Claims
- 1. An anodizing apparatus comprising, at the peripheral portion of a substrate to be subjected to anodizing, a first electrode coming in contact with the back side of the substrate and a second electrode facing the first electrode, interposing the substrate between them; the first electrode having substantially the same beltlike form as the second electrode.
- 2. The anodizing apparatus according to claim 1, wherein the first and second electrodes each have the form of a beltlike ring or a beltlike polygon.
- 3. The anodizing apparatus according to claim 1, wherein the second electrode comprises platinum.
- 4. An anodizing apparatus comprising, at the peripheral portion of a substrate to be subjected to anodizing, a first electrode coming in contact with the back side of the substrate and a second electrode facing the first electrode, interposing the substrate between them, and, in the remaining substrate region excluding the peripheral portion, a third electrode coming in contact with the back side of the substrate and a fourth electrode facing the third electrode, interposing the substrate between them; the first electrode and third electrode having substantially the same form as the second electrode and fourth electrode, respectively.
- 5. The anodizing apparatus according to claim 4, wherein the first and second electrodes each have the form of a beltlike ring or a beltlike polygon.
- 6. The anodizing apparatus according to claim 4, wherein the third and fourth electrodes each have the form of a disk or a polygon.
- 7. The anodizing apparatus according to claim 4, wherein the distance between the first and second electrodes is shorter than the distance between the third and fourth electrodes.
Priority Claims (2)
Number |
Date |
Country |
Kind |
11-161110 |
Jun 1999 |
JP |
|
11-161111 |
Jun 1999 |
JP |
|
Parent Case Info
This is a divisional application of application Ser. No. 09/586,887, filed Jun. 5, 2000 now U.S. Pat. No. 6,664,169.
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