Number | Date | Country | Kind |
---|---|---|---|
88-12323 | Sep 1988 | KRX |
Number | Name | Date | Kind |
---|---|---|---|
4746623 | Lane | May 1988 | |
4778774 | Blossfeld | Oct 1988 | |
4786610 | Blossfeld | Nov 1988 | |
4829015 | Schaber et al. | May 1989 | |
4871685 | Taka et al. | Oct 1989 | |
4882297 | Blossfeld | Nov 1989 | |
4883772 | Cleeves et al. | Nov 1989 |
Entry |
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Bondur et al., "Selective Reactive Ion Etching of Silicon Compounds", IBM Tech. Disc. Bul., vol. 21, No. 10, Mar. 1979, pp. 4015. |