Conductive carbon nanotube tip, probe having the conductive carbon nanotube tip, and method of manufacturing the conductive carbon nanotube tip

Abstract

A conductive carbon nanotube tip and a manufacturing method thereof are provided. The conductive carbon nanotube tip includes a carbon nanotube tip substantially vertically placed on a substrate, and a ruthenium coating layer covering a surface of the carbon nanotube tip and extending to at least a part of the substrate. The manufacturing method includes substantially vertically placing a carbon nanotube tip on a substrate, and forming a ruthenium coating layer on the carbon nanotube tip and at least a part of the substrate.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other features and advantages of the present invention are illustrated in detailed exemplary embodiments thereof with reference to the attached drawings in which:

FIG. 1 is a sectional view of a conductive carbon nanotube tip according to an embodiment of the present invention;

FIG. 2 is a perspective view of a probe of an SPM according to an embodiment of the present invention;

FIG. 3A is an EFM image of a PZT test piece, which is taken using a silicon-based conductive tip;

FIGS. 3B and 3C are EFM images of a PZT test piece, which are taken using a probe according to the embodiment of FIG. 2;

FIGS. 4A through 4C are views illustrating a method of manufacturing a conductive carbon nanotube tip according to an embodiment of the present invention; and

FIG. 5 is a time chart illustrating an atomic layer deposition process for forming a ruthenium coating layer.

Claims

1. A conductive carbon nanotube tip comprising: a carbon nanotube tip substantially vertically placed on a substrate; anda ruthenium coating layer covering a surface of the carbon nanotube tip and extending to at least a part of the substrate.

2. The conductive carbon nanotube tip of claim 1, wherein a thickness of the ruthenium coating layer is approximately 5-100 nm.

3. The conductive carbon nanotube tip of claim 1, wherein the thickness of the ruthenium coating layer is approximately 10-30 nm.

4. The conductive carbon nanotube tip of claim 1, wherein the ruthenium coating layer is formed through an atomic layer deposition (ALD) process.

5. A probe of a scanning probe microscope, comprising: a cantilever having a first end fixed on a support;a carbon nanotube tip substantially vertically placed on the cantilever near a second end thereof; anda ruthenium coating layer covering a surface of the carbon nanotube tip and extending to at least a part of the cantilever.

6. The probe of claim 5, wherein a thickness of the ruthenium coating layer is approximately 5-100 nm.

7. The probe of claim 6, wherein the thickness of the ruthenium coating layer is approximately 10-30 nm.

8. The probe of claim 5, wherein the ruthenium coating layer is formed through an atomic layer deposition (ALD) process.

9. The probe of claim 5, wherein the cantilever is provided with a protrusion near the second end thereof and the carbon nanotube tip has a bottom fixed on the protrusion.

10. A method of manufacturing a conductive carbon nanotube tip, comprising: substantially vertically placing a carbon nanotube tip on a substrate; andforming a ruthenium coating layer on the carbon nanotube tip and at least a part of the substrate.

11. The method of claim 10, wherein the substantially vertically placing the carbon nanotube tip comprises forming a protrusion by etching or grinding the substrate and setting up the carbon nanotube on an apex of the protrusion.

12. The method of claim 10, wherein a thickness of the ruthenium coating layer is approximately 5-100 nm.

13. The method of claim 12, wherein the thickness of the ruthenium coating layer is approximately 10-30 nm.