Number | Date | Country | Kind |
---|---|---|---|
57-110252 | Jun 1982 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
3916036 | Gipstein et al. | Oct 1975 | |
4289845 | Bowden et al. | Sep 1981 | |
4377631 | Toukhy et al. | Mar 1983 | |
4409317 | Shiraishi | Jul 1984 |
Number | Date | Country |
---|---|---|
53-135621 | Nov 1978 | JPX |
Entry |
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J. Barry and R. Wilbarg, "Post Exposure Baking for Improved Photoresist Adhesion", IBM Technical Disclosure Bulletin, vol. 24, No. 10, Mar. 1982, p. 5160. |