Carbon thin line probe

Abstract

A carbon thin line probe having a carbon thin line selectively formed at a projection-like terminal end portion thereof by means of an irradiation of high-energy beam, the carbon thin line internally containing a metal. Thereby achieved is a carbon thin line probe suitable for example for the probe of SPM cantilever, which has a high aspect ratio and high durability and reliability, capability of batch processing based on a simple manufacturing method, and to which magnetic characteristic can be imparted.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A to 1D are manufacturing process drawings for explaining a manufacturing method of prior-art CNT having a metal ultrafine particle fixed at a terminal end portion thereof.

FIG. 2 illustrates a method for adhering and fixing to a probe terminal end portion of AFM cantilever the prior-art CNT having metal ultrafine particle fixed at a terminal portion thereof as shown in FIGS. 1A to 1D.

FIG. 3 is a schematic sectional view showing construction of SPM cantilever having the carbon thin line probe according to an embodiment of the invention.

FIGS. 4A to 4C are manufacturing process drawings for explaining a manufacturing method of SPM cantilever shown in FIG. 3.

FIG. 5 shows the manner of growing/forming CNF thin line with using a ultra-high vacuum apparatus in the manufacturing process shown in FIGS. 4A to 4C.

FIGS. 6A to 6E each are a schematic enlarged sectional view of carbon thin line probe according to the carbon thin line probe shown in FIG. 3 and modifications thereof.

Claims

1. A carbon thin line probe comprising a carbon thin line selectively formed at a projection-like terminal end portion thereof by means of an irradiation of high-energy beam, wherein said carbon thin line internally contains a metal.

2. The carbon thin line probe according to claim 1, wherein said internally contained metal is formed through the entire portion of said carbon thin line.

3. The carbon thin line probe according to claim 1, wherein said internally contained metal is formed at a terminal end portion or proximal end portion of said carbon thin line.

4. The carbon thin line probe according to claim 2, wherein said internally contained metal is formed so as to uniformly fill and be integral with an interior of said carbon thin line.

5. The carbon thin line probe according to claim 3, wherein said internally contained metal is formed so as to uniformly fill and be integral with an interior of said carbon thin line.

6. The carbon thin line probe according to claim 2, wherein said internally contained metal is formed so as to be scattered through an interior of said carbon thin line.

7. The carbon thin line probe according to claim 3, wherein said internally contained metal is formed so as to be scattered through an interior of said carbon thin line.

8. The carbon thin line probe according to claim 1, wherein said internally contained metal comprises a metal having a magnetic characteristic or its alloy.

9. The carbon thin line probe according to claim 1, wherein at least a portion of said carbon thin line is formed into a carbon nanotube (CNT).

10. A scanning probe microscope comprising a cantilever probe using the carbon thin line probe according to any one of claims 1 to 9.

11. A micro-injector comprising a probe using the carbon thin line probe according to any one of claims 1 to 9.