Number | Name | Date | Kind |
---|---|---|---|
3549411 | Bean et al. | Dec 1970 | |
3652324 | Chu et al. | Mar 1972 | |
3911168 | Schinella et al. | Oct 1975 | |
4001465 | Graul et al. | Jan 1977 | |
4230745 | Betz et al. | Oct 1980 | |
4254161 | Kenlage | Mar 1981 | |
4278705 | Agraz-Guerena et al. | Jul 1981 | |
4333964 | Ghezzo | Jun 1982 | |
4435447 | Ito et al. | Mar 1984 | |
4473598 | Ephrath et al. | Sep 1984 | |
4583281 | Ghezzo et al. | Apr 1986 | |
4597159 | Usami et al. | Jul 1986 |
Number | Date | Country |
---|---|---|
48-31034 | May 1968 | JPX |
Entry |
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Bassous, "Fabricating Submicrometer Silicon Devices", IBM Tech. Disclosure Bulletin, vol. 15, No. 6, pp. 1823-1825, Nov. 1972. |