Apparatus and Method for Partial Ion Implantation

Abstract

Disclosed herein is an apparatus and method for partial ion implantation. The apparatus includes a wafer support, an ion beam irradiator capable of generating and irradiating an ion beam entering the wafer, and an ion beam exposure adjustor to adjust exposure of the wafer with respect to the ion beam according to regions of the wafer by setting an exposure opening via combination of ion beam shields for blocking the ion beam with respect to the wafer. The exposure opening enables the wafer to be partially exposed to the ion beam irradiated therethrough. With this apparatus, effective partial ion implantation can be performed to compensate variation of a threshold voltage Vt in a channel of a transistor, thereby providing more uniform characteristics of the transistor.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

For a more complete understanding of the disclosure, reference should be made to the following detailed description and accompanying drawing wherein:

FIG. 1 illustrates an apparatus for partial ion implantation in accordance with an embodiment of the present invention;

FIGS. 2 and 3 are schematic views illustrating operation of an ion beam exposure adjustor of the apparatus;

FIGS. 4 and 5 are schematic plan views illustrating the ion beam exposure adjustor of the apparatus;

FIGS. 6 and 7 are schematic views illustrating a first example of a method for partial ion implantation in accordance with an embodiment of the present invention;

FIG. 8 is a graphical representation schematically depicting a dose distribution of implanted ions in the first example of the method;

FIGS. 9 and 10 are schematic views illustrating a second example of the method for the partial ion implantation;

FIGS. 11 and 12 are graphical representations schematically depicting a dose distribution of implanted ions in the second example of the method; and

FIG. 13 is a graphical representation depicting an improved distribution of a threshold voltage Vt by partial ion implantation in accordance with an embodiment of the present invention.

Claims

1. An apparatus for partial ion implantation, the apparatus comprising: a wafer support;an ion beam irradiator capable of generating and irradiating an ion beam entering a wafer; andan ion beam exposure adjustor capable of adjusting exposure of the wafer with respect to the ion beam according to regions of the wafer by blocking the ion beam to partially expose the wafer to the ion beam.

2. The apparatus according to claim 1, wherein the ion beam exposure adjustor is positioned in front of the wafer to allow variation in size or position of an exposure opening through which the ion beam passes.

3. The apparatus according to claim 1, wherein the wafer support is repetitiously movable in a predetermined direction while the ion beam irradiator performs repetitious scanning of the ion beam in a direction different from the moving direction of the wafer support to allow a whole region of the wafer to be irradiated by the ion beam, and the ion beam exposure adjustor operates in conjunction with movement of the wafer support to maintain the exposure opening for the ion beam with respect to the wafer.

4. An apparatus for partial ion implantation, the apparatus comprising: a wafer support;an ion beam irradiator capable of generating and irradiating an ion beam entering a wafer; andan ion beam exposure adjustor capable of adjusting exposure of the wafer with respect to the ion beam according to regions of the wafer by setting an exposure opening via combination of ion beam shields for blocking the ion beam, the exposure opening enabling the wafer to be partially exposed to the ion beam irradiated therethrough.

5. The apparatus according to claim 4, wherein the wafer support is repetitiously movable in a predetermined direction while the ion beam irradiator performs repetitious scanning of the ion beam in a direction different from the moving direction of the wafer support to allow a whole region of the wafer to be irradiated by the ion beam, and the ion beam exposure adjustor operates in conjunction with movement of the wafer support to maintain the exposure opening for the ion beam with respect to the wafer.

6. The apparatus according to claim 4, wherein the ion beam shields are positioned in front of the wafer to partially block a surface of the wafer with respect to the ion beam.

7. The apparatus according to claim 4, wherein the ion beam exposure adjustor comprises a shield-combining part to move and combine the ion beam shields so as to allow variation in size and position of the exposure opening with respect to the wafer.

8. The apparatus according to claim 7, wherein the shield-combining part comprises a driving supporter connected to the wafer support, and a shaft connecting the driving supporter and the ion beam shields.

9. The apparatus according to claim 7, wherein the shield-combining part is capable of rotating the combination of the ion beam shields about the wafer.

10. The apparatus according to claim 4, wherein the ion beam shields are separated an equal distance from the wafer in front thereof so as to move independently in parallel to each other and then combine with each other to set the exposure opening for the ion beam.

11. The apparatus according to claim 10, wherein the ion beam shields are arranged in parallel to each other in two rows.

12. The apparatus according to claim 4, wherein the ion beam shields are positioned in multiple layers in front of the wafer, and are independently movable in parallel to each other and capable of combining with each other to set the exposure opening for the ion beam.

13. The apparatus according to claim 12, wherein the ion beam shields comprises first ion beam shields arranged in one of the layers to face each other, and second ion beam shields arranged in another layer to block a region between the first ion beam shields

14. A method for partial ion implantation to implant ions to a plurality of regions of a wafer in different doses, comprising the steps of: mounting a wafer on a wafer support such that the wafer faces an ion beam irradiated from an ion beam irradiator;primarily adjusting an ion beam exposure adjustor to partially expose a first region of the wafer to to the ion beam;primarily implanting ions by scanning the ion beam on the exposed first region;secondarily adjusting the ion beam exposure adjustor to allow a second region of the wafer to be exposed to the ion beam; andsecondarily implanting ions by scanning the ion beam on the exposed second region.

15. The method according to claim 14, wherein the secondary ion implanting step comprises repetitiously moving the wafer support in a predetermined direction while repetitiously scanning the ion beam in a direction different from the moving direction of the wafer support to allow a whole region of the wafer to be irradiated by the ion beam, and the ion beam exposure adjustor operates in conjunction with movement of the wafer support to maintain the exposure opening for the ion beam with respect to the wafer.

16. The method according to claim 15, wherein, during the ion implanting steps, controlling the concentration of ions implanted to the regions of the wafer depending on the number of times the ion beam is repetitiously scanned.

17. The method according to claim 14, wherein each ion implanting step comprises rotating either the ion beam exposure adjustor or the wafer.

18. The method according to claim 14, further comprising: rotating either the ion beam exposure adjustor or the wafer before the secondary ion implanting step.

19. The method according to claim 14, wherein the step of adjusting the ion beam exposure adjustor comprises exposing the regions of the wafer to the ion beam by independently moving the ion beam shields of the ion beam exposure adjustor in parallel to each other, with the ion beam shields arranged in parallel to each other or with the ion beam shields arranged in multiple layers.

20. The method according to claim 14, wherein the second region of the wafer comprises the first region of the wafer.