Number | Name | Date | Kind |
---|---|---|---|
4412133 | Eckes et al. | Oct 1983 | |
4480284 | Tojo et al. | Oct 1984 | |
4502094 | Lewin et al. | Feb 1985 |
Entry |
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Rev. Sci. Instrum., vol. 44, No. 10, Oct. 1973, "Electrostatic Wafer Chuck for Electron Beam Microfabrication," by George A. Wardly, pp. 1506-1509. |