Circuits and methods for preventing over-programming of ReRAM-based memory cells

Information

  • Patent Grant
  • 10147485
  • Patent Number
    10,147,485
  • Date Filed
    Monday, September 25, 2017
    7 years ago
  • Date Issued
    Tuesday, December 4, 2018
    5 years ago
Abstract
A method for preventing over-programming of resistive random access (ReRAM) based memory cells in a ReRAM memory array includes applying a programming voltage in a programming circuit path including a ReRAM memory cell to be programmed, sensing programming current drawn by the ReRAM cell while the programming voltage is applied across the memory cell, and decreasing the programming current as a function of a rise in programming current.
Description
BACKGROUND

The present invention relates to semiconductor memory cells and arrays. More particularly, the present invention relates to resistive random-access memory (ReRAM) cells and arrays and to circuits and methods for preventing over-programming of ReRAM memory cells and arrays of ReRAM memory cells.


ReRAM cell programming comes with the risk of over-programming ReRAM cells to an on resistance (Ron) level, which is too low to adequately re-erase them. Programming of ReRAM cells usually starts from an erased state where the ReRAM device has a high off resistance (Roff) in about the 1-10 GOhm range and should decrease the ReRAM resistance to a lower resistance Ron state, which can ideally be in about the 100 KOhm range. The programming speed depends on the power applied to the ReRAM device (the product of voltage across and current flowing through the ReRAM device).



FIG. 1A shows a four-column portion of a row of a typical ReRAM array (shown within dashed lines 10) along with typical segment circuits used to erase and program a bit-line with push-pull ReRAM cells each having a top (“Top”) and a bottom (“Bot”) ReRAM device. The segment circuits include an n-segment (shown within dashed lines 12) and a p-segment (shown within dashed lines 14). While FIG. 1 shows the segment circuits in use with a three-transistor ReRAM cell, persons of ordinary skill in the art will appreciate that the scheme of FIG. 1 is applicable to other push-pull ReRAM cell arrangements.


The row of the array is disposed between two lines VB and GB, designated by reference numerals 16 and 18, respectively, which are sometimes referred to as complementary bit lines. A bit line BL, one for each row of the array indicated by reference numeral 20, runs in the row direction of the array. The VB and GB lines 16 and 18 n-segment circuit 12, the p-segment circuit 14, and the bit line BL 20 are all formed from interconnect metal lines on the integrated circuit containing the ReRAM array 10 and as such have a characteristic resistance associated with them. The resistance from the n-segment end of the VB line 14 through the array 10 is represented by resistor RVBN at reference numeral 22. The resistance from the n-segment end of the bitline BL line 20 through the array 10 is represented by resistor RBLN at reference numeral 24. The resistance from the n-segment end of the GB line 18 through the array 10 is represented by resistor RGBN at reference numeral 26. The resistance from the p-segment end of the VB line 14 through the array 10 is represented by resistor RVBP at reference numeral 28. The resistance from the p-segment end of the bitline BL line 20 through the array 10 is represented by resistor RBLP at reference numeral 30. The resistance from the p-segment end of the GB line 18 through the array 10 is represented by resistor RGBP at reference numeral 32.


The VB, GB and BL bit-lines 16, 18, and 20 are driven to the potential at VSS line 34 (typically 0V) by pull-down n-channel MOS devices at the n-segment side 12 of the array. Thus the VB line 16 is pulled down to the potential at the VSS line 34 by transistors 38. The GB line 18 is pulled down to the potential at the VSS line 34 by transistors 40. The BL line 20 is pulled down to the potential at the VSS line 34 by transistors 42.


The VB, GB and BL bit-lines 16, 18, and 20 are driven to the potential at VPP line 36 by pull-up p-channel MOS devices at the p-segment side 14 of the array 10, where VPP is the bit-line programming-voltage (e.g. 1.8V). Thus the VB line 16 is pulled up to the potential at the VPP line 36 by transistors 44. The GB line 18 is pulled up to the potential at the VPP line 36 by transistors 46. The BL line 20 is pulled up to the potential at the VPP line 36 by transistors 48.


Depending on the operation, erasing the ReRAM device labeled TOP or BOT or programming the TOP or BOT ReRAM device, the VB, GB and BL bit-lines 16, 18, and 20 are driven either to VSS 34 or VPP 36 from one or the other of the n-channel and p-channel sides 12 and 14. Persons of ordinary skill in the art will appreciate that FIG. 1A shows an example with four three-transistor push-pull ReRAM cells, but these lines are much longer, and can be thousands of cells wide.



FIG. 1A shows all of the n-channel and p-channel pulldown and pull-up devices as two serial-connected devices. This is necessary in embodiments where these devices are the same type as the lower voltage transistors used inside the push-pull-cells, in order to avoid BVDSS problems at 1.8V programming and erase potentials. Persons of ordinary skill in the art will appreciate that where high-voltage transistors that can withstand the VPP potential are used for transistors 38, 40, 42, 44, 46, and 48, only single transistors may be employed.


Pulldown n-channel transistors 38 are controlled by VBS0=1 at their gates if VB 16 needs to be pulled down to VSS. Pulldown n-channel transistors 40 are controlled by GBS0=1 at their gates if GB 18 needs to be pulled down to VSS. Pulldown n-channel transistors 42 are controlled by BLS0=1 at their gates if BL 20 needs to be pulled down to VSS.


Similarly, pull-up p-channel transistors 44 are controlled by VBS1_B=0 at their gates if VB 16 needs to be pulled up to VPP. Pull-up p-channel transistors 46 are controlled by GBS1_B=0 at their gates if GB 18 needs to be pulled up to VPP. Pull-up p-channel transistors 48 are controlled by BLS1_B=0 at their gates if BL 20 needs to be pulled up to VPP.


As may be seen from an examination of FIG. 1A, array 10 also includes a word line (WL) 50 for each column and n-word lines (WLN) 52 and p-word lines (WLP) 54 that are shared by adjacent columns in the particular arrangement shown in FIG. 1A. The WL, WLP, and WLN word lines 50, 52, and 54 are used in programming the individual push-pull ReRAM memory cells (one of which is shown within dashed lines 56 in FIG. 1) in the array 10.



FIG. 1B is a graph showing simulated voltages and currents encountered during programming and erasing ReRAM devices in the ReRAM cells depicted in FIG. 1A. The simulation-waveforms of FIG. 1B show voltages (top waveforms), currents (center-waveforms) and power (bottom waveforms) as a function of ReRAM resistance on the X-axis on logarithmic scale in units of KOhms ranging from 100 Ohm at the left side to 1 MOhm at the right side. The bundles of 8 waveforms reflect 8 different segment length cases from 3 to 384 clusters in width, each cluster including 96 columns which range from 3*96=288 columns to 384*96=36864 columns in width. The number of columns matches the number of cells, connected to the same bit-lines. The individual waveforms differ because of the amount of metal-resistance on bit-lines, which is directly related to segment width.


Reading from right to left, programming starts slowly after applying proper bit-line voltages and selecting proper word-lines to apply that voltage across the selected ReRAM devices. If programming starts from an erased state where the ReRAM device has a high Roff, the voltage across ReRAM (top curves) is full-rail VPP, the initial current (middle curves) is very low, and the consumed power (bottom curves) is low due to the low current. Roughly in the 1 MOhm to 100 KOhm range of this example, the increasing current causes metal-line and select-device-IR-drop to increase, and the voltage across the ReRAM device drops in tandem with increasing currents in the >10 uA range. As can be seen from FIG. 1B, power-peaks are visible in the 5-50 KOhm range. Where the power-peak appears, programming (the change of Ron) occurs very rapidly and is difficult to stop before Ron saturates after the power-peak, perhaps in the 1 KOhm range. The circuit shown in FIG. 1A can cause ReRAM devices to be programmed to an unacceptably low value of Ron.


An undesirable consequence of programming ReRAM cells to such low values of Ron is that it is difficult to later re-erase them if they need to be re-programmed. At an Ron range in the region of about 1 KOhm, it is difficult to get enough voltage to the ReRAM device at high enough currents to start the erase process.


Accordingly, a challenge is how to limit the ReRAM programming to a much higher Ron level, perhaps in the 100 KOhm range, which allows ReRAM cells to be re-erased later, if needed.


SUMMARY

A method for preventing over-programming of resistive random access (ReRAM) based memory cells in a ReRAM memory array includes applying a programming voltage in a programming circuit path including a ReRAM memory cell to be programmed, sensing programming current drawn by the ReRAM cell while the programming voltage is applied across the memory cell, and decreasing the programming current as a function of a rise in programming current.


According to one aspect of the present invention negative feedback-passgate-devices are inserted in between pull-up and pulldown-devices providing programming voltage and the bit-lines, in parallel with erase-mode-bypass-devices. In erase mode the erase mode bypass devices are activated. In programming modes the erase mode bypass devices are turned off and the feedback passgate devices limit programming current as a function of an IR drop across one or more bit lines carrying programming current to at least one ReRAM cell being programmed.


According to another aspect of the present invention negative feedback-passgate-devices are inserted in between the pull-up and pulldown-devices and the bit-lines, in parallel with erase-mode bypass devices. In addition, a number of serially-connected MOS transistor voltage threshold (Vt) drops are inserted in the feedback-paths. The total number of Vt drops plus one should be smaller than VPP, so that initially the feedback-passgates are on, when the current is initially still very low. The feedback-pass-gate resistance is increased, meaning that the IR-drop shows up earlier, but more importantly it takes a much smaller IR-drop to shut the feedback-path-gates off below the pass-gate Vt to stop programming while the ReRAM device being programmed remains at a higher Ron.


According to yet another aspect of the present invention, instead of inserting Vt drops in the feedback-path, a buffer can be inserted in the feedback path. According to this aspect of the present invention, the buffer output flips at a preselected buffer-trip-point and the programming operation stops immediately as the feedback-path-gates are shut off entirely to Vgs=0V. The buffer trip point can be set by proper buffer-device-sizing.





BRIEF DESCRIPTION OF THE DRAWINGS

The invention will be explained in more detail in the following with reference to embodiments and to the drawing in which are shown:



FIG. 1A is a diagram showing a typical prior-art push-pull memory cell ReRAM array along with typical segment circuits used to erase and program a bit-line;



FIG. 1B is a graph showing the voltages and currents encountered during programming and erasing ReRAM devices in the ReRAM cells depicted in FIG. 1A;



FIG. 2A is a diagram showing a push-pull memory cell ReRAM array along with segment circuits used to erase and program a bit-line in accordance with an aspect of the present invention:



FIG. 2B is a graph showing the voltages and currents encountered during programming and erasing ReRAM devices in the ReRAM cells depicted in FIG. 2A;



FIG. 3A is a diagram showing a push-pull memory cell ReRAM array along with segment circuits used to erase and program a bit-line in accordance with an aspect of the present invention;



FIG. 3B is a graph showing the voltages and currents encountered during programming and erasing ReRAM devices in the ReRAM cells depicted in FIG. 3A; and



FIG. 4 a diagram showing a push-pull memory cell ReRAM array along with segment circuits used to erase and program a bit-line in accordance with an aspect of the present invention.





DETAILED DESCRIPTION

Persons of ordinary skill in the art will realize that the following description of the present invention is illustrative only and not in any way limiting. Other embodiments of the invention will readily suggest themselves to such skilled persons.


Referring now to FIG. 2A diagram shows a typical push-pull memory cell ReRAM array 10 along with n-segment an p-segment circuits 12 and 14 used to erase and program the push-pull ReRAM cells including feedback devices in accordance with the present invention.


The first invention is to insert feedback-pass-gate-devices in between the pull-up and pulldown devices and the VB, GB, and BL bit-lines 16, 18, and 20, in parallel with erase-mode-bypass devices. Thus, on the n-segment side 12, erase mode bypass n-channel transistors 58 connected in series with n-channel transistors 38 to VB line 16 are shunted by a feedback-pass-gate formed from n-channel transistors 60. Erase mode bypass n-channel transistors 62 connected in series with n-channel transistors 42 connected to BL line 20 are shunted by a feedback-pass-gate formed from n-channel transistors 64.


On the p-segment side 14, erase mode bypass p-channel transistors 66 connected in series with p-channel transistors 48 connected to BL line 20 are shunted by a feedback-pass-gate formed from p-channel transistors 68. Erase mode bypass p-channel transistors 70 connected in series with p-channel transistors 46 to GB line 18 are shunted by a feedback-pass-gate formed from p-channel transistors 72.


In erase mode, ER=1 turns on the n-channel erase mode bypass devices 58 and 62 in n-segment 12 and ER_B=0 turns on the p-channel erase mode bypass devices 66 and 70 in p-segment 14. In programming modes, ER=0 turns off the n-channel erase mode bypass devices 58 and 62 in n-segment 12 and ER_B=1 turns off the p-channel erase mode bypass devices 66 and 70 in p-segment 14.


The feedback-passgates are controlled by other bit-lines. The feedback-pass-gate formed from n-channel transistors 60 connected to VB 16 in n-segment 12 is controlled by BL 20 to which their gates are connected. The feedback-pass-gate formed from n-channel transistors 64 connected to BL 20 in n-segment 12 is controlled by GB 18 to which their gates are connected.


The feedback-pass-gate formed from p-channel transistors 68 connected to BL 20 in p-segment 14 is controlled by VB 16 to which their gates are connected. The feedback-pass-gate formed from p-channel transistors 72 connected to GB 18 in p-segment 14 is controlled by BL 20 to which their gates are connected.


When the Top (Top) ReRAM device in a cell is being erased. BL 20 is driven to VSS and VB 16 is driven to VPP. The erase mode bypass devices are all turned on. GB 18 is also driven to VSS, but this is not the high-current path. Both high-current-paths are through the n-channel erase mode bypass devices 62, pull-down devices 42 and pull-up devices 44.


When the Bottom (Bot) ReRAM device in a cell is being erased, GB 18 is driven to VSS and BL 20 is driven to VPP. The erase mode bypass devices are all turned on. VB 16 is also driven to VPP, but this is not the high-current path. Both high-current-paths are through the p-channel erase mode bypass devices 66, pull-down devices 40 and pull-up devices 48.


When the Top (Top) ReRAM device in a cell is being programmed, VB 16 is driven to VSS and BL 20 is driven to VPP. The erase mode bypass devices are all turned off. GB 18 is also driven to VSS, but this is not the high-current path. Both high-current paths are through the n-channel feedback-passgates 60 and the p-channel feedback-passgates 68, pull-down devices 38 and pull-up devices 48. Initially, when programming starts from high Roff, there is no high current flowing and the full voltage is seen by the cells to be programmed. As the cells program and their resistance begins to fall, the currents become high, and the metal-IR-drop increases, which shows up at the two high-current bit-lines on the opposite side from the active pull-up or pull-down devices, whereby there is more or less IR-drop at one or the other side, depending on the cell location within the row, since the metal is longer or shorter on one side or the other. For example, if the selected cell is at the far left near n-segment 12, most metal-IR-drop occurs along BL 20 through its resistance component RBLP 30, and the voltage is lower at the n-segment 12 side, which controls the gates of the n-channel pass-gate transistors 60 connected between VSS and VB 16. When this JR-drop occurs, the voltage at the gates of n-channel transistors 60 decreases because of the IR drop in resistor RBLP 30 (the length of BL 20). The decreased gate drive increases the resistance of n-channel passgate transistors 60.


While in this example with the cell at far left, the metal resistance RVBN is negligible and doesn't contribute much IR-drop, the increasing resistance of the feedback-pass-gate 60 causes an IR drop to VB 16 that decreases the voltage at the gates of p-channel passgate transistors 68. The decreased gate drive increases the resistance of p-channel passgate transistors 68. As the IR drop increases with increasing programming current, the negative feedbacks accelerate the IR-drop at the ReRAM cell being programmed from both sides, which eventually stops the programming operation.


Persons of ordinary skills in the art will realize that during programming of a cell located at the far right, the feedback mechanism will be dominated by RVBN over feedback-pass-gate 68 to feedback-pass-gate 60, while RBLP is negligible. Such skilled persons will also realize that during programming of a cell located somewhere near the center, both RBLP and RVBN will trigger the feedback more equally and simultaneously over both feedback-passgates 60 and 68.


When the Bottom (Bot) ReRAM device in a cell is being programmed, BL 20 is driven to VSS and GB 18 is driven to VPP. VB 16 is also driven to VPP, but this is not the high-current path. Both high-current paths are through the n-channel feedback-passgates 64 and the p-channel feedback-passgates 72, pull-down-devices 42 and pull-up devices 46. The feedback mechanism is similar to the case where the Top ReRAM device is being programmed, in that the IR drop caused by the resistance of the GB 16 and BL 20 lines causes the gate voltage of the n-channel feedback-passgates 64 and the p-channel feedback-passgates 72 to drop, increasing their resistance and limiting the current passing through them.


Comparing the waveforms of the graphs of FIG. 2B with the graphs of FIG. 1B, it can be seen that the power-peak both shifts towards the right and sharpens at the left. This results in the termination of the programming operation at a ReRAM device value of Ron that is higher than would be the case if the present invention was not employed.


Referring now to FIG. 3A, a diagram shows a push-pull memory cell ReRAM array along with segment circuits used to erase and program a bit-line in accordance with an aspect of the present invention in which a number of Vt voltage dropping devices are placed in the gates circuits of the n-channel passgate transistors 60 and 64 and the p-channel passgate transistors 68 and 72. Each Vt voltage dropping device 74 in the n-segment 12 includes a diode-connected n-channel transistor. Each Vt voltage dropping device 76 in the n-segment 14 includes a diode-connected p-channel transistor. As will be appreciated by persons of ordinary skill in the art, the number of such devices 74 and 76 to be used in any embodiment of the invention depends on the process technology as well as the VPP voltage level used.


The total number of VT-drops plus one should be smaller than VPP, so that initially the feedback-passgates are ON, when the current is initially still very low. The feedback-pass-gate resistance is increased, causing the IR-drop to show up earlier, but more importantly it takes a much smaller IR-drop to shut the feedback-path-gates off below the pass-gate-Vt to stop programming at a higher Ron.



FIG. 3B is a graph showing the voltages and currents encountered during programming and erasing ReRAM devices in the ReRAM cells depicted in FIG. 3A. As a result of using the circuit shown in FIG. 3A, the power-peaks shift further right and sharpen at the left side of the waveform further, even though in the simulation resulting in the graphs of FIG. 3B the number of Vt-drops (three) was not maximized.


In accordance with yet another aspect of the present invention, instead of inserting Vt-drops in the feedback-path, alternatively buffers can be inserted in the feedback path. This aspect of the invention is illustrated in FIG. 4. According to the aspect of the invention shown in FIG. 4, the gates of the n-channel passgate transistors 60 and 64 and the p-channel passgate transistors 68 and 72 are driven through buffers 78. The buffers 78 are configured so that the buffer-output flips at a selected buffer-trip-point, which can be determined by proper buffer-device-sizing and the programming operation stops immediately as the feedback-path-gates are shut off entirely to Vgs=0V.


As will be appreciated by persons of ordinary skill in the art, the aspects of the invention depicted in FIGS. 2A, 3A and 4 can be further combined. Two serial feedback-passgates can be provided, a first one having Vt-drops to accelerate the IR-drops as much as possible, combined with a second one using buffers. This provides the advantage of employing buffer-feedback to shut down the pass-gate entirely.


While embodiments and applications of this invention have been shown and described, it would be apparent to those skilled in the art that many more modifications than mentioned above are possible without departing from the inventive concepts herein. The invention, therefore, is not to be restricted except in the spirit of the appended claims.

Claims
  • 1. A method for preventing over-programming of resistive random access (ReRAM) memory cells in a ReRAM memory array comprising: applying a programming voltage in a programming circuit path including a ReRAM memory cell to be programmed;sensing programming current drawn by the ReRAM memory cell while the programming voltage is applied across the ReRAM memory cell by sensing a voltage drop in a bit line in the memory array, the bit line being in the programming circuit path; andincreasing a resistance of a circuit element in the programming path as a function of the rise in programming current by reducing a gate drive voltage to at least one MOS transistor in the programming path by an amount that is a function of the voltage drop.
  • 2. The method of claim 1 further comprising reducing the gate drive voltage to the at least one MOS transistor by a voltage equal to an integral number of MOS transistor voltage threshold drops.
  • 3. The method of claim 2 wherein a total number of MOS transistor voltage threshold drops plus one is less than the programming voltage.
  • 4. The method of claim 1 further comprising providing in a circuit providing the gate drive a buffer having a buffer-trip-point selected to terminate gate drive to the at least one MOS transistor in the programming path at a gate drive voltage that is a function of a predetermined level of programming current.
  • 5. A circuit for preventing over-programming of resistive random access (ReRAM) memory cells in a ReRAM memory array comprising: a programming circuit path for applying a programming voltage to a ReRAM memory cell to be programmed;a bit line in the memory array through which programming current flows, the bit line having a bit line resistance, the bit line sensing programming current drawn by the ReRAM cell while the programming voltage is applied across the memory cell; andat least one MOS transistor disposed in the programming path, the at least one MOS transistor having a gate coupled to the bit line at a location to cause a gate voltage applied to the at least one MOS transistor that decreases as a function of increased current flow through the bit line.
  • 6. The circuit of claim 5 further comprising a plurality of diode-connected MOS transistors coupled in series to the gate of the at least one MOS transistor.
  • 7. The circuit of claim 6 where each of the diode-connected MOS transistors has a MOS transistor voltage threshold drop and a total voltage drop across the plurality of diode-connected MOS transistors voltage drop plus one MOS transistor voltage threshold drop is less than the programming voltage.
  • 8. The circuit of claim 5 further comprising a buffer coupled in series to the gate of the at least one MOS transistor, the buffer having a buffer-trip-point selected to terminate gate drive to the at least one MOS transistor in the programming path at a gate drive voltage that is a function of a predetermined level of programming current.
US Referenced Citations (160)
Number Name Date Kind
4758745 Elgamal et al. Jul 1988 A
4873459 Gamal et al. Oct 1989 A
4904338 Kozicki Feb 1990 A
5229963 Ohtsuka et al. Jul 1993 A
5254866 Ogoh Oct 1993 A
5314772 Kozicki et al. May 1994 A
5463583 Takashina Oct 1995 A
5500532 Kozicki Mar 1996 A
5537056 McCollum Jul 1996 A
5542690 Kozicki Aug 1996 A
5557137 Cohen Sep 1996 A
5576568 Kowshik Nov 1996 A
5587603 Kowshik Dec 1996 A
5625211 Kowshik Apr 1997 A
5682389 Nizaka Oct 1997 A
5729162 Rouy Mar 1998 A
5761115 Kozicki et al. Jun 1998 A
5770885 McCollum Jun 1998 A
5801415 Lee et al. Sep 1998 A
5812452 Hoang Sep 1998 A
5896312 Kozicki et al. Apr 1999 A
5914893 Kozicki et al. Jun 1999 A
5986322 McCollum et al. Nov 1999 A
6063663 Caprara et al. May 2000 A
6084796 Kozicki et al. Jul 2000 A
6100560 Lovett Aug 2000 A
6137725 Tassan et al. Oct 2000 A
6144580 Murray Nov 2000 A
6222774 Tanzawa et al. Apr 2001 B1
6324102 McCollum Nov 2001 B1
6326651 Manabe Dec 2001 B1
6348365 Moore et al. Feb 2002 B1
6356478 McCollum Mar 2002 B1
6388324 Kozicki May 2002 B2
6418049 Kozicki et al. Jul 2002 B1
6437365 Hawley et al. Aug 2002 B1
6469364 Kozicki Oct 2002 B1
6487106 Kozicki Nov 2002 B1
6635914 Kozicki et al. Oct 2003 B2
6709887 Moore et al. Mar 2004 B2
6768687 Kaihatsu Jul 2004 B2
6784476 Kim et al. Aug 2004 B2
6798692 Kozicki et al. Sep 2004 B2
6815784 Park et al. Nov 2004 B2
6825489 Kozicki Nov 2004 B2
6847073 Kanaya Jan 2005 B2
6849891 Hsu et al. Feb 2005 B1
6864500 Gilton Mar 2005 B2
6865117 Kozicki Mar 2005 B2
6891769 McCollum et al. May 2005 B2
6914802 Kozicki Jul 2005 B2
6927411 Kozicki Aug 2005 B2
6940745 Kozicki Sep 2005 B2
6955940 Campbell et al. Oct 2005 B2
6970383 Han et al. Nov 2005 B1
6985378 Kozicki Jan 2006 B2
6998312 Kozicki et al. Feb 2006 B2
7006376 Kozicki Feb 2006 B2
7061036 Kajiyama Jun 2006 B2
7078295 Jeon et al. Jul 2006 B2
7101728 Kozicki et al. Sep 2006 B2
7120053 Atsumi et al. Oct 2006 B2
7120079 McCollum et al. Oct 2006 B2
7126837 Banachowicz et al. Oct 2006 B1
7142450 Kozicki et al. Nov 2006 B2
7145794 Kozicki Dec 2006 B2
7169635 Kozicki Jan 2007 B2
7180104 Kozicki Feb 2007 B2
7187610 McCollum et al. Mar 2007 B1
7227169 Kozicki Jun 2007 B2
7232717 Choi et al. Jun 2007 B1
7245535 McCollum et al. Jul 2007 B2
7288781 Kozicki Oct 2007 B2
7294875 Kozicki Nov 2007 B2
7301821 Greene et al. Nov 2007 B1
7339232 Seo et al. Mar 2008 B2
7368789 Dhaoui et al. May 2008 B1
7372065 Kozicki et al. May 2008 B2
7385219 Kozicki et al. Jun 2008 B2
7402847 Kozicki et al. Jul 2008 B2
7405967 Kozicki et al. Jul 2008 B2
7430137 Greene et al. Sep 2008 B2
7499360 McCollum et al. Mar 2009 B2
7511532 Derharcobian et al. Mar 2009 B2
7519000 Caveney et al. Apr 2009 B2
7560722 Kozicki Jul 2009 B2
7675766 Kozicki Mar 2010 B2
7692972 Sadd et al. Apr 2010 B1
7728322 Kozicki Jun 2010 B2
7763158 Kozicki Jul 2010 B2
7816717 Ozaki Oct 2010 B2
7839681 Wang et al. Nov 2010 B2
7928492 Jeon et al. Apr 2011 B2
7929345 Issaq Apr 2011 B2
8269203 Greene et al. Sep 2012 B2
8269204 Greene et al. Sep 2012 B2
8415650 Greene et al. Apr 2013 B2
8531866 Ikegami et al. Sep 2013 B2
8735211 Greeley et al. May 2014 B2
9128821 Chen et al. Sep 2015 B2
9704573 Hecht Jul 2017 B1
20020003247 Yokoyama et al. Jan 2002 A1
20030107105 Kozicki Jun 2003 A1
20030222303 Fukuda Dec 2003 A1
20040124407 Kozicki et al. Jul 2004 A1
20050141431 Caveney et al. Jun 2005 A1
20050225413 Kozicki et al. Oct 2005 A1
20060028895 Taussig et al. Feb 2006 A1
20060050546 Roehr Mar 2006 A1
20060051927 Takami Mar 2006 A1
20060086989 Lee et al. Apr 2006 A1
20060171200 Rinerson et al. Aug 2006 A1
20060230375 Casey et al. Oct 2006 A1
20060238185 Kozicki Oct 2006 A1
20060291364 Kozicki Dec 2006 A1
20070045728 Lee Mar 2007 A1
20070075352 Irie Apr 2007 A1
20070108508 Lin et al. May 2007 A1
20070109861 Wang et al. May 2007 A1
20070121369 Happ May 2007 A1
20070146012 Murphy Jun 2007 A1
20070165446 Oliva et al. Jul 2007 A1
20070165532 Retana et al. Jul 2007 A1
20080101117 Ogura et al. May 2008 A1
20080113560 Caveney et al. May 2008 A1
20080211540 Fujita Sep 2008 A1
20080279028 McCollum et al. Nov 2008 A1
20090034325 Lowrey et al. Feb 2009 A1
20090184359 He et al. Jul 2009 A1
20090198812 Caveney et al. Aug 2009 A1
20090283740 Kozicki et al. Nov 2009 A1
20100092656 Kozicki Apr 2010 A1
20100100857 Chen et al. Apr 2010 A1
20100135071 Kozicki Jun 2010 A1
20100149873 Wang et al. Jun 2010 A1
20100157688 Issaq Jun 2010 A1
20100169886 Troxel et al. Jul 2010 A1
20100208520 Wang et al. Aug 2010 A1
20110001108 Greene et al. Jan 2011 A1
20110001115 Greene et al. Jan 2011 A1
20110001116 Greene Jan 2011 A1
20110002167 McCollum Jan 2011 A1
20110024821 Wang et al. Feb 2011 A1
20110205780 Yasuda et al. Aug 2011 A1
20120223381 Lu et al. Sep 2012 A1
20130033921 Tsuda et al. Feb 2013 A1
20130134378 Liu May 2013 A1
20130234100 An et al. Sep 2013 A1
20140071745 Kawasumi Mar 2014 A1
20140151621 Tendulkar Jun 2014 A1
20140158968 Jo Jun 2014 A1
20140175531 Huang et al. Jun 2014 A1
20140233301 Lu et al. Aug 2014 A1
20140246719 Dhaoui Sep 2014 A1
20140264238 Jo Sep 2014 A1
20140269008 Baker, Jr. Sep 2014 A1
20150188039 Wang Feb 2015 A1
20150076439 Saitoh et al. Mar 2015 A1
20160133837 Hsueh Dec 2016 A1
20170345496 Liu Nov 2017 A1
Non-Patent Literature Citations (19)
Entry
PCT/US2017/062878 International Search Report and Written Opinion, dated Mar. 28, 2018.
Aratani, et al., Aratani, K. “A Novel Resistance Memory with High Scalability and Nanosecond Switching,” IEDM, 2007, pp. 783-786.
Baek, et al., Baek, I. G. et al., “Highly Scalable Non-volatile Resistive Memory using Simple Binary Oxide Driven by Asymmetric Uni-polar Voltage Pulses, Samsung Advanced Institute of Technology,” IDEM 2004, 26 pages.
Burr, Burr, G. W. et al., “Overview of Candidate Device Technologies for Storage-class Memory,” IBM Journal of Research & Development, 2008, vol. 52, No. 4/5, pp. 449-464.
Choi, et al., Choi, S. J. et al., “Improvement of CBRAM Resistance Window by Scaling Down Electrode Size in Pure-GeTe Film,” IEEE Electron Device Letters, Feb. 2009, vol. 30, No. 2, pp. 120-122.
Fang, et al., Fang, T. N. et al, “Erase Mechanism for Copper Oxide Resistive Switching Memory Cells with Nickel Electrode,” Int'l Electron Devices Meeting, 2006, pp. 1-4.
Greene, et al., Greene, Jonathan et al., “Antifuse Field Programmable Gate Arrays,” Proceedings of the IEEE, Jul. 1993, vol. 81, No. 7, pp. 1042-1056.
Kund, et al., Kund, Michael et al., “Conductive Bridging RAM (CBRAM): An Emerging Non-volatile Memory Technology Scalable to Sub 20nm,” IEDM Technical Digest, Dec. 5, 2005, pp. 754-757, held in Washington, D.C.
Lemieux, et al., Lemieux, G. et al., “Directional and Single-Driver Wires in FPGA Interconnect,” International Conference on Field-Programmable Technology (ICFPT), Dec. 2004, pp. 41-48, Brisbane, Australia.
Meyer, Meyer, R., “Scalable Non-volatile Cross-point Memory Based on Dual-layer Oxide Memory Elements,” 9th Annual Non-volatile Memory Technology Symposium, Nov. 11-14, 2008, in Pacific Grove, CA, Unity Semiconductor Corporation, Sunnyvale, CA 94085, 41 pp.
Meyer, et al., Meyer, R. et al., “Oxide Dual-layer Memory Element for Scalable Non-volatile Cross-point Memory Technology,” 9th Annual Non-volatile Memory Technology Symposium, Nov. 11-14, 2008, in Pacific Grove, CA, pp. 1-5.
Sakamoto, et al., Sakamoto, T. et al., “A /Ta2O5 Solid-Electrolyte Switch with Improved Reliabiltiy,” 2007 IEEE Symposium on VLSI Technogy, Jun. 12-14, 2007, pp. 38-39, held in Kyoto, JP.
Strukov, et al., Strukov, Dimitri B. et al., “The Missing Memristor Found,” Nature, May 1, 2008, vol. 453, pp. 80-85.
Symanczyk, Symanczyk, Ralf, “Conductive Bridging Memory Devleopment from Single Cells to 2Mbit Memory Arrays,” 8th Non-Volatile Memory Technology Symposium, Nov. 10-13, 2007, 25 pages.
PCT/US2016/066955, Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, or the Declaration, Form PCT/ISA/220.
PCT/US2016/066967, Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, or the Declaration, Form PCT/ISA/220.
Wei Yi et al: Feedback write scheme for memristive switching devices 11, Applied Physics A⋅ Materials Science & Processing, Springer, Berlin, DE, vol. 102, No. 4, Jan. 27, 2011 (Jan. 27, 2011), pp. 973-982.
Yi-Chung Chen et al: “The 3-D Stacking Bipolar RRAM for High Density”, IEEE Transactions on Nanotechnology, IEEE Service Center, Piscataway, NJ, US, vol. 11, No. 5, Sep. 1, 2012 (Sep. 1, 2012), pp. 948-956.
International Search Report and Written Opinion of the International Searching Authority dated Dec. 19, 2017, International application No. PCT/US2017/054174.
Related Publications (1)
Number Date Country
20180108409 A1 Apr 2018 US
Provisional Applications (1)
Number Date Country
62401880 Sep 2016 US