Number | Name | Date | Kind |
---|---|---|---|
4625227 | Hara et al. | Nov 1986 | |
4797375 | Brownell | Jan 1989 | |
5089442 | Olmer | Feb 1992 | |
5234868 | Cote | Aug 1993 | |
5270264 | Andideh et al. | Dec 1993 | |
5272117 | Roth et al. | Dec 1993 | |
5494854 | Jain | Feb 1996 |
Number | Date | Country |
---|---|---|
0045259 | Mar 1982 | JPX |
0207353 | Dec 1982 | JPX |
0296447 | Dec 1987 | JPX |
4-192522 | Jul 1992 | JPX |
5003164 | Jan 1993 | JPX |
2 173822 | Oct 1986 | GBX |
Entry |
---|
Neves Aus Der Technik, vol. 2, May 1987, Wursburg, DE, page 2 XP002024607 "Verbesserte Planarisierung", whole article. |