcarbonyl)methylene group, a bis(alkylcarbonyl)imide group, a bis(alkylsulfonyl)methylene group, a bis(alkylsulfonyl)imide group, a tris(alkylcarbonyl)methylene group, and a tris(alkylsulfonyl)methylene group, and an alcoholic hydroxyl group.
Among those, as the polar group, the carboxyl group, the phenolic hydroxyl group, the fluorinated alcohol group (preferably a hexafluoroisopropanol group), or the sulfonic acid group is preferable.
Examples of the eliminable group that is eliminated by the action of an acid include groups represented by Formulae (Y1) to (Y4).
—C(Rx1)(Rx2)(Rx3) Formula (Y1):
—C(═O)OC(Rx1)(Rx2)(Rx3) Formula (Y2):
—C(R36)(R37)(OR38) Formula (Y3):
—C(Rn)(H)(Ar) Formula (Y4):
In Formula (Y1) and Formula (Y2), Rx1 to Rx3 each independently represent an (linear or branched) alkyl group or (monocyclic or polycyclic) cycloalkyl group, an (linear or branched) alkenyl group, or an (monocyclic or polycyclic) aryl group. Further, in a case where all of Rx1 to Rx3 are (linear or branched) alkyl groups, it is preferable that at least two of Rx1, Rx2, or Rx3 are methyl groups.
Above all, it is preferable that Rx1 to Rx3 each independently represent a linear or branched alkyl group, and it is more preferable that Rx1 to Rx3 each independently represent the linear alkyl group.
Two of Rx1 to Rx3 may be bonded to each other to form a monocycle or a polycycle.
As the linear or branched alkyl group represented by each of Rx1 to Rx3, an alkyl group having 1 to 5 carbon atoms, such as a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, an isobutyl group, and a t-butyl group, is preferable.
As the cycloalkyl group represented by each of Rx1 to Rx3, a monocyclic cycloalkyl group such as a cyclopentyl group and a cyclohexyl group, or a polycyclic cycloalkyl group such as a norbornyl group, a tetracyclodecanyl group, a tetracyclododecanyl group, and an adamantyl group is preferable.
As the aryl group represented by each of Rx1 to Rx3, an aryl group having 6 to 10 carbon atoms is preferable, and examples thereof include a phenyl group, a naphthyl group, and an anthryl group.
As the alkenyl group represented by each of Rx1 to Rx3, a vinyl group is preferable.
A cycloalkyl group is preferable as the ring formed by the bonding of two of Rx1 to Rx3. As the cycloalkyl group formed by the bonding of two of Rx1 to Rx3, a monocyclic cycloalkyl group such as a cyclopentyl group or a cyclohexyl group, or a polycyclic cycloalkyl group such as a norbornyl group, a tetracyclodecanyl group, a tetracyclododecanyl group, or an adamantyl group is preferable, and a monocyclic cycloalkyl group having 5 or 6 carbon atoms is more preferable.
In the cycloalkyl group formed by the bonding of two of Rx1 to Rx3, for example, one of the methylene groups constituting the ring may be substituted with a heteroatom such as an oxygen atom, a group having a heteroatom, such as a carbonyl group, or a vinylidene group. In addition, in the cycloalkyl group, one or more of the ethylene groups constituting the cycloalkane ring may be substituted with a vinylene group.
With regard to the group represented by Formula (Y1) or Formula (Y2), for example, an aspect in which Rx1 is a methyl group or an ethyl group, and Rx2 and Rx3 are bonded to each other to form a cycloalkyl group is preferable.
In Formula (Y3), R36 to R38 each independently represent a hydrogen atom or a monovalent organic group. R37 and R38 may be bonded to each other to form a ring. Examples of the monovalent organic group include an alkyl group, a cycloalkyl group, an aryl group, an aralkyl group, and an alkenyl group. It is also preferable that R36 is the hydrogen atom.
Further, the alkyl group, the cycloalkyl group, the aryl group, and the aralkyl group may include a heteroatom such as an oxygen atom, and/or a group having a heteroatom, such as a carbonyl group. For example, in the alkyl group, the cycloalkyl group, the aryl group, and the aralkyl group, one or more of the methylene groups may be substituted with a heteroatom such as an oxygen atom and/or a group having a heteroatom, such as a carbonyl group.
In addition, R38 and another substituent contained in the main chain of the repeating unit may be bonded to each other to form a ring. A group formed by the mutual bonding of R38 and another substituent on the main chain of the repeating unit is preferably an alkylene group such as a methylene group.
As Formula (Y3), a group represented by Formula (Y3-1) is preferable.
Here, L1 and L2 each independently represent a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group, or a group formed by combination thereof (for example, a group formed by combination of an alkyl group and an aryl group).
In the alkyl group and the cycloalkyl group, for example, one of the methylene groups may be substituted with a heteroatom such as an oxygen atom or a group having a heteroatom, such as a carbonyl group.
In addition, it is preferable that one of L1 or L2 is a hydrogen atom, and the other is an alkyl group, a cycloalkyl group, an aryl group, or a group formed by combination of an alkylene group and an aryl group.
At least two of Q, M, or L1 may be bonded to each other to form a ring (preferably a 5- or 6-membered ring).
From the viewpoint of pattern miniaturization, L2 is preferably a secondary or tertiary alkyl group, and more preferably the tertiary alkyl group. Examples of the secondary alkyl group include an isopropyl group, a cyclohexyl group, and a norbornyl group, and examples of the tertiary alkyl group include a tert-butyl group and an adamantane group. In these aspects, since the glass transition temperature (Tg) and the activation energy are increased, it is possible to suppress fogging in addition to ensuring film hardness.
In Formula (Y4), Ar represents an aromatic ring group. Rn represents an alkyl group, a cycloalkyl group, or an aryl group. Rn and Ar may be bonded to each other to form a non-aromatic ring. Ar is more preferably an aryl group.
From the viewpoint that the acid decomposability of the repeating unit is excellent, in a case where a non-aromatic ring is directly bonded to a polar group (or a residue thereof) in an eliminable group that protects the polar group, it is also preferable that a ring member adjacent to the ring member atom directly bonded to the polar group (or a residue thereof) in the non-aromatic ring has no halogen atom such as a fluorine atom as a substituent.
In addition, the eliminable group that is eliminated by the action of an acid may be a 2-cyclopentenyl group (for example, a 3-methyl-2-cyclopentenyl group) having a substituent (an alkyl group and the like) and a cyclohexyl group (for example, a 1,1,4,4-tetramethylcyclohexyl group) having a substituent (an alkyl group and the like).
As the repeating unit having an acid-decomposable group, a repeating unit represented by Formula (A) is also preferable.
L1 represents a divalent linking group which may have a fluorine atom or an iodine atom, R1 represents a hydrogen atom, a fluorine atom, an iodine atom, a fluorine atom, an alkyl group which may have an iodine atom, or an aryl group which may have a fluorine atom or an iodine atom, and R2 represents an eliminable group that is eliminated by the action of an acid and may have a fluorine atom or an iodine atom. It should be noted that at least one of L1, R1, or R2 has a fluorine atom or an iodine atom.
L1 represents a divalent linking group which may have a fluorine atom or an iodine atom. Examples of the divalent linking group which may have a fluorine atom or an iodine atom include —CO—, —O—, —S—, —SO—, —SO2—, a hydrocarbon group which may have a fluorine atom or an iodine atom (for example, an alkylene group, a cycloalkylene group, an alkenylene group, and an arylene group), and a linking group formed by the linking of a plurality of these groups. Among those, as L1, —CO— or -arylene group-alkylene group having a fluorine atom or an iodine atom—is preferable.
As the arylene group, a phenylene group is preferable.
The alkylene group may be linear or branched. The number of carbon atoms of the alkylene group is not particularly limited, but is preferably 1 to 10, and more preferably 1 to 3.
The total number of fluorine atoms and iodine atoms included in the alkylene group having a fluorine atom or an iodine atom is not particularly limited, but is preferably 2 or more, more preferably 2 to 10, and still more preferably 3 to 6.
R1 represents a hydrogen atom, a fluorine atom, an iodine atom, an alkyl group which may have a fluorine atom or an iodine atom, or an aryl group which may have a fluorine atom or an iodine atom.
The alkyl group may be linear or branched. The number of carbon atoms of the alkyl group is not particularly limited, but is preferably 1 to 10, and more preferably 1 to 3.
The total number of fluorine atoms and iodine atoms included in the alkyl group having a fluorine atom or an iodine atom is not particularly limited, but is preferably 1 or more, more preferably 1 to 5, and still more preferably 1 to 3.
The alkyl group may include a heteroatom such as an oxygen atom other than a halogen atom.
R2 represents an eliminable group that is eliminated by the action of an acid and may have a fluorine atom or an iodine atom.
Among those, examples of the eliminable group include groups represented by Formulae (Z1) to (Z4).
—C(Rx11)(Rx12)(Rx13) Formula (Z1):
—C(═O)OC(Rx11)(Rx12)(Rx13) Formula (Z2):
—C(R136)(R137)(OR138) Formula (Z3):
—C(Rn1)(H)(Ar1) Formula (Z4):
In Formulae (Z1) and (Z2), Rx11 to Rx13 each independently represent an (linear or branched) alkyl group which may have a fluorine atom or an iodine atom, a (monocyclic or polycyclic) cycloalkyl group which may have a fluorine atom or an iodine atom, an (linear or branched) alkenyl group which may have a fluorine atom or an iodine atom, or an (monocyclic or polycyclic) aryl group which may have a fluorine atom or an iodine atom. Further, in a case where all of Rx11 to Rx13 are each an (linear or branched) alkyl group, it is preferable that at least two of Rx11, Rx12, or Rx13 are methyl groups.
Rx11 to Rx13 are the same as Rx1 to Rx3 in (Y1) and (Y2) described above, respectively, except that they may have a fluorine atom or an iodine atom, and have the same definitions and suitable ranges as those of the alkyl group, the cycloalkyl group, the alkenyl group, and the aryl group.
In Formula (Z3), R136 to R138 each independently represent a hydrogen atom, or a monovalent organic group which may have a fluorine atom or an iodine atom. R137 and R138 may be bonded to each other to form a ring. Examples of the monovalent organic group which may have a fluorine atom or an iodine atom include an alkyl group which may have a fluorine atom or an iodine atom, a cycloalkyl group which may have a fluorine atom or an iodine atom, an aryl group which may have a fluorine atom or an iodine atom, an aralkyl group which may have a fluorine atom or an iodine atom, and a group formed by combination thereof (for example, a group formed by combination of the alkyl group and the cycloalkyl group).
Incidentally, the alkyl group, the cycloalkyl group, the aryl group, and the aralkyl group may include a heteroatom such as an oxygen atom, in addition to the fluorine atom and the iodine atom. That is, in the alkyl group, the cycloalkyl group, the aryl group, and the aralkyl group, for example, one of the methylene groups may be substituted with a heteroatom such as an oxygen atom or a group having a heteroatom, such as a carbonyl group.
In addition, R138 and another substituent contained in the main chain of the repeating unit may be bonded to each other to form a ring. In this case, a group formed by the mutual bonding of R138 and another substituent on the main chain of the repeating unit is preferably an alkylene group such as a methylene group.
As Formula (Z3), a group represented by Formula (Z3-1) is preferable.
Here, L11 and L12 each independently represent a hydrogen atom; an alkyl group which may have a heteroatom selected from the group consisting of a fluorine atom, an iodine atom, and an oxygen atom; a cycloalkyl group which may have a heteroatom selected from the group consisting of a fluorine atom, an iodine atom, and an oxygen atom; an aryl group which may have a heteroatom selected from the group consisting of a fluorine atom, an iodine atom, and an oxygen atom; or a group formed by combination thereof (for example, a group formed by combination of an alkyl group and a cycloalkyl group, each of which may have a heteroatom selected from the group consisting of a fluorine atom, an iodine atom, and an oxygen atom).
In Formula (Z4), Ar1 represents an aromatic ring group which may have a fluorine atom or an iodine atom. Rn1 is an alkyl group which may have a fluorine atom or an iodine atom, a cycloalkyl group which may have a fluorine atom or an iodine atom, or an aryl group which may have a fluorine atom or an iodine atom. Rn1 and Ar1 may be bonded to each other to form a non-aromatic ring.
As the repeating unit having an acid-decomposable group, a repeating unit represented by General Formula (AI) is also preferable.
In General Formula (AI),
Two of Rx1 to Rx3 may be bonded to each other to form a monocycle or polycycle (a monocyclic or polycyclic cycloalkyl group and the like).
Examples of the alkyl group which may have a substituent, represented by Xa1, include a methyl group and a group represented by —CH2—R11. R11 represents a halogen atom (a fluorine atom or the like), a hydroxyl group, or a monovalent organic group, examples thereof include an alkyl group having 5 or less carbon atoms, which may be substituted with a halogen atom, an acyl group having 5 or less carbon atoms, which may be substituted with a halogen atom, and an alkoxy group having 5 or less carbon atoms, which may be substituted with a halogen atom; and an alkyl group having 3 or less carbon atoms is preferable, and a methyl group is more preferable. Xa1 is preferably a hydrogen atom, a methyl group, a trifluoromethyl group, or a hydroxymethyl group.
Examples of the divalent linking group of T include an alkylene group, an aromatic ring group, a —COO-Rt- group, and an —O-Rt- group. In the formulae, Rt represents an alkylene group or a cycloalkylene group.
As the alkyl group of each of Rx1 to Rx3, an alkyl group having 1 to 4 carbon atoms, such as a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, an isobutyl group, and a t-butyl group, is preferable.
As the cycloalkyl group of each of Rx1 to Rx3, a monocyclic cycloalkyl group such as a cyclopentyl group and a cyclohexyl group, or a polycyclic cycloalkyl group such as a norbornyl group, a tetracyclodecanyl group, a tetracyclododecanyl group, and an adamantyl group is preferable.
As the aryl group as each of Rx1 to Rx3, an aryl group having 6 to 10 carbon atoms is preferable, and examples thereof include a phenyl group, a naphthyl group, and an anthryl group.
As the alkenyl group of each of Rx1 to Rx3, a vinyl group is preferable.
As the cycloalkyl group formed by the bonding of two of Rx1 to Rx3, a monocyclic cycloalkyl group such as a cyclopentyl group and a cyclohexyl group is preferable, and in addition, a polycyclic cycloalkyl group such as a norbornyl group, a tetracyclodecanyl group, a tetracyclododecanyl group, and an adamantyl group is also preferable. Among those, a monocyclic cycloalkyl group having 5 or 6 carbon atoms is preferable.
In the cycloalkyl group formed by the bonding of two of Rx1 to Rx3, for example, one of the methylene groups constituting the ring may be substituted with a heteroatom such as an oxygen atom, a group having a heteroatom, such as a carbonyl group, or a vinylidene group. In addition, in the cycloalkyl group, one or more of the ethylene groups constituting the cycloalkane ring may be substituted with a vinylene group.
With regard to the repeating unit represented by General Formula (AI), for example, an aspect in which Rx1 is a methyl group or an ethyl group, and Rx2 and Rx3 are bonded to each other to form the above-mentioned cycloalkyl group is preferable.
In a case where each of the groups has a substituent, examples of the substituent include an alkyl group (having 1 to 4 carbon atoms), a halogen atom, a hydroxyl group, an alkoxy group (having 1 to 4 carbon atoms), a carboxyl group, and an alkoxycarbonyl group (having 2 to 6 carbon atoms). The substituent preferably has 8 or less carbon atoms.
The repeating unit represented by General Formula (AI) is preferably an acid-decomposable tertiary alkyl (meth)acrylate ester-based repeating unit (the repeating unit in which Xa1 represents a hydrogen atom or a methyl group, and T represents a single bond).
The content of the repeating unit having an acid-decomposable group is preferably 15% by mole or more, more preferably 20% by mole or more, and still more preferably 30% by mole or more with respect to all the repeating units in the resin (A). In addition, an upper limit value thereof is preferably 80% by mole or less, more preferably 70% by mole or less, and particularly preferably 60% by mole or less.
Specific examples of the repeating unit having an acid-decomposable group are shown below, but the present invention is not limited thereto. Further, in the formulae, Xa1 represents H, CH3, CF3, or CH2OH, and Rxa and Rxb each represent a linear or branched alkyl group having 1 to 5 carbon atoms.
The resin (A) may include a repeating unit other than the above-mentioned repeating units.
For example, the resin (A) may include at least one repeating unit selected from the group consisting of the following group A and/or at least one repeating unit selected from the group consisting of the following group B.
Group A: A group consisting of the following repeating units (20) to (29).
(20) A repeating unit having an acid group, which will be described later.
(21) A repeating unit having a fluorine atom or an iodine atom, which will be described later.
(22) A repeating unit having a lactone group, a sultone group, or a carbonate group, which will be described later.
(23) A repeating unit having a photoacid generating group, which will be described later.
(24) A repeating Unit represented by General Formula (V-1) or General Formula (V-2), which will be described later.
(25) A repeating unit represented by Formula (A), which will be described later.
(26) A repeating unit represented by Formula (B), which will be described later.
(27) A repeating unit represented by Formula (C), which will be described later.
(28) A repeating unit represented by Formula (D), which will be described later.
(29) A repeating unit group B represented by Formula (E), which will be described later: a group consisting of the following repeating units (30) to (32).
(30) A repeating unit having at least one group selected from a lactone group, a sultone group, a carbonate group, a hydroxyl group, a cyano group, or an alkali-soluble group, which will be described later.
(31) A repeating unit having an alicyclic hydrocarbon structure and not exhibiting acid decomposability described later.
(32) A repeating unit represented by General Formula (III) having neither a hydroxyl group nor a cyano group, which will be described later.
In a case where the composition of the embodiment of the present invention is used as an actinic ray-sensitive or radiation-sensitive resin composition for EUV, it is preferable that the resin (A) has at least one repeating unit selected from the group consisting of the group A.
Furthermore, in a case where the composition is used as the actinic ray-sensitive or radiation-sensitive resin composition for EUV, it is preferable that the resin (A) includes at least one of a fluorine atom or an iodine atom.
In a case where the resin (A) includes both a fluorine atom and an iodine atom, the resin (A) may have one repeating unit including both a fluorine atom and an iodine atom, and the resin (A) may include two kinds of repeating units, that is, a repeating unit having a fluorine atom and a repeating unit having an iodine atom.
In addition, in a case where the composition is used as an actinic ray-sensitive or radiation-sensitive resin composition for EUV, it is also preferable that the resin (A) has a repeating unit having an aromatic group.
In a case where the composition of the embodiment of the present invention is used as an actinic ray-sensitive or radiation-sensitive resin composition for ArF, it is preferable that the resin (A) has at least one repeating unit selected from the group consisting of the group B.
Furthermore, in a case where the composition of the embodiment of the present invention is used as the actinic ray-sensitive or radiation-sensitive resin composition for ArF, it is preferable that the resin (A) includes neither a fluorine atom nor a silicon atom.
In addition, in a case where the composition is used as the actinic ray-sensitive or radiation-sensitive resin composition for ArF, it is preferable that the resin (A) does not have an aromatic group.
<Repeating Unit Having Acid Group>
The resin (A) may have a repeating unit having an acid group.
As the acid group, an acid group having a pKa of 13 or less is preferable.
As the acid group, for example, a carboxyl group, a phenolic hydroxyl group, a fluorinated alcohol group (preferably a hexafluoroisopropanol group), a sulfonic acid group, a sulfonamide group, or an isopropanol group is preferable.
In addition, in the hexafluoroisopropanol group, one or more (preferably one or two) fluorine atoms may be substituted with a group (an alkoxycarbonyl group and the like) other than a fluorine atom. —C(CF3)(OH)—CF2— formed as above is also preferable as the acid group. In addition, one or more fluorine atoms may be substituted with a group other than a fluorine atom to form a ring including —C(CF3)(OH)—CF2—.
The repeating unit having an acid group is preferably a repeating unit different from a repeating unit having the structure in which a polar group is protected by the eliminable group that is eliminated by the action of an acid as described above, and a repeating unit having a lactone group, a sultone group, or a carbonate group which will be described later.
The repeating unit having an acid group may have a fluorine atom or an iodine atom.
As the repeating unit having an acid group, a repeating unit represented by Formula (B) is preferable.
R3 represents a hydrogen atom or a monovalent organic group which may have a fluorine atom or an iodine atom.
The monovalent organic group which may have a fluorine atom or an iodine atom is preferably a group represented by -L4-R8. L4 represents a single bond or an ester group. R8 is an alkyl group which may have a fluorine atom or an iodine atom, a cycloalkyl group which may have a fluorine atom or an iodine atom, an aryl group which may have a fluorine atom or an iodine atom, or a group formed by combination thereof.
R4 and R5 each independently represent a hydrogen atom, a fluorine atom, an iodine atom, or an alkyl group which may have a fluorine atom or an iodine atom.
L2 represents a single bond or an ester group.
Furthermore, (n+m+1) is preferably an integer of 1 to 5.
As the repeating unit having an acid group, a repeating unit represented by General Formula (I) is also preferable.
In General Formula (I),
As the alkyl group represented by each of R41, R42, and R43 in General Formula (I), an alkyl group having 20 or less carbon atoms, such as a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a hexyl group, a 2-ethylhexyl group, an octyl group, and a dodecyl group is preferable, an alkyl group having 8 or less carbon atoms is more preferable, and an alkyl group having 3 or less carbon atoms is still more preferable.
The cycloalkyl group of each of R41, R42, and R43 in General Formula (I) may be monocyclic or polycyclic. Among those, a monocyclic cycloalkyl group having 3 to 8 carbon atoms, such as a cyclopropyl group, a cyclopentyl group, and a cyclohexyl group, is preferable.
Examples of the halogen atom of each of R41, R42, and R43 in General Formula (I) include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom, and the fluorine atom is preferable.
As the alkyl group included in the alkoxycarbonyl group of each of R41, R42, and R43 in General Formula (I), the same ones as the alkyl group in each of R41, R42, and R43 are preferable.
Preferred examples of the substituent in each of the groups include an alkyl group, a cycloalkyl group, an aryl group, an amino group, an amide group, a ureide group, a urethane group, a hydroxyl group, a carboxyl group, a halogen atom, an alkoxy group, a thioether group, an acyl group, an acyloxy group, an alkoxycarbonyl group, a cyano group, and a nitro group. The substituent preferably has 8 or less carbon atoms.
Ar4 represents an (n+1)-valent aromatic ring group. The divalent aromatic ring group in a case where n is 1 is preferably, for example, an arylene group having 6 to 18 carbon atoms, such as a phenylene group, a tolylene group, a naphthylene group, and an anthracenylene group, or a divalent aromatic ring group including a heterocycle such as a thiophene ring, a furan ring, a pyrrole ring, a benzothiophene ring, a benzofuran ring, a benzopyrrole ring, a triazine ring, an imidazole ring, a benzimidazole ring, a triazole ring, a thiadiazole ring, and a thiazole ring. Furthermore, the aromatic ring group may have a substituent.
Specific examples of the (n+1)-valent aromatic ring group in a case where n is an integer of 2 or more include groups formed by removing any (n−1) hydrogen atoms from the above-described specific examples of the divalent aromatic ring group.
Examples of the substituent which can be contained in the alkyl group, the cycloalkyl group, the alkoxycarbonyl group, the alkylene group, and the (n+1)-valent aromatic ring group, each mentioned above, include the alkyl groups; the alkoxy groups such as a methoxy group, an ethoxy group, a hydroxyethoxy group, a propoxy group, a hydroxypropoxy group, and a butoxy group; the aryl groups such as a phenyl group; and the like, as mentioned for each of R41, R42, and R43 in General Formula (I).
Examples of the alkyl group of R64 in —CONR64— represented by X4 (R64 represents a hydrogen atom or an alkyl group) include an alkyl group having 20 or less carbon atoms, such as a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a hexyl group, a 2-ethylhexyl group, an octyl group, and a dodecyl group, and an alkyl group having 8 or less carbon atoms, is preferable.
As X4, a single bond, —COO—, or —CONH— is preferable, and the single bond or —COO— is more preferable.
As the alkylene group in L4, an alkylene group having 1 to 8 carbon atoms, such as a methylene group, an ethylene group, a propylene group, a butylene group, a hexylene group, and an octylene group, is preferable.
As Ar4, an aromatic ring group having 6 to 18 carbon atoms is preferable, and a benzene ring group, a naphthalene ring group, and a biphenylene ring group are more preferable.
The repeating unit represented by General Formula (I) preferably comprises a hydroxystyrene structure. That is, Ar4 is preferably the benzene ring group.
The repeating unit represented by General Formula (I) is preferably a repeating unit represented by General Formula (1).
In General Formula (1),
The repeating unit having an acid group is exemplified below. In the formula, a represents 1 or 2.
Moreover, the repeating unit having an acid group is preferably a repeating unit specifically described below. In the formula, R represents a hydrogen atom or a methyl group, and a represents 2 or 3.
The content of the repeating unit having an acid group is preferably 10% by mole or more, and more preferably 15% by mole or more with respect to all the repeating units in the resin (A). In addition, an upper limit value thereof is preferably 70% by mole or less, more preferably 65% by mole or less, and still more preferably 60% by mole or less.
<Repeating Unit Having Fluorine Atom or Iodine Atom>
The resin (A) may have a repeating unit having a fluorine atom or an iodine atom in addition to the above-mentioned <Repeating Unit Having Acid-Decomposable Group> and <Repeating Unit Having Acid Group>. In addition, <Repeating Unit Having Fluorine Atom or Iodine Atom> as mentioned herein is preferably different from other kinds of repeating units belonging to the group A, such as <Repeating Unit Having Lactone Group, Sultone Group, or Carbonate Group> and <Repeating Unit Having Photoacid Generating Group>, which will be described later.
As the repeating unit having a fluorine atom or an iodine atom, a repeating unit represented by Formula (C) is preferable.
L5 represents a single bond or an ester group.
The repeating unit having a fluorine atom or an iodine atom will be exemplified below.
The content of the repeating unit having a fluorine atom or an iodine atom is preferably 0% by mole or more, more preferably 5% by mole or more, and still more preferably 10% by mole or more with respect to all the repeating units in the resin (A). In addition, an upper limit value thereof is preferably 50% by mole or less, more preferably 45% by mole or less, and still more preferably 40% by mole or less.
Furthermore, since the repeating unit having a fluorine atom or an iodine atom does not include <Repeating Unit Having Acid-Decomposable Group> and <Repeating Unit Having Acid Group> as described above, the content of the repeating unit having a fluorine atom or an iodine atom is also intended to mean a content of the repeating unit having a fluorine atom or an iodine atom, excluding <Repeating Unit Having Acid-Decomposable Group> and <Repeating Unit Having Acid Group>.
The total content of the repeating units including at least one of a fluorine atom or an iodine atom in the repeating units of the resin (A) is preferably 20% by mole or more, more preferably 30% by mole or more, and still more preferably 40% by mole or more with respect to all the repeating units of the resin (A). An upper limit value thereof is not particularly limited, but is, for example, 100% by mole or less.
In addition, examples of the repeating unit including at least one of a fluorine atom or an iodine atom include a repeating unit which has a fluorine atom or an iodine atom, and has an acid-decomposable group, a repeating unit which has a fluorine atom or an iodine atom, and has an acid group, and a repeating unit having a fluorine atom or an iodine atom.
<Repeating Unit Having Lactone Group, Sultone Group, or Carbonate Group>
The resin (A) may have a repeating unit having at least one selected from the group consisting of a lactone group, a sultone group, and a carbonate group (hereinafter also collectively referred to as “a repeating unit having a lactone group, a sultone group, or a carbonate group”).
It is also preferable that the repeating unit having a lactone group, a sultone group, or a carbonate group has no acid group such as a hexafluoropropanol group.
The lactone group or the sultone group may have a lactone structure or a sultone structure. The lactone structure or the sultone structure is preferably a 5- to 7-membered ring lactone structure or a 5- to 7-membered ring sultone structure. Among those, the structure is more preferably a 5- to 7-membered ring lactone structure with which another ring structure is fused so as to form a bicyclo structure or a spiro structure or a 5- to 7-membered ring sultone structure with which another ring structure is fused so as to form a bicyclo structure or a spiro structure.
The resin (A) preferably has a repeating unit having a lactone group or a sultone group, formed by extracting one or more hydrogen atoms from a ring member atom of a lactone structure represented by any of General Formulae (LC1-1) to (LC1-21) or a sultone structure represented by any of General Formulae (SL1-1) to (SL1-3).
In addition, the lactone group or the sultone group may be bonded directly to the main chain. For example, a ring member atom of the lactone group or the sultone group may constitute the main chain of the resin (A).
The moiety of the lactone structure or the sultone structure may have a substituent (Rb2). Preferred examples of the substituent (Rb2) include an alkyl group having 1 to 8 carbon atoms, a cycloalkyl group having 4 to 7 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, an alkoxycarbonyl group having 1 to 8 carbon atoms, a carboxyl group, a halogen atom, a hydroxyl group, a cyano group, and an acid-decomposable group. n2 represents an integer of 0 to 4. In a case where n2 is 2 or more, Rb2's which are present in a plural number may be different from each other, and Rb2's which are present in a plural number may be bonded to each other to form a ring.
Examples of the repeating unit having a group having the lactone structure represented by any of General Formulae (LC1-1) to (LC1-21) or the sultone structure represented by any of General Formulae (SL1-1) to (SL1-3) include a repeating unit represented by General Formula (AI).
In General Formula (AI), Rb0 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 4 carbon atoms.
Preferred examples of the substituent which may be contained in the alkyl group of Rb0 include a hydroxyl group and a halogen atom.
Examples of the halogen atom of Rbo include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Rbo is preferably the hydrogen atom or a methyl group.
Ab represents a single bond, an alkylene group, a divalent linking group having a monocyclic or polycyclic alicyclic hydrocarbon structure, an ether group, an ester group, a carbonyl group, a carboxyl group, or a divalent group formed by combination thereof. Among those, the single bond or a linking group represented by -Ab1-CO2— is preferable. Ab1 is a linear or branched alkylene group, or a monocyclic or polycyclic cycloalkylene group, and is preferably a methylene group, an ethylene group, a cyclohexylene group, an adamantylene group, or a norbornylene group.
V represents a group formed by extracting one hydrogen atom from a ring member atom of the lactone structure represented by any of General Formulae (LC1-1) to (LC1-21) or a group formed by extracting one hydrogen atom from a ring member atom of the sultone structure represented by any of General Formulae (SL1-1) to (SL1-3).
In a case where an optical isomer is present in the repeating unit having a lactone group or a sultone group, any of optical isomers may be used. In addition, one kind of optical isomers may be used singly or a plurality of kinds of optical isomers may be mixed and used. In a case where one kind of optical isomers is mainly used, an optical purity (ee) thereof is preferably 90 or more, and more preferably 95 or more.
As the carbonate group, a cyclic carbonic acid ester group is preferable.
As the repeating unit having a cyclic carbonic acid ester group, a repeating unit represented by General Formula (A-1) is preferable.
In General Formula (A-1), RA1 represents a hydrogen atom, a halogen atom, or a monovalent organic group (preferably a methyl group).
The repeating unit having a lactone group, a sultone group, or a carbonate group will be exemplified below.
(in the formulae, Rx represents H, CH3, CH2OH, or CF3)
(in the formulae, Rx represents H, CH3, CH2OH, or CF3)
(in the formulae, Rx represents H, CH3, CH2OH, CF3)
The content of the repeating unit having a lactone group, a sultone group, or a carbonate group is preferably 1% by mole or more, and more preferably 10% by mole or more with respect to all the repeating units in the resin (A). In addition, an upper limit value thereof is preferably 85% by mole or less, more preferably 80% by mole or less, still more preferably 70% by mole or less, and particularly preferably 60% by mole or less.
<Repeating Unit Having Photoacid Generating Group>
The resin (A) may have, as a repeating unit other than those above, a repeating unit having a group that generates an acid upon irradiation with actinic rays or radiation (hereinafter also referred to as a “photoacid generating group”).
In this case, it can be considered that the repeating unit having a photoacid generating group corresponds to a compound that generates an acid upon irradiation with actinic rays or radiation which will be described later (also referred to as a “photoacid generator”).
Examples of such the repeating unit include a repeating unit represented by General Formula (4).
R41 represents a hydrogen atom or a methyl group. L41 represents a single bond or a divalent linking group. L42 represents a divalent linking group. R40 represents a structural moiety that decomposes upon irradiation with actinic rays or radiation to generate an acid in a side chain.
The repeating unit having a photoacid generating group is exemplified below.
Other examples of the repeating unit represented by General Formula (4) include the repeating units described in paragraphs <0094> to <0105> of JP2014-041327A.
The content of the repeating unit having a photoacid generating group is preferably 1% by mole or more, and more preferably 5% by mole or more with respect to all the repeating units in the resin (A). In addition, an upper limit value thereof is preferably 40% by mole or less, more preferably 35% by mole or less, and still more preferably 30% by mole or less.
<Repeating Unit Represented by General Formula (V-1) or General Formula (V-2)>
The resin (A) may have a repeating unit represented by General Formula (V-1) or General Formula (V-2).
The repeating unit represented by General Formula (V-1) and General Formula (V-2) is preferably a repeating unit different from the above-mentioned repeating units.
In the formulae,
<Repeating Unit for Reducing Motility of Main Chain>
The resin (A) preferably has a high glass transition temperature (Tg) from the viewpoint that excessive diffusion of an acid generated or pattern collapse during development can be suppressed. Tg is preferably higher than 90° C., more preferably higher than 100° C., still more preferably higher than 110° C., and particularly preferably higher than 125° C. In addition, since an excessive increase in Tg causes a decrease in the dissolution rate in a developer, Tg is preferably 400° C. or lower, and more preferably 350° C. or lower.
Furthermore, in the present specification, the glass transition temperature (Tg) of a polymer such as the resin (A) is calculated by the following method. First, the Tg of a homopolymer consisting only of each repeating unit included in the polymer is calculated by a Bicerano method. Hereinafter, the calculated Tg is referred to as the “Tg of the repeating unit”. Next, the mass proportion (%) of each repeating unit to all the repeating units in the polymer is calculated. Then, the Tg at each mass proportion is calculated using a Fox's equation (described in Materials Letters 62 (2008) 3152, and the like), and these are summed to obtain the Tg (° C.) of the polymer.
The Bicerano method is described in Prediction of polymer properties, Marcel Dekker Inc., New York (1993), and the like. The calculation of a Tg by the Bicerano method can be carried out using MDL Polymer (MDL Information Systems, Inc.), which is software for estimating physical properties of a polymer.
In order to raise the Tg of the resin (A) (preferably to raise the Tg to higher than 90° C.), it is preferable to reduce the motility of the main chain of the resin (A). Examples of a method for lowering the motility of the main chain of the resin (A) include the following (a) to (e) methods.
Furthermore, the resin (A) preferably has a repeating unit having a Tg of a homopolymer exhibiting 130° C. or higher.
In addition, the type of the repeating unit having a Tg of the homopolymer exhibiting 130° C. or higher is not particularly limited, and may be any of repeating units having a Tg of a homopolymer of 130° C. or higher calculated by the Bicerano method. Further, it corresponds to a repeating unit having a Tg of a homopolymer exhibiting 130° C. or higher, depending on the type of a functional group in the repeating units represented by Formula (A) to Formula (E) which will be described later.
(Repeating Unit Represented by Formula (A))
As an example of a specific unit for accomplishing (a) above, a method of introducing a repeating unit represented by Formula (A) into the resin (A) may be mentioned.
In Formula (A), RA represents a group having a polycyclic structure. Rx represents a hydrogen atom, a methyl group, or an ethyl group. The group having a polycyclic structure is a group having a plurality of ring structures, and the plurality of ring structures may or may not be fused.
Specific examples of the repeating unit represented by Formula (A) include the following repeating units.
In the formulae, R represents a hydrogen atom, a methyl group, or an ethyl group.
(Repeating Unit Represented by Formula (B))
As an example of a specific unit for accomplishing (b) above, a method of introducing a repeating unit represented by Formula (B) into the resin (A) may be mentioned.
In Formula (B), Rb1 to Rb4 each independently represent a hydrogen atom or an organic group, and at least two or more of Rb1, . . . , or Rb4 represent an organic group.
Furthermore, in a case where at least one of the organic groups is a group in which a ring structure is directly linked to the main chain in the repeating unit, the types of the other organic groups are not particularly limited.
In addition, in a case where none of the organic groups is a group in which a ring structure is directly linked to the main chain in the repeating unit, at least two or more of the organic groups are substituents having three or more constituent atoms excluding hydrogen atoms.
Specific examples of the repeating unit represented by Formula (B) include the following repeating units.
In the formula, R's each independently represent a hydrogen atom or an organic group. Examples of the organic group include an organic group such as an alkyl group, a cycloalkyl group, an aryl group, an aralkyl group, and an alkenyl group, each of which may have a substituent.
(Repeating Unit Represented by Formula (C))
As an example of a specific unit for accomplishing (c) above, a method of introducing a repeating unit represented by Formula (C) into the resin (A) may be mentioned.
In Formula (C), Rc1 to Rc4 each independently represent a hydrogen atom or an organic group, and at least one of Rc1, . . . , or Rc4 is a group having a hydrogen-bonding hydrogen atoms with a number of 3 atoms or less from the main chain carbon. Among those, it is preferable that the group has hydrogen-bonding hydrogen atoms with a number of atoms of 2 or less (on a side closer to the vicinity of the main chain) to induce an interaction between the main chains of the resin (A).
Specific examples of the repeating unit represented by Formula (C) include the following repeating units.
In the formula, R represents an organic group. Examples of the organic group include an alkyl group, a cycloalkyl group, an aryl group, an aralkyl group, an alkenyl group, and an ester group (—OCOR or —COOR: R represents an alkyl group or fluorinated alkyl group having 1 to 20 carbon atoms), each of which may have a substituent.
(Repeating Unit Represented by Formula (D))
As an example of a specific unit for accomplishing (d) above, a method of introducing a repeating unit represented by Formula (D) into the resin (A) may be mentioned.
In Formula (D), “Cyclic” is a group that forms a main chain with a cyclic structure. The number of the ring-constituting atoms is not particularly limited.
Specific examples of the repeating unit represented by Formula (D) include the following repeating units.
In the formula, R's each independently represent a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group, an aralkyl group, an alkenyl group, a hydroxyl group, an alkoxy group, an acyloxy group, a cyano group, a nitro group, an amino group, a halogen atom, an ester group (—OCOR″ or —COOR″: R″ is an alkyl group or fluorinated alkyl group having 1 to 20 carbon atoms), or a carboxyl group. Further, the alkyl group, the cycloalkyl group, the aryl group, the aralkyl group, and the alkenyl group may each have a substituent. In addition, the hydrogen atom bonded to the carbon atom in the group represented by R may be substituted with a fluorine atom or an iodine atom.
In the formula, R′'s each independently represent an alkyl group, a cycloalkyl group, an aryl group, an aralkyl group, an alkenyl group, a hydroxyl group, an alkoxy group, an acyloxy group, a cyano group, a nitro group, an amino group, a halogen atom, an ester group (—OCOR″ or —COOR″: R″ is an alkyl group or fluorinated alkyl group having 1 to 20 carbon atoms), or a carboxyl group. Further, the alkyl group, the cycloalkyl group, the aryl group, the aralkyl group, and the alkenyl group may each have a substituent. In addition, a hydrogen atom bonded to the carbon atom in the group represented by R′ may be substituted with a fluorine atom or an iodine atom.
(Repeating Unit Represented by Formula (E))
As an example of a specific unit for accomplishing (e) above, a method of introducing a repeating unit represented by Formula (E) into the resin (A) may be mentioned.
In Formula (E), Re's each independently represent a hydrogen atom or an organic group. Examples of the organic group include an alkyl group, a cycloalkyl group, an aryl group, an aralkyl group, and an alkenyl group, which may have a substituent.
The “Cyclic” is a cyclic group including a carbon atom of the main chain. The number of atoms included in the cyclic group is not particularly limited.
Specific examples of the repeating unit represented by Formula (E) include the following repeating units.
In the formula, R's each independently represent a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group, an aralkyl group, an alkenyl group, a hydroxyl group, an alkoxy group, an acyloxy group, a cyano group, a nitro group, an amino group, a halogen atom, an ester group (—OCOR″ or —COOR″: R″ is an alkyl group or fluorinated alkyl group having 1 to 20 carbon atoms), or a carboxyl group. Further, the alkyl group, the cycloalkyl group, the aryl group, the aralkyl group, and the alkenyl group may each have a substituent. In addition, the hydrogen atom bonded to the carbon atom in the group represented by R may be substituted with a fluorine atom or an iodine atom.
In addition, in Formula (E-2), Formula (E-4), Formula (E-6), and Formula (E-8), two R's may be bonded to each other to form a ring.
The content of the repeating unit represented by Formula (E) is preferably 5% by mole or more, and more preferably 10% by mole or more with respect to all the repeating units in the resin (A). In addition, an upper limit value thereof is preferably 60% by mole or less, and more preferably 55% by mole or less.
<Repeating Unit Having at Least One Group Selected from Lactone Group, Sultone Group, Carbonate Group, Hydroxyl Group, Cyano Group, or Alkali-Soluble Group>
The resin (A) may have a repeating unit having at least one group selected from a lactone group, a sultone group, a carbonate group, a hydroxyl group, a cyano group, or an alkali-soluble group.
Examples of the repeating unit having a lactone group, a sultone group, or a carbonate group contained in the resin (A) include the repeating units described in <Repeating Unit Having Lactone Group, Sultone Group, or Carbonate Group> mentioned above. A preferred content thereof is also the same as described in <Repeating Unit Having Lactone Group, Sultone Group, or Carbonate Group> mentioned above.
The resin (A) may have a repeating unit having a hydroxyl group or a cyano group. As a result, the adhesiveness to a substrate and the affinity for a developer are improved.
The repeating unit having a hydroxyl group or a cyano group is preferably a repeating unit having an alicyclic hydrocarbon structure substituted with a hydroxyl group or a cyano group.
The repeating unit having a hydroxyl group or a cyano group preferably has no acid-decomposable group. Examples of the repeating unit having a hydroxyl group or a cyano group include repeating units represented by General Formulae (AIIa) to (AIId).
In General Formulae (AIIa) to (AIId),
The content of the repeating unit having a hydroxyl group or a cyano group is preferably 5% by mole or more, and more preferably 10% by mole or more with respect to all the repeating units in the resin (A). In addition, an upper limit value thereof is preferably 40% by mole or less, more preferably 35% by mole or less, and still more preferably 30% by mole or less.
Specific examples of the repeating unit having a hydroxyl group or a cyano group are shown below, but the present invention is not limited thereto.
The resin (A) may have a repeating unit having an alkali-soluble group.
Examples of the alkali-soluble group include a carboxyl group, a sulfonamide group, a sulfonylimide group, a bissulfonylamide group, or an aliphatic alcohol group (for example, a hexafluoroisopropanol group) in which the α-position is substituted with an electron-withdrawing group, and the carboxyl group is preferable. In a case where the resin (A) includes a repeating unit having an alkali-soluble group, the resolution for use in contact holes is increased.
Examples of the repeating unit having an alkali-soluble group include a repeating unit in which an alkali-soluble group is directly bonded to the main chain of a resin such as a repeating unit with acrylic acid and methacrylic acid, or a repeating unit in which an alkali-soluble group is bonded to the main chain of the resin via a linking group. Further, the linking group may have a monocyclic or polycyclic cyclic hydrocarbon structure.
The repeating unit having an alkali-soluble group is preferably a repeating unit with acrylic acid or methacrylic acid.
The content of the repeating unit having an alkali-soluble group is preferably 0% by mole or more, more preferably 3% by mole or more, and still more preferably 5% by mole or more with respect to all the repeating units in the resin (A). An upper limit value thereof is preferably 20% by mole or less, more preferably 15% by mole or less, and still more preferably 10% by mole or less.
Specific examples of the repeating unit having an alkali-soluble group are shown below, but the present invention is not limited thereto. In the specific examples, Rx represents H, CH3, CH2OH, or CF3.
As the repeating unit having at least one group selected from a lactone group, a hydroxyl group, a cyano group, or an alkali-soluble group, a repeating unit having at least two selected from a lactone group, a hydroxyl group, a cyano group, or an alkali-soluble group is preferable, a repeating unit having a cyano group and a lactone group is more preferable, and a repeating unit having a structure in which a cyano group is substituted in the lactone structure represented by General Formula (LC1-4) is still more preferable.
<Repeating Unit Having Alicyclic Hydrocarbon Structure and not Exhibiting Acid Decomposability>
The resin (A) may have a repeating unit having an alicyclic hydrocarbon structure and not exhibiting acid decomposability. This can reduce the elution of low-molecular-weight components from the resist film into an immersion liquid during liquid immersion exposure. Examples of such the repeating unit include repeating units derived from 1-adamantyl (meth)acrylate, diadamantyl (meth)acrylate, tricyclodecanyl (meth)acrylate, and cyclohexyl (meth)acrylate.
<Repeating Unit Represented by General Formula (III) Having Neither Hydroxyl Group Nor Cyano Group>
The resin (A) may have a repeating unit represented by General Formula (III), which has neither a hydroxyl group nor a cyano group.
In General Formula (III), R5 represents a hydrocarbon group having at least one cyclic structure and having neither a hydroxyl group nor a cyano group.
Ra represents a hydrogen atom, an alkyl group, or a —CH2—O—Ra2 group. In the formula, Ra2 represents a hydrogen atom, an alkyl group, or an acyl group.
The cyclic structure contained in R5 includes a monocyclic hydrocarbon group and a polycyclic hydrocarbon group. Examples of the monocyclic hydrocarbon group include a cycloalkyl group having 3 to 12 carbon atoms (more preferably 3 to 7 carbon atoms) or a cycloalkenyl group having 3 to 12 carbon atoms.
Examples of the polycyclic hydrocarbon group include a ring-assembled hydrocarbon group and a crosslinked cyclic hydrocarbon group. Examples of the crosslinked cyclic hydrocarbon ring include a bicyclic hydrocarbon ring, a tricyclic hydrocarbon ring, and a tetracyclic hydrocarbon ring. Further, examples of the crosslinked cyclic hydrocarbon ring also include a fused ring formed by fusing a plurality of 5- to 8-membered cycloalkane rings.
As the crosslinked cyclic hydrocarbon group, a norbornyl group, an adamantyl group, a bicyclooctanyl group, or a tricyclo[5,2,1,02,6]decanyl group is preferable, and the norbornyl group or the adamantyl group is more preferable.
The alicyclic hydrocarbon group may have a substituent, and examples of the substituent include a halogen atom, an alkyl group, a hydroxyl group protected by a protective group, and an amino group protected by a protective group.
The halogen atom is preferably a bromine atom, a chlorine atom, or a fluorine atom.
As the alkyl group, a methyl group, an ethyl group, a butyl group, or a t-butyl group is preferable. The alkyl group may further have a substituent, and examples of the substituent include a halogen atom, an alkyl group, a hydroxyl group protected by a protective group, and an amino group protected by a protective group.
Examples of the protective group include an alkyl group, a cycloalkyl group, an aralkyl group, a substituted methyl group, a substituted ethyl group, an alkoxycarbonyl group, and an aralkyloxycarbonyl group.
As the alkyl group, an alkyl group having 1 to 4 carbon atoms is preferable.
As the substituted methyl group, a methoxymethyl group, a methoxythiomethyl group, a benzyloxymethyl group, a t-butoxymethyl group, or a 2-methoxyethoxymethyl group is preferable.
The substituted ethyl group is preferably a 1-ethoxyethyl group or a 1-methyl-1-methoxyethyl group.
As the acyl group, an aliphatic acyl group having 1 to 6 carbon atoms, such as a formyl group, an acetyl group, a propionyl group, a butyryl group, an isobutyryl group, a valeryl group, and a pivaloyl group, is preferable.
As the alkoxycarbonyl group, an alkoxycarbonyl group having 1 to 4 carbon atoms is preferable.
The content of the repeating unit represented by General Formula (III), which has neither a hydroxyl group nor a cyano group, is preferably 0% to 40% by mole, and more preferably 0% to 20% by mole with respect to all the repeating units in the resin (A).
Specific examples of the repeating unit represented by General Formula (III) are shown below, but the present invention is not limited thereto. In the formulae, Ra represents H, CH3, CH2OH, or CF3.
<Other Repeating Units>
The resin (A) may further have a repeating unit other than the above-mentioned repeating units.
For example, the resin (A) may have a repeating unit selected from the group consisting of a repeating unit having an oxathiane ring group, a repeating unit having an oxazolone ring group, a repeating unit having a dioxane ring group, and a repeating unit having a hydantoin ring group.
Such repeating units will be exemplified below.
The resin (A) may have a variety of repeating structural units, in addition to the repeating structural units described above, for the purpose of adjusting dry etching resistance, suitability for a standard developer, adhesiveness to a substrate, a resist profile, resolving power, heat resistance, sensitivity, and the like.
As the resin (A), all the repeating units also preferably include (meth)acrylate-based repeating units (particularly in a case where the composition is used as an actinic ray-sensitive or radiation-sensitive resin composition for ArF). In this case, any of a resin in which all of the repeating units are methacrylate-based repeating units, a resin in which all of the repeating units are acrylate-based repeating units, and a resin in which all of the repeating units are methacrylate-based repeating units and acrylate-based repeating units can be used, and it is preferable that the amount of the acrylate-based repeating units is 50% by mole or less with respect to all the repeating units.
The resin (A) can be synthesized in accordance with an ordinary method (for example, radical polymerization).
The weight-average molecular weight of the resin (A) as a value expressed in terms of polystyrene by a GPC method is preferably 1,000 to 200,000, more preferably 3,000 to 20,000, and still more preferably 5,000 to 15,000. By setting the weight-average molecular weight of the resin (A) to 1,000 to 200,000, deterioration of heat resistance and dry etching resistance can be further suppressed. In addition, deterioration of developability and deterioration of film forming property due to high viscosity can also be further suppressed.
The dispersity (molecular weight distribution) of the resin (A) is usually 1.00 to 5.00, preferably 1.00 to 3.00, more preferably 1.20 to 3.00, and still more preferably 1.20 to 2.00. The smaller the dispersity, the more excellent the resolution and the resist shape, and the smoother the side wall of the resist pattern, the more excellent the roughness.
In the composition of the embodiment of the present invention, the content of the resin (A) is preferably 50% to 99.9% by mass, and more preferably 60% to 99.0% by mass with respect to the total solid content of the composition.
In addition, the resin (A) may be used singly or in combination of a plurality thereof.
[Resin B]
The resist composition of the embodiment of the present invention includes one or more resins B selected from the group consisting of a resin B1 including a fluorine atom and having polarity that increases by the action of an acid, a resin B2 including a fluorine atom and having polarity that increases by the action of an alkali, and a resin B3 including a fluorine atom and having polarity that increases by either of the action of an acid and the action of an alkali.
It should be noted that the resin B1 to the resin B3 include no repeating unit including an ion-bonding group.
It is presumed that since the resin B includes a fluorine atom in the molecule, it is unevenly distributed on the surface of the resist film. Examples of the effect of addition of the resin B include control of static and dynamic contact angles of a surface of the resist film with respect to water, and suppression of out gas, in addition to the improvement of the LWR performance of a pattern thus formed, mentioned above.
Hereinafter, the resin B1 to the resin B3 will be described.
<Resin B1>
The resin B1 is a resin including a fluorine atom and having polarity that increases by the action of an acid.
The “resin having polarity that increases by the action of an acid” is specifically intended to mean a resin having a group that decomposes by the action of an acid to generate a polar group in the main chain or a side chain of the resin, or both the main chain and a side chain (hereinafter also referred to as an “acid-decomposable group”). That is, as the acid-decomposable group, a group in which the hydrogen atom of a polar group is substituted with a group that is eliminated by an acid is preferable.
As the polar group, an alkali-soluble group is preferable, and examples thereof include a carboxyl group, a phenolic hydroxyl group, a fluorinated alcohol group, a sulfonic acid group, a sulfonamide group, a sulfonylimide group, an (alkylsulfonyl)(alkylcarbonyl)methylene group, an (alkylsulfonyl)(alkylcarbonyl)imide group, a bis(alkylcarbonyl)methylene group, a bis(alkylcarbonyl)imide group, a bis(alkylsulfonyl)methylene group, a bis(alkylsulfonyl)imide group, a tris(alkylcarbonyl)methylene group, and a tris(alkylsulfonyl)methylene group.
Examples of the group that is eliminated by an acid include —C(R36)(R37)(R38) and —C(R01)(R02)(OR39).
In the formulae, R36 to R39 each independently an alkyl group, a cycloalkyl group, an aryl group, an aralkyl group, or an alkenyl group. R36 and R37 may be bonded to each other to form a ring.
R01 and R02 each independently represent a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group, an aralkyl group, or an alkenyl group.
From the viewpoint that the LWR of a pattern thus formed is more excellent, it is preferable that the group that is eliminated by an acid has 8 or more carbon atoms.
From the viewpoint that the LWR of a pattern thus formed is more excellent, it is preferable that the acid-decomposable group includes a polycyclic structure, and it is more preferable that the group that is eliminated by an acid includes a polycyclic structure. As the polycyclic structure, a structure including a polycyclic cycloalkane (for example, adamantane and norbornene) is preferable.
As the acid-decomposable group, a cumyl ester group, an enol ester group, an acetal ester group, or a tertiary alkyl ester group is preferable.
Above all, as the resin B1, a resin including a repeating unit having a fluorine atom and a repeating unit having an acid-decomposable group is preferable.
Hereinafter, the repeating unit having a fluorine atom and the repeating unit having an acid-decomposable group will be described.
(Repeating Unit with Fluorine Atom)
The repeating unit having a fluorine atom preferably includes an alkyl group having a fluorine atom, a cycloalkyl group having a fluorine atom, or an aryl group having a fluorine atom.
The alkyl group having a fluorine atom (preferably having 1 to 10 carbon atoms, and more preferably having 1 to 4 carbon atoms) is a linear or branched alkyl group in which at least one hydrogen atom is substituted with a fluorine atom, and the alkyl group may further have another substituent.
The cycloalkyl group having a fluorine atom is a monocyclic or polycyclic cycloalkyl group in which at least one hydrogen atom is substituted with a fluorine atom, and may further have another substituent.
Examples of the aryl group having a fluorine atom include an aryl group such as a phenyl group and a naphthyl group, in which at least one hydrogen atom is substituted with a fluorine atom, and the aryl group may further have another substituent.
As the alkyl group having a fluorine atom, the cycloalkyl group having a fluorine atom, or the aryl group having a fluorine atom, a group represented by any of General Formulae (F2) to (F4) is preferable.
In General Formulae (F2) to (F4),
R57 to R68 each independently represent a hydrogen atom, a fluorine atom, or an (linear or branched) alkyl group. It should be noted that at least one of R57, . . . , or R61, at least one of R62, R63, or R64, and at least one of R65, . . . , or R68 represent a fluorine atom or an alkyl group (preferably having 1 to 4 carbon atoms) in which at least one hydrogen atom is substituted with a fluorine atom.
It is preferable that all of R57 to R61 and R65 to R67 are fluorine atoms. R62, R63, and R68 are each preferably a fluoroalkyl group (preferably having 1 to 4 carbon atoms), and more preferably a perfluoroalkyl group having 1 to 4 carbon atoms. R62 and R63 may be linked to each other to form a ring.
Specific examples of the group represented by General Formula (F2) include a p-fluorophenyl group, a pentafluorophenyl group, and a 3,5-di (trifluoromethyl)phenyl group.
Specific examples of the group represented by General Formula (F3) include a trifluoromethyl group, a pentafluoropropyl group, a pentafluoroethyl group, a heptafluorobutyl group, a hexafluoroisopropyl group, a heptafluoroisopropyl group, a hexafluoro(2-methyl)isopropyl group, a nonafluorobutyl group, an octafluoroisobutyl group, a nonafluorohexyl group, a nonafluoro-t-butyl group, a perfluoroisopentyl group, a perfluorooctyl group, a perfluoro(trimethyl)hexyl group, a 2,2,3,3-tetrafluorocyclobutyl group, and a perfluorocyclohexyl group.
Specific examples of the group represented by General Formula (F4) include —C(CF3)2OH, —C(C2F5)2OH, —C(CF3)(CH3)OH, and —CH(CF3)OH.
The alkyl group having a fluorine atom, the cycloalkyl group having a fluorine atom, or the aryl group having a fluorine atom may be directly bonded to the main chain of the resin B1.
In addition, the alkyl group having a fluorine atom, the cycloalkyl group having a fluorine atom, or the aryl group having a fluorine atom may be bonded via a single group or a combination of two or more groups selected from the group consisting of an alkylene group, a phenylene group, an ether group, a thioether group, a carbonyl group, an ester group, an amide group, a urethane group, and a ureylene groups.
Suitable examples of the repeating unit having a fluorine atom include those shown below.
In the formula, R10 and R11 each independently represent a hydrogen atom, a fluorine atom, an alkyl groups (preferably a linear or branched alkyl group having 1 to 4 carbon atoms, examples thereof having a substituent including a fluorinated alkyl group).
W3 to W6 each independently represent an organic group including at least one or more fluorine atoms.
Specifically, the organic group represented by each of W3 to W6 is preferably a group represented by General Formula (X). That is, the organic group is preferably an organic group including a group represented by any of General Formulae (F2) to (F4).
*-LX-RX (X)
In General Formula (X), LX represents a single bond or a linear or branched alkylene group (preferably having 1 to 6 carbon atoms). RX represents a group represented by any of General Formulae (F2) to (F4).
The content of the repeating unit having a fluorine atom is preferably 20% to 65% by mole, more preferably 25% to 60% by mole, and still more preferably 30% to 55% by mole with respect to all the repeating units in the resin B1.
(Repeating Unit Having Acid-Decomposable Group)
The repeating unit having an acid-decomposable group is preferably a repeating unit represented by General Formula (AI). Further, the definition of the acid-decomposable group is as described above.
In General Formula (AI),
Xa1 represents a hydrogen atom, a methyl group, a trifluoromethyl group, or a hydroxymethyl group. T represents a single bond or a divalent linking group.
Rx1 to Rx3 each independently represent an (linear or branched) alkyl group or a (monocyclic or polycyclic) cycloalkyl group.
At least two of Rx1, Rx2, or Rx3 may be bonded to each other to form a (monocyclic or polycyclic) cycloalkyl group.
Examples of the divalent linking group of T include an alkylene group, a —COO-Rt- group, and an —O-Rt- group. In the formula, Rt represents an alkylene group or a cycloalkylene group.
It is preferable that in General Formula (AI), —C(RX1)(RX2)(RX3) has 8 or more carbon atoms from the viewpoint that the LWR of a pattern thus formed is more excellent.
In addition, an aspect in which in General Formula (AI), Rx1 is a methyl group or an ethyl group, and Rx2 and Rx3 are bonded to form the above-mentioned cycloalkyl group, and/or an aspect in which at least one of Rx1, Rx2, or Rx3 is the above-mentioned cycloalkyl group is preferable. Among those, the cycloalkyl group is preferably a polycyclic cycloalkyl group (for example, an adamantyl group and a norbornane group) from the viewpoint that the LWR of a pattern thus formed is more excellent.
A monomer corresponding to the repeating unit represented by General Formula (AI) can be synthesized, for example, by the method described in JP2006-16379A.
Suitable aspects of the acid-decomposable group include the repeating units described in paragraphs 0049 to 0054 of JP2010-44358A, the contents of which are incorporated herein by reference.
The content of the repeating unit having an acid-decomposable group is preferably 20% to 65% by mole, and more preferably 25% to 60% by mole with respect to all the repeating units in the resin B1.
(Other Repeating Units)
The resin B1 preferably includes, above all, a repeating unit other than the repeating unit having a fluorine atom and the repeating unit having an acid-decomposable group.
Hereinafter, other repeating units which can be included in the resin B1 will be described.
<<Repeating Unit B1X>>
The resin B1 may include a repeating unit which is stable with respect to an acid and is sparingly or insoluble in an alkaline developer (hereinafter also referred to as a “repeating unit B1X”). It is preferable that the repeating unit B1X does not correspond to any of the repeating unit having a fluorine atom and the repeating unit having an acid-decomposable group.
As the repeating unit B1X, a repeating unit represented by General Formula (CIII) is preferable.
In General Formula (CIII),
As the alkyl group represented by Rc32, a linear or branched alkyl group having 3 to 20 carbon atoms is preferable.
As the cycloalkyl group represented by Rc32, a cycloalkyl group having 3 to 20 carbon atoms is preferable.
As the alkenyl group represented by Rc32, an alkenyl group having 3 to 20 carbon atoms is preferable.
As the cycloalkenyl group represented by Rc32, a cycloalkenyl group having 3 to 20 carbon atoms is preferable.
As the divalent linking group represented by Lc3, an ester group, an amide group, an alkylene group (preferably having 1 to 5 carbon atoms), or an oxy group is preferable.
The repeating unit B1X is preferably a repeating unit derived from alkyl methacrylate having polarity that does not change by either the action of an acid or the action of an alkali.
That is, it is preferable that Rc31 represents the methyl group, Lc3 represents an ester group, and Rc32 represents the alkyl group or cycloalkyl group having polarity that does not change by either the action of an acid or the action of an alkali.
The alkyl group or cycloalkyl group having polarity that does not change by any of the action of an acid and the action of the alkali, represented by Rc32, is as described above, the alkyl group is preferable, and the branched alkyl group is more preferable. Examples of the alkyl group or cycloalkyl group having polarity that does not change by any of the action of an acid and the action of the alkali, represented by Rc32, include a 2-ethylhexyl group.
In a case where the resin B1 includes a repeating unit B1X, the content of the repeating unit B1X is preferably 5% to 55% by mole, more preferably 5% to 15% by mole, and still more preferably 5% to 10% by mole with respect to all the repeating units in the resin B1.
<<Repeating Unit Having Alkali-Soluble Group>>
The resin B1 may include a repeating unit having an alkali-soluble group.
Examples of the alkali-soluble group include a carboxyl group, a phenolic hydroxyl group, a fluorinated alcohol group, a sulfonic acid group, a sulfonamide group, a sulfonylimide group, an (alkylsulfonyl)(alkylcarbonyl)methylene group, an (alkylsulfonyl)(alkylcarbonyl)imide group, a bis(alkylcarbonyl)methylene group, a bis(alkylcarbonyl)imide group, a bis(alkylsulfonyl)methylene group, a bis(alkylsulfonyl)imide group, a tris(alkylcarbonyl)methylene group, and a tris(alkylsulfonyl)methylene group.
Examples of the repeating unit having an alkali-soluble group include a repeating unit in which an alkali-soluble group is directly bonded to the main chain of a resin such as a repeating unit derived from acrylic acid or methacrylic acid, or a repeating unit in which an alkali-soluble group is bonded to the main chain of the resin via a linking group.
In a case where the resin B1 includes a repeating unit having an alkali-soluble group, the content of the repeating unit having an alkali-soluble group is preferably 5% to 15% by mole, and more preferably 5% to 10% by mole with respect to all the repeating units in the resin B1.
In addition, from the viewpoint that the LWR of a pattern thus formed is more excellent, it is preferable that the resin B1 is a resin including three or more repeating units having structures that are different from each other. Further, the expression, “the resin B1 includes three or more kinds of repeating units” is intended to mean that three or more kinds of repeating units are included in a content of 5% by mole or more with respect to all the repeating units of the resin B1.
<Resin B2>
The resin B2 is a resin including a fluorine atom and having polarity that increases by the action of an alkali.
Specific examples of the “resin having polarity that increases by the action of an alkali” include a resin having a polarity conversion group.
The polarity conversion group is preferably a group that decomposes by the action of an alkali such as an alkaline developer to increase the polarity.
Examples of the polarity conversion group include a lactone group, a carboxylic acid ester group (—COO—), an acid anhydride group (—C(O)OC(O)—), an acid imide group (—NHCONH—), a carboxylic acid thioester group (—COS—), a carbonic acid ester group (—OC(O)O—), a sulfuric acid ester group (—OSO2O—), and a sulfonic acid ester group (—SO2O—).
Furthermore, an ester group directly linked to the main chain of the repeating unit is deteriorated in a function of decomposing by the action of an alkali to increase the polarity in the same manner as in an acrylate group, and therefore, it is not included in the polarity conversion group.
In addition, in the resin B2, the substitution position with a fluorine atom is not particularly limited.
(Repeating Unit Having Polarity Conversion Group)
The resin B2 preferably includes a repeating unit having a polarity conversion group.
The repeating unit having a polarity conversion group is preferably a repeating unit obtained by polymerization such as addition polymerization, condensation polymerization, and addition condensation, but is more preferably a repeating unit obtained by addition polymerization of carbon-carbon double bonds. Examples of the repeating unit include (meth)acrylate-based repeating units (including the repeating units having a substituent at the α- or β-position), styrene-based repeating units (including the repeating units having a substituent at the α- or β-position), vinyl ether-based repeating units, norbornene-based repeating units, and repeating units of maleic acid derivatives (maleic acid anhydride or a derivative thereof, maleimide, and the like); and the (meth)acrylate-based repeating units, the styrene-based repeating units, the vinyl ether-based repeating units, or the norbornene-based repeating units are preferable, the (meth)acrylate-based repeating units, the vinyl ether-based repeating units, or the norbornene-based repeating units are more preferable, and the (meth)acrylate-based repeating units are still more preferable.
Examples of the repeating unit having a polarity conversion group include a repeating unit (K0), a repeating unit (K01), and a repeating unit (K02). Further, the repeating unit (K0) does not include the repeating unit (K01) and the repeating unit (K02).
Hereinafter, each of repeating units will be described.
<<Repeating Unit (K0)>>
The repeating unit (K0) is a repeating unit represented by General Formula (K0).
In the formula, Rk1 represents a group including a polarity conversion group, a hydrogen atom, a halogen atom, a hydroxyl group, an alkyl group, a cycloalkyl group, or an aryl group.
Rk2 represents a group including a polarity conversion group, an alkyl group, a cycloalkyl group, or an aryl group.
It should be noted that at least one of Rk1 or Rk2 represents a group including a polarity conversion group.
Furthermore, the ester group directly linked to the main chain of the repeating unit (K0) is not included in the polarity conversion group as described above.
As the polarity conversion group, a group represented by X in a partial structure represented by General Formula (KA-1) or General Formula (KB-1).
Furthermore, as will be described later, the polarity conversion group may be a group represented by X in a partial structure represented by General Formula (KC-1).
X in General Formula (KA-1) or General Formula (KB-1) represents a carboxylic acid ester group (—COO—), an acid anhydride group (—C(O)OC(O)—), an acid imide group (—NHCONH—), a carboxylic acid thioester group (—COS—), a carbonic acid ester group (—OC(O)O—), a sulfuric acid ester group (—OSO2O—), and a sulfonic acid ester group (—SO2O—).
Y1 and Y2 may be the same as or different from each other, and each represent an electron-withdrawing group.
Furthermore, the repeating unit (K0) preferably has a group having the partial structure represented by General Formula (KA-1) or General Formula (KB-1). In addition, in a case where the partial structure has no bond, such as a case of the partial structure represented by General Formula (KA-1) and the partial structure represented by General Formula (KB-1) in which Y1 and Y2 are monovalent, the group having the partial structure represented by General Formula (KA-1) or General Formula (KB-1) is a group having a monovalent or higher valent group formed by extracting at least any one hydrogen atom in the partial structure represented by General Formula (KA-1) or General Formula (KB-1).
The partial structure represented by General Formula (KA-1) or General Formula (KB-1) may be linked to the main chain of the resin B2 via a substituent at any position.
The partial structure represented by General Formula (KA-1) is a structure that forms a ring structure together with the group as X.
As X, a carboxylic acid ester group (that is, in a case of forming a lactone ring structure as General Formula (KA-1)), an acid anhydride group, or a carbonic acid ester group is preferable, and the carboxylic acid ester group is more preferable.
The ring structure represented by General Formula (KA-1) may have a substituent, and for example, may have nka pieces of substituents Z.
In a case where a plurality of Zka1's are present, Zka1's each independently represent an alkyl group, a cycloalkyl group, an ether group, a hydroxyl group, an amide group, an aryl group, a lactone ring group, or an electron-withdrawing group.
Zka1's may be linked to each other to form a ring. Examples of the ring formed by the mutual linking of Zka1's include a cycloalkyl ring and a heterocycle (a cyclic ether ring, a lactone ring, and the like).
nka represents an integer of 0 to 10, and is preferably an integer of 8 or less, more preferably an integer of 5 or less, still more preferably an integer of 4 or less, and particularly preferably an integer of 3 or less. A lower limit thereof may be 1 or more.
The electron-withdrawing group represented by Zka1 is the same as an electron-withdrawing group represented by each of Y1 and Y2 described later.
In addition, the electron-withdrawing group may be substituted with another electron-withdrawing group.
In General Formula (KA-1), X is the carboxylic acid ester group, and the partial structure represented by General Formula (KA-1) is preferably a lactone ring, and more preferably a 5- to 7-membered lactone ring. Another ring may be fused with the 5- to 7-membered lactone structure in a configuration such that a bicyclo structure or a spiro structure is formed.
As a structure including the lactone ring structure represented by General Formula (KA-1), the structure represented by any of General Formula (KA-1-1) to General Formula (KA-1-17) is preferable. Further, the lactone ring structure may be directly bonded to the main chain. A preferred structure thereof is a structure represented by General Formula (KA-1-1), General Formula (KA-1-4), General Formula (KA-1-5), General Formula (KA-1-6), General Formula (KA-1-13), General Formula (KA-1-14), or General Formula (KA-1-17).
The structure including the lactone ring structure may have a substituent (examples of the substituent include the above-mentioned substituent Zka1).
As X in General Formula (KB-1), a carboxylic acid ester group (—COO—) is preferable.
Y1 and Y2 in General Formula (KB-1) each independently represent an electron-withdrawing group.
Examples of the electron-withdrawing group include a group represented by General Formula (EW). * in General Formula (EW) represents a bond directly linked to X in General Formula (KB-1).
In General Formula (EW),
new is a repetition number of the linking groups represented by —C(Rew1)(Rew2)— and represents an integer of 0 or 1. A case where new is 0 indicates that the bonding is formed by a single bond and Yew1 is directly bonded.
Examples of Yew1 include a halogen atom, a cyano group, a nitrile group, a nitro group, a halo(cyclo)alkyl group represented by —C(Rf1)(Rf2)—Rf3, a haloaryl group, an oxy group, a carbonyl group, a sulfonyl group, a sulfinyl group, and a combination thereof. Furthermore, the “halo(cyclo)alkyl group” represents an alkyl or cycloalkyl group which is at least partially halogenated. In addition, the “halo(cyclo)alkyl group” preferably represents an alkyl or a cycloalkyl group, which is at least partially fluorinated.
The electron-withdrawing group may be, for example, a group exemplified below.
Rew3 and Rew4 each independently represent any group in the exemplified groups below. With any of Rew3 and Rew4, each of the groups exemplified below has an electron-withdrawing property. Among those, Rew3 and Rew4 are each preferably an alkyl group, a cycloalkyl group, or a fluorinated alkyl group.
In a case where Yew1 is a divalent or higher valent group, the remaining bond forms a bond with any atom or substituent. At least any one group of Yew1, Rew1, or Rew2 may be linked to the main chain of the resin B2 via a further substituent.
As Yew1, a halogen atom, a halo(cyclo)alkyl group represented by —C(Rf1)(Rf2)—Rf3, or a haloaryl group is preferable.
Rew1 and Rew2 each independently represent any substituent, for example, a hydrogen atom, an alkyl group, a cycloalkyl group, or an aryl group.
At least two of Rew1, Rew2, or Yew1 may be linked to each other to form a ring.
Rf1 represents a halogen atom, a perhaloalkyl group, a perhalocycloalkyl group, or a perhaloaryl group, and is preferably a fluorine atom, a perfluoroalkyl group, or a perfluorocycloalkyl group, and more preferably the fluorine atom or a trifluoromethyl group.
Rf2 and Rf3 each independently represent a hydrogen atom, a halogen atom, or an organic group, and Rf2 and Rf3 may be linked to each other to form a ring. The organic group represents, for example, an alkyl group, a cycloalkyl group, an alkoxy group, a perhaloalkyl group, a perhalocycloalkyl group, or a perhaloaryl group. Among these, as the organic group, the alkyl group, the cycloalkyl group, the alkoxy group, the perfluoroalkyl group, or the perfluorocycloalkyl group is preferable.
It is more preferable that Rf2 represents the same group as that of Rf1 or is linked to Rf3 to form a ring.
At least two Rf1 to Rf3 may be linked to form a ring, and examples of the ring formed include a (halo)cycloalkyl ring and a (halo)aryl ring.
As the ring which may be formed by the mutual linking of at least two of Rew1, Rew2, or Yew1, a cycloalkyl group or a heterocyclic group is preferable, and as the heterocyclic group, a lactone ring group is preferable. Examples of the lactone ring include the structures represented by General Formula (KA-1-1) to General Formula (KA-1-17).
The polarity conversion group may also be a group represented by X in the partial structure represented by General Formula (KC-1), in addition to the group represented by X in the partial structure represented by each of General Formula (KA-1) and General Formula (KB-1).
Y3—X—Y4 (KC-1)
X in General Formula (KC-1) represents a carboxylic acid ester group (—COO—), an acid anhydride group (—C(O)OC(O)—), an acid imide group (—NHCONH—), a carboxylic acid thioester group (—COS—), a carbonic acid ester group (—OC(O)O—), a sulfuric acid ester group (—OSO2O—), and a sulfonic acid ester group (—SO2O—).
As X of General Formula (KC-1), the carboxylic acid ester group (—COO—) is preferable.
Y3 represents an electron-withdrawing group. The electron-withdrawing group has the same definition as the electron-withdrawing group represented by each of Y1 and Y2 in General Formula (KB-1), and suitable aspects thereof are also the same.
Y4 represents a linear alkyl group having 1 to 4 carbon atoms.
In a case where the repeating unit (K0) has a group having a partial structure represented by General Formula (KC-1), the group having a partial structure represented by General Formula (KC-1) is a group having a monovalent or higher valent group formed by extracting at least any one hydrogen atom from a linear alkyl group having 1 to 4 carbon atoms, represented by Y4.
The partial structure represented by General Formula (KC-1) may be linked to the main chain of the resin B2 via a substituent at any position.
Moreover, the repeating unit (K0) may have a plurality of the partial structures represented by General Formula (KA-1), a plurality of the partial structures represented by General Formula (KB-1), or a plurality of the partial structures represented by General Formula (KC-1).
In addition, the repeating unit (K0) may have two or more of the partial structure of General Formula (KA-1), the partial structure of General Formula (KB-1), or the partial structure of General Formula (KC-1).
The repeating unit (K0) may be a repeating unit (K0-1) having a fluorine atom and a polarity conversion group on one side chain (hereinafter also simply referred to as a “repeating unit (K0-1)”), may be a repeating unit (K0-2) having a polarity conversion group and having no fluorine atom (hereinafter also simply referred to as a “repeating unit (K0-2)”), and may be a repeating unit (K0-3) having a polarity conversion group on one side chain and having a fluorine atom on a side chain different from the side chain in the same repeating unit (hereinafter simply a “repeating unit (K0-3)”).
Among those, the resin B2 more preferably includes a repeating unit (K0-1) as the repeating unit (K0).
In a case where the resin B2 has the repeating unit (K0-2), the resin B2 has a fluorine atom at an any position in the resin. In a case where the resin B2 has the repeating unit (K0-2), it is preferable that the resin B2 is a copolymer of the repeating unit (K0-2) and the “Repeating Unit Having Fluorine Atom” mentioned above as the repeating unit which can be included in the resin B1.
In addition, it is preferable that the side chain having a polarity conversion group and the side chain having a fluorine atom in the repeating unit (K0-3) are bonded to the same carbon atom in the main chain, that is, the side chains are in a positional relationship as in General Formula (4). In the formula, B1 represents a group having a polarity conversion group, and B2 represents a group having at least one of a fluorine atom or a silicon atom.
Moreover, in the repeating unit (K0-2) and the repeating unit (K0-3), the polarity conversion group is more preferably a partial structure represented by —COO— in the structure represented by General Formula (KA-1).
As the partial structure represented by General Formula (KA-1), a partial structure represented by General Formula (KY-2) is preferable.
That is, it preferable that the resin B2 has a monovalent or higher valent group formed by extracting at least any one hydrogen atom from the partial structure represented by General Formula (KY-2).
In General Formula (KY-2), Rky6 to Rky10 each independently represent a hydrogen atom, a halogen atom, an alkyl group, a cycloalkyl group, a carbonyl group, a carbonyloxy group, an oxycarbonyl group, an ether group, a hydroxyl group, a cyano group, an amide group, or an aryl group.
The partial structure represented by General Formula (KY-2) is preferably a group represented by General Formula (KY-3). * represents a bonding position.
In General Formula (KY-3),
In a case where the resin B2 includes a partial structure represented by General Formula (KY-3), it is preferable that the resin B2 includes a repeating unit having a group represented by General Formula (2).
In General Formula (2),
X represents an alkylene group, an oxygen atom, or a sulfur atom.
As the structure of —R2—Z—, a structure represented by —(CH2)l—COO— is preferable (1 represents an integer of 1 to 5).
Specific examples of the repeating unit having a polarity conversion group include the repeating units described in paragraphs 0315 and 0316 of JP2015-143881A, the contents of which are incorporated herein by reference.
In a case where the resin B2 includes the repeating unit (K0) as the repeating unit having a polarity conversion group, the content of the repeating unit (K0) is preferably 10% to 100% by mole, more preferably 20% to 100% by mole, still more preferably 30% to 100% by mole and particularly preferably 40% to 100% by mole with respect to all the repeating units in the resin B2.
In addition, the content of the repeating unit (K0-1) is preferably 10% to 100% by mole, more preferably 20% to 100% by mole, still more preferably 30% to 100% by mole, and particularly preferably 40% to 100% by mole with respect to all the repeating units in the resin B2.
In addition, the content of the repeating unit (K0-2) is preferably 10% to 90% by mole, more preferably 15% to 85% by mole, still more preferably 20% to 80% by mole, and particularly preferably 25% to 75% by mole with respect to all the repeating units in the resin B2.
The content of the “Repeating Unit Having Fluorine Atom” used together with the repeating unit (K0-2), is preferably 10% to 90% by mole, more preferably 15% to 85% by mole, still more preferably 20% to 80% by mole, and particularly preferably 25% to 75% by mole with respect to all the repeating units in the resin B2.
In addition, the content of the repeating unit (K0-3) is preferably 10% to 100% by mole, more preferably 20% to 100% by mole, still more preferably 30% to 100% by mole, and particularly preferably 40% to 100% by mole with respect to all the repeating units in the resin B2.
<<Repeating Unit (K01)>>
The repeating unit (K01) is a repeating unit including a group represented by Formula (I).
Formula (I):
In Formula (I), R1 represents a monovalent alkali-dissociable group having 1 to 20 carbon atoms. M represents a divalent hydrocarbon group having 1 to 20 carbon atoms, which may have a substituent. L represents a divalent organic group having 1 to 20 carbon atoms, which has a carbon atom bonded to an adjacent carbonyl group. Further, L and M may be bonded to each other to form an alicyclic structure or aliphatic heterocyclic structure having 3 to 20 ring members. * represents a bond.
The “alkali-dissociable group” is a group in which a hydrogen atom in a polar functional group such as a carboxyl group is substituted, and is referred to as a group that dissociates in the presence of an alkali (in a 2.38%-by-mass aqueous tetramethylammonium hydroxide solution at 23° C.).
The monovalent alkali-dissociable group having 1 to 20 carbon atoms, represented by R1 is not particularly limited as long as it dissociates in the presence of an alkali to generate a polar group.
Examples of the alkali-dissociable group include a monovalent fluorinated hydrocarbon group. In addition, examples of the alkali-dissociable group include a monovalent hydrocarbon group in a case where a fluorine atom is bonded to at least one of a carbon atom bonded to a carbonyl group of the ester bond adjacent to R1 or a carbon atom bonded to the carbon atom.
Examples of the monovalent hydrocarbon group include chain hydrocarbon groups such as alkyl groups such as a methyl group, an ethyl group, a propyl group, and a butyl group, alkenyl groups such as an ethenyl group, a propenyl group, a butenyl group, and a pentenyl group, and alkynyl groups such as an ethynyl group, a propynyl group, a butynyl group, and a pentynyl group; alicyclic hydrocarbon groups such as monocyclic cycloalkyl groups such as a cyclobutyl group, a cyclopentyl group, and a cyclohexyl group, monocyclic cycloalkenyl groups such as a cyclobutenyl group, a cyclopentenyl group, and a cyclohexenyl group, polycyclic cycloalkyl groups such as a norbornyl group, an adamantyl group, and a tricyclodecyl group, and polycyclic cycloalkenyl groups such as a norbornenyl group and a tricyclodecenyl group; and aromatic hydrocarbon groups such as aryl groups such as a phenyl group, a tolyl group, a xylyl group, and a naphthyl group, and aralkyl groups such as a benzyl group, a phenethyl group, and a phenylpropyl group.
Examples of the monovalent fluorinated hydrocarbon group include a group in which a part or all of hydrogen atoms of the monovalent hydrocarbon group are substituted with fluorine atoms.
As the alkali-dissociable group, a fluorinated hydrocarbon group is preferable, and a fluorinated hydrocarbon group in which fluorine atom is bonded to at least one of a carbon atom bonded to a carbonyl group of the ester bond adjacent to R1 and a carbon atom bonded to the carbon atom is more preferable. In addition, the alkali-dissociable group preferably has a primary or secondary carbon atom bonded to an adjacent oxygen atom from the viewpoint of enhancing the alkali dissociability. Further, the lower limit of the number of carbon atoms of the alkali-dissociable group is preferably 2. On the other hand, the upper limit of the number of carbon atoms of the alkali-dissociable group is preferably 10, more preferably 8, and still more preferably 6.
Examples of the divalent hydrocarbon group having 1 to 20 carbon atoms, represented by M, include chain hydrocarbon groups such as alkanediyl groups such as a methanediyl group, an ethanediyl group, a propanediyl group, and a butanediyl group, alkenediyl groups such as an ethenediyl group, a propenediyl group, and a butenediyl group, and alkynediyl groups such as an ethynediyl group, a propynediyl group, and a butynediyl group; alicyclic hydrocarbon groups such as monocyclic cycloalkanediyl groups such as a cyclobutanediyl group, a cyclopentanediyl groups, and a cyclohexanediyl group, monocyclic cycloalkenediyl groups such as a cyclobutenediyl group, a cyclopentenediyl group, and a cyclohexenediyl group, polycyclic cycloalkanediyl groups such as a norbornanediyl group, a tricyclodecanediyl group, and an adamantanediyl group, and polycyclic cycloalkenediyl groups such as a norbornenediyl group and a tricyclodecenediyl group; aromatic hydrocarbon groups such as arenediyl groups such as a benzenediyl group, a toluenediyl group, and a xylenediyl group, and arenediyl alkanediyl groups and arenediyl cycloalkanediyl groups such as a benzenediyl methanediyl group and a naphthalenediyl cyclohexanediyl group.
Among those, the methanediyl group, the ethanediyl group, or the benzenediyl group is preferable, and the methanediyl group is more preferable.
The divalent hydrocarbon group having 1 to 20 carbon atoms, represented by M, may further have a substituent. Examples of the substituent include a halogen atom, a hydroxyl group, a carbonyl group, a carboxyl group, a nitro group, a cyano group, an ether group, an ester group, a hydrocarbon group, and a fluorinated hydrocarbon group. Among these, the halogen atom or the fluorinated hydrocarbon group is preferable, and a fluorine atom or a trifluoromethyl group is more preferable.
In a case where there are a plurality of the substituents, the substituents may be bonded to each other to form an alicyclic structure or aliphatic heterocyclic structure having 3 to 20 ring members. Furthermore, examples of the alicyclic structure or aliphatic heterocyclic structure having 3 to 20 ring members include oxacycloalkane structures such as an oxacyclopentane structure and an oxacyclohexane structure; dioxacycloalkane structures such as a dioxacyclopentane structure and a dioxacyclohexane structure; and lactone structures such as a butyrolactone structure and a valerolactone structure. Among these, the oxacycloalkane structures or the lactone structures are preferable, and the oxacyclohexane structure or the valerolactone structure is more preferable.
Examples of the divalent organic group having 1 to 20 carbon atoms, represented by L, include the same hydrocarbon groups as those exemplified as M, and a group having a group including a heteroatom between carbon and carbon of the hydrocarbon group.
Examples of the group including a heteroatom which may be included between carbon and carbon include one or a group formed by combination of two selected from the group consisting of —O—, —S—, —NRA—, —CO—, and —CS—. RA is a hydrocarbon group having 1 to 10 carbon atoms. Examples of the hydrocarbon group represented by RA include the same hydrocarbon groups as those exemplified as R1.
An upper limit of the number of carbon atoms of the divalent organic group represented by L is preferably 10, more preferably 8, and still more preferably 6. In addition, as the divalent organic group represented by L, a chain hydrocarbon group and an alicyclic hydrocarbon group are preferable, an alkanediyl group or a cycloalkanediyl group is more preferable, and a methanediyl group or a cyclohexanediyl group is still more preferable.
Examples of the alicyclic structure or aliphatic heterocyclic structure having 3 to 20 ring members, which is formed by the mutual bonding of L and M, include cycloalkane structures such as a cyclopentane structure and a cyclohexane structure; and lactone structures such as a butyrolactone structure and a valerolactone structure. Among these, the alicyclic structures are preferable, and the cyclohexane structure is more preferable.
Specific examples of the group represented by Formula (I) will be exemplified below.
In Formulae (I-1) to (I-30), * represents a bond.
The repeating unit (K01) is preferably a repeating unit represented by Formula (IA).
Furthermore, in Formula (IA), R2 represents a hydrogen atom, a fluorine atom, a methyl group, or a trifluoromethyl group. Z represents the above-mentioned group represented by Formula (I).
In a case where the resin B2 includes the repeating unit (K01) as the repeating unit having a polarity conversion group, the content of the repeating unit (K01) is preferably 10% to 100% by mole, more preferably 20% to 100% by mole, still more preferably 30% to 100% by mole and particularly preferably 40% to 100% by mole with respect to all the repeating units in the resin B2.
<<Repeating Unit (K02)>>
The repeating unit (K02) is a repeating unit derived from a monomer represented by Formula (II).
Formula (II):
In Formula (II), R″ represents a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, which may have a halogen atom, or a halogen atom. R12 represents a fluorinated hydrocarbon group having 1 to 10 carbon atoms or a group represented by Formula (IIA). R13 and R14 each independently represent an alkyl group having 1 to 4 carbon atoms. A11 and A12 each independently represent an alkanediyl group having 1 to 6 carbon atoms or * represents a bond with the oxygen atom. It should be noted that in A11 and A12, the carbon atom bonded to the oxygen atom is not a tertiary carbon atom. A13, A14, and A15 each independently represent an alkanediyl group having 1 to 6 carbon atoms. X11 and X12 each independently represent an oxygen atom, —CO—O—, or —O—CO—. a represents 0 or 1.
Formula (IIA):
In Formula (IIA), AT1 represents a divalent aliphatic hydrocarbon group having 1 to 18 carbon atoms, which may have a fluorine atom. XT1 represents —CO—O— or —O—CO—. AT2 represents an aliphatic hydrocarbon group having 1 to 17 carbon atoms, which may have a fluorine atom. It should be noted that at least one of AT1 or AT2 includes one or more fluorine atoms. * represents a bond with the carbonyl group.
Examples of a halogen atom in the alkyl group having 1 to 6 carbon atoms, which may have a halogen atom, represented by RH include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Examples of the alkyl group having 1 to 6 carbon atoms, which may have a halogen atom, represented by RH include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group a sec-butyl group, a tert-butyl group, an n-pentyl group, an n-hexyl group, a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluoro-sec-butyl group, a perfluoro-tert-butyl group, a perfluoropentyl group, a perfluorohexyl group, a perchloromethyl group, a perbromomethyl group, and a periodomethyl group, and the alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, and more preferably a methyl group or an ethyl group.
Examples of the halogen atom represented by RH include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.
Among those, the hydrogen atom or the methyl group is preferable as R11.
The fluorinated hydrocarbon group having 1 to 10 carbon atoms, represented by R12, is not particularly limited, and examples thereof include an aliphatic hydrocarbon group having 1 to 10 carbon atoms, which has a fluorine atom, and an alicyclic hydrocarbon group having 1 to 10 carbon atoms, which has a fluorine atom.
Examples of the aliphatic hydrocarbon group having 1 to 10 carbon atoms, which has a fluorine atom, include an alkyl group having 1 to 10 carbon atoms, which has a fluorine atom, and specifically, a difluoromethyl group, a trifluoromethyl group, a 1,1-difluoroethyl group, a 2,2-difluoroethyl group, a 1,1,1-trifluoroethyl group, a 2,2,2-trifluoroethyl group, a perfluoroethyl group, a 1,1,2,2-tetrafluoropropyl group, a 1,1,1,2,2-pentafluoropropyl group, a 1,1,2,2,3,3-hexafluoropropyl group, a perfluoropropyl group, a perfluoroethylmethyl group, a 1-(trifluoromethyl)-1,2,2,2-tetrafluoroethyl group, a 1-(trifluoromethyl)-2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluorobutyl group, a 1,1,2,2,3,3-hexafluorobutyl group, a 1,1,1,2,2,3,3-peptafluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a perfluorobutyl group, a 1,1-bis(trifluoro)methyl-2,2,2-trifluoroethyl group, a 2-(perfluoropropyl)ethyl group, a 1,1,2,2,3,3,4,4-octafluoropentyl group, a perfluoropentyl group, a 1,1,2,2,3,3,4,4,5,5-decafluoropentyl group, a 1,1-bis(trifluoromethyl)-2,2,3,3,3-pentafluoropropyl group, a 2-(perfluorobutyl) ethyl group, a 1,1,1,2,2,3,3,4,4-nonafluoropentyl group, a 1,1,2,2,3,3,4,4,5,5-decafluorohexyl group, a 1,1,2,2,3,3,4,4,5,5,6,6-dodecafluorohexyl group, a perfluorohexyl group, a perfluoropentylmethyl group, and a perfluorohexyl group.
Examples of the alicyclic hydrocarbon group having 1 to 10 carbon atoms, which has a fluorine atom, include a cycloalkyl group having 1 to 10 carbon atoms, which has a fluorine atom, and specifically include a perfluorocyclohexyl group, a perfluoroadamantyl group.
Examples of the divalent aliphatic hydrocarbon group having 1 to 18 carbon atoms, which may have a fluorine atom, represented by AT1 in Formula (IIA) include an alkanediyl group having 1 to 18 carbon atoms, which may have a fluorine atom, and a divalent cyclic aliphatic hydrocarbon group having 1 to 18 carbon atoms, which may have a fluorine atom.
The alkanediyl group having 1 to 18 carbon atoms, which may have a fluorine atom, preferably has 1 to 10 carbon atoms, more preferably has 1 to 6 carbon atoms, and still more preferably has 2 or 3 carbon atoms.
Specific examples of the alkanediyl group having 1 to 18 carbon atoms, which may have a fluorine atom, represented by AT1 include a methanediyl group, an ethanediyl group, a propanediyl group, a butanediyl group, and a divalent group formed by removing one hydrogen atom or fluorine atom from the groups exemplified as the fluorinated hydrocarbon group having 1 to 10 carbon atoms, represented by R12.
Among those, as the alkanediyl group having 1 to 18 carbon atoms, which may have a fluorine atom, a perfluoroalkanediyl group is preferable, and a perfluoroalkanediyl group having 2 or 3 carbon atoms is more preferable.
The divalent cyclic aliphatic hydrocarbon group having 1 to 18 carbon atoms, which may have a fluorine atom, may be either monocyclic or polycyclic. Examples of the monocyclic divalent aliphatic hydrocarbon group having 1 to 18 carbon atoms include a cyclohexanediyl group and a perfluorocyclohexanediyl group. Examples of the polycyclic divalent aliphatic hydrocarbon group having 1 to 18 carbon atoms include an adamantanediyl group, a norbornanediyl group, and a perfluoroadamantanediyl group.
The aliphatic hydrocarbon group having 1 to 17 carbon atoms, which may have a fluorine atom, of AT2 is preferably an aliphatic hydrocarbon group having 3 to 12 carbon atoms, and more preferably an aliphatic hydrocarbon groups having 3 to 10 carbon atoms, each of which may have a fluorine atom.
Examples of the aliphatic hydrocarbon group having 1 to 17 carbon atoms, which may have a fluorine atom, of AT2 include an alkyl group having 1 to 17 carbon atoms, which may have a fluorine atom, and an alicyclic hydrocarbon group having 1 to 17 carbon atoms, which may have a fluorine atom.
Specific examples of the alkyl group having 1 to 17 carbon atoms, which may have a fluorine atom, represented by AT2 include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group a sec-butyl group, a tert-butyl group, an n-pentyl group, an n-hexyl group, and the groups exemplified as the fluorinated hydrocarbon group having 1 to 10 carbon atoms, represented by R′2.
In addition, examples of the alicyclic hydrocarbon group having 1 to 17 carbon atoms, which may have a fluorine atom, include a cycloalkyl group having 1 to 17 carbon atoms, which may have a fluorine atom, and specifically include a cyclohexyl group and a perfluorocyclohexyl group.
It should be noted that in Formula (IIA), at least one of AT1 or AT2 includes one or more fluorine atoms. Among those, it is preferable that AT1 includes a fluorine atom.
In Formula (I), as R′2, among those, the fluorinated alkyl group having 1 to 6 carbon atoms or the group represented by Formula (IIA) is preferable, and the group represented by Formula (IIA) is more preferable.
As the alkyl group having 1 to 4 carbon atoms, represented by each of R13 and R14, an alkyl group having 1 to 3 carbon atoms is preferable, a methyl group or an ethyl group is more preferable, and the methyl group is still more preferable.
Examples of the alkanediyl group having 1 to 6 carbon atoms, represented by each of A11, A12, A13, A14, and A15, include linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, and a hexane-1,6-diyl group; and branched alkanediyl groups such as an ethane-1,1-diyl group, a propane-1,2-diyl group, a butane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, and a 2-methylbutane-1,4-diyl group.
As A11 and A12, among those, an alkanediyl group having 1 to 4 carbon atoms is preferable, and an alkanediyl group having 1 or 2 carbon atoms is more preferable.
As *-A13-X11-(A14-X12)a-A15-, *-A13-CO—O-A15-, *-A13-O—CO-A15- or *-A13-CO—O-A14-CO—O-A15- is preferable, and *-A13-CO—O-A15- is more preferable.
Specific examples of the compound (II) will be shown below. Further, in each of the compounds represented by Formulae (II-1) to (II-11), a compound in which the methyl group corresponding to is substituted with a hydrogen atom is also mentioned as the specific example of the compound (II).
In a case where the resin B2 includes the repeating unit (K02) as the repeating unit having a polarity conversion group, the content of the repeating unit (K02) is preferably 10% to 100% by mole, more preferably 20% to 100% by mole, still more preferably 30% to 100% by mole and particularly preferably 40% to 100% by mole with respect to all the repeating units in the resin B2.
The resin B2 may include another repeating unit other than the repeating unit having a polarity conversion group. Examples of such another repeating unit include the “Repeating Unit Having Fluorine Atom”, the “Repeating Unit B1X”, and the “Repeating Unit Having Alkali-Soluble Group” mentioned above as the repeating unit which can be included in the resin B1.
In a case where the resin B2 includes a repeating unit having a fluorine atom, the content of the repeating unit having a fluorine atom is preferably 20% to 65% by mole, more preferably 25% to 60% by mole, and still more preferably 30% to 55% by mole with respect to all the repeating units in the resin B2.
In a case where the resin B2 includes a repeating unit B1X, the content of the repeating unit B1X is preferably 5% to 55% by mole, more preferably 5% to 15% by mole, and still more preferably 5% to 10% by mole with respect to all the repeating units in the resin B2.
In a case where the resin B2 includes a repeating unit having an alkali-soluble group, the content of the repeating unit having an alkali-soluble group is preferably 5% to 15% by mole, and more preferably 5% to 10% by mole with respect to all the repeating units in the resin B2.
The resin B3 is a resin including a fluorine atom and having polarity that increases by the action of either of an acid and the action of an alkali.
Specific examples of the resin B3 include resins including a fluorine atom and having an acid-decomposable group and a polarity conversion group.
The definition and suitable aspects of the acid-decomposable group are the same as the definition and suitable aspects of the acid-decomposable group included in the resin B1 described above.
The definition and suitable aspects of the polarity conversion group are the same as the definition and suitable aspects of the polarity conversion group included in the resin B2 described above.
Specifically, as the resin B3, a resin including a repeating unit having an acid-decomposable group and a repeating unit having a polarity conversion group is preferable.
Suitable aspects of the repeating unit having an acid-decomposable group are the same as the suitable aspects of the “Repeating Unit Having Acid-Decomposable Group” described above as the repeating unit which can be included in the resin B1.
Suitable aspects of the repeating unit having a polarity conversion group are the same as the suitable aspects of the “Repeating Unit Having Polarity Conversion Group” described above as the repeating unit which can be included in the resin B2.
The content of the repeating unit having an acid-decomposable group in the resin B3 is preferably 10% to 60% by mole, and more preferably 20% to 60% by mole with respect to all the repeating units in the resin B3.
The content of the repeating unit having a polarity conversion group in the resin B3 is preferably 10% to 60% by mole, and more preferably 20% to 60% by mole with respect to all the repeating units in the resin B3.
In addition, in the resin B3, the substitution position of a fluorine atom is not particularly limited.
The resin B3 may include the “Repeating Unit Having Fluorine Atom”, the “Repeating Unit B1X”, the “Repeating Unit Having Alkali-Soluble Group”, and the like mentioned above as the repeating unit which can be included in the resin B1.
In a case where the resin B3 includes a repeating unit having a fluorine atom, the content of the repeating unit having a fluorine atom is preferably 20% to 65% by mole, more preferably 25% to 60% by mole, and still more preferably 30% to 55% by mole with respect to all the repeating units in the resin B3.
In a case where the resin B3 includes a repeating unit B1X, the content of the repeating unit B1X is preferably 5% to 55% by mole, more preferably 5% to 15% by mole, and still more preferably 5% to 10% by mole with respect to all the repeating units in the resin B3.
In a case where the resin B3 includes a repeating unit having an alkali-soluble group, the content of the repeating unit having an alkali-soluble group is preferably 5% to 15% by mole, and more preferably 5% to 10% by mole with respect to all the repeating units in the resin B3.
In addition, from the viewpoint that the LWR of a pattern thus formed is more excellent, it is preferable that the resin B3 is a resin including three or more repeating units having structures that are different from each other. Further, the expression, the “resin B3 includes three or more kinds of repeating units” means that three or more kinds of repeating units are included in a content of 5% by mole or more with respect to all the repeating units of the resin B3.
The weight-average molecular weight of the resin B as a value expressed in terms of polystyrene by a gel permeation chromatography (GPC) method is preferably 1,000 to 100,000, more preferably 1,000 to 50,000, and still more preferably 2,000 to 15,000.
The molecular weight distribution of the resin B (weight-average molecular weight (Mw)/number-average molecular weight (Mn)) is not particularly limited, but is preferably 1.0 to 2.5, and more preferably 1.0 to 2.0.
The content of the resin B is preferably 0.01% to 20% by mass, more preferably 0.1% to 15% by mass, still more preferably 0.1% to 10% by mass, and particularly preferably 0.1% to 6% by mass, with respect to a total solid content of the composition.
Moreover, in a case where the resist composition of the embodiment of the present invention includes one or more resins selected from the group consisting of the resin B1 including a repeating unit having an acid-decomposable group and the resin B3 including a repeating unit having an acid-decomposable group, the total content of the resin B1 and the resin B3 is preferably 0.7% by mass or more, more preferably 1.0% by mass or more, and still more preferably 2.0% by mass or more with respect to the total content of all resins included in the resist composition. In addition, an upper limit thereof is not particularly limited, but is preferably 8.0% by mass or less.
[Resin C]
The resist composition of the embodiment of the present invention may further include a resin (resin C) that is different from the above-mentioned resin A and resin B.
The resin C is not particularly limited as long as it does not inhibit the effect of the present invention, and for example, a resin including a fluorine atom and a carboxylic acid group is preferable, and a resin that includes a repeating unit including a fluorine atom and a repeating unit including a carboxylic acid group is more preferable.
Since the resin including a fluorine atom and a carboxylic acid group includes the fluorine atom in the molecule, it is presumed that the resin is unevenly distributed on the surface of the resist film. Examples of the effect of addition of the resin including a fluorine atom and a carboxylic acid group include control of static and dynamic contact angles of a surface of the resist film with respect to water, and improvement of developability, in addition to the improvement of the LWR performance of a pattern thus formed.
The repeating unit including a fluorine atom, which can be included in the resin C, is the same as the “(Repeating Unit Having Fluorine Atom)” described in the above-mentioned resin B1.
Examples of the repeating unit including a carboxylic acid group which can be included in the resin C include a repeating unit derived from (meth)acrylic acid.
As the resin C, a resin that includes a repeating unit including a fluorine atom, a repeating unit including a carboxylic acid group, and another repeating unit which may be present, as desired, is preferable. Such another resin is the same as “(Another Repeating Unit)” described in the above-mentioned resin B1.
In a case where the resin C includes a repeating unit including a fluorine atom, the content of the repeating unit including a fluorine atom is preferably 20% to 65% by mole, more preferably 25% to 60% by mole, and still more preferably 30% to 55% by mole with respect to all the repeating units in the resin C.
In a case where the resin C includes a repeating unit including a carboxylic acid group, the content of the repeating unit including a carboxylic acid group is preferably 5% to 30% by mole, more preferably 5% to 20% by mole, and still more preferably 10% to 20% by mole with respect to all the repeating units in the resin C.
In a case where the resin C includes such another repeating unit, the content of such another repeating unit is preferably 5% to 55% by mole, more preferably 10% to 55% by mole, and still more preferably 30% to 50% by mole with respect to all the repeating units in the resin C.
The content of the resin C is preferably 0.01% to 20% by mass, and more preferably 0.1% to 10% by mass with respect to the total solid content of the topcoat composition.
[Photoacid Generator]
The resist composition of the embodiment of the present invention includes one or more (specific photoacid generators) selected from the group consisting of the following compound (I) to the following compound (III) as a compound that generates an acid upon irradiation with actinic rays or radiation (photoacid generators).
As in an ordinary resist composition in the related art, in a case where photoacid generators and acid diffusion control agents are added to the composition only as an individual compound, the photoacid generators or the acid diffusion control agents are easily aggregated with each other. Therefore, in the ordinary resist composition in the related art, a portion having a high (or low) concentration of the photoacid generators and a portion having a high (or low) concentration of the acid diffusion control agents are present in a resist film thus formed, and thus, the concentration distribution of the photoacid generators and the acid diffusion control agents is likely to be non-uniform. As a result, in a case where the resist film is exposed, unevenness in the amount and the diffusion of an acid generated in the resist film also occurs, which causes non-uniformity in the width of a pattern obtained after development.
In contrast, since the specific compound includes both of a structural moiety X having a function corresponding to a photoacid generator and a structural moiety having a function corresponding to an acid diffusion control agent (a structural moiety Y or a structural moiety Z) in one molecule, it is possible to keep a presence ratio of each of the structural moieties constant in the resist film. Therefore, even in a case where the resist film is exposed, the amount and the diffusion of an acid generated in the resist film are likely to be uniform, and the width of a pattern obtained after development is likely to be stable. That is, the LWR performance of a pattern thus formed is excellent.
In particular, in a case where the acid dissociation constant of an acid generated by irradiating the compound (I) to the compound (III) with actinic rays or radiation is within a predetermined range, the LWR performance of a pattern thus formed is more excellent.
Hereinafter, the specific photoacid generator will be described.
<Specific Photoacid Generator>
(Compound (I))
Hereinafter, the compound (I) will be described.
Compound (I): a compound having each one of the following structural moiety X and the following structural moiety Y, in which the compound generates an acid including the following first acidic moiety derived from the following structural moiety X and the following second acidic moiety derived from the following structural moiety Y, upon irradiation with actinic rays or radiation
Structural moiety X: a structural moiety which consists of an anionic moiety A1− and a cationic moiety M1+, and forms a first acidic moiety represented by HA1 upon irradiation with actinic rays or radiation
Structural moiety Y: a structural moiety which consists of an anionic moiety A2″ and a cationic moiety M2+, and forms a second acidic moiety represented by HA2, having a structure different from that of the first acidic moiety formed in the structural moiety X, upon irradiation with actinic rays or radiation
It should be noted that the compound (I) satisfies the following condition I:
Condition I: a compound PI formed by substituting the cationic moiety M1+ in the structural moiety X and the cationic moiety M2+ in the structural moiety Y with H+ in the compound (I) has an acid dissociation constant a1 derived from an acidic moiety represented by HA1, formed by substituting the cationic moiety M1+ in the structural moiety X with H+, and an acid dissociation constant a2 derived from an acidic moiety represented by HA2, formed by substituting the cationic moiety M2+ in the structural moiety Y with H+, and the acid dissociation constant a2 is larger than the acid dissociation constant a1.
Furthermore, the acid dissociation constant a1 and the acid dissociation constant a2 are determined by the above-mentioned method. More specifically, with regard to the acid dissociation constant a1 and the acid dissociation constant a2 of the compound PI, in a case where the acid dissociation constant of the compound PI is determined, the pKa with which the compound PI (in which the compound PI corresponds to a “compound having HA1 and HA2”) serves as a “compound having A1− and HA2” is the acid dissociation constant a1, and the pKa with which the “compound having A1− and HA2” serves as the “compound having A1− and A2′” is the acid dissociation constant a2.
In addition, the compound PI corresponds to an acid generated by irradiating the compound (I) with actinic rays or radiation.
From the viewpoint that the LWR performance of a pattern thus formed is more excellent, in the compound PI, the difference between the acid dissociation constant a1 and the acid dissociation constant a2 is, for example, 0.4 or more, preferably 2.0 or more, and more preferably 3.0 or more. Further, the upper limit value of the difference between the acid dissociation constant a1 and the acid dissociation constant a2 is not particularly limited, but is, for example, 15.0 or less.
In addition, from the viewpoint that the stability of the cationic moiety of the compound (I) in the resist composition is more excellent, in the compound PI, the acid dissociation constant a2 is, for example, 7.0 or less, preferably 2.0 or less, and more preferably 1.0 or less. Further, the lower limit value of the acid dissociation constant a2 is preferably −2.0 or more.
In addition, from the viewpoint that the LWR performance of a pattern thus formed is more excellent, the acid dissociation constant a1 is preferably 2.0 or less, more preferably 0.5 or less, and still more preferably −0.1 or less in the compound PI. Further, the lower limit value of the acid dissociation constant a1 is preferably −15.0 or more.
The compound (I) is not particularly limited, and examples thereof include a compound represented by General Formula (Ia).
M11+A11−-L1-A12−M12+ (Ia)
In General Formula (Ia), “M11+A11−” and “A12−M12+” correspond to the structural moiety X and the structural moiety Y, respectively. The compound (Ia) generates an acid represented by HA11-L1-A21H upon irradiation with actinic rays or radiation. That is, “M11+A11−” forms a first acidic moiety represented by HA11, and “A12−M12+” forms a second acidic moiety represented by HA12, that has a structure different from that of the first acidic moiety.
In General Formula (Ia), M11+ and M12+ each independently represent an organic cation.
A11− and A12− each independently represent an anionic functional group. It should be noted that A12− represents a structure different from that of the anionic functional group represented by A11−.
L1 represents a divalent linking group.
It should be noted that in the compound PIa (HA11-L1-A12H) formed by substituting organic cations represented by M11+ and M12+ with H+ in General Formula (Ia), the acid dissociation constant a2 derived from the acidic moiety represented by A12H is larger than the acid dissociation constant a1 derived from the acidic moiety represented by HA11. Further, suitable values of the acid dissociation constant a1 and the acid dissociation constant a2 are as described above.
The organic cations represented by M1+ and M2+ in General Formula (I) are as described later.
Examples of the anionic functional group represented by A11− and A12− include groups represented by General Formulae (B-1) to (B-13).
In General Formulae (B-1) to (B-13), * represents a bonding position.
Further, it is also preferable that * in General Formula (B-12) is a bonding position to a group that is neither —CO— nor —SO2—.
In General Formulae (B-1) to (B-5), and (B-12), RX1 represents an organic group.
As RX1, a linear, branched, or cyclic alkyl group, or an aryl group is preferable.
The alkyl group preferably has 1 to 15 carbon atoms, and more preferably has 1 to 10 carbon atoms.
The alkyl group may have a substituent. As the substituent, a fluorine atom or a cyano group is preferable. In a case where the alkyl group has a fluorine atom as the substituent, it may be a perfluoroalkyl group.
In addition, the alkyl group may have a carbon atom substituted with a carbonyl group.
As the aryl group, a phenyl group or a naphthyl group is preferable, and the phenyl group is more preferable.
The aryl group may have a substituent. As the substituent, a fluorine atom, a perfluoroalkyl group (for example, preferably having 1 to 10 carbon atoms, and more preferably having 1 to 6 carbon atoms), or a cyano group is preferable.
Furthermore, in General Formula (B-5), the atom directly bonded to N− in RX1 is preferably neither a carbon atom in —CO— nor a sulfur atom in —SO2—.
In addition, it is preferable that Rxi in General Formula (B-3) does not include a fluorine atom.
In General Formulae (B-7) and (B-11), RX2 represents a hydrogen atom, or a substituent other than a fluorine atom and a perfluoroalkyl group.
As the substituent other than a fluorine atom and a perfluoroalkyl group, represented by RX2, a linear, branched, or cyclic alkyl group other than the fluorine atom and the perfluoroalkyl group is preferable.
The alkyl group preferably has 1 to 15 carbon atoms, and more preferably has 1 to 10 carbon atoms.
It is preferable that the alkyl group has no fluorine atom. That is, in a case where the alkyl group has a substituent, the alkyl group may have a substituent other than a fluorine atom.
In General Formula (B-8), RXF1 represents a hydrogen atom, a fluorine atom, or a perfluoroalkyl group. It should be noted that at least one of the plurality of RXF1's represents a fluorine atom or a perfluoroalkyl group.
The perfluoroalkyl group represented by RXF1 preferably has 1 to 15 carbon atoms, more preferably has 1 to 10 carbon atoms, and still more preferably has 1 to 6 carbon atoms.
In General Formula (B-10), RXF2 represents a fluorine atom or a perfluoroalkyl group.
The perfluoroalkyl group represented by RXF2 preferably has 1 to 15 carbon atoms, more preferably has 1 to 10 carbon atoms, and still more preferably has 1 to 6 carbon atoms.
In General Formula (B-9), n represents an integer of 0 to 4.
A combination of the anionic functional groups represented by A11− and A12− is not particularly limited, but for example, in a case where A11− is a group represented by General Formula (B-8) or (B-10), examples of the anionic functional group represented by A12− include a group represented by General Formula (B-1) to (B-7), (B-9), or (B-11) to (B-13); and in a case where A11− is a group represented by General Formula (B-7), examples of the anionic functional group represented by A12− includes a group represented by General Formula (B-6).
In General Formula (I), the divalent linking group represented by L1 is not particularly limited, and is preferably —CO—, —NR—, —CO—, —O—, or an alkylene group (which preferably has 1 to 6 carbon atoms, and may be linear or branched), a cycloalkylene group (preferably having 3 to 15 carbon atoms), an alkenylene group (preferably having 2 to 6 carbon atoms), a divalent aliphatic heterocyclic group (preferably a 5- to 10-membered ring, more preferably a 5- to 7-membered ring, and still more preferably a 5- or 6-membered ring, each having at least one of an N atom, an O atom, an S atom, or an Se atom in the ring structure), and a divalent aromatic heterocyclic group (preferably a 5- to 10-membered ring, more preferably a 5- to 7-membered ring, and still more preferably a 5- or 6-membered ring, each having at least one of an N atom, an O atom, an S atom, or an Se atom in the ring structure), a divalent aromatic hydrocarbon ring group (preferably a 6- to 10-membered ring, and more preferably a 6-membered ring), and a divalent linking group formed by combination of a plurality of these groups. Examples of R include a hydrogen atom or a monovalent organic group. The monovalent organic group is not particularly limited, but is preferably, for example, an alkyl group (preferably having 1 to 6 carbon atoms).
The divalent linking group may include a group selected from the group consisting of —S—, —SO—, and —SO2—.
In addition, the alkylene group, the cycloalkylene group, the alkenylene group, and the divalent aliphatic hydrocarbon ring group may be substituted with a substituent. Examples of the substituent include a halogen atom (preferably a fluorine atom).
In General Formula (I), preferred forms of the organic cations represented by M11+ and M12+ will be described in detail.
The organic cations represented by M1+ and M2+ each independently preferably an organic cation represented by General Formula (ZaI) (cation (ZaI)) or an organic cation represented by General Formula (ZaII) (cation (ZaII)).
In General Formula (ZaI),
The organic group as each of R201, R202, and R203 usually has 1 to 30 carbon atoms, and preferably has 1 to 20 carbon atoms. In addition, two of R201 to R203 may be bonded to each other to form a ring structure, and the ring may include an oxygen atom, a sulfur atom, an ester group, an amide group, or a carbonyl group. Examples of the group formed by the bonding of two of R201 to R203 include an alkylene group (for example, a butylene group and a pentylene group), and —CH2—CH2—O—CH2—CH2—.
Suitable aspects of the organic cation as General Formula (ZaI) include an organic cation (ZaI-1), a cation (ZaI-2), an organic cation represented by General Formula (ZaI-3b) (cation (ZaI-3b)), and an organic cation represented by General Formula (ZaI-4b) (cation (ZaI-4b)), each of which will be described later.
First, the cation (ZaI-1) will be described.
The cation (ZaI-1) is a cation, that is, an arylsulfonium cation in which at least one of R201, R202, or R203 of General Formula (ZaI) is an aryl group.
In the arylsulfonium cation, all of R201 to R203 may be aryl groups, or some of R201 to R203 may be an aryl group, and the rest may be an alkyl group or a cycloalkyl group.
In addition, one of R201 to R203 may be an aryl group, two of R201 to R203 may be bonded to each other to form a ring structure, and an oxygen atom, a sulfur atom, an ester group, an amide group, or a carbonyl group may be included in the ring. Examples of the group formed by the bonding of two of R201 to R203 include an alkylene group (for example, a butylene group, a pentylene group, or —CH2—CH2—O—CH2—CH2—) in which one or more methylene groups may be substituted with an oxygen atom, a sulfur atom, an ester group, an amide group, and/or a carbonyl group.
Examples of the arylsulfonium cation include a triarylsulfonium cation, a di aryl alkyl sulfonium cation, an aryldialkylsulfonium cation, a diarylcycloalkyl sulfonium cation, and an aryldicycloalkyl sulfonium cation.
As the aryl group included in the arylsulfonium cation, a phenyl group or a naphthyl group is preferable, and the phenyl group is more preferable. The aryl group may be an aryl group which has a heterocyclic structure having an oxygen atom, a nitrogen atom, a sulfur atom, or the like. Examples of the heterocyclic structure include a pyrrole residue, a furan residue, a thiophene residue, an indole residue, a benzofuran residue, and a benzothiophene residue. In a case where the arylsulfonium cation has two or more aryl groups, the two or more aryl groups may be the same as or different from each other.
The alkyl group or the cycloalkyl group contained in the arylsulfonium cation, as necessary, is preferably a linear alkyl group having 1 to 15 carbon atoms, a branched alkyl group having 3 to 15 carbon atoms, or a cycloalkyl group having 3 to 15 carbon atoms, and examples thereof include a methyl group, an ethyl group, a propyl group, an n-butyl group, a sec-butyl group, a t-butyl group, a cyclopropyl group, a cyclobutyl group, and a cyclohexyl group.
Examples of the substituent which may be contained in each of the aryl group, the alkyl group, and the cycloalkyl group of each of R201 to R203 each independently include an alkyl group (for example, having 1 to 15 carbon atoms), a cycloalkyl group (for example, having 3 to 15 carbon atoms), an aryl group (for example, having 6 to 14 carbon atoms), an alkoxy group (for example, having 1 to 15 carbon atoms), a cycloalkylalkoxy group (for example, having 1 to 15 carbon atoms), a halogen atom, a hydroxyl group, and a phenylthio group.
The substituent may further have a substituent as possible, and may be in the form of an alkyl halide group such as a trifluoromethyl group, for example, in which the alkyl group has a halogen atom as a substituent.
Next, the cation (ZaI-2) will be described.
The cation (ZaI-2) is a cation in which R201 to R203 in Formula (ZaI) are each independently a cation representing an organic group having no aromatic ring. Here, the aromatic ring also encompasses an aromatic ring including a heteroatom.
The organic group having no aromatic ring as each of R201 to R203 generally has 1 to 30 carbon atoms, and preferably 1 to 20 carbon atoms.
R201 to R203 are each independently preferably an alkyl group, a cycloalkyl group, an allyl group, or a vinyl group, more preferably a linear or branched 2-oxoalkyl group, a 2-oxocycloalkyl group, or an alkoxycarbonylmethyl group, and still more preferably the linear or branched 2-oxoalkyl group.
Examples of the alkyl group and the cycloalkyl group of each of R201 to R203 include a linear alkyl group having 1 to 10 carbon atoms or branched alkyl group having 3 to 10 carbon atoms (for example, a methyl group, an ethyl group, a propyl group, a butyl group, and a pentyl group), and a cycloalkyl group having 3 to 10 carbon atoms (for example, a cyclopentyl group, a cyclohexyl group, and a norbornyl group).
R201 to R203 may further be substituted with a halogen atom, an alkoxy group (for example, having 1 to 5 carbon atoms), a hydroxyl group, a cyano group, or a nitro group.
Next, the cation (ZaI-3b) will be described.
The cation (ZaI-3b) is a cation represented by General Formula (ZaI-3b).
In General Formula (ZaI-3b),
Any two or more of R1c to R5c, R5c and R6c, R6c and R7c, R5c and Rx, and Rx and Ry may each be bonded to each other to form a ring, and the ring may each independently include an oxygen atom, a sulfur atom, a ketone group, an ester bond, or an amide bond.
Examples of the ring include an aromatic or non-aromatic hydrocarbon ring, an aromatic or non-aromatic heterocycle, and a polycyclic fused ring formed by combination of two or more of these rings. Examples of the ring include a 3- to 10-membered ring, and the ring is preferably a 4- to 8-membered ring, and more preferably a 5- or 6-membered ring.
Examples of the group formed by the bonding of any two or more of R1c to R5c, R6c and R7c, and Rx and Ry include an alkylene group such as a butylene group and a pentylene group. The methylene group in this alkylene group may be substituted with a heteroatom such as an oxygen atom.
As the group formed by the bonding of R5c and R6c, and R5c and Rx, a single bond or an alkylene group is preferable. Examples of the alkylene group include a methylene group and an ethylene group.
Next, the cation (ZaI-4b) will be described.
The cation (ZaI-4b) is a cation represented by General Formula (ZaI-4b).
In General Formula (ZaI-4b),
In General Formula (ZaI-4b), the alkyl group of each of R13, R14, and R15 is linear or branched. The alkyl group preferably has 1 to 10 carbon atoms. As the alkyl group, a methyl group, an ethyl group, an n-butyl group, a t-butyl group, or the like is more preferable.
Next, General Formula (ZaII) will be described.
In General Formula (ZaII), R204 and R205 each independently represent an aryl group, an alkyl group, or a cycloalkyl group.
As the aryl group of each of R204 and R205, a phenyl group or a naphthyl group is preferable, and the phenyl group is more preferable. The aryl group of each of R204 and R205 may be an aryl group which has a heterocycle having an oxygen atom, a nitrogen atom, a sulfur atom, or the like. Examples of the skeleton of the aryl group having a heterocycle include pyrrole, furan, thiophene, indole, benzofuran, and benzothiophene.
As the alkyl group and the cycloalkyl group of each of R204 and R205, a linear alkyl group having 1 to 10 carbon atoms or a branched alkyl group having 3 to 10 carbon atoms (for example, a methyl group, an ethyl group, a propyl group, a butyl group, and a pentyl group), or a cycloalkyl group having 3 to 10 carbon atoms (for example, a cyclopentyl group, a cyclohexyl group, and a norbornyl group) is preferable.
The aryl group, the alkyl group, and the cycloalkyl group of each of R204 and R205 may each independently have a substituent. Examples of the substituent which may be contained in each of the aryl group, the alkyl group, and the cycloalkyl group of each of R204 and R205 include an alkyl group (for example, having 1 to 15 carbon atoms), a cycloalkyl group (for example, having 3 to 15 carbon atoms), an aryl group (for example, having 6 to 15 carbon atoms), an alkoxy group (for example, having 1 to 15 carbon atoms), a halogen atom, a hydroxyl group, and a phenylthio group.
(Compound (II))
Next, the compound (II) will be described.
Compound (II): a compound having two or more of the structural moieties X and the structural moiety Y, in which the compound generates an acid including two or more of the first acidic moieties derived from the structural moiety X and the second acidic moiety derived from the structural moiety Y, upon irradiation with actinic rays or radiation
It should be noted that the compound (II) satisfies the following condition II.
Condition II: a compound PII formed by substituting the cationic moiety M1+ in the structural moiety X and the cationic moiety M2+ in the structural moiety Y with H+ in the compound (II) has an acid dissociation constant a1 derived from an acidic moiety represented by HA1, formed by substituting the cationic moiety M1+ in the structural moiety X with H+ and an acid dissociation constant a2 derived from an acidic moiety represented by HA2, formed by substituting the cationic moiety M2+ in the structural moiety Y with H+, and the acid dissociation constant a2 is larger than the acid dissociation constant a1.
The acid dissociation constant a1 and the acid dissociation constant a2 are determined by the above-mentioned method.
Here, the acid dissociation constant a1 and the acid dissociation constant a2 of the compound PII will be more specifically described. In a case where the compound (II) is, for example, a compound that generates an acid having two of the first acidic moieties derived from the structural moiety X and one of the second acidic moieties derived from the structural moiety Y, the compound PII corresponds to a “compound having two HA1's and HA2”. In a case where the acid dissociation constant of the compound PII was determined, the pKa in a case where the compound PII serves as a “compound having one A1−, one HA1, and HA2” is the acid dissociation constant a1, and the pKa in a case where the compound having two A1−'s and HA2 serves as a “compound having two A1−'s and A2−′” is the acid dissociation constant a2. That is, in a case where the compound PII has a plurality of acid dissociation constants derived from the acidic moiety represented by HA1, formed by substituting the cationic moiety M1+ in the structural moiety X with H+, the smallest value is considered as the acid dissociation constant a1.
In addition, the compound PII corresponds to an acid generated by irradiating the compound (II) with actinic rays or radiation.
Furthermore, the compound (II) may have a plurality of the structural moieties Y.
From the viewpoint that the LWR performance of a pattern thus formed is more excellent, in the compound PII, the difference between the acid dissociation constant a1 and the acid dissociation constant a2 is, for example, 0.4 or more, preferably 2.0 or more, and more preferably 3.0 or more. Further, the upper limit value of the difference between the acid dissociation constant a1 and the acid dissociation constant a2 is not particularly limited, but is, for example, 15.0 or less.
In addition, from the viewpoint that the stability of the cationic moiety of the compound (II) in the resist composition is more excellent in the compound PII, the acid dissociation constant a2 is, for example, 5.0 or less, preferably 2.0 or less, and more preferably 1.0 or less. Further, the lower limit value of the acid dissociation constant a2 is preferably −2.0 or more.
In addition, from the viewpoint that the LWR performance of a pattern thus formed is more excellent, in the compound PII, the acid dissociation constant a1 is preferably 2.0 or less, more preferably 0.5 or less, and still more preferably −0.1 or less. Further, the lower limit value of the acid dissociation constant a1 is preferably −15.0 or more.
The compound (II) is not particularly limited, and examples thereof include a compound represented by General Formula (IIa).
In General Formula (IIa), “M21+A21−” and “A22−M22+” correspond to the structural moiety X and the structural moiety Y, respectively. The compound (IIa) generates an acid represented by General Formula (IIa-1) upon irradiation with actinic rays or radiation. That is, “M21+A21−” forms a first acidic moiety represented by HA21, and “A22−M22+” forms a second acidic moiety represented by HA22 having a structure different from that of the first acidic moiety.
In General Formula (IIa), M21+ and M22+ each independently represent an organic cation.
A21− and A22− each independently represent an anionic functional group. It should be noted that A22− represents a structure different from the anionic functional group represented by A21−.
L2 represents a (n1+n2) valent organic group.
n1 represents an integer of 2 or more.
n2 represents an integer of 1 or more.
It should be noted that in the compound PIIa (corresponding to a compound represented by General Formula (IIA-1)), formed by substituting organic cations represented by M21+ and M22+ with H+ in General Formula (IIa), the acid dissociation constant a2 derived from the acidic moiety represented by A22H is larger than the acid dissociation constant a1 derived from the acidic moiety represented by HA21. Further, suitable values of the acid dissociation constant a1 and the acid dissociation constant a2 are as described above.
In General Formula (IIa), M21+, M22+, A21−, and A22− have the same definitions as M11+, M12+, A11−, and A12− in General Formula (Ia), respectively, and suitable aspects thereof are also the same.
In General Formula (IIa), n1 pieces of M21+ and n1 pieces of A21+ represent the same group as each other.
In General Formula (IIa), the (n1+n2)-valent organic group represented by L2 is not particularly limited, and examples thereof include groups represented by (A1) and (A2) below. Further, in (A1) and (A2) below, at least two of *'s represent bonding positions to A21−, and at least one of *'s represents a bonding position to A22−.
In (A1) and (A2) above, T1 represents a trivalent hydrocarbon ring group or a trivalent heterocyclic group, and T2 represents a carbon atom, a tetravalent hydrocarbon ring group, or a tetravalent heterocyclic group.
The hydrocarbon ring group may be an aromatic hydrocarbon ring group or an aliphatic hydrocarbon ring group. The number of carbon atoms included in the hydrocarbon ring group is preferably 6 to 18, and more preferably 6 to 14.
The heterocyclic group may be either an aromatic heterocyclic group or an aliphatic heterocyclic group. The heterocycle is preferably a 5- to 10-membered ring, more preferably a 5- to 7-membered ring, and still more preferably a 5- or 6-membered ring, each of which has at least one N atom, O atom, S atom, or Se atom in the ring structure.
In addition, in (A1) and (A2), L21 and L22 each independently represent a single bond or a divalent linking group.
The divalent linking group represented by each of L21 and L22 has the same definition as the divalent linking group represented by L1 in General Formula (Ia), and a suitable aspect thereof is also the same.
n1 represents an integer of 2 or more. An upper limit thereof is not particularly limited, but is, for example, 6 or less, preferably 4 or less, and more preferably 3 or less.
n2 represents an integer of 1 or more. An upper limit thereof is not particularly limited, but is, for example, 3 or less, and preferably 2 or less.
In addition, examples of the compound (II) include a compound represented by General Formula (IIax).
In General Formula (IIax), any two of “M23+A23−”, “A24−M24+”, or “A25−M25+” correspond to the structural moiety X, and the other one corresponds to the structural moiety Y. The compound (IIax) generates an acid represented by General Formula (IIax-1) upon irradiation with actinic rays or radiation. That is, “M23+A23−” forms a first acidic moiety represented by HA23, “A24−M24+” forms a second acidic moiety represented by HA24 having a structure different from that of the first acidic moiety, and “A25−M25+” forms a second acidic moiety represented by HA25 having a structure different from that of the first acidic moiety.
In General Formula (IIax), M23+, M24+, and M25+ each independently represent an organic cation.
A23− and A25− each represent a monovalent anionic functional group.
A24− represents a divalent anionic functional group.
L1x and L2x each represent a divalent organic group.
n2x represents an integer of 1 or more.
It should be noted that in the compound PIIax (corresponding to the compound represented by General Formula (IIax-1)) in which the organic cation represented by each of M23+, M24+, and M25+ is substituted with H+ in General Formula (IIax), the smallest acid dissociation constant and the largest acid dissociation constant of the acid dissociation constant a1ax derived from the acidic moiety represented by HA23, the acid dissociation constant a2ax derived from the acidic moiety represented by A24H, and the acid dissociation constant a3ax derived from the acidic moiety represented by A25H corresponds to the acid dissociation constant a1 and the acid dissociation constant a2, respectively.
Further, suitable values of the acid dissociation constant a1 and the acid dissociation constant a2 are as described above. The acid dissociation constant derived from an acidic moiety that does not correspond to the acid dissociation constant a1 or the acid dissociation constant a2 is preferably within the acid dissociation constant a1+1.0, more preferably within the acid dissociation constant a1+0.7, and still more preferably within the acid dissociation constant a1+0.3.
In General Formula (IIa), M23+, M24+, M25+, A23−, and A25− have the same definitions as M11+, M12+, A11−, and A12− in General Formula (Ia) mentioned above, respectively, and suitable aspects thereof are also the same.
In a case where A23− or A25− represents an acidic moiety corresponding to the acid dissociation constant a1 in a case where the organic cation is substituted with H+, a group represented by either of General Formulae (B-8) and (B-10) is preferable as A23− or A25−.
The divalent anionic functional group represented by A24− is not particularly limited, but examples thereof include a linking group including —N−—, and *—SO2—N−—CO—*, *—SO2—N−—SO2—, *—CO—N—CO—*, *—SO2—N−—*, and the like are preferable. Further, * represents a bonding position.
n2x is preferably 1 to 3, more preferably 1 or 2, and still more preferably 1.
In the compound represented by General Formula (IIax-1), it is preferable that the acid dissociation constant a2ax derived from the acidic moiety represented by A24H corresponds to the acid dissociation constant a2.
In General Formula (IIax), M23+ and M25+ each preferably represent the same group, and A23− and A25− each preferably represent the same group.
In General Formula (IIax), M24+'s and A24+'s may be the same as or different from each other.
The divalent organic group represented by each of L1x and L2x is not particularly limited, and is preferably —CO—, —NR—, —CO—, —O—, —S—, —SO—, —SO2—, an alkylene group (which preferably has 1 to 6 carbon atoms, and may be linear or branched), a cycloalkylene group (preferably having 3 to 15 carbon atoms), an alkenylene group (preferably having 2 to 6 carbon atoms), a divalent aliphatic heterocyclic group (preferably a 5- to 10-membered ring, more preferably a 5- to 7-membered ring, and still more preferably a 5- or 6-membered ring, each having at least one of an N atom, an O atom, an S atom, or an Se atom in the ring structure), and a divalent aromatic heterocyclic group (preferably a 5- to 10-membered ring, more preferably a 5- to 7-membered ring, and still more preferably a 5- or 6-membered ring, each having at least one of an N atom, an O atom, an S atom, or an Se atom in the ring structure), a divalent aromatic hydrocarbon ring group (preferably a 6- to 10-membered ring, and more preferably a 6-membered ring), and a divalent organic group formed by combination of a plurality of these groups. Examples of R include a hydrogen atom or a monovalent organic group. The monovalent organic group is not particularly limited, but is preferably, for example, an alkyl group (preferably having 1 to 6 carbon atoms).
In addition, the alkylene group, the cycloalkylene group, the alkenylene group, and the divalent aliphatic hydrocarbon ring group may be substituted with a substituent. Examples of the substituent include a halogen atom (preferably a fluorine atom).
Furthermore, in L1x, the bonding position with A23− and A24− is preferably a carbon atom (excluding carbonyl carbon). In addition, in L2x, the bonding position with A24− and A25− is preferably a carbon atom (excluding carbonyl carbon).
(Compound (III))
Next, the compound (III) will be described.
Compound (III): a compound having two or more of the structural moieties X and the following structural moiety Z, in which the compound generates an acid including two or more of the first acidic moieties derived from the structural moiety X and the structural moiety Z, upon irradiation with actinic rays or radiation
Structural moiety Z: a nonionic moiety capable of neutralizing an acid
The nonionic moiety capable of neutralizing an acid in the structural moiety Z is not particularly limited, and is preferably, for example, an organic moiety including a functional group having a group or electron which is capable of electrostatically interacting with a proton.
Examples of the functional group a functional group having a group or electron which is capable of electrostatically interacting with a proton include a functional group with a macrocyclic structure, such as a cyclic polyether, or a functional group having a nitrogen atom having an unshared electron pair not contributing to it-conjugation. The nitrogen atom having an unshared electron pair not contributing to it-conjugation is, for example, a nitrogen atom having a partial structure represented by the following formula.
Preferred examples of the partial structure of the functional group having a group or electron capable of electrostatically interacting with a proton include a crown ether structure, an azacrown ether structure, primary to tertiary amine structures, a pyridine structure, an imidazole structure, and a pyrazine structure, and among these, the primary to tertiary amine structures are preferable.
In the compound PIII formed by substituting the cationic moiety M1+ in the structural moiety X with H+ in the compound (III), the acid dissociation constant a1 derived from the acidic moiety represented by HA1, formed by substituting the cationic moiety M1+ in the structural moiety X with H+, is preferably 2.0 or less, more preferably 0.5 or less, still more preferably −0.1 or less, from the viewpoint that the LWR performance of a pattern thus formed is more excellent. Further, the lower limit value of the acid dissociation constant a1 is preferably −15.0 or more.
Furthermore, in a case where the compound PIII has a plurality of acid dissociation constants derived from the acidic moiety represented by HA1, formed by substituting the cationic moiety M1+ in the structural moiety X with H+, the smallest value is considered as the acid dissociation constant a1.
That is, in a case where the compound (III) is, for example, a compound that generates an acid having two of the first acidic moieties derived from the structural moiety X and the structural moiety Z, the compound PIII corresponds to a “compound having two of HA1”. In a case where the acid dissociation constant of this compound PIII is determined, the pKa in a case where the compound PIII serves as a “compound having one of A1− and one of HA1” is the acid dissociation constant a1. That is, in a case where the compound PIII has a plurality of acid dissociation constants derived from the acidic moiety represented by HA1, formed by substituting the cationic moiety M1+ in the structural moiety X with H+, the smallest value is considered as the acid dissociation constant a1.
Furthermore, for example, in a case where the compound (III) is a compound represented by the compound (Ma) which will be described later, the compound PIII formed by substituting the cationic moiety M1+ in the structural moiety X with H+ in the compound (III) corresponds to HA31-L3-N(R2X)-L4-A31H.
The compound (III) is not particularly limited, and examples thereof include a compound represented by General Formula (Ma).
In General Formula (Ma), “M31+A31−” corresponds to the structural moiety X. The compound (Ma) generates an acid represented by HA31-L3-N(R2X)-L4-A31H upon irradiation with actinic rays or radiation. That is, “M31+A31−” forms the first acidic moiety represented by HA31.
In General Formula (Ma), M31+ represents an organic cation.
A31− represents an anionic functional group.
L3 and L4 each independently represent a divalent linking group.
R2X represents a monovalent organic group.
In General Formula (Ma), M31+ and A31− have the same definitions as M11+ and A11− in General Formula (Ia), respectively, and suitable aspects thereof are also the same.
In General Formula (Ma), L3 and L4 have the same definition as L1 in General Formula (Ia), and suitable aspects thereof are also the same.
In General Formula (Ma), two M31+'s and two A31−'s represent the same group as each other.
In General Formula (Ma), the monovalent organic group represented by R2x is not particularly limited, and examples thereof include an alkyl group (which preferably has 1 to 10 carbon atoms, and may be linear or branched), a cycloalkyl group (preferably having 3 to 15 carbon atoms), and an alkenyl group (preferably having 2 to 6 carbon atoms), in which —CH2— may be substituted with one or a combination of two or more selected from the group consisting of —CO—, —NH—, —O—, —S—, —SO—, and —SO2—.
In addition, the alkyl group, the cycloalkyl group, and the alkenyl group may be substituted with a substituent.
The molecular weight of the compound represented by each of the compounds (I) to (III) are preferably 300 to 3,000, more preferably 500 to 2,000, and still more preferably 700 to 1,500.
The content of the compound represented by each of the compounds (I) to (III) is preferably 0.1% to 20.0% by mass, more preferably 1.0% to 20.0% by mass, and still more preferably 1.0% to 15.0% by mass with respect to the total solid content of the composition.
The compound represented by each of the compounds (I) to (III) may be used singly or in combination of two or more kinds thereof. In a case where two or more kinds of the compounds are used, a total content thereof is preferably within the suitable content range.
Preferred examples of the compounds represented by the compounds (I) to (III) are shown below.
<Another Photoacid Generator>
The resist composition of the embodiment of the present invention may include another photoacid generator (hereinafter also referred to as a “photoacid generator PX”) other than the above-mentioned specific photoacid generator. Further, the photoacid generator PX is not included in the specific photoacid generator.
As the photoacid generator PX, a compound that generates an organic acid upon irradiation with actinic rays or radiation is preferable. Examples thereof include a sulfonium salt compound, an iodonium salt compound, a diazonium salt compound, a phosphonium salt compound, an imidosulfonate compound, an oxime sulfonate compound, a diazodisulfone compound, a disulfone compound, and an o-nitrobenzyl sulfonate compound.
As the photoacid generator PX, known compounds that generate an acid upon irradiation with actinic rays or radiation can be used singly or as a mixture thereof, appropriately selected and used. For example, the known compounds disclosed in paragraphs <0125> to <0319> of the specification of US2016/0070167A1, paragraphs <0086> to <0094> of the specification of US2015/0004544A1, and paragraphs <0323> to <0402> of the specification of US2016/0237190A1 can be suitably used as the photoacid generator PX.
As the photoacid generator PX, for example, a compound represented by Formula (ZI), Formula (ZII), or Formula (ZIII) is preferable.
R201, R202, R203, R204, and R205 in General Formulae (ZI) and (ZII) are the same as R201, R202, R203, R204, and R205 in General Formulae (ZaI) and (ZaII), respectively, mentioned above in the description of the specific photoacid generator.
In other words, the cationic moieties in General Formulae (ZI) and (ZII) are the same as the cation (ZaI) and the cation (ZaII) mentioned above in the description of the specific compound, respectively.
In addition, in General Formula VIM, R206 and R207 are the same as R204 and R205 in General Formula (ZII), respectively. That is, in General Formula (ZIII), R206 and R207 are the same as R204 and R205 in General Formula (ZaII), respectively.
In General Formulae (ZI) and (ZII), Z− represents an anion. Z− represents an anion (anion having an extremely low ability to cause a nucleophilic reaction).
Examples of the anion include a sulfonate anion (an aliphatic sulfonate anion, an aromatic sulfonate anion, a camphor sulfonate anion, and the like), a carboxylate anion (an aliphatic carboxylate anion, an aromatic carboxylate anion, an aralkyl carboxylate anion, and the like), a sulfonylimide anion, a bis(alkylsulfonyl)imide anion, and a tris(alkylsulfonyl)methide anion.
As Z− in Formula (ZI) and Z−in Formula (ZII), the anion represented by Formula (3) is preferable.
In Formula (3),
o represents an integer of 1 to 3. p represents an integer of 0 to 10. q represents an integer of 0 to 10.
Xf represents a fluorine atom or an alkyl group substituted with at least one fluorine atom. The alkyl group preferably has 1 to 10 carbon atoms, and more preferably has 1 to 4 carbon atoms. In addition, a perfluoroalkyl group is preferable as the alkyl group substituted with at least one fluorine atom.
Xf is preferably a fluorine atom or a perfluoroalkyl group having 1 to 4 carbon atoms, and more preferably a fluorine atom or CF3. In particular, it is preferable that both Xf's are fluorine atoms.
R4 and R5 each independently represent a hydrogen atom, a fluorine atom, an alkyl group, or an alkyl group substituted with at least one fluorine atom. In a case where R4's and R5's are each present in a plural number, R4's and R5's may each be the same as or different from each other.
The alkyl group represented by each of R4 and R5 may have a substituent, and preferably has 1 to 4 carbon atoms. R4 and R5 are each preferably a hydrogen atom.
Specific examples and suitable aspects of the alkyl group substituted with at least one fluorine atom are the same ones as the specific examples and the suitable aspects of Xf in Formula (3), respectively.
L represents a divalent linking group. In a case where L's are present in a plural number, they may be the same as or different from each other.
Examples of the divalent linking group include —O—CO—O—, —COO—, —OCO—, —CONH—, —NHCO—, —CO—, —O—, —S—, —SO—, —SO2—, an alkylene group (preferably having 1 to 6 carbon atoms), a cycloalkylene group (preferably having 3 to 15 carbon atoms), an alkenylene group (preferably having 2 to 6 carbon atoms), and a divalent linking group formed by combination of a plurality of these groups. Among those, —O—CO—O—, —COO—, —OCO—, —CONH—, —NHCO—, —CO—, —O—, —SO2—, —O—CO—O-alkylene group-, -alkylene group-O—CO—O—, —COO-alkylene group-, —OCO-alkylene group-, —CONH-alkylene group-, or —NHCO-alkylene group- is preferable; and —O—CO—O—, —O—CO—O-alkylene group-, -alkylene group-O—CO—O—, —COO—, —OCO—, —CONH—, —SO2—, —COO-alkylene group-, or —OCO-alkylene group- is more preferable.
W represents an organic group including a cyclic structure. Among those, W is preferably a cyclic organic group.
Examples of the cyclic organic group include an alicyclic group, an aryl group, and a heterocyclic group.
The alicyclic group may be monocyclic or polycyclic. Examples of the monocyclic alicyclic group include monocyclic cycloalkyl groups such as a cyclopentyl group, a cyclohexyl group, and a cyclooctyl group. Examples of the polycyclic alicyclic group include polycyclic cycloalkyl groups such as a norbornyl group, a tricyclodecanyl group, a tetracyclodecanyl group, a tetracyclododecanyl group, and an adamantyl group. Among those, an alicyclic group having a bulky structure having 7 or more carbon atoms, such as a norbornyl group, a tricyclodecanyl group, a tetracyclodecanyl group, a tetracyclododecanyl group, and an adamantyl group, is preferable.
The aryl group may be monocyclic or polycyclic. Examples of the aryl group include a phenyl group, a naphthyl group, a phenanthryl group, and an anthryl group.
The heterocyclic group may be monocyclic or polycyclic. The polycyclic heterocyclic group can further suppress acid diffusion. Further, the heterocyclic group may have aromaticity or may not have aromaticity. Examples of the heterocycle having aromaticity include a furan ring, a thiophene ring, a benzofuran ring, a benzothiophene ring, a dibenzofuran ring, a dibenzothiophene ring, and a pyridine ring. Examples of the heterocycle not having aromaticity include a tetrahydropyran ring, a lactone ring, a sultone ring, and a decahydroisoquinoline ring. As the heterocycle in the heterocyclic group, the furan ring, the thiophene ring, the pyridine ring, or the decahydroisoquinoline ring is particularly preferable.
The cyclic organic group may have a substituent. Examples of the substituent include an alkyl group (which may be either linear or branched, preferably having 1 to 12 carbon atoms), a cycloalkyl group (which may be any of a monocycle, a polycycle, and a spirocycle, and preferably has 3 to 20 carbon atoms), an aryl group (preferably having 6 to 14 carbon atoms), a hydroxyl group, an alkoxy group, an ester group, an amide group, a urethane group, a ureide group, a thioether group, a sulfonamide group, and a sulfonic acid ester group. Incidentally, the carbon constituting the cyclic organic group (carbon contributing to ring formation) may be carbonyl carbon.
As the anion represented by Formula (3), SO3−—CF2—CH2—OCO-(L)q′—W, SO3−—CF2—CHF—CH2—OCO-(L)q′—W, SO3−—CF2—COO-(L)q′—W, SO3−—CF2—CF2—CH2—CH2-(L)q-W, or SO3−—CF2—CH(CF3)—OCO-(L)q′—W is preferable. Here, L, q, and W are each the same as in Formula (3). q′ represents an integer of 0 to 10.
As Z− in Formula (ZI) and Z−in Formula (ZII), an anion represented by Formula (4) is also preferable.
In Formula (4),
XB1 and XB2 each independently represent a hydrogen atom or a monovalent organic group having no fluorine atom. It is preferable that XB1 and XB2 are each the hydrogen atom.
XB3 and XB4 each independently represent a hydrogen atom or a monovalent organic group. It is preferable that at least one of XB3 or XB4 is a fluorine atom or a monovalent organic group having a fluorine atom, and it is more preferable that both XB3 and XB4 are fluorine atoms or monovalent organic groups having a fluorine atom. It is still more preferable that both XB3 and XB4 are fluorine-substituted alkyl groups.
L, q, and W are the same as in Formula (3).
As Z− in Formula (ZI) and Z− in Formula (ZII), an anion represented by Formula (5) is preferable.
In Formula (5), Xa's each independently represent a fluorine atom or an alkyl group substituted with at least one fluorine atom. Xb's each independently represent a hydrogen atom or an organic group having no fluorine atom. The definitions and preferred aspects of o, p, q, R4, R5, L, and W are each the same as those in Formula (3).
Z− in Formula (ZI) and Z− in Formula (ZII) may be a benzenesulfonate anion, and are each preferably a benzenesulfonate anion substituted with a branched alkyl group or a cycloalkyl group.
As Z− in Formula (ZI) and Z− in Formula (ZII), an aromatic sulfonate anion represented by Formula (SA1) is also preferable.
In Formula (SA1),
Ar represents an aryl group, and may further have a substituent other than a sulfonate anion and a -(D-B) group. Examples of the substituent which may be further contained include a fluorine atom and a hydroxyl group.
n represents an integer of 0 or more. n is preferably 1 to 4, more preferably 2 or 3, and still more preferably 3.
D represents a single bond or a divalent linking group. Examples of the divalent linking group include an ether group, a thioether group, a carbonyl group, a sulfoxide group, a sulfone group, a sulfonic acid ester group, an ester group, and a group consisting of a combination of two or more of these.
B represents a hydrocarbon group.
It is preferable that D is the single bond and B is an aliphatic hydrocarbon structure. It is more preferable that B is an isopropyl group or a cyclohexyl group.
Preferred examples of the sulfonium cation in Formula (ZI) and the iodonium cation in Formula (ZII) are shown below.
Preferred examples of the anion Z− in Formula (ZI) and the anion Z− in Formula (ZII) are shown below.
Any combination of the cations and the anions can be used as the photoacid generator PX.
The acid dissociation constant pKa of a compound generated by the decomposition of the photoacid generator PX is preferably 5 or less, more preferably 4 or less, and still more preferably 3 or less. A lower limit thereof is not particularly limited, but is, for example, −7 or more.
The photoacid generator PX may be in a form of a low-molecular-weight compound or a form incorporated into a part of a polymer. Further, a combination of the form of a low-molecular-weight compound and the form incorporated into a part of a polymer may also be used.
The photoacid generator PX is preferably in the form of a low-molecular-weight compound.
In a case where the photoacid generator PX is in the form of a low-molecular-weight compound, the molecular weight is preferably 3,000 or less, more preferably 2,000 or less, and still more preferably 1,000 or less.
In a case where the photoacid generator PX is included in a part of a polymer, it may be included in a part of the above-mentioned Resin X or in a resin other than Resin X.
The photoacid generators PX may be used singly or in combination of two or more kinds thereof.
The content of the photoacid generator PX (in a case where the photoacid generators PX are present in a plurality of kinds, a total content thereof) in the composition is preferably 0.1% to 35.0% by mass, more preferably 0.5% to 25.0% by mass, and still more preferably 0.5% to 20.0% by mass with respect to the total solid content of the composition.
In a case where a compound having the cation (ZaI-3b) or the cation (ZaI-4b) is included as the photoacid generator PX, the content of the photoacid generator PX included in the composition (in a case where the photoacid generators are present in a plurality of kinds, a total content thereof) is preferably 0.2% to 35.0% by mass, and more preferably 0.5% to 30.0% by mass with respect to the total solid content of the composition.
Hereinafter, specific examples of the photoacid generator PX will be shown, but the present invention is not limited thereto.
[Acid Diffusion Control Agent]
The resist composition of the embodiment of the present invention may include an acid diffusion control agent.
The acid diffusion control agent acts as a quencher that suppresses a reaction of the acid-decomposable resin in the unexposed area by excessive generated acids by trapping the acids generated from a photoacid generator and the like upon exposure. For example, a basic compound (DA), a basic compound (DB) having basicity reduced or lost upon irradiation with actinic rays or radiation, an onium salt (DC) which is a relatively weak acid with respect to an acid generator, a low-molecular-weight compound (DD) having a nitrogen atom, and a group that is eliminated by the action of an acid, an onium salt compound (DE) having a nitrogen atom in the cationic moiety, can be used as the acid diffusion control agent. In the resist composition of the embodiment of the present invention, a known acid diffusion control agent can be appropriately used. For example, the known compounds disclosed in paragraphs <0627> to <0664> of the specification of US2016/0070167A1, paragraphs <0095> to <0187> of the specification of US2015/0004544A1, paragraphs <0403> to <0423> of the specification of US2016/0237190A1, and paragraphs <0259> to <0328> of the specification of US2016/0274458A1 can be suitably used as the acid diffusion control agent.
<Basic Compound (DA)>
As the basic compound (DA), compounds having structures represented by Formulae (A) to (E) are preferable.
In General Formulae (A) and (E),
The alkyl group in each of General Formulae (A) and (E) may have a substituent or may be unsubstituted.
With regard to the alkyl group, the alkyl group having a substituent is preferably an aminoalkyl group having 1 to 20 carbon atoms, a hydroxyalkyl group having 1 to 20 carbon atoms, or a cyanoalkyl group having 1 to 20 carbon atoms.
The alkyl group in each of General Formulae (A) and (E) are more preferably unsubstituted.
As the basic compound (DA), guanidine, aminopyrrolidine, pyrazole, pyrazoline, piperazine, aminomorpholine, aminoalkylmorpholine, or piperidine is preferable; and a compound having an imidazole structure, a diazabicyclo structure, an onium hydroxide structure, an onium carboxylate structure, a trialkylamine structure, an aniline structure, or a pyridine structure, an alkylamine derivative having a hydroxyl group and/or an ether bond, or an aniline derivative having a hydroxyl group and/or an ether bond is more preferable.
<Basic Compound (DB) Having Basicity that is Reduced or Lost Upon Irradiation with Actinic Rays or Radiation>
The basic compound (DB) having basicity reduced or lost upon irradiation with actinic rays or radiation (hereinafter also referred to as a “compound (DB)”) is a compound which has a proton-accepting functional group, and decomposes under irradiation with actinic rays or radiation to exhibit deterioration in proton-accepting properties, no proton-accepting properties, or a change from the proton-accepting properties to acidic properties.
The proton-accepting functional group refers to a functional group having a group or electron which is capable of electrostatically interacting with a proton, and for example, means a functional group with a macrocyclic structure, such as a cyclic polyether, or a functional group having a nitrogen atom having an unshared electron pair not contributing to it-conjugation. The nitrogen atom having an unshared electron pair not contributing to it-conjugation is, for example, a nitrogen atom having a partial structure represented by the following formula.
Preferred examples of the partial structure of the proton-accepting functional group include a crown ether structure, an azacrown ether structure, primary to tertiary amine structures, a pyridine structure, an imidazole structure, and a pyrazine structure.
The compound (DB) decomposes upon irradiation with actinic rays or radiation to generate a compound exhibiting deterioration in proton-accepting properties, no proton-accepting properties, or a change from the proton-accepting properties to acidic properties. Here, exhibiting deterioration in proton-accepting properties, no proton-accepting properties, or a change from the proton-accepting properties to acidic properties means a change of proton-accepting properties due to the proton being added to the proton-accepting functional group, and specifically a decrease of the equilibrium constant in chemical equilibrium in a case where a proton adduct is generated from the compound (DB) having the proton-accepting functional group and the proton.
The proton-accepting properties can be confirmed by performing pH measurement.
The acid dissociation constant pKa of the compound generated by decomposition of the compound (DB) upon irradiation with actinic rays or radiation preferably satisfies pKa<−1, and more preferably satisfies −13<pKa<−1, and still more preferably satisfies −13<pKa<−3.
Furthermore, the acid dissociation constant pKa can be determined by the above-mentioned method.
<Onium Salt (DC) which Serves as Relatively Weak Acid with Respect to Photoacid Generator>
In the resist composition of the embodiment of the present invention, the onium salt (DC) which is a relatively weak acid with respect to a photoacid generator can be used as the acid diffusion control agent.
In a case where the photoacid generator and the onium salt that generates an acid which is a relatively weak acid with respect to an acid generated from the photoacid generator are mixed and used, an acid generated from the photoacid generator upon irradiation with actinic rays or radiation produces an onium salt having a strong acid anion by discharging the weak acid through salt exchange in a case where the acid collides with an onium salt having an unreacted weak acid anion. In this process, the strong acid is exchanged with a weak acid having a lower catalytic ability, and thus, the acid is apparently deactivated and the acid diffusion can be controlled.
As the onium salt which serves as a relatively weak acid with respect to the photoacid generator, compounds represented by General Formulae (d1-1) to (d1-3) are preferable.
In General Formulae (d1-1) to (d1-3), R51 is a hydrocarbon group which may have a substituent. Z2c is a hydrocarbon group having 1 to 30 carbon atoms, may have a substituent (provided that carbon adjacent to S does not have a fluorine atom and/or a fluoroalkyl group as a substituent). R52 is an organic group (an alkyl group and the like), Y3 is —SO2—, a linear, branched, or cyclic alkylene group, or an arylene group, Y4 is —SO2—, and Rf is a hydrocarbon group having a fluorine atom (a fluoroalkyl group and the like). M+'s are each independently an ammonium cation, a sulfonium cation, or an iodonium cation.
Preferred examples of the sulfonium cation or the iodonium cation represented by M+ include the sulfonium cation exemplified for General Formula (ZaI) and the iodonium cation exemplified for General Formula (ZaII).
The onium salt (DC) which is a relatively weak acid with respect to a photoacid generator may be a compound having a cationic moiety and an anionic moiety in the same molecule, in which the cationic moiety and the anionic moiety are linked by a covalent bond (hereinafter also referred to as a “compound (DCA)”).
As the compound (DCA), a compound represented by any of General Formulae (C-1) to (C-3) is preferable.
In General Formulae (C-1) to (C-3),
Examples of the substituent having 1 or more carbon atoms in each of R1 to R3 include an alkyl group, a cycloalkyl group, an aryl group, an alkyloxycarbonyl group, a cycloalkyloxycarbonyl group, an aryloxycarbonyl group, an alkylaminocarbonyl group, a cycloalkylaminocarbonyl group, and an arylaminocarbonyl group. Among those, the alkyl group, a cycloalkyl group, or the aryl group is preferable.
Examples of L1 as the divalent linking group include a linear or branched alkylene group, a cycloalkylene group, an arylene group, a carbonyl group, an ether bond, an ester bond, an amide bond, an urethane bond, an urea bond, and a group formed by combination of two or more of these groups. L1 is preferably the alkylene group, the arylene group, the ether bond, the ester bond, and the group formed by combination of two or more of these groups.
<Low-Molecular-Weight Compound (DD) Having Nitrogen Atom and Group that is Eliminated by Action of Acid>
The low-molecular-weight compound (DD) having a nitrogen atom and having a group that is eliminated by the action of an acid (hereinafter also referred to as a “compound (DD)”) is preferably an amine derivative having a group that is eliminated by the action of an acid on the nitrogen atom.
As the group that is eliminated by the action of an acid, an acetal group, a carbonate group, a carbamate group, a tertiary ester group, a tertiary hydroxyl group, or a hemiaminal ether group is preferable, and the carbamate group or the hemiaminal ether group is more preferable.
The molecular weight of the compound (DD) is preferably 100 to 1,000, more preferably 100 to 700, and still more preferably 100 to 500.
The compound (DD) may have a carbamate group having a protective group on the nitrogen atom. The protective group constituting the carbamate group is represented by General Formula (d-1).
In General Formula (d-1),
The alkyl group, the cycloalkyl group, the aryl group, or the aralkyl group represented by Rb may be each independently substituted with a functional group such as a hydroxyl group, a cyano group, an amino group, a pyrrolidino group, a piperidino group, a morpholino group, and an oxo group, an alkoxy group, or a halogen atom. The same applies to the alkoxyalkyl group represented by Rb.
As Rb, a linear or branched alkyl group, a cycloalkyl group, or an aryl group is preferable, and the linear or branched alkyl group, or the cycloalkyl group is more preferable.
Examples of the ring formed by the mutual linking of two Rb's include an alicyclic hydrocarbon, an aromatic hydrocarbon, a heterocyclic hydrocarbon, and derivatives thereof.
Examples of the specific structure of the group represented by General Formula (d-1) include, but are not limited to, the structures disclosed in paragraph <0466> of the specification of US2012/0135348A1.
The compound (DD) is preferably a compound represented by General Formula (6).
In General Formula (6),
In General Formula (6), the alkyl group, the cycloalkyl group, the aryl group, and the aralkyl group as Ra may be each independently substituted with the same groups as the group mentioned above as a group which may be substituted in the alkyl group, the cycloalkyl group, the aryl group, and the aralkyl group as Rb.
Specific examples of the alkyl group, the cycloalkyl group, the aryl group, and the aralkyl group (these groups may be substituted with the groups as described above) of Ra include the same groups as the specific examples as described above with respect to Rb.
Specific examples of the particularly preferred compound (DD) in the present invention include, but are not limited to, the compounds disclosed in paragraph <0475> of the specification of US2012/0135348A1.
<Onium Salt Compound (DE) Having Nitrogen Atom in Cationic Moiety>
The onium salt compound (DE) having a nitrogen atom in the cationic moiety (hereinafter also referred to as a “compound (DE)”) is preferably a compound having a basic moiety including a nitrogen atom in the cationic moiety. The basic moiety is preferably an amino group, and more preferably an aliphatic amino group. All of the atoms adjacent to the nitrogen atom in the basic moiety are still more preferably hydrogen atoms or carbon atoms. In addition, from the viewpoint of improving basicity, it is preferable that an electron-withdrawing functional group (such as a carbonyl group, a sulfonyl group, a cyano group, and a halogen atom) is not directly linked to the nitrogen atom.
Specific preferred examples of the compound (DE) include, but are not limited to, the compounds disclosed in paragraph <0203> of the specification of US2015/0309408A1.
Preferred examples of the acid diffusion control agent are shown below.
In a case where the resist composition of the embodiment of the present invention includes an acid diffusion control agent, the content of the acid diffusion control agent (in a case where a plurality of kinds of the acid diffusion control agents are present, a total content thereof) is preferably 0.1% to 11.0% by mass, more preferably 0.1% to 10.0% by mass, still more preferably 0.1% to 8.0% by mass, and particularly preferably 0.1% to 5.0% by mass with respect to the total solid content of the composition.
In the resist composition of the embodiment of the present invention, the acid diffusion control agents may be used singly or in combination of two or more kinds thereof
[Surfactant]
The resist composition of the embodiment of the present invention may include a surfactant. By incorporation of the surfactant, it is possible to form a pattern having more excellent adhesiveness and fewer development defects.
As the surfactant, fluorine-based and/or silicon-based surfactants are preferable.
Examples of the fluorine- and/or silicon-based surfactants include the surfactants described in paragraph <0276> of US2008/0248425A. In addition, EFTOP EF301 or EF303 (manufactured by Shin-Akita Chemical Co., Ltd.); FLUORAD FC430, 431, or 4430 (manufactured by Sumitomo 3M Japan Limited); MEGAFACE F171, F173, F176, F189, F113, F110, F177, F120, or R08 (manufactured by DIC Corporation); SURFLON S-382, SC101, 102, 103, 104, 105, or 106 (manufactured by Asahi Glass Co., Ltd.); TROYSOL S-366 (manufactured by Troy Corporation); GF-300 or GF-150 (manufactured by Toagosei Co., Ltd.); SURFLON S-393 (manufactured by AGC Seimi Chemical Co., Ltd.); EFTOP EF121, EF122A, EF122B, RF122C, EF125M, EF135M, EF351, EF352, EF801, EF802, or EF601 (manufactured by JEMCO Inc.); PF636, PF656, PF6320, or PF6520 (manufactured by OMNOVA Solutions Inc.); KH-20 (manufactured by Asahi Kasei Corporation); or FTX-204G, 208G, 218G, 230G, 204D, 208D, 212D, 218D, or 222D (manufactured by NEOS COMPANY LIMITED) may be used. In addition, a polysiloxane polymer, KP-341 (manufactured by Shin-Etsu Chemical Co., Ltd.), can also be used as the silicon-based surfactant.
Moreover, in addition to the known surfactants as shown above, a surfactant may be synthesized using a fluoroaliphatic compound manufactured using a telomerization method (also referred to as a telomer method) or an oligomerization method (also referred to as an oligomer method). Specifically, a polymer including a fluoroaliphatic group derived from fluoroaliphatic compound may be used as the surfactant. This fluoroaliphatic compound can be synthesized, for example, by the method described in JP2002-90991A.
As the polymer having a fluoroaliphatic group, a copolymer of a monomer having a fluoroaliphatic group and (poly(oxyalkylene))acrylate and/or (poly(oxyalkylene))methacrylate is preferable, and the polymer may be unevenly distributed or block-copolymerized. Furthermore, examples of the poly(oxyalkylene) group include a poly(oxyethylene) group, a poly(oxypropylene) group, and a poly(oxybutylene) group, and the group may also be a unit such as those having alkylenes having different chain lengths within the same chain length such as poly(block-linked oxyethylene, oxypropylene, and oxyethylene) and poly(block-linked oxyethylene and oxypropylene). In addition, the copolymer of a monomer having a fluoroaliphatic group and (poly(oxyalkylene))acrylate (or methacrylate) is not limited only to a binary copolymer but may also be a ternary or higher copolymer obtained by simultaneously copolymerizing monomers having two or more different fluoroaliphatic groups or two or more different (poly(oxyalkylene)) acrylates (or methacrylates).
Examples of a commercially available surfactant thereof include MEGAFACE F-178, F-470, F-473, F-475, F-476, and F-472 (manufactured by DIC Corporation), a copolymer of acrylate (or methacrylate) having a C6F13 group and (poly(oxyalkylene))acrylate (or methacrylate), and a copolymer of acrylate (or methacrylate) having a C3F7 group, (poly(oxyethylene))acrylate (or methacrylate), and (poly(oxypropylene))acrylate (or methacrylate).
In addition, another surfactant other than the fluorine-based and/or silicon-based surfactants, described in paragraph <0280> of US2008/0248425A, may also be used.
These surfactants may be used singly or in combination of two or more kinds thereof.
The content of the surfactant is preferably 0.0001% to 2% by mass and more preferably 0.0005% to 1% by mass with respect to the total solid content of the resist composition of the embodiment of the present invention.
[Solvent]
The resist composition of the embodiment of the present invention may include a solvent. The solvent preferably includes at least one solvent of (M1) propylene glycol monoalkyl ether carboxylate, or (M2) at least one selected from the group consisting of a propylene glycol monoalkyl ether, a lactic acid ester, an acetic acid ester, an alkoxypropionic acid ester, a chain ketone, a cyclic ketone, a lactone, and an alkylene carbonate as a solvent. Further, this solvent may further include components other than the components (M1) and (M2).
The present inventors have found that by using such a solvent and the above-mentioned resin (A) in combination, a pattern having a small number of development defects can be formed while improving the coating property of the composition. A reason therefor is not necessarily clear, but the present inventors have considered that since these solvents have a good balance among the solubility, the boiling point, and the viscosity of the resin (A), the unevenness of the film thickness of a composition film, the generation of precipitates during spin coating, and the like can be suppressed.
As the component (M1), at least one selected from the group consisting of propylene glycol monomethyl ether acetate (PGMEA), propylene glycol monomethyl ether propionate, and propylene glycol monoethyl ether acetate is preferable, and propylene glycol monomethyl ether acetate (PGMEA) is more preferable.
As the component (M2), the following ones are preferable.
As the propylene glycol monoalkyl ether, propylene glycol monomethyl ether (PGME), or propylene glycol monoethyl ether (PGEE) is preferable.
As the lactic acid ester, ethyl lactate, butyl lactate, or propyl lactate is preferable.
As the acetic acid ester, methyl acetate, ethyl acetate, butyl acetate, isobutyl acetate, propyl acetate, isoamyl acetate, methyl formate, ethyl formate, butyl formate, propyl formate, or 3-methoxybutyl acetate is preferable.
In addition, butyl butyrate is also preferable.
As the alkoxypropionic acid ester, methyl 3-methoxypropionate (MMP) or ethyl 3-ethoxypropionate (EEP) is preferable.
As the chain ketone, 1-octanone, 2-octanone, 1-nonanone, 2-nonanone, acetone, 2-heptanone, 4-heptanone, 1-hexanone, 2-hexanone, diisobutyl ketone, phenyl acetone, methyl ethyl ketone, methyl isobutyl ketone, acetyl acetone, acetonyl acetone, ionone, diacetonyl alcohol, acetyl carbinol, acetophenone, methyl naphthyl ketone, or methyl amyl ketone is preferable.
As the cyclic ketone, methyl cyclohexanone, isophorone, or cyclohexanone is preferable.
As the lactone, γ-butyrolactone is preferable.
As the alkylene carbonate, propylene carbonate is preferable.
As the component (M2), propylene glycol monomethyl ether (PGME), ethyl lactate, ethyl 3-ethoxypropionate, methyl amyl ketone, cyclohexanone, butyl acetate, pentyl acetate, γ-butyrolactone, or propylene carbonate is more preferable.
In addition to the components, it is preferable to use an ester-based solvent having 7 or more carbon atoms (preferably 7 to 14 carbon atoms, more preferably 7 to 12 carbon atoms, and still more preferably 7 to 10 carbon atoms) and 2 or less heteroatoms.
As the ester-based solvent having 7 or more carbon atoms and 2 or less heteroatoms, amyl acetate, 2-methylbutyl acetate, 1-methylbutyl acetate, hexyl acetate, pentyl propionate, hexyl propionate, butyl propionate, isobutyl isobutyrate, heptyl propionate, or butyl butanoate is preferable, and isoamyl acetate is more preferable.
As the component (M2), a component having a flash point (hereinafter also referred to as fp) of 37° C. or higher is preferably used. As such a component (M2), propylene glycol monomethyl ether (fp: 47° C.), ethyl lactate (fp: 53° C.), ethyl 3-ethoxypropionate (fp: 49° C.), methyl amyl ketone (fp: 42° C.), cyclohexanone (fp: 44° C.), pentyl acetate (fp: 45° C.), methyl 2-hydroxyisobutyrate (fp: 45° C.), γ-butyrolactone (fp: 101° C.), or propylene carbonate (fp: 132° C.) is preferable. Among those, propylene glycol monoethyl ether, ethyl lactate, pentyl acetate, or cyclohexanone is more preferable, and propylene glycol monoethyl ether or ethyl lactate is still more preferable.
In addition, the “flash point” herein means the value described in a reagent catalog of Tokyo Chemical Industry Co., Ltd. or Sigma-Aldrich Co. LLC.
The mixing mass ratio (M1/M2) of the content of the component (M1) to the component (M2) in the mixed solvent is preferably in the range of “100/0” to “15/85”, and more preferably in the range of “100/0” to “40/60”. In a case where such a configuration is adopted and used, it is possible to further reduce the number of development defects.
As described above, the solvent may further include components other than the components (M1) and (M2). In this case, the content of the components other than the components (M1) and (M2) is preferably in the range of 30% by mass or less, and more preferably 5% to 30% by mass with respect to the total mass of the solvent.
The content of the solvent in the resist composition of the embodiment of the present invention is preferably set so that the concentration of solid contents is 0.5% to 30% by mass, and more preferably set so that the concentration of solid contents is 1% to 20% by mass. With this content, the coating property of the resist composition of the embodiment of the present invention is more excellent.
<Other Additives>
The resist composition of the embodiment of the present invention may further include a resin other than those described above, a crosslinking agent, an acid proliferation agent, a dye, a plasticizer, a photosensitizer, a light absorber, an alkali-soluble resin, a dissolution inhibitor, a dissolution accelerator, or the like.
[Resist Film and Pattern Forming Method]
A resist film can be formed using the composition, and a pattern can further be formed.
The procedure of the pattern forming method using the composition is not particularly limited, but preferably has the following steps.
Step 1: A step of forming a resist film on a support (substrate), using the composition of the embodiment of the present invention
Step 2: A step of exposing the resist film Step 3: A step of developing the exposed resist film using a developer to form a pattern
Hereinafter, the procedure of each of the steps will be described in detail.
[Step 1: Resist Film Forming Step]
The step 1 is a step of forming a resist film on a support (on a substrate), using a composition.
The definition of the composition is as described above.
Hereinafter, a specific example of the method for preparing the composition will be shown.
In the composition used in the pattern forming method of the embodiment of the present invention, it is preferable that the content of metal atoms is reduced.
Hereinafter, first, a specific example of a method for reducing the content of the metal atoms in the composition will be described, and then a specific example of a method for preparing the composition will be described.
Examples of the method for reducing the content of the metal atoms in the composition include a method for adjusting the content by filtration using a filter. As for the filter pore diameter, the pore size is preferably less than 100 nm, more preferably 10 nm or less, and still more preferably 5 nm or less. As the filter, a polytetrafluoroethylene-made, polyethylene-made, or nylon-made filter is preferable. The filter may include a composite material in which the filter material is combined with an ion exchange medium. As the filter, a filter which has been washed with an organic solvent in advance may be used. In the step of filtration using a filter, plural kinds of filters connected in series or in parallel may be used. In a case of using the plural kinds of filters, a combination of filters having different pore diameters and/or materials may be used. In addition, various materials may be filtered plural times, and the step of filtering plural times may be a circulatory filtration step.
In addition, examples of a method for reducing the content of the metal atoms in the composition include a method of selecting raw materials having a low content of metals as raw materials constituting various materials in the composition, a method of subjecting raw materials constituting various materials in the composition to filtration using a filter, and a method of performing distillation under the condition for suppressing the contamination as much as possible by, for example, lining the inside of a device with TEFLON (registered trademark).
In addition, as the method for reducing the content of the metal atoms in the composition, removal with an adsorbing material may be performed, in addition to the above-mentioned filter filtration, and the filter filtration and the adsorbing material may be used in combination. As the adsorbing material, known adsorbing materials can be used, and for example, inorganic adsorbing materials such as silica gel and zeolite, and organic adsorbing materials such as activated carbon can be used.
In addition, in order to reduce the content of the metal atoms in the composition, it is necessary to prevent the incorporation of metal impurities in the production process. Sufficient removal of metal impurities from a production device can be confirmed by measuring the content of metal components included in a washing liquid used to wash the production device.
Next, a specific example of the method for preparing the composition will be described.
In the production of the composition, for example, it is preferable to dissolve various components such as the resin and the photoacid generator as described above in a solvent, and then perform filtration (which may be circulatory filtration) using a plurality of filters having different materials. For example, it is preferable to connect a polyethylene-made filter with a pore diameter of 50 nm, a nylon-made filter with a pore diameter of 10 nm, and a polyethylene-made filter with a pore diameter of 3 to 5 nm in permuted connection, and then perform filtration. As for the filtration, a method of performing circulatory filtration twice or more is also preferable. Further, the filtration step also has an effect of reducing the content of the metal atoms in the composition. A smaller pressure difference among the filters is more preferable, and the pressure difference is generally 0.1 MPa or less, preferably 0.05 MPa or less, and more preferably 0.01 MPa or less. A smaller pressure difference between the filter and the charging nozzle is also preferable, and the pressure difference is generally 0.5 MPa or less, preferably 0.2 MPa or less, and more preferably 0.1 MPa or less.
In addition, as a method for performing circulatory filtration using a filter in the production of the composition, for example, a method of performing circulatory filtration twice or more using a polytetrafluoroethylene-made filter having a pore diameter of 50 nm is also preferable.
It is preferable to subject the inside of a device for producing the composition to gas replacement with an inert gas such as nitrogen. With this, it is possible to suppress dissolution of an active gas such as oxygen in the composition.
The composition is filtered by a filter and then charged into a clean container. It is preferable that the composition charged in the container is subjected to cold storage. This enables performance deterioration caused by the lapse of time to be suppressed. A shorter time from completion of the charge of the composition into the container to initiation of cold storage is more preferable, and the time is generally 24 hours or shorter, preferably 16 hours or shorter, more preferably 12 hours or shorter, and still more preferably 10 hours or shorter. The storage temperature is preferably 0° C. to 15° C., more preferably 0° C. to 10° C., and still more preferably 0° C. to 5° C.
Next, a method of forming a resist film on a substrate using the composition will be described.
Examples of the method of forming a resist film on a substrate using the composition include a method of applying the composition onto a substrate.
The composition can be applied onto a substrate (for example, silicon and silicon dioxide coating) as used in the manufacture of integrated circuit elements by a suitable application method such as ones using a spinner or a coater. As the application method, spin application using a spinner is preferable. The rotation speed upon spin application using a spinner is preferably 1,000 to 3,000 rpm.
After applying the composition, the substrate may be dried to form a resist film. In addition, various underlying films (an inorganic film, an organic film, or an antireflection film) may be formed on the underlayer of the resist film.
Examples of the drying method include a method of heating and drying. The heating may be performed using a unit included in an ordinary exposure machine and/or an ordinary development machine, and may also be performed using a hot plate or the like. The heating temperature is preferably 80° C. to 150° C., more preferably 80° C. to 140° C., and still more preferably 80° C. to 130° C. The heating time is preferably 30 to 1,000 seconds, more preferably 60 to 800 seconds, and still more preferably 60 to 600 seconds.
The film thickness of the resist film is not particularly limited, but is preferably 10 to 150 nm, and more preferably 15 to 100 nm, from the viewpoint that a fine pattern having higher accuracy can be formed.
Moreover, a topcoat may be formed on the upper layer of the resist film, using the topcoat composition.
It is preferable that the topcoat composition is not mixed with the resist film and can be uniformly applied onto the upper layer of the resist film.
Furthermore, it is preferable to dry the resist film before forming the topcoat. Then, the topcoat composition can be applied onto the obtained resist film by the same unit as the method for forming a resist film, and further dried to form a topcoat.
The film thickness of the topcoat is preferably 10 to 200 nm, and more preferably 20 to 100 nm.
The topcoat composition includes, for example, a resin, an additive, and a solvent.
As the resin, the same resin as the above-mentioned resin B can be used. The content of the resin is preferably 50% to 99.9% by mass, and more preferably 60% to 99.7% by mass with respect to the total solid content of the topcoat composition.
As the additive, the above-mentioned acid diffusion control agent can be used. In addition, a compound having a radical trapping group such as a compound having an N-oxy free radical group can also be used. Examples of such a compound include a [4-(benzoyloxy)-2,2,6,6-tetramethylpiperidinooxy] radical. The content of the additive is preferably 0.01% to 20% by mass, and more preferably 0.1% to 15% by mass with respect to the total solid content of the topcoat composition.
It is preferable that the solvent does not dissolve a resist film, and examples of the solvent include an alcohol-based solvent (4-methyl-2-pentanol and the like), an ether-based solvent (diisoamyl ether and the like), an ester-based solvent, a fluorine-based solvent, and a hydrocarbon-based solvent (n-decane and the like).
The content of the solvent in the topcoat composition is preferably set so that the concentration of solid contents is 0.5% to 30% by mass, and more preferably set so that the concentration of solid contents is 1% to 20% by mass.
In addition, the topcoat composition may include a surfactant in addition to the above-mentioned additive, and as the surfactant, a surfactant which may be included in the resist composition of the embodiment of the present invention can be used. The content of the surfactant is preferably 0.0001% to 2% by mass, and more preferably 0.0005% to 1% by mass with respect to the total solid content of the topcoat composition.
In addition, the topcoat is not particularly limited, a topcoat known in the related art can be formed by the methods known in the related art, and a topcoat can be formed in accordance with, for example, the description in paragraphs <0072> to <0082> of JP2014-059543A.
It is preferable that a topcoat including a basic compound as described in JP2013-61648A, for example, is formed on a resist film. Specific examples of the basic compound which can be included in the topcoat include a basic compound which may be included in the resist composition of the embodiment of the present invention.
In addition, the topcoat preferably includes a compound which includes at least one group or bond selected from the group consisting of an ether bond, a thioether bond, a hydroxyl group, a thiol group, a carbonyl bond, and an ester bond.
[Step 2: Exposing Step]
The step 2 is a step of exposing the resist film.
Examples of the exposing method include a method of irradiating a resist film thus formed with actinic rays or radiation through a predetermined mask.
Examples of the actinic rays or radiation include infrared light, visible light, ultraviolet light, far ultraviolet light, extreme ultraviolet light, X-rays, and electron beams, preferably a far ultraviolet light having a wavelength of 250 nm or less, more preferably a far ultraviolet light having a wavelength of 220 nm or less, and particularly preferably a far ultraviolet light having a wavelength of 1 to 200 nm, specifically, KrF excimer laser (248 nm), ArF excimer laser (193 nm), F2 excimer laser (157 nm), EUV (13 nm), X-rays, and electron beams.
It is preferable to perform baking (heating) before performing development after the exposure. The baking accelerates a reaction in the exposed area, and the sensitivity and the pattern shape are improved.
The heating temperature is preferably 80° C. to 150° C., more preferably 80° C. to 140° C., and still more preferably 80° C. to 130° C.
The heating time is preferably 10 to 1,000 seconds, more preferably 10 to 180 seconds, and still more preferably 30 to 120 seconds.
The heating may be performed using a unit included in an ordinary exposure machine and/or an ordinary development machine, and may also be performed using a hot plate or the like.
This step is also referred to as a post-exposure baking.
[Step 3: Developing Step]
The step 3 is a step of developing the exposed resist film using a developer to form a pattern.
Examples of the developing method include a method in which a substrate is immersed in a tank filled with a developer for a certain period of time (a dip method), a method in which development is performed by heaping a developer up onto the surface of a substrate by surface tension, and then leaving it to stand for a certain period of time (a puddle method), a method in which a developer is sprayed on the surface of a substrate (a spray method), and a method in which a developer is continuously jetted onto a substrate rotating at a constant rate while scanning a developer jetting nozzle at a constant rate (a dynamic dispense method).
Furthermore, after the step of performing development, a step of stopping the development may be carried out while substituting the solvent with another solvent.
The developing time is not particularly limited as long as it is a period of time where the unexposed area of a resin is sufficiently dissolved and is preferably 10 to 300 seconds, and more preferably 20 to 120 seconds.
The temperature of the developer is preferably 0° C. to 50° C., and more preferably 15° C. to 35° C.
Examples of the developer include an alkaline developer and an organic solvent developer.
As the alkaline developer, it is preferable to use an aqueous alkaline solution including an alkali. The type of the aqueous alkaline solution is not particularly limited, but examples thereof include an aqueous alkaline solution including a quaternary ammonium salt typified by tetramethylammonium hydroxide, an inorganic alkali, a primary amine, a secondary amine, a tertiary amine, an alcoholamine, a cyclic amine, or the like. Among those, the aqueous solutions of the quaternary ammonium salts typified by tetramethylammonium hydroxide (TMAH) are preferable as the alkaline developer. An appropriate amount of an alcohol, a surfactant, or the like may be added to the alkaline developer. The alkali concentration of the alkaline developer is usually 0.1% to 20% by mass. Further, the pH of the alkaline developer is usually 10.0 to 15.0.
The organic solvent developer is a developer including an organic solvent.
The vapor pressure of the organic solvent included in the organic solvent developer (in a case of a mixed solvent, a vapor pressure as a whole) is preferably 5 kPa or less, more preferably 3 kPa or less, and still more preferably 2 kPa or less at 20° C. By setting the vapor pressure of the organic solvent to 5 kPa or less, evaporation of the developer on a substrate or in a development cup is suppressed, the temperature uniformity in a wafer plane is improved, and as a result, the dimensional uniformity in the wafer plane is enhanced.
Examples of the organic solvent used in the organic solvent developer include known organic solvents, and include an ester-based solvent, a ketone-based solvent, an alcohol-based solvent, an amide-based solvent, an ether-based solvent, and a hydrocarbon-based solvent.
It is preferable to use an ester-based solvent having 7 or more carbon atoms (preferably 7 to 14 carbon atoms, more preferably 7 to 12 carbon atoms, and still more preferably 7 to 10 carbon atoms), and 2 or less heteroatoms as the organic solvent included in the organic solvent developer, from the viewpoint that swelling of the resist film can be suppressed in a case where EUV and electron beams are used in the exposing step.
The heteroatom of the ester-based solvent is an atom other than a carbon atom and a hydrogen atom, and examples thereof include an oxygen atom, a nitrogen atom, and a sulfur atom. The number of the heteroatoms is preferably 2 or less.
As the ester-based solvent having 7 or more carbon atoms and 2 or less heteroatoms, amyl acetate, isoamyl acetate, 2-methylbutyl acetate, 1-methylbutyl acetate, hexyl acetate, pentyl propionate, hexyl propionate, butyl propionate, isobutyl isobutyrate, heptyl propionate, butyl butanoate, or the like is preferable, and isoamyl acetate is more preferable.
In a case where EUV and electron beams are used in the exposing step, a mixed solvent of the ester-based solvent and the hydrocarbon-based solvent or a mixed solvent of the ketone-based solvent and the hydrocarbon-based solvent may be used instead of the ester-based solvent having 7 or more carbon atoms and having 2 or less heteroatoms as the organic solvent included in the organic solvent developer. Also in this case, it is effective in suppressing the swelling of the resist film.
In a case where the ester-based solvent and the hydrocarbon-based solvent are used in combination, it is preferable to use isoamyl acetate as the ester-based solvent. In addition, from the viewpoint of adjusting the solubility of the resist film, a saturated hydrocarbon-based solvent (for example, octane, nonane, decane, dodecane, undecane, and hexadecane) is preferable as the hydrocarbon-based solvent.
In a case where the ketone-based solvent and the hydrocarbon-based solvent are used in combination, it is preferable to use 2-heptanone as the ketone-based solvent. In addition, from the viewpoint of adjusting the solubility of the resist film, a saturated hydrocarbon-based solvent (for example, octane, nonane, decane, dodecane, undecane, and hexadecane) is preferable as the hydrocarbon-based solvent.
In a case of using the mixed solvent, the content of the hydrocarbon-based solvent depends on the solvent solubility of the resist film, it is not particularly limited, and therefore, the content may be appropriately adjusted to determine a necessary amount of the hydrocarbon-based solvent.
A plurality of the organic solvents may be mixed or the organic solvent may be used in admixture with a solvent other than those described above or water. It should be noted that in order to fully exert the effects of the present invention, the moisture content of the developer as a whole is preferably less than 10% by mass, and the developer is more preferably substantially free of the moisture. The concentration of the organic solvent (in a case of mixing a plurality of the organic solvents, a total thereof) in the developer is preferably 50% by mass or more, more preferably 50% to 100% by mass, still more preferably 85% to 100% by mass, particularly preferably 90% to 100% by mass, and most preferably 95% to 100% by mass.
[Other Steps]
It is preferable that the pattern forming method includes a step of performing washing using a rinsing liquid after Step 3.
Examples of the rinsing liquid used in the rinsing step after the step of performing development using the developer include pure water. Further, an appropriate amount of a surfactant may be added to pure water.
An appropriate amount of a surfactant may be added to the rinsing liquid.
A method for the rinsing step is not particularly limited, but examples thereof include a method in which a rinsing liquid is continuously jetted on a substrate rotated at a constant rate (a rotation application method), a method in which a substrate is immersed in a tank filled with a rinsing liquid for a certain period of time (a dip method), and a method in which a rinsing liquid is sprayed on a substrate surface (a spray method).
Furthermore, the pattern forming method of the embodiment of the present invention may include a heating step (postbaking) after the rinsing step. By the present step, the developer and the rinsing liquid remaining between and inside the patterns are removed by baking. In addition, the present step also has an effect that a resist pattern is annealed and the surface roughness of the pattern is improved. The heating step after the rinsing step is usually performed at 40° C. to 250° C. (preferably 90° C. to 200° C.) for usually 10 seconds to 3 minutes (preferably 30 to 120 seconds).
In addition, an etching treatment on the substrate may be carried out using a pattern thus formed as a mask. That is, the substrate (or the underlayer film and the substrate) may be processed using the pattern thus formed in Step 3 as a mask to form a pattern on the substrate.
A method for processing the substrate (or the underlayer film and the substrate) is not particularly limited, but a method in which a pattern is formed on a substrate by subjecting the substrate (or the underlayer film and the substrate) to dry etching using the pattern thus formed in Step 3 as a mask is preferable.
The dry etching may be one-stage etching or multi-stage etching. In a case where the etching is etching including a plurality of stages, the etchings at the respective stages maybe the same treatment or different treatments.
For etching, any of known methods can be used, and various conditions and the like are appropriately determined according to the type of a substrate, usage, and the like. Etching can be carried out, for example, in accordance with Journal of The International Society for Optical Engineering (Proc. of SPIE), Vol. 6924, 692420 (2008), JP2009-267112A, and the like. In addition, the etching can also be carried out in accordance with “Chapter 4 Etching” in “Semiconductor Process Text Book, 4th Ed., published in 2007, publisher: SEMI Japan”.
Among those, oxygen plasma etching is preferable as the dry etching.
Various materials (for example, a developer, a rinsing liquid, a composition for forming an antireflection film, and a composition for forming a topcoat) other than the composition used in the pattern forming method of the embodiment of the present invention preferably have smaller amounts of impurities such as a metal (for example, Na, K, Ca, Fe, Cu, Mg, Al, Li, Cr, Ni, Sn, Ag, As, Au, Ba, Cd, Co, Pb, Ti, V, W, and Zn). The content of the impurities included in these materials is preferably, for example, 1 ppm by mass or less.
Examples of a method for reducing impurities such as a metal in various materials other than the composition include filtration using a filter. As for the filter pore diameter, the pore size is preferably less than 100 nm, more preferably 10 nm or less, and still more preferably 5 nm or less. As the filter, a polytetrafluoroethylene-made, polyethylene-made, or nylon-made filter is preferable. The filter may include a composite material in which the filter material is combined with an ion exchange medium. As the filter, a filter which has been washed with an organic solvent in advance may be used. In the step of filtration using a filter, plural kinds of filters connected in series or in parallel may be used. In a case of using the plural kinds of filters, a combination of filters having different pore diameters and/or materials may be used. In addition, various materials may be filtered plural times, and the step of filtering plural times may be a circulatory filtration step.
In addition, examples of a method for reducing impurities such as a metal in various materials other than the composition include a method of selecting raw materials having a low content of metals as raw materials constituting various materials, a method of subjecting raw materials constituting various materials to filtration using a filter, and a method of performing distillation under the condition for suppressing the contamination as much as possible by, for example, lining the inside of a device with TEFLON (registered trademark).
In addition, as the method for reducing impurities such as a metal in various materials other than the composition, removal of impurities with an adsorbing material may be performed, in addition to the above-mentioned filter filtration, and the filter filtration and the adsorbing material may be used in combination. As the adsorbing material, known adsorbing materials can be used, and for example, inorganic adsorbing materials such as silica gel and zeolite, and organic adsorbing materials such as activated carbon can be used. It is necessary to prevent the incorporation of metal impurities in the production process in order to reduce the impurities such as a metal included in the various materials other than the composition. Sufficient removal of metal impurities from a production device can be confirmed by measuring the content of metal components included in a washing liquid used to wash the production device.
A conductive compound may be added to an organic treatment liquid such as a rinsing liquid in order to prevent breakdown of chemical liquid pipes and various parts (a filter, an O-ring, a tube, or the like) due to electrostatic charging, and subsequently generated electrostatic discharging. The conductive compound is not particularly limited, but examples thereof include methanol. The addition amount is not particularly limited, but from the viewpoint that preferred development characteristics or rinsing characteristics are maintained, the addition amount is preferably 10% by mass or less, and more preferably 5% by mass or less.
For members of the chemical liquid pipe, various pipes coated with stainless steel (SUS), or a polyethylene, polypropylene, or fluorine resin (a polytetrafluoroethylene or perfluoroalkoxy resin, or the like) that has been subjected to an antistatic treatment can be used. In the same manner, for the filter or the O-ring, polyethylene, polypropylene, or a fluorine resin (a polytetrafluoroethylene or perfluoroalkoxy resin, or the like) that has been subjected to an antistatic treatment can be used.
A method for improving the surface roughness of a pattern may be applied to a pattern thus formed by the method of the embodiment of the present invention. Examples of the method for improving the surface roughness of the pattern include the method of treating a pattern by a plasma of a hydrogen-containing gas disclosed in WO2014/002808A. Additional examples of the method include known methods as described in JP2004-235468A, US2010/0020297A, JP2008-83384A, and Proc. of SPIE Vol. 832883280N-1 “EUV Resist Curing Technique for LWR Reduction and Etch Selectivity Enhancement”.
In a case where a pattern thus formed is in the form of a line, an aspect ratio determined by dividing the height of the pattern with the line width is preferably 2.5 or less, more preferably 2.1 or less, and still more preferably 1.7 or less.
In a case where a pattern thus formed is in the form of a trench (groove) pattern or a contact hole pattern, an aspect ratio determined by dividing the height of the pattern with the trench width or the hole diameter is preferably 4.0 or less, more preferably 3.5 or less, and still more preferably 3.0 or less.
The pattern forming method of the embodiment of the present invention can also be used for forming a guide pattern in a directed self-assembly (DSA) (see, for example, ACS Nano Vol. 4, No. 8, Pages 4815-4823).
In addition, a pattern thus formed by the method can be used as a core material (core) of the spacer process disclosed in, for example, JP1991-270227A (JP-H03-270227A) and JP2013-164509A.
[Method for Manufacturing Electronic Device]
Moreover, the present invention further relates to a method for manufacturing an electronic device, including the above-described pattern forming method, and an electronic device manufactured by the manufacturing method.
The electronic device of an embodiment of the present invention is suitably mounted on electric and electronic equipment (for example, home appliances, office automation (OA)-related equipment, media-related equipment, optical equipment, telecommunication equipment, and the like).
Hereinbelow, the present invention will be described in more detail with reference to Examples. The materials, the amounts of materials used, the proportions, the treatment details, the treatment procedure, and the like shown in the Examples below may be modified as appropriate as long as the modifications do not depart from the spirit of the present invention. Therefore, the scope of the present invention should not be construed as being limited to the Examples shown below.
[Various Components of Actinic Ray-Sensitive or Radiation-Sensitive Resin Composition] [Acid-Decomposable Resin (resin A)]
The resins A (resins A-1 to A-25) shown in Table 4 and Table 8 are shown below.
As resins A-1 to A-25, those synthesized according to a method for synthesizing a resin A-1 (Synthesis Example 1) which will be described later were used. The compositional ratio (molar ratio; corresponding in order from the left), the weight-average molecular weight (Mw), and the dispersity (Mw/Mn) of each repeating unit shown below are shown in Table 1.
Furthermore, the weight-average molecular weight (Mw) and the dispersity (Mw/Mn) of the resins A-1 to A-25 were measured by GPC (carrier: tetrahydrofuran (THF)) (an amount expressed in terms of polystyrene). In addition, the compositional ratio (ratio based on % by mole) of the resin was measured by 13C-nuclear magnetic resonance (NMR).
The structural formulae of the resins A-1 to A-25 shown in Table 1 are shown below.
Cyclohexanone (113 g) was heated to 80° C. under a nitrogen stream. While stirring this liquid, a mixed solution of a monomer represented by Formula M-1 (25.5 g), a monomer represented by Formula M-2 (31.6 g), cyclohexanone (210 g), and dimethyl 2,2′-azobisisobutyrate [V-601, manufactured by FUJIFILM Wako Pure Chemical Corporation] (6.21 g) was added dropwise thereto over 6 hours to obtain a reaction solution. After completion of dropwise addition, the reaction solution was further stirred at 80° C. for 2 hours. The obtained reaction solution was cooled, then reprecipitated with a large amount of methanol/water (mass ratio: 9:1), and filtered, and the obtained solid was vacuum-dried to obtain 52 g of a resin A-1.
The resin A-1 thus obtained had a weight-average molecular weight (Mw: expressed in terms of polystyrene) of 6,500 and a dispersity (Mw/Mn) of 1.52, as determined from GPC (carrier: tetrahydrofuran (THF)). The compositional ratio measured by 13C-nuclear magnetic resonance (NMR) was 50/50 expressed in terms of a molar ratio.
[Photoacid Generator]
<First Photoacid Generator>
The structures of first photoacid generators (compounds B-1 to B-23) shown in Table 4 and Table 8 are shown below.
Furthermore, the compounds B-1 to B-18, and B-22 correspond to the above-mentioned compound (I), the compound B-20 and the compound B-23 corresponds to the above-mentioned compound (II), and the compound B-19 and the compound 21 correspond to the above-mentioned compound (III).
(Acid Dissociation Constant pKa of Acid Generated from First Photoacid Generator)
The acid dissociation constant pKa of an acid generated from the first photoacid generator is shown in Table 2.
Furthermore, in the measurement of the acid dissociation constant pKa of an acid generated from the first photoacid generator, specifically, the pKa is a value determined by subjecting a compound formed by substituting each cationic moiety in the compounds B-1 to B-22 with H+ (for example, in a case of the compound B-1, a compound formed by substituting the triphenylsulfonium cation with H+) to computation from a value based on a Hammett's substituent constant and database of publicly known literature values, using Software Package 1 of ACD/Labs, as described above. In addition, in a case where pKa could not be calculated by the method, a value obtained by Gaussian 16 based on density functional theory (DFT) was adopted.
In the following table, “pKa1” represents an acid dissociation constant of the first stage, “pKa2” represents an acid dissociation constant of the second stage, and “pKa3” represents an acid dissociation constant of the third stage. A smaller value of pKa means a higher acidity.
As described above, the compounds B-1 to B-18, and B-22 correspond to the above-mentioned compound (I). Here, pKa1 corresponds to the above-mentioned acid dissociation constant a1, and pKa2 corresponds to the above-mentioned acid dissociation constant a2.
In addition, as described above, the compound B-20 and the compound B-23 correspond to the above-mentioned compound (II). Here, pKa1 corresponds to the above-mentioned acid dissociation constant a1, and pKa3 corresponds to the above-mentioned acid dissociation constant a2.
Since an acid (a compound formed by substituting the triphenylsulfonium cation of compound B-20 with H+) generated from the compound B-20 has a symmetric structure, the acid dissociation constants pKa of the two first acidic moieties derived from the structural moiety X are theoretically the same value. However, in the above-mentioned calculation method, the acid dissociation constants of the two first acidic moieties derived from the structural moiety X are obtained as the acid dissociation constant pKa1 of the first stage and the acid dissociation constant pKa2 of the second stage. For the acid generated from compound B-20, the smallest value (that is, the acid dissociation constant pKa1) of the acid dissociation constants pKa of the two first acidic moieties derived from the structural moiety X corresponds to the above-mentioned acid dissociation constant a1. Also for acids generated from compound B-23, in the same manner as the acid generated from compound B-20, the smallest value (that is, the acid dissociation constant pKa1) of the acid dissociation constants pKa of the two first acidic moieties derived from the structural moiety X corresponds to the above-mentioned acid dissociation constant a1.
In addition, as described above, the compounds B-19 and B-21 correspond to the above-mentioned compound (III). Here, pKa1 corresponds to the above-mentioned acid dissociation constant a1.
That is, also for acids generated from compounds B-19 and B-21, in the same manner as the acid generated from compound B-20, the smallest value (that is, the acid dissociation constant pKa1) of the acid dissociation constants pKa of the two first acidic moieties derived from the structural moiety X corresponds to the above-mentioned acid dissociation constant a1.
<Second Photoacid Generator>
The structures of second photoacid generators (C-1 to C-19) shown in Table 4 and Table 8 are shown below.
[Acid Diffusion Control Agent]
The structures of acid diffusion control agents (compounds D-1 to D-5) shown in Table 4 and Table 8 are shown below.
[Additive Resin and Resin for Topcoat]
Additive resins (E-1 to E-26) shown in Table 4 and Table 8 and topcoat resins (PT-1 to PT-3) shown in Table 5 were synthesized.
The molar ratios of the repeating units, and the weight-average molecular weights (Mw), and the dispersities (Mw/Mn) in the additive resins (E-1 to E-26) shown in Table 4 and Table 8 and the resins (PT-1 to PT-3) for a topcoat shown in Table 5 are shown in Table 3.
Furthermore, the weight-average molecular weights (Mw) and the dispersities (Mw/Mn) of the additive resins E-1 to E-26 and the topcoat resins PT-1 to PT-3 were measured by GPC(carrier: tetrahydrofuran (THF)) (an amount expressed in terms of polystyrene). In addition, the compositional ratio (ratio based on % by mole) of the resin was measured by 13C-nuclear magnetic resonance (NMR).
In the following table, the “Note” column indicates which of the resin B1 to the resin B3 the additive resin corresponds to. “-” is intended not to correspond to any of them.
The monomer structures used in the synthesis of the additive resins E-1 to E-26 shown in Table 3 and the topcoat resins PT-1 to PT-3 shown in Table 3 are shown below. Further, among the monomers shown below, ME-15, ME-16, ME-21, ME-22, and ME-23 can constitute a repeating unit having an acid-decomposable group.
[Surfactant]
Surfactants shown in Table 4 and Table 8 are shown below.
[Solvent]
Solvents shown in Table 4 and Table 8 are shown below.
[Preparation of Actinic Ray-Sensitive or Radiation-Sensitive Resin Composition and Pattern Formation: ArF Liquid Immersion Exposure] [Preparation (1) of Actinic Ray-Sensitive or Radiation-Sensitive Resin Composition]
The respective components shown in Table 4 were mixed so that the concentration of solid contents was 4% by mass. Next, the obtained mixed liquid was filtered initially through a polyethylene-made filter having a pore diameter of 50 nm, then through a nylon-made filter having a pore diameter of 10 nm, and lastly through a polyethylene-made filter having a pore diameter of 5 nm in this order to prepare an actinic ray-sensitive or radiation-sensitive resin composition (hereinafter also referred to as a resin composition). In addition, in the resin composition, the solid content means all components other than the solvent. The obtained resin composition was used in Examples and Comparative Examples.
Furthermore, in Table 4, the content (% by mass) of each component means a content with respect to the total solid content.
In addition, in Table 4, the “Content (% by mass) with respect to all resins” in the column of the additive resin (resin B) is intended to mean a content (% by mass) of the additive resin with respect to the total content of all resins included in the resist composition).
[Preparation of Topcoat Composition]
Various components included in the topcoat composition shown in Table 5 are shown below.
<Resin>
As the resin shown in Table 5, resins PT-1 to PT-3 shown in Table 3 were used.
<Additive>
The structures of additives shown in Table 5 are shown below.
<Surfactant>
As the surfactant shown in Table 5, the surfactant H-3 was used.
<Solvent>
Solvents shown in Table 5 are shown below.
<Preparation of Topcoat Composition>
The respective components shown in Table 5 were mixed so that the concentration of solid contents was 3% by mass, and then the obtained mixed liquid was filtered initially through a polyethylene-made filter having a pore diameter of 50 nm, then through a nylon-made filter having a pore diameter of 10 nm, and lastly through a polyethylene-made filter having a pore diameter of 5 nm in this order to prepare a topcoat composition. Further, the solid content as mentioned herein means all the components other than the solvent. The obtained topcoat composition was used in Examples.
[Pattern Formation (1): ArF Liquid Immersion Exposure and Organic Solvent Development]
A composition for forming an organic antireflection film, ARC29SR (manufactured by Brewer Science, Inc.), was applied onto a silicon wafer and baked at 205° C. for 60 seconds to form an antireflection film having a film thickness of 98 nm. A resin composition shown in Table 6 (see Table 4 for the composition of the resin composition) was applied thereon and baked at 100° C. for 60 seconds to form a resist film (actinic ray-sensitive or radiation-sensitive film) having a film thickness of 90 nm. Furthermore, in Examples 1-7, 1-12, and 1-16, a topcoat film was formed on the upper layer of the resist film (the composition of the topcoat compositions used is shown in Table 5). The film thickness of the topcoat film was 100 nm in any case.
The resist film was exposed via a 6% halftone mask having a 1:1 line-and-space pattern with a line width of 45 nm, using an ArF excimer laser liquid immersion scanner (XT1700i, manufactured by ASML, NA 1.20, Dipole, outer sigma: 0.950, inner sigma: 0.850, Y polarization). Ultrapure water was used as the immersion liquid.
The resist film after the exposure was baked at 90° C. for 60 seconds, developed with n-butyl acetate for 30 seconds, and then rinsed with 4-methyl-2-pentanol for 30 seconds. Then, the film was spin-dried to obtain a negative tone pattern.
<LWR Evaluation>
In a case where a 45 nm (1:1) line-and-space pattern resolved with an optimum exposure dose upon resolving a line pattern having an average line width of 45 nm was observed from the upper part of the pattern using a critical dimension scanning electron microscope (SEM (S-9380II manufactured by Hitachi, Ltd.)), the line width was observed at any points, and a measurement deviation thereof was evaluated as 3σ. A smaller value thereof indicates better performance. Further, LWR (nm) is preferably 2.5 nm or less, more preferably 2.4 nm or less, and still more preferably 2.3 nm or less. The results are shown in Table 6 below.
As shown in Table 6 above, the resist compositions of Examples exhibited desired effects.
[Pattern Formation (2): ArF Liquid Immersion Exposure and Aqueous Alkaline Solution Development]
A composition for forming an organic antireflection film, ARC29SR (manufactured by Brewer Science, Inc.), was applied onto a silicon wafer and baked at 205° C. for 60 seconds to form an antireflection film having a film thickness of 98 nm. A resin composition shown in Table 7 (see Table 4 for the composition of the resin composition) was applied thereon and baked at 100° C. for 60 seconds to form a resist film having a film thickness of 90 nm. Furthermore, in Examples 2-2, 2-11, and 2-18, a topcoat film (the composition of the topcoat compositions used is shown in Table 5) was formed on the upper layer of the resist film. The film thickness of the topcoat film was 100 nm in any case.
The resist film was exposed via a 6% halftone mask having a 1:1 line-and-space pattern with a line width of 45 nm, using an ArF excimer laser liquid immersion scanner (XT1700i, manufactured by ASML, NA 1.20, Dipole, outer sigma: 0.950, inner sigma: 0.890, Y deflection). Ultrapure water was used as the immersion liquid.
The resist film after the exposure was baked at 90° C. for 60 seconds, developed with an aqueous tetramethylammonium hydroxide solution (2.38%-by-mass) for 30 seconds, and then rinsed with pure water for 30 seconds. Thereafter, the resist film was spin-dried to obtain a positive tone pattern.
The obtained positive tone pattern was subjected to line width roughness (LWR, nm) which had been carried out on the negative tone pattern obtained by the above-described [Pattern Formation (1): ArF Liquid Immersion Exposure and Organic Solvent Development]. The results are shown in Table 7 below.
As shown in Table 7 above, the resist composition of the embodiment of the present invention exhibited desired effects.
[Preparation of Actinic Ray-Sensitive or Radiation-Sensitive Resin Composition and Pattern Formation: EUV Exposure] [Preparation (2) of Actinic Ray-Sensitive or Radiation-Sensitive Resin Composition]
The respective components shown in Table 8 were mixed so that the concentration of solid contents was 2% by mass. Next, the obtained mixed liquid was filtered initially through a polyethylene-made filter having a pore diameter of 50 nm, then through a nylon-made filter having a pore diameter of 10 nm, and lastly through a polyethylene-made filter having a pore diameter of 5 nm in this order to prepare an actinic ray-sensitive or radiation-sensitive resin composition (hereinafter also referred to as a resin composition). In addition, in the resin composition, the solid content means all components other than the solvent. The obtained resin composition was used in Examples and Comparative Examples.
Furthermore, in Table 8, the content (% by mass) of each component means a content with respect to the total solid content.
In addition, in Table 8, the “Content (% by mass) with respect to all resins” in the column of the additive resin (resin B) is intended to mean a content (% by mass) of the additive resin with respect to the total content of all resins included in the resist composition).
[Pattern Formation (3): EUV Exposure and Organic Solvent Development]
A composition for forming an underlayer film, AL412 (manufactured by Brewer Science, Inc.), was applied onto a silicon wafer and baked at 205° C. for 60 seconds to form an underlying film having a film thickness of 20 nm. A resin composition shown in Table 9 (see Table 8 for the composition of the resin composition) was applied thereon and baked at 100° C. for 60 seconds to form a resist film having a film thickness of 30 nm.
The silicon wafer having the obtained resist film was subjected to patternwise irradiation using an EUV exposure device (manufactured by Exitech Ltd., Micro Exposure Tool, NA 0.3, Quadrupol, outer sigma 0.68, inner sigma 0.36). Further, as a reticle, a mask having a line size=20 nm and a line: space=1:1 was used.
The resist film after the exposure was baked at 90° C. for 60 seconds, developed with n-butyl acetate for 30 seconds, and spin-dried to obtain a negative tone pattern.
[Evaluation]
(Line Width Roughness (LWR, nm))
In a case where a 20 nm (1:1) line-and-space pattern resolved with an optimum exposure dose upon resolving a line pattern having an average line width of 20 nm was observed from the upper part of the pattern using a critical dimension scanning electron microscope (SEM (S-9380II manufactured by Hitachi, Ltd.)), the line width was observed at any points, and a measurement deviation thereof was evaluated as 3σ. A smaller value thereof indicates better performance. Further, LWR (nm) is preferably 3.8 nm or less, and more preferably 3.5 nm or less. The results are shown in Table 9 below.
As shown in Table 9 above, the resist composition of the embodiment of the present invention exhibited desired effects.
[Pattern Formation (4): EUV Exposure and Aqueous Alkaline Solution Development]
A composition for forming an underlayer film, AL412 (manufactured by Brewer Science, Inc.), was applied onto a silicon wafer and baked at 205° C. for 60 seconds to form an underlying film having a film thickness of 20 nm. A resin composition shown in Table 10 (see Table 8 for the composition of the resin composition) was applied thereon and baked at 100° C. for 60 seconds to form a resist film having a film thickness of 30 nm.
The silicon wafer having the obtained resist film was subjected to patternwise irradiation using an EUV exposure device (manufactured by Exitech Ltd., Micro Exposure Tool, NA 0.3, Quadrupol, outer sigma 0.68, inner sigma 0.36). Further, as a reticle, a mask having a line size=20 nm and a line: space=1:1 was used.
The resist film after the exposure was baked at 90° C. for 60 seconds, developed with an aqueous tetramethylammonium hydroxide solution (2.38%-by-mass) for 30 seconds, and then rinsed with pure water for 30 seconds. Thereafter, the resist film was spin-dried to obtain a positive tone pattern.
The obtained positive tone pattern was subjected to line width roughness (LWR, nm) which had been carried out on the negative tone pattern obtained by the above-described [Pattern Formation (3): EUV Exposure and Organic Solvent Development].
The results of the evaluation tests are shown in Table 10 below.
As shown in Table 10 above, the resist composition of the embodiment of the present invention exhibited desired effects.
| Number | Date | Country | Kind |
|---|---|---|---|
| 2019-012509 | Jan 2019 | JP | national |
| 2019-237366 | Dec 2019 | JP | national |
This application is a Continuation of PCT International Application No. PCT/JP2020/001603 filed on Jan. 17, 2020, which claims priority under 35 U.S.C § 119(a) to Japanese Patent Application No. 2019-012509 filed on Jan. 28, 2019 and Japanese Patent Application No. 2019-237366 filed on Dec. 26, 2019. Each of the above application(s) is hereby expressly incorporated by reference, in its entirety, into the present application.
| Number | Date | Country | |
|---|---|---|---|
| Parent | PCT/JP2020/001603 | Jan 2020 | US |
| Child | 17320364 | US |
