Implementations described herein generally relate to chip packaging, and in particular, solder structures for improving solder pitch.
An increasing demand for electronic equipment that is smaller, lighter, and more compact has resulted in a concomitant demand for semiconductor packages that have smaller outlines and mounting areas or “footprints.” One response to this demand has been the development of the “flip-chip” method of attachment and connection of semiconductor chips or “dice” to substrates (e.g., PCBs or lead-frames). Flip-chip mounting involves the formation of bumped contacts (e.g., solder balls) on the active surface of the die, then inverting or “flipping” the die upside down and reflowing the bumped contacts (i.e., heating the bumped contacts to the melting point) to form solder joints fusing the bumped contacts to the corresponding pads on the substrate.
In flip-chip mounting and connection methods, reliability of solder connections is becoming an increasing concern of the electronics industry. One challenge is that the solder resist surrounding solder joints is susceptible to cracking, which during reflow of the solder joint, may permit the wicking of solder away from the solder joint, which may lead to cracking and poor performance. Additionally, as the number of solder connections on a chip package continues to increase, the pitch dimension between the solder connections chip packages continues to shrink.
Therefore, there is a need for improved solder pitch for an integrated circuit device.
An integrated circuit (“IC”) die includes a body having a dielectric layer and a plurality of contact pads formed on the dielectric layer. The IC die also includes a passivation layer disposed on the dielectric layer. The passivation layer has a plurality of openings exposing the plurality of contact pads. A plurality of inner under-bump-metallurgy (“UBM”) structures are disposed on a first portion of the plurality of openings, and a plurality of outer UBM structures are disposed on a second portion of the plurality of openings. The plurality of inner UBM structures have uniform spacing in a direction parallel to an edge of the body. The plurality of outer UBM structures are positioned around the plurality of inner UBM structures, and each of the plurality of outer UBM structures having a longitudinal axis directed toward a central area of the IC die.
In another embodiment, a chip package assembly includes an IC die and package substrate. The IC die has a plurality of inner bump structures uniformly spaced in a direction parallel to an edge of the body. The IC die also has a plurality of outer bump structures disposed around the plurality of inner bump structures. Each of the plurality of outer UBM structures having a longitudinal axis directed toward a central area of the IC die. The package substrate has a plurality of solder pads. Each of the plurality of solder pads has a pad surface exposed through a layer of solder resist and is arranged to connect to a respective one of the plurality of inner bump structures or the plurality of outer bump structures via solder connections.
So that the manner in which the above recited features of the present invention can be understood in detail, a more particular description of the invention, briefly summarized above, may be had by reference to embodiments, some of which are illustrated in the appended drawings. It is to be noted, however, that the appended drawings illustrate only typical embodiments of this invention and are therefore not to be considered limiting of its scope, for the invention may admit to other equally effective embodiments.
To facilitate understanding, identical reference numerals have been used, where possible, to designate identical elements that are common to the figures. It is contemplated that elements of one embodiment may be beneficially incorporated in other embodiments.
Embodiments of the disclosure provide an IC die having improved solder pitch. In one embodiment, an integrated circuit (IC) die includes a body having a dielectric layer and a plurality of contact pads formed on the dielectric layer. The IC die also includes a passivation layer disposed on the dielectric layer. The passivation layer has a plurality of openings exposing the plurality of contact pads. A plurality of inner under-bump-metallurgy (“UBM”) structures are disposed on a first group of the plurality of openings, and a plurality of outer UBM structures are disposed on a second group of the plurality of openings. The plurality of inner UBM structures have uniform spacing in a direction parallel to an edge of the body. The plurality of outer UBM structures are positioned around the plurality of inner UBM structures, and each of the plurality of outer UBM structures has a longitudinal axis directed toward a central area of the IC die. This improved arrangement of the orientation of the outer UBM structures enhances the reliability of solder connections while the different orientation of the inner UBM structures enables tight pitch of the inner UBM structures without detrimentally increasing the potential for bridging between adjacent solder connections.
Turning now to
The chip package assembly 100 includes at least one integrated circuit (IC) die 102 mounted to a package substrate 104. Although one IC die 102 is shown mounted to the package substrate 104 in
The IC die 102 may be, but are not limited to, programmable logic devices, such as field programmable gate arrays (FPGA), memory devices, such as high band-width memory (HBM), optical devices, processors, application-specific integrated circuit (ASIC), or other solid state, logic or memory structures. The IC die 102 may optionally include optical devices such as photo-detectors, lasers, optical sources, and the like.
The IC die 102 has a body 107 that includes a top surface 136, a bottom surface 134 and sides 132. Functional circuitry 110 resides in the body 107 of the IC die 102 and is connected to inputs and outputs residing on the bottom surface 134 of the IC die 102 by routing 112.
The package substrate 104 has a body that includes a top surface 146, a bottom surface 144, and sides 142. Routing 114 formed through the body of the package substrate 104 is connected to inputs and outputs residing on the top and bottom surfaces 146, 144 of the package substrate 104.
The solder connections 116 mechanically and electrically secure the IC die 102 to the package substrate 104. For example, the solder connections 116 mechanically couple the top surface 146 of the package substrate 104 to the bottom surface 134 of the IC die 102, while also electrically connecting the routings 112 formed in the IC die 102 with the routings 114 formed in the package substrate 104. The solder connections 116 include inner solder connections 116i that are located in an inner region of the IC die 102 and outer solder connections 116e that are located around the inner solder connections 116i.
The chip package assembly 100 may be mounted to a printed circuit board (PCB) 106 to form an electronic device 120. In this manner, the routing 114 of the package substrate 104 is coupled to the routing 122 of the PCB 106 via solder balls 118, or other suitable connection. In the example depicted in
A passivation layer 204 is disposed on the bottom surface 134 of the IC die 102. The passivation layer 204 includes an opening 212 through which an exposed surface 210 of the contact pad 202 is revealed. In at least one embodiment, the passivation layer 204 is formed of a non-organic material, such as un-doped silicate glass (USG), SIN, SiON, silicon oxide (SiO), or combinations thereof. The passivation layer 204 may be formed by any suitable method, such as chemical vapor deposition (CVD), physical vapor deposition (PVD), or the like. In other embodiments, the passivation layer 204 may be formed of a polymer layer, such as an epoxy, polyimide, benzocyclobutene (BCB), polybenzoxazole (PBO), or the like, although other relatively soft, often organic, dielectric materials can also be used. One of ordinary skill in the art will appreciate that a single layer of contact pads and a passivation layer are shown for illustrative purposes only. As such, other embodiments may include any number of contact pads and/or passivation layers.
A bump structure 217 is formed on the passivation layer 204 and electrically connected to the contact pad 202 through the opening 212. In some embodiments, the bump structure 217 includes an under-bump-metallurgy (UBM) structure 219 and a conductive pillar 208. The UBM structure 219 is formed over the surfaces of the passivation layer 204 and the exposed surface 210 of the contact pad 202. In some embodiments, the UBM structure 219 includes a diffusion barrier layer or a glue layer, which may comprise titanium (Ti), tantalum (Ta), titanium nitride (TiN), tantalum nitride (TaN), or the like and be formed by PVD or sputtering. The UBM structure 219 may further include a seed layer formed on the diffusion barrier layer by PVD or sputtering. The seed layer may be formed of copper (Cu) or copper alloys including Al, chromium (Cr), nickel (Ni), tin (Sn), gold (Ag), or combinations thereof. In at least one embodiment, the UBM structure 219 includes a Ti layer and a Cu seed layer.
The conductive pillar 208 is disposed on the UBM structure 219 and makes electrical connection with the exposed surface 210 of the contact pad 202. The pillar 208 is generally formed from a conductive metal, such as copper or other suitable metal. The pillar 208 and/or the UBM structure 219 may extend through the opening 212 and beyond the passivation layer 204 forming the bottom surface 134 of the IC die 102.
In one embodiment, the conductive pillar 208 includes a copper layer. The copper layer comprises pure elemental copper, copper containing unavoidable impurities, and/or copper alloys containing minor amounts of elements such as Ta, indium (In), SN, zinc (Zn), manganese (Mn), Cr, Ti, germanium (Ge), strontium (Sr), platinum (Pt), magnesium (Mg), aluminum (Al) or zirconium (Zr). The conductive pillar 208 may be formed by sputtering, printing, electroplating, electro-less plating, electrochemical deposition (ECD), molecular beam epitaxy (MBE), atomic layer deposition (ALD), and/or commonly used CVD methods. In one embodiment, the copper layer is formed by electro-chemical plating (ECP).
In some embodiments, the bump structure 217 has an elongated shape. Exemplary shapes of the elongated bump structure include a rectangle, a rectangle with at least one curved or rounded side, an oval, an ellipse or any other suitable elongated shape. In some embodiments, the bump structures 217 have a circular shape or a combination of circular and elongated shapes. In some embodiments, the dimension and shape of the conductive pillar 208 are substantially the same as those of the UBM structure 219. In some embodiments, the dimension and shape of the conductive pillar 208 are not exactly the same as those of the UBM structure 219. For example, the UBM structure 219 may be smaller than the dimension of the conductive pillar 208.
An optional conductive cap layer is formed on the conductive pillar 208. The conductive cap layer can be a metallization layer that may include nickel (Ni), Sb, tin-lead (SnPb), Au, Ag, palladium (Pd), In, Pt, NiPdAu, NiAu, or other similar materials or alloys. The conductive cap layer may be a multi-layered structure or a single-layered structure.
In some embodiments, the solder connections 116 securing the IC die 102 to the package substrate 104 are arranged to enhance the pitch of the solder connections 116.
In
In some embodiments, the inner UBM structures 219i are uniformly spaced on the IC die 102. For example, the inner UBM structures 219i may have uniform spacing (i.e., pitch) in a direction parallel to an edge of the IC die 102. In
In some embodiments, the inner UBM structures 219i having an elongated shape are positioned so their longitudinal axes 233 share a common direction. In the example shown in
Accordingly, it is believed the combined arrangement of the outer UBM structures 219e longitudinally aligned with a central area 211 of the IC die 102 and the inner UBM structures 219i uniformly spaced in a direction parallel to an edge of the IC die 102 enhances the pitch of the UBM structures 219. In this respect, the combined arrangement of the outer UBM structures 219e and the inner UBM structures 219i advantageously reduces the potential for bridging between adjacent solder connections 116. Accordingly, a more robust and reliable electrical connection is realized.
Referring back to
The built-up layer 228 extends from the core 230 and terminates to define the top surface of the package substrate 104. The top surface is generally defined by a layer of solder resist 222. The solder resist 222 includes an opening 216 through which an exposed surface 218 of the solder pad 220 is revealed. A solder ball 214 is disposed on and makes electrical connection with the exposed surface 218. The solder ball 214 extends through the opening 216 and beyond the solder resist 222. The solder ball 214, after mounting of the IC die 102 to the package substrate 104 and reflow, makes mechanical and electrical connection between the solder pad 220 and pillar 208, thus connecting the functional circuitry 110 of the IC die 102 with the electrical routing 114 of the package substrate 104.
The built-up layer 228 also includes the routing 114 of the package substrate 104. In the package substrate 104, the routing 114 of the built-up layer 228 is fabricated using conductive vias 224 and conductive lines 226. One of the conductive vias or lines 224, 226 terminate at the solder pad 220. One of the conductive vias or lines 224, 226 also terminate at feed through 236 formed through the core 230. The core 230 provides the structural rigidity to the package substrate 104 and may be fabricated from silicon, ceramic, glass reinforced plastic or other suitable material. Additional conductive vias or lines may connect the feed through 236 to the contact pad 242, which is utilized to connect with the solder ball 118 (shown in phantom in
In addition to the claim recited below, additional examples of the disclosure may be recited as follows.
An integrated circuit (“IC”) die includes a body having a dielectric layer and a plurality of contact pads formed on the dielectric layer. The IC die also includes a passivation layer disposed on the dielectric layer. The passivation layer has a plurality of openings exposing the plurality of contact pads. A plurality of inner under-bump-metallurgy (“UBM”) structures are disposed on a first portion of the plurality of openings, and a plurality of outer UBM structures are disposed on a second portion of the plurality of openings. The plurality of inner UBM structures have uniform spacing in a direction parallel to an edge of the body. The plurality of outer UBM structures are positioned around the plurality of inner UBM structures, and each of the plurality of outer UBM structures having a longitudinal axis directed toward a central area of the IC die.
In some embodiments, the plurality of inner UBM structures includes at least two inner UBM structures having an elongated shape and a longitudinal axis aligned in the direction parallel to the edge of the body.
In some embodiments, the longitudinal axes of the at least two inner UBM structures and the edge of the body are aligned in a direction parallel to a horizontal axis bifurcating the body along a Y-axis.
In some embodiments, the longitudinal axes of the at least two inner UBM structures and the edge of the body are aligned in a direction parallel to a vertical axis bifurcating the body along an X-axis.
In some embodiments, the plurality of inner UBM structures includes at least two inner UBM structures having a circular shape.
In another embodiment, a chip package assembly includes an IC die and package substrate. The IC die has a plurality of inner bump structures uniformly spaced in a direction parallel to an edge of the body. The IC die also has a plurality of outer bump structures disposed around the plurality of inner bump structures. Each of the plurality of outer UBM structures having a longitudinal axis directed toward a central area of the IC die. The package substrate has a plurality of solder pads. Each of the plurality of solder pads has a pad surface exposed through a layer of solder resist and is arranged to connect to a respective one of the plurality of inner bump structures or the plurality of outer bump structures via solder connections.
While the foregoing is directed to embodiments of the present invention, other and further embodiments of the invention may be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims that follow.