Patent Grant
7349223
The invention relates to the field of probe card assembly systems. More particularly, the invention relates to enhanced probe card assemblies having improved planarity, such as across a probe substrate contact area.
In conventional integrated circuit (IC) wafer probe cards, electrical contacts between the probe card and an integrated circuit wafer are typically provided by tungsten needle probes. However, advanced semiconductor technologies often require higher pin counts, smaller pad pitches, and higher dock frequencies, which are not possible with tungsten needle probes.
While emerging technologies have provided spring probes for different probing applications, most probes have inherent limitations, such as limited pitch, limited pin count, varying levels of flexibility, limited probe tip geometries, limitations of materials, and high costs of fabrication.
K. Banerji, A. Suppelsa, and W. Mullen III, Selectively Releasing Conductive Runner and Substrate Assembly Having Non-Planar Areas, U.S. Pat. No. 5,166,774 (24 Nov. 1992) disclose a runner and substrate assembly which comprises “a plurality of conductive runners adhered to a substrate, a portion of at least some of the conductive runners have non-planar areas with the substrate for selectively releasing the conductive runner from the substrate when subjected to a predetermined stress”.
A. Suppelsa, W. Mullen III and G. Urbish, Selectively Releasing Conductive Runner and Substrate Assembly, U.S. Pat. No. 5,280,139 (18 Jan. 1994) disclose a runner and substrate assembly which comprises “a plurality of conductive runners adhered to a substrate, a portion of at least some of the conductive runners have a lower adhesion to the substrate for selectively releasing the conductive runner from the substrate when subjected to a predetermined stress”.
D. Pedder, Bare Die Testing, U.S. Pat. No. 5,786,701 (28 Jul. 1998) disclose a testing apparatus for testing integrated circuits (ICs) at the bare die stage, which includes “a testing station at which microbumps of conductive material are located on interconnection trace terminations of a multilayer interconnection structure, these terminations being distributed in a pattern corresponding to the pattern of contact pads on the die to be tested. To facilitate testing of the die before separation from a wafer using the microbumps, the other connections provided to and from the interconnection structure have a low profile”.
D. Grabbe, I. Korsunsky and R. Ringler, Surface Mount Electrical Connector, U.S. Pat. No. 5,152,695 (6 Oct. 1992) disclose a connector for electrically connecting a circuit between electronic devices, in which “the connector includes a platform with cantilevered spring arms extending obliquely outwardly therefrom. The spring arms include raised contact surfaces and in one embodiment, the geometry of the arms provide compound wipe during deflection”.
H. Iwasaki, H. Matsunaga, and T. Ohkubo, Partly Replaceable Device for Testing a Multi-Contact Integrated Circuit Chip Package, U.S. Pat. No. 5,847,572 (8 Dec. 1998) disclose “a test device for testing an integrated circuit (IC) chip having side edge portions each provided with a set of lead pins. The test device comprises a socket base, contact units each including a contact support member and socket contact numbers, and anisotropic conductive sheet assemblies each including an elastic insulation sheet and conductive members. The anisotropic conductive sheet assemblies are arranged to hold each conductive member in contact with one of the socket contact members of the contact units. The test device further comprises a contact retainer detachably mounted on the socket base to bring the socket contact members into contact with the anisotropic sheet assemblies to establish electrical communication between the socket contact members and the conductive members of the anisotropic conductive sheet assemblies. Each of the contact units can be replaced by a new contact unit if the socket contact members partly become fatigued, thereby making it possible to facilitate the maintenance of the test device. Furthermore, the lead pins of the IC chip can be electrically connected to a test circuit board with the shortest paths formed by part of the socket contact members and the conductive members of the anisotropic conductive sheet assemblies”.
W. Berg, Method of Mounting a Substrate Structure to a Circuit Board, U.S. Pat. No. 4,758,927 (19 Jul. 1988) discloses “a substrate structure having contact pads is mounted to a circuit board which has pads of conductive material exposed at one main face of the board and has registration features which are in predetermined positions relative to the contact pads of the circuit board. The substrate structure is provided with leads which are electrically connected to the contact pads of the substrate structure and project from the substrate structure in cantilever fashion. A registration element has a plate portion and also has registration features which are distributed about the plate portion and are engageable with the registration features of the circuit board, and when so engaged, maintain the registration element against movement parallel to the general plane of the circuit board. The substrate structure is attached to the plate portion of the registration element so that the leads are in predetermined position relative to the registration features of the circuit board, and in this position of the registration element the leads of the substrate structure overlie the contact pads of the circuit board. A clamp member maintains the leads in electrically conductive pressure contact with the contact pads of the circuit board”.
D. Sarma, P. Palanisamy, J. Heam and D. Schwarz, Controlled Adhesion Conductor, U.S. Pat. No. 5,121,298 (9 Jun. 1992) disclose “Compositions useful for printing controllable adhesion conductive patterns on a printed circuit board include finely divided copper powder, a screening agent and a binder. The binder is designed to provide controllable adhesion of the copper layer formed after sintering to the substrate, so that the layer can lift off the substrate in response to thermal stress. Additionally, the binder serves to promote good cohesion between the copper particles to provide good mechanical strength to the copper layer so that it can tolerate lift off without fracture”.
R. Mueller, Thin-Film Electrothermal Device, U.S. Pat. No. 4,423,401 (27 Dec. 1983) discloses “A thin film multilayer technology is used to build micro miniature electromechanical switches having low resistance metal-to-metal contacts and distinct on-off characteristics. The switches, which are electrothermally activated, are fabricated on conventional hybrid circuit substrates using processes compatible with those employed to produce thin-film circuits. In a preferred form, such a switch includes a cantilever actuator member comprising a resiliently bendable strip of a hard insulating material (e.g. silicon nitride) to which a metal (e.g. nickel) heating element is bonded. The free end of the cantilever member carries a metal contact, which is moved onto (or out of) engagement with an underlying fixed contact by controlled bending of the member via electrical current applied to the heating element”.
S. Ibrahim and J. Elsner, Multi-Layer Ceramic Package, U.S. Pat. No. 4,320,438 (16 Mar. 1982) disclose “In a multi-layer package, a plurality of ceramic lamina each has a conductive pattern, and there is an internal cavity of the package within which is bonded a chip or a plurality of chips interconnected to form a chip array. The chip or chip array is connected through short wire bonds at varying lamina levels to metallized conductive patterns thereon, each lamina level having a particular conductive pattern. The conductive patterns on the respective lamina layers are interconnected either b y tunneled through openings filled with metallized material, or by edge formed metallizations so that the conductive patterns ultimately connect to a number of pads at the undersurface of the ceramic package mounted onto a metalized board. There is achieved a high component density; but because connecting leads are “staggered” or connected at alternating points with wholly different package levels, it is possible to maintain a 10 mil spacing and 10 mil size of the wire bond lands. As a result, there is even greater component density but without interference of wire bonds one with the other, this factor of interference being the previous limiting factor in achieving high component density networks in a multi layer ceramic package”.
F. McQuade, and J. Lander, Probe Assembly for Testing Integrated Circuits, U.S. Pat. No. 5,416,429 (16 May 1995) disclose a probe assembly for testing an integrated circuit, which “includes a probe card of insulating material with a central opening, a rectangular frame with a smaller opening attached to the probe card, four separate probe wings each comprising a flexible laminated member having a conductive ground plane sheet, an adhesive dielectric film adhered to the ground plane, and probe wing traces of spring alloy copper on the dielectric film. Each probe wing has a cantilevered leaf spring portion extending into the central opening and terminates in a group of aligned individual probe fingers provided by respective terminating ends of said probe wing traces. The probe fingers have tips disposed substantially along a straight line and are spaced to correspond to the spacing of respective contact pads along the edge of an IC being tested. Four spring clamps each have a cantilevered portion which contact the leaf spring portion of a respective probe wing, so as to provide an adjustable restraint for one of the leaf spring portions. There are four separate spring clamp adjusting means for separately adjusting the pressure restraints exercised by each of the spring clamps on its respective probe wing. The separate spring clamp adjusting means comprise spring biased platforms each attached to the frame member by three screws and spring washers so that the spring clamps may be moved and oriented in any desired direction to achieve alignment of the position of the probe finger tips on each probe wing”.
D. Pedder, Structure for Testing Bare Integrated Circuit Devices, European Patent Application No. EP 0 731 369 A2 (Filed 14 Feb. 1996), U.S. Pat. No. 5,764,070 (9 Jun. 1998) discloses a test probe structure for making connections to a bare IC or a wafer to be tested, which comprises “a multilayer printed circuit probe arm which carries at its tip an MCM-D type substrate having a row of microbumps on its underside to make the required connections. The probe arm is supported at a shallow angle to the surface of the device or wafer, and the MCM-D type substrate is formed with the necessary passive components to interface with the device under test. Four such probe arms may be provided, one on each side of the device under test”.
B. Eldridge, G. Grube, I. Khandros, and G. Mathieu, Method of Mounting Resilient Contact Structure to Semiconductor Devices, U.S. Pat. No. 5,829,128 (3 Nov. 1998), Method of Making Temporary Connections Between Electronic Components, U.S. Pat. No. 5,832,601 (10 Nov. 1998), Method of Making Contact Tip Structures, U.S. Pat. No. 5,864,946 (2 Feb. 1999), Mounting Spring Elements on Semiconductor Devices, U.S. Pat. No. 5,884,398 (23 Mar. 1999), Method of Burning-In Semiconductor Devices, U.S. Pat. No. 5,878,486 (9 Mar. 1999), and Method of Exercising Semiconductor Devices, U.S. Pat. No. 5,897,326 (27 Apr. 1999), disclose “Resilient contact structures are mounted directly to bond pads on semiconductor dies, prior to the dies being singulated (separated) from a semiconductor wafer. This enables the semiconductor dies to be exercised (e.g. tested and/or burned-in) by connecting to the semiconductor dies with a circuit board or the like having a plurality of terminals disposed on a surface thereof. Subsequently, the semiconductor dies may be singulated from the semiconductor wafer, whereupon the same resilient contact structures can be used to effect interconnections between the semiconductor dies and other electronic components (such a wiring substrates, semiconductor packages, etc.). Using the all-metallic composite interconnection elements of the present invention as the resilient contact structures, burn-in can be performed at temperatures of at least 150° C., and can be completed in less than 60 minutes”. While the contact tip structures disclosed by B. Eldridge et al. provide resilient contact structures, the structures are each individually mounted onto bond pads on semiconductor dies, requiring complex and costly fabrication. As well, the contact tip structures are fabricated from wire, which often limits the resulting geometry for the tips of the contacts. Furthermore, such contact tip structures have not been able to meet the needs of small pitch applications (e.g. typically on the order of 50 μm spacing for a peripheral probe card, or on the order of 75 μm spacing for an area array).
T. Dozier II, B. Eldridge, G. Grube, I. Khandros, and G. Mathieu, Sockets for Electronic Components and Methods of Connecting to Electronic Components, U.S. Pat. No. 5,772,451 (30 Jun. 1998) disclose “Surface-mount, solder-down sockets permit electronic components such as semiconductor packages to be releasably mounted to a circuit board. Resilient contact structures extend from a top surface of a support substrate, and solder-ball (or other suitable) contact structures are disposed on a bottom surface of the support substrate. Composite interconnection elements are used as the resilient contact structures disposed atop the support substrate. In any suitable manner, selected ones of the resilient contact structures atop the support substrate are connected, via the support substrate, to corresponding ones of the contact structures on the bottom surface of the support substrate. In an embodiment intended to receive an LGA-type semiconductor package, pressure contact is made between the resilient contact structures and external connection points of the semiconductor package with a contact force which is generally normal to the top surface of the support substrate. In an embodiment intended to receive a BGA-type semiconductor package, pressure contact is made between the resilient contact structures and external connection points of the semiconductor package with a contact force which is generally parallel to the top surface of the support substrate”.
Other emerging technologies have disclosed probe tips on springs which are fabricated in batch mode processes, such as by thin-film or micro electronic mechanical system (MEMS) processes.
D. Smith and S. Alimonda, Photolithographically Patterned Spring Contact, U.S. Pat. No. 5,613,861 (25 Mar. 1997), U.S. Pat. No. 5,848,685 (15 Dec. 1998), and International Patent Application No. PCT/US 96/08018 (Filed 30 May 1996), disclose a photolithography patterned spring contact, which is “formed on a substrate and electrically connects contact pads on two devices. The spring contact also compensates for thermal and mechanical variations and other environmental factors. An inherent stress gradient in the spring contact causes a free portion of the spring to bend up and away from the substrate. An anchor portion remains fixed to the substrate and is electrically connected to a first contact pad on the substrate. The spring contact is made of an elastic material and the free portion compliantly contacts a second contact pad, thereby contacting the two contact pads”. While the photolithography patterned springs, as disclosed by Smith et al., are capable of satisfying many IC probing needs, the springs are small, and provide little vertical compliance to handle the planarity compliance needed in the reliable operation of many current IC prober systems. Vertical compliance for many probing systems is typically on the order of 0.004″-0.010″, which often requires the use of tungsten needle probes.
Furthermore, no one has taught a way to interconnect such a probe containing up to several thousand pins to a tester, while effectively dealing with planarity requirements. As advanced integrated circuit devices become more complex while decreasing in size, it would be advantageous to provide a probe card assembly which can be used to reliably interconnect to such devices.
To accommodate for planarity differences between an array of probe tips and the surface pads on a wafer under test, it may be advantageous to provide a probe substrate which can pivot freely by a small amount about its center. For such a system, however, an accurately controlled force must still be provided to engage the contacts, while holding the substrate positionally stable in the X, Y, and theta directions. Furthermore, for applications in which the substrate includes a large number (e.g. thousands) of wires or signals exiting its backside, wherein supports are located at the periphery of the substrate, these supports must not hinder the fan out exit pathways. As well, the signal wires must not hinder the pivoting of the substrate, nor should they hinder the controlled force provided to engage the springs against a device under test (DUT).
It would be advantageous to provide a method and apparatus for improved flexible probe springs, which are capable of high pin counts, small pitches, cost-effective fabrication, and customizable spring tips. It would also be advantageous to provide probe card assemblies using such flexible probe springs, which provide planarity compliance to semiconductor devices under testing and/or burn-in, while providing accurate axial and theta positioning.
Similarly, integrated circuit packages provide connections for power signals and transport signals, between an integrated circuit chip IC and a motherboard, so that the integrated circuit chip 44 can interface to the rest of a test system.
Microprocessor devices are some of the IC devices which are most severely limited by today's IC packages. Future microprocessors will need over 10,000 I/Os and will operate at over 20 GHz.
In conventional IC packages, the signal, power and ground connections are typically achieved through either wire bonds or solder balls. Conventional packages using wire bonds or solder ball attachments have both signal and power parasitics, which impact performance. Current microprocessors have dock frequencies over 2 GHz but will be advancing to frequencies over 20 GHz in the near future. Current wire bond and solder ball technologies cannot maintain signals in the 20 GHz range.
Packages using wire bonds and solder balls attachments have signal, power and ground parasitics that impact performance. Therefore, new solutions are needed. Advanced packages, such as the Intel Bumpless Build-up Layer (BBUL) Packaging Technology (BBUL), build the package on top of the microprocessor, which can help to reduce such parasitics. BBUL packaging can also be used to tightly couple multiple chips in the same package which is referred to as a “chips-first” or Multi-Chip Module (MCM). Various details of BBUL structures are described in S. Towle, H. Braunisch, C. Hu, R. Emory, and G. Vandentop, Bumpless Build-Up Layer Packaging, Intel Corporation, Components Research, Presented at ASME International Mechanical Engineering Congress and Exposition (IMECE), New York, 12 Nov. 2001; and R. Emory, S. Towle, H. Braunsich, C. Hu, G. Raiser, and G. Vendentop, Novel Microelectronic Packaging Method for reduced Thermomechanical Stresses on Low Dielectric Constant Materials, Intel Corporation, presented at Advanced Metallization Conference, Montreal, Canada, 9 Oct. 2001.
The high-density build up layer on top of ICs has much better performance than traditional packaging approaches. The interconnections to the chip are shorter than solder bumps and much shorter than wire bonds, resulting in far lower inductance. Capacitors can be located closer to the IC, which enables better power delivery. The shorter signal distances should allow the IC to run at lower voltages, reducing electrical cross talk and also reducing power consumption. The high density interconnect (HDI) allows more interconnects from the silicon than solder bumps or wire bonds. In many cases, the delays and cross talk of the signals carried in the interconnect of the HDI is lower than delays of signals carried in the interconnect of the IC. Higher performance can be attained by having signals leave the IC interconnect and travel through the HDI interconnect since the propagation delays and cross talk are better in the HDI than on the IC. BBUL packages are thinner and capable of embedding multiple ICs in the same package.
This BBUL and MCM approaches tend to be very expensive due to fabrication complexity, and the need to guarantee that every chip in the module is good. Any bad chip or defect in manufacturing of the HDI between chips will cause all of the chips and the package to be rejected. A bad chip is any chip that does not meet performance requirements. Resultant BBUL/MCM packages are therefore typically significantly more expensive to manufacture than individually packaged ICs. In the past, the “chips-first” approach was only used to build MCMs used in satellites for space applications, where the smaller size and weight justified the higher cost.
It would be advantageous to provide a package which can be tested prior to attaching integrated circuits. Such a package would constitute a major technical advance. Further more, it would be advantageous to provide a package which provides through holes comprising multiple electrical routing layers, and provides advanced high density interface (HDI) functions, such as higher densities of I/O connections than attainable in flip-chip or wire bonded packages, high interconnect performance to an IC, within a thinner package. Such a package would constitute a further technical advance.
Although the disclosed probe card assembly systems and improved non-planar spring probes and methods for production are described herein in connection with integrated circuit test probes, probe cards, and/or packages, the system and techniques can be implemented with other devices, such as interconnections between integrated circuits and substrates within electronic components or devices, burn-in devices and MEMS devices, or any combination thereof, as desired.
In addition, it is within the scope of this invention that assembly structures and methods disclosed in this document can be used to test, burn-in or package various miniaturized integrated solid state circuits, including both silicon and III-V semiconductor devices, as well as liquid crystal display panels, solid state sensor arrays, such as biosensors, environmental sensors and surface acoustic wave device sensors.
Accordingly, although the invention has been described in detail with reference to a particular preferred embodiment, persons possessing ordinary skill in the art to which this invention pertains will appreciate that various modifications and enhancements may be made without departing from the spirit and scope of the claims that follow.
Several embodiments of enhanced integrated circuit probe card assemblies are disclosed, which extend the mechanical compliance of both MEMS and thin-film fabricated probes, such that these types of spring probe structures can be used to test one or more integrated circuits on a semiconductor wafer. Several embodiments of probe card assemblies, which provide tight signal pad pitch compliance and/or enable high levels of parallel testing in commercial wafer probing equipment, are disclosed. In some preferred embodiments, the probe card assembly structures include separable standard components, which reduce assembly manufacturing cost and manufacturing time. These structures and assemblies enable high speed testing in wafer form. The probes also have built in mechanical protection for both the integrated circuits and the MEMS or thin film fabricated spring tips and probe layout structures on substrates. Alternate card assembly structures comprise a stiffening structure and a compliant carrier structure, such as a decal or screen, which is attached to the probe chip substrate.
Patterned probe springs 14 are capable of very small spring to spring pitch 20, which allows multiple probe springs 14 to be used to contact power or ground pads on an integrated circuit device 44 (
Improved Structures for Miniature Springs.
The interleaved photolithographic springs 34a, 34b each have a plurality of spring contact points 24. When spring contacts are used for connection to power or ground traces 46 or pads 47 of an integrated circuit device 44, the greatest electrical resistance occurs at the point of contact. Therefore, an interleaved spring contact 34, having a plurality of contact points 24, inherently lowers the resistance between the spring contact 34 and a trace 46 or pad 47. As described above, multiple interleaved probe springs 34 may be used for many applications, such as for high quality electrical connections for an integrated circuit device 44, or for a probe card assembly 60 (
Shoulder-point photolithographic springs 50 therefore include one or more extending points 52, as well as a shoulder 54, wherein the points 52 provide desired penetration to provide good electrical contact to traces 46, while the shoulder 54 prevents the spring 50 from penetrating too deep into a device 44 or wafer 92. Since the geometry of the probe springs 50 are highly controllable by photolithographic screening and etching processes, the detailed geometry of the shoulder-point photolithographic spring 50 is readily achieved.
Improved Probe Card Assemblies.
The substrate 16 is typically a solid plate, and is preferably a material having a low thermal coefficient of expansion (TCE), such as ceramic, ceramic glass, glass, or silicon. The electrically conductive spring probe tips 61a-61n establish electrical contact between the probe card assembly 60 and a semiconductor wafer 92, when the probe card assembly 60a and the semiconductor wafer 92 are positioned together.
The spring probe tips 61a-61n may have a variety of tip geometries, such as single point springs 14, interleaved springs 34, or shoulder point springs 50, and are fabricated on the substrate 16, typically using thin-film or MEMS processing methods, to achieve low manufacturing cost, well controlled uniformity, very fine pad pitches 20, and large pin counts.
The probe tips 61a-61n are electrically connected to flexible electric connections 64a-64n, preferably through metalized vias 66a-66n within the substrate 16. Each of the plurality of flexible electric connections 64a-64n are then electrically connected to a printed wiring board probe card 68, which is then typically held in place by a metal ring or frame support structure 70. The preferred metallized via electrical connections 66a-66n (e.g. such as produced by Micro Substrate Corporation, of Tempe, Ariz.), are typically formed by first creating holes in the substrate 16, using laser or other drilling methods. The holes are then filled or plated with conductive material, such as by plating or by extrusion. After the conductive vias 66a-66n are formed, they are typically polished back, to provide a flat and smooth surface.
The conductive pads 77a-77n on the underside of the printed wiring board probe card 68 are typically arranged with a pad pitch 85, such that the conductive pads 77a-77n are aligned with the electrically conductive connections 64a-64n located on the upper connector surface 62b of the substrate 16. The conductive pads 77a-77n are then preferably fanned out to conductive paths 78a-78n, which are typically arranged with a probe card pitch 87. The electrically conductive connections 72a 72n, which are located on the upper surface of the printed wiring board probe card 68 and are connected to the conductive paths 78a-78n, are typically arranged with a probe card connection pitch 89, which may be aligned with the probe card pitch 87, or may preferably be fanned out further on the upper surface of the printed wiring board probe card 68. The probe card connection pitch 89 is preferably chosen such that the electrically conductive connections 72a-72n are aligned with the test head connectors 74a-74n located on the test head 76, which are typically arranged with a test head pitch 91.
The flexible electric connections 64a-64n are typically fabricated using a longer spring length 28 than the probe tips 61a-61n, to provide a compliance of approximately 4-10 mils. In some embodiments, the flexible connections 64a-64n are typically built in compliance to photolithographic springs, such as described above, or as disclosed in either U.S. Pat. No. 5,848,685 or U.S. Pat. No. 5,613,861, which are incorporated herein by reference.
The flexible connections 64a-64n are connected to the printed wiring board (PWB) probe card 68, either permanently (e.g. such as by solder or conductive epoxy) or non-permanently (e.g. such as by corresponding metal pads which mate to the tips 24 of flexible connection springs 64a-64n). The printed wiring board probe card 68 then fans out the signals to pads 72a-72n, on a pad pitch 89 suitable for standard pogo pin contactors 74a-74n typically arranged with a test head pitch 91 on a test head 76.
The flexible connections 64a-64n are preferably arranged within an area array, having an array pitch 83 such as 1.00 mm or 1.27 mm, which provides a reasonable density (i.e. probe card pitch 87) for plated through-holes (PTH) 78 on the printed wiring board probe card 68, and allows signal fan-out on multiple layers within the printed wiring board probe card 68, without resorting to advanced printed wiring board probe cards 68 containing blind conductive vias 78a-78n.
The flexible conductive connections 64a-64n, which contact conductive pads 77a 77n on the underside of the printed wiring board probe card 68, maintain electrical connection between the printed wiring board probe card 68 and the substrate 16, while the substrate 16 is allowed to move up and down slightly along the Z-axis 84, as well as tilt about its center. The flexible connections 64a-64n also provide lateral compliance between a substrate 16 and a printed wiring board probe card 68 having different thermal coefficients of expansion (e.g. such as for a low TCE substrate 16 and a relatively high TCE printed wiring board probe card 68).
Alternately, the substrate 16 may be an assembly, such as a membrane probe card, which connects to the printed wiring board probe card 68 through membrane bump contacts 64a-64n. In alternate embodiments of the probe card assembly, connections 64a-64n are provided by a separable connector 132 (
As the size and design of integrated circuit devices 44 becomes increasingly small and complex, the fine pitch 20 (
The probe card assembly 60a provides electrical interconnections to a substrate 16, which may contain thousands of spring probe tips 61a-61n, while providing adequate mechanical support for the probe card assembly 60a, to work effectively in a typical integrated circuit test probing environment. The probe card assembly 60a is readily used for applications requiring very high pin counts, for tight pitches, or for high frequencies. As well, the probe card assembly 60a is easily adapted to provide electrical contact for all traces 46 (
As shown in
However, it is increasingly important to allow probe card assemblies to provide contact with a planar semiconductor wafer 92, wherein the semiconductor wafer 92 and the probe card assembly are slightly non-planar to each other, such as by a slight variation in X-axis rotation 86 and/or Y-axis rotation 88.
In the probe card assembly 60a shown in
The signal traces from the probe tips 61a-61n, typically having a small pitch 20, are preferably fanned out to the flexible connections 64a-64n, typically having a larger pitch, using routing traces on one or both surfaces 62a,62b of the substrate 16.
The flexible connections 64a-64n are preferably laid out on a standardized layout pattern, which can match standardized power and ground pad patterns (i.e. assignments) on the printed wiring board probe card 68, thus allowing the same printed wiring board probe card 68 to be used for substrates 16 laid out to mate to different integrated circuit devices 44. As a printed wiring board probe card 68 may be adapted to specialized substrates 16, for the testing of a variety of different devices 44, the operating cost for a printed wiring board probe card 68 is reduced.
To aid in high frequency power decoupling, capacitors 172 (
A look up and look down camera is typically used to align the wafer chuck to the substrate 16, whereby the probe tips 20 are aligned to the contact pads 47 or traces 46 on a device under test 44 located on a semiconductor wafer 92. Alignment is typically achieved, either by looking at spring tips 24, or at alignment marks 125 printed on the substrate 16.
For probe card assemblies without such a camera, the substrate 16 is preferably comprised of translucent or transparent material (e.g. such as glass ceramic or glass), thereby allowing view-through-the-top alignment methods to be performed by a test operator. A window 165 (
For applications where access to the surface of the semiconductor wafer 92 is required while probe contact is maintained (e.g. such as for voltage contrast electron beam probing during development of the integrated circuit device 44), a window 123 (
Defined openings (i.e. windows 123) within the substrate 16 are also preferably used for in-situ e-beam repair of devices such as DRAMs, in which the probe card assembly 60 may remain in place. Testing, repair and retesting may thus be performed at the same station, without moving the wafer 92.
The structure of the probe card assembly 60a provides very short electrical distances between the probe tips 61a-61n and the controlled impedance environment in the printed wiring board probe card 68, which allows the probe card assembly 60a to be used for high frequency applications. For embodiments wherein the traces on one or both surfaces 62a,62b of the substrate 16 are required to be impedance controlled, one or more conductive reference planes may be added within the substrate 16, either on top of the traces, below the traces, or both above and below the traces. For ultra high-frequency applications, the substrate 16 may contain alternating ground reference traces, which are connected between reference planes 262 (
High Compliance Probe Assemblies.
As described above, a probe card assembly structure 60 fixedly supports a substrate 16, relative to the printed wiring board probe card 68, in the lateral X and Y directions, as well as rotationally 90 in relation to the Z axis 84.
While the flexible spring probes 61a-61n, as well as flexible connections 64a-64n, provide some planarity compliance between a probe card assembly 60 and a semiconductor wafer 92 or device 44, other preferred embodiments of the probe card assembly 60 provide enhanced planarity compliance.
Since probe springs 61a-61n are often required to be very small, to provide high density connections and a fine pitch 20, in some probe card applications which require substantial planarity compliance, the compliance provided by the probe springs 61a-61n alone may not be sufficient. Therefore, in some preferred embodiments of the probe card assembly 60, the probe card assembly 60 allows the substrate 16 to pivot about its center (i.e. vary in X-axis rotation 86 and/or Y-axis rotation 88), to provide increased planarity compliance to a semiconductor wafer 92 under test. In such applications, the probe card assembly 60 must still exert a controlled downward force in the Z direction 84, for engaging the probe spring contacts 61a-61n located on the bottom surface 62a of the substrate 16 against a semiconductor wafer 92.
For many embodiments of the probe card assembly 60, the central region 119 (
A ball joint fulcrum structure may be located within the central region of a probe card assembly on the back side of the substrate support structure, to allow the substrate 16 to pivot about the center, and to provide force to engage the probe tips 61a 61n. However, such a structure would typically impede wire leads or other electrical connections, which often need to exit over the central region of the probe card assembly. Moreover, such a movable joint does not typically restrict theta rotation 90 of the substrate 16 reliably.
A leaf spring 98 connects to the substrate 16 through a bridge structure 100. The leaf spring 98 and bridge structure 100 provide pivoting freedom for the substrate 16 (i.e. slight X-axis rotation 86 and Y-axis rotation 88), with controlled movement in the Z direction 84, X direction 80, Y direction 82 and Z-Axis rotation (theta) 90 directions. In preferred embodiments, a preload assembly 121 (
As shown in
The leaf spring 98 is typically fabricated from a sheet of stainless steel or spring steel, and is typically patterned using chemical etching methods. The downward force is a function of the stiffness of the spring, the diameter of the spring spacers 104 and 106, as well as the size of the leaf spring 98.
While the leaf spring 98 shown in
The bridge 100 and the spacers 104 and 106 are preferably comprised of light and strong metals, such as aluminum or titanium, to minimize the moveable mass of the bridge and leaf spring suspended probe card assembly 60b.
The substrate 16 is typically attached to the legs 102 of the bridge 100, using an adhesive 112, such as an epoxy, or solder. Where substrate replaceability is needed, detachable connections 130, such as shown in
On the bottom side 62a of the substrate 16, lower standoffs 114 are preferably used, which prevent the substrate 16 from touching a wafer under test 92. The lower standoffs 114 are preferably made of a relatively soft material, such as polyimide, to avoid damage to the semiconductor wafer under test 92. In addition, to further avoid damage to active circuits 44 in the semiconductor wafer 92, the standoffs 114 are preferably placed, such that when the probe card assembly 60 is aligned with a device 44 on a semiconductor wafer 92, the standoffs are aligned with the saw streets 94 (
On the upper surface 62b of the substrate 16, upper standoffs 116 are also preferably used, to prevent damage to the topside flexible electrical connections 64a-64n. The upper standoffs 116 are preferably made of a moderately hard insulative material, such as LEXAN™, silicone, or plastic.
In the preferred embodiment shown in
Since printed wiring board probe cards 68b are typically made of relatively soft materials (e.g. such as glass epoxy), crash pads 120 are preferably placed on the probe card 68b, under the adjusting screws 118, to prevent the tip of the adjusting screws 118 from sinking into the printed wiring board probe card 68b over repeated contact cycles. Fastener shims 122 are also preferably used with the adjusting screws 118, such that the initial distance and planarity between the substrate 16 and the printed wiring board probe card 68b may be accurately set.
The preload shims 110 are preferably used to control the initial pre-load of the downward force exerted by the leaf spring 98 onto the bridge 100. The set preload prevents vibration of the substrate 16, and improves contact characteristics between the substrate 16 and to the semiconductor wafer under test 92.
In the alternate bridge and spring suspended probe card assembly 60c shown in
As seen in
In one embodiment of the probe card assembly 60, the preferred separable connector 132 is a MEG-Array™ connector, manufactured by FCI Electronics, of Etters, Pa. One side of the separable connector 132 is typically soldered to the printed wiring board probe card 68, while the mating side is typically soldered to the daughter card 134, whereby the daughter card 134 may be removeably connected from the printed wiring board probe card 68b, while providing a large number of reliable electrical connections. The daughter card 134 preferably provides further fanout of the electrical connections, from a typical pitch of about 1 mm for the flexible connections 64a-64n, to a common pitch of about 1.27 mm for a separable connector 132.
Upper substrate standoffs 116 are preferably used, to limit the maximum Z travel of the substrate 16, relative to the daughter card 134, thereby providing protection for the flexible connections 64a-64n. The upper standoffs 116 are also preferably adjustable, such that there is a slight pre-load on the flexible connections 64a-64n, forcing the substrate 16 away from the daughter card 134, thereby reducing vibrations and chatter of the substrate 16 during operation. A damping material 145 (e.g. such as a gel) may also preferably be placed at one or more locations between the substrate 16 and the daughter card 134, to prevent vibration, oscillation or chatter of the substrate 16.
The separable connector 132 (e.g. such as an FCI connector 132) preferably has forgiving mating coplanarity requirements, thereby providing fine planarity compliance between the daughter card 134 and the printed wiring board probe card 68. Supports 149, e.g. such as but not limited to fasteners 166, spacers 164, nuts 168, shims 170 (
Small Test Area Probe Assemblies.
While many of the probe card assemblies 60 described above provide large planarity compliance for a probe spring substrate 16, some probe card assemblies are used for applications in which the device under test comprises a relatively small surface area. For example, for wafers 92 which include a small number of integrated circuits 44 (e.g. such as two ICs), the size of a mating substrate 16 can also be relatively small (e.g. such as less than 2 cm square).
In such embodiments, therefore, the planarity of the substrate 16 to the wafer under test 92 may become less critical than for large surface areas, and the compliance provided by the probe springs 61a-61n alone is often sufficient to compensate for the testing environment. While the compliance provided by the probe springs 61a 61n may be relatively small, as compared to conventional needle springs, such applications are well suited for a probe card assembly 60 having photolithographically formed or MEMS formed spring probes 61a-61n.
The probe card assembly 60h is therefore inherently less complex, and typically more affordable, than multi-layer probe card assembly designs. The small size of the substrate 16 reduces the cost of the probe card assembly 60h, since the cost of a substrate 16 is strongly related to the surface area of the substrate 16.
The probe springs 61a-61n are fabricated on the lower surface 62a of a hard substrate 16, using either thin-film or MEMS processing methods, as described above. Signals from the probe springs 61a-61n are fanned out to an array of metal pads 182,184,186 (
The small test area probe card assembly 60h preferably includes a means for providing a mechanical connection between the printed wiring board probe card substrate 68 and the daughter card 134. In the probe card assembly 60h embodiment shown in
Lower substrate standoffs 114, which are typically taller than other features on the substrate 16 (except for the spring tips 61a-61n), are preferably placed on the lower surface 62a of the substrate 16, preferably to coincide with the saw streets 94 on a semiconductor wafer 92 under test, thereby preventing the wafer under test 92 from crashing into the substrate 16, and preventing damage to active regions on the semiconductor wafer 92.
As shown in
Standoffs 114, are preferably placed in locations matching inactive regions on the wafer 92, such as on the scribe lane 94, to prevent damage to active devices 44 on the device under test 44. One or more alignment marks 185 are also preferably located on the substrate wafer 174. The production cost and turnaround time for a probe card assembly 60 can be significantly improved, by standardizing the footprints of the micro BGA pad array 180, the daughter card 134, and the printed wiring board probe card 68.
Standardization of the micro-BGA pad array 180, as well power/ground pad assignments for the pads located on the substrates 16,134,68, allows a standardized pattern of vias 66a-66n in the base substrate 174.
Standardization of other componentry for probe card assemblies 60 often allows printed wiring board probe cards 68 (and in some embodiments daughter cards 134), to be used for different substrates 16 and integrated circuit devices 44, wherein only the routing of the substrate 16 is customized.
The use of a starting substrate 174 (
Alternate Applications for Probe Springs.
Photolithographic or MEMS spring probes 61, 14, 34, 50 may alternately be used for bare die burn-in sockets, such as for DieMate™ burn-in sockets, manufactured by Texas Instruments Inc., of Mansfield Mass., or for Die™Pak burn-in sockets, available through Aehr Test, Inc. of Fremont Calif. For bare die burn-in sockets which contact the substrate 16 around the edges, the probe springs 61 springs and fanout metalization are needed only on one surface (e.g. probe surface 62a) of the substrate 16. The required fanout is used to determine the size of the substrate 16, based on the number of the I/O signals needed to be routed to pads on the edge of the substrate 16. Alternately, vias 66 in the substrate 16, as described above, can be used to route the I/O signals to an array of pads on the opposite surface 62b of the substrate 16, allowing the substrate to be smaller, and thereby reducing the cost of fabrication.
Tiled Probe Assemblies.
As well, the tiling probe strips 192, having spring probes 61a-61n, typically include electrical vias 66a-66n and an array of electrical connections 64a-64n, such as seen in the probe chip substrate 16 of
The support substrate 204 preferably has a low thermal coefficient of expansion (TCE), and is preferably matched to silicon. As well, the substrate 204 typically fans out a large number of signal traces 46 (
In the tiled probe head 202 shown in
In alternate embodiments of the tiled probe head assembly 202, all pads 47 (
Burn-In Structures.
As integrated circuit devices 44 are initially placed on nano-spring contactor chips 214 (e.g. such as by a “pick and place” machine), an applied vacuum to the board vacuum ports 218 on the burn-in board 212 and generally aligned contactor chip vacuum ports 220 on the nano-spring contactor chips 214 prevents the placed integrated circuit devices 44 from shifting from their placed positions.
When all of the integrated circuit devices 44 are placed onto the corresponding contactor chips 214, a clamp plate 224 is preferably placed in contact with the integrated circuit devices 44, to retain the integrated circuit devices 44 in place during burn-in operation, and to allow the probe springs 61a-61n to provide electrical connections to the integrated circuit devices 44. Individual spring pads 226 may also be used, to push on the integrated circuit devices 44 under test, to allow for planarity tolerances of the clamp plate 224 and the burn-in board 212. The burn-in structure 210 preferably includes means 217 for retaining the clamp plate 224, such that once the clamp plate 224 is placed in contact with the integrated circuit devices 44, the clamp plate 224 is attached to the burn-in board 212, and the applied vacuum may be switched off.
Protective Coating Processes for Improved Spring Probes.
As described above, since spring probes 61 provide advantages of high pitch, high pin count, and flexibility, they may be used for a wide variety of applications. However, when these typically small spring probes 61 are used to contact traces 46 on integrated circuit devices 44, such as on semiconductive wafers 92, wherein the traces 46 often contain an oxide layer, the spring probes 61 are often required to break through oxide layers and establish adequate electrical contact with metal traces or conductive pads. As the spring probes 61 are often used many times, the small, unprotected spring probe tips 24 may become worm. Therefore, it would be advantageous to provide an electrically conductive wear coating on the contact tips 24 of the probe springs 61. However, such a protective coating is required to cover both the entire surface of the spring tip 24.
As described above, the probe springs 61 may be formed by a plasma chemical vapor deposition and photolithographic processes, such as disclosed in U.S. Pat. No. 5,848,685 and U.S. Pat. No. 5,613,861, wherein successive layers of conductive material are applied to a substrate, and wherein non-planar springs are subsequently formed. In such processes, however, a protective coating applied during the deposition process would not inherently provide a continuous coating on all surfaces of the formed non-planar probe springs. In alternate embodiments, the probe springs 61 may be formed by plating processes.
The probe springs 61, after their release, are not planar to the substrate surface. Therefore, a protective coating may be applied after the springs 61 have been released from the release layer 18.
When the protective coating 233 is applied 232 to the substrate 16 and probes 61, the protective coating 233 covers both the planar and non-planar regions on the exposed surface 62 of the substrate 16. While the spring probes 16 are covered with the protective coating 233 during the coating step 230, all the traces on the substrate structure are electrically shorted together, from the applied conductive coating 233. The conductive coating 233 is therefore required to be patterned, or partially removed, to restore electrical isolation between different probe springs 61 and their respective traces. While conventional photo-masking processes are typically used in the majority of integrated circuit processing, to selectively etch away conductive coatings, such as titanium nitride coatings, such photo-masking processes are used for planar structures.
The non-planar probe spring coating process therefore provides a protective coating to the tips 24 of the probe springs, while etching the unwanted protective coating in the substrate surface 16 and portions of the spring probes 61 which are not coated with photo-resist layers 248.
Spring Probe Substrates for Ultra High Frequency Applications.
As described above, the structure of the probe card assemblies 60 provides very short electrical distances between the probe tips 61a-61n and the controlled impedance environment in the printed wiring board probe card 68, which allows the probe card assemblies 60 to be used for high frequency applications. As well, the spring probe substrate 16 may preferably be modified for ultra high frequency applications.
A conductive layer 262d may be deposited on top of the insulating layer 267, to provide a coaxial, controlled impedance connection. Alternate layers of conductive materials 262 and dielectric materials 263 can preferably be integrated with the substrate 16, such as for embodiments which require decoupling capacitors in close proximity to a probe spring 61. For a substrate 16 which is a conductive or semiconductive material, such as silicon, an oxide or dielectric layer 269 may preferably be deposited or formed between the substrate 16 and a conductive reference plane 262c, thereby forming a capacitance structure 271, which may be used as a decoupling capacitor. Similarly, in some embodiments, the capacitor structure can also be formed on the opposite surface, or both surfaces of the substrate 16. In this case, a dielectric layer, e.g. oxide, may be deposited or formed on the surface prior to the deposition of the ground plane 262b. Electrical connection to the conducting substrate 16 is provided through regions (not shown) on the surface of the substrate 16 which are not covered by the dielectric 269 or ground plane films. Photolithographic techniques can be used to open up such regions for establishing contacts to the conducting substrate. In such cases where the substrate 16 is a conducting material, electrically insulative films, e.g. oxide, may be deposited or formed on the walls of the vias or holes to prevent electrical shorting. As well, one or more assembled components 265, such as passive components 265 (e.g. typically capacitors, resistors, and/or inductors), or active component devices 265, may be incorporated on either surface 62a,62b of the substrate 16.
The fixed portions 15 of the spring probes 61 typically extend a relatively short distance across the substrate 16. Traces 60 located on the surface of the substrate 16 are electrically connected to the fixed portions 15 of the spring probes 61, and electrically connect the probe springs 61 to the vias 78. The traces may be comprised of a different material than the spring probes 61, and are preferably comprised of metals having high electrical conductivity (e.g. such as copper or gold).
Advanced Multi-Die Probe Card System Architectures.
Multi-Die probing requires a high number of parallel contacts, e.g. such as electrical contacts, between the test head 76 (
Probe card assemblies 60, 300 such as a probe card assembly 60a (
Probe card assemblies 60,300 which contact multiple die 44 preferably comprise independent power supplies for each die 44, and preferably provide a plurality of power rails, e.g. 2-3 or more, for connection to each die 44. As well, the probe card assemblies 60 preferably include multiple bypass capacitors 172, as close as possible to each device under test DUT 44.
The probe card assembly 60 provides transfer of signal and power connections from the devices under test 44 and the test head 76, along the Z-axis 84, while preferably providing controlled impedance. The probe card assembly also transfers signal and power connections in the X-Y directions 80,82 (
As described above, some embodiments of the probe card assemblies 60, such as the bridge and leaf spring suspended probe card assembly 60b (
In some embodiments of the staged interface probe card assembly 300, enhanced compliance is provided entirely by probe springs 412, wherein the probe chip substrate 16,310 is held stationary with respect to the motherboard PWB 304. Lower standoffs 114 are typically provided on the lower surface of the probe chip substrate 310, which limit the minimum vertical distance between the probe chip substrate and a wafer 92. The height of the lower standoffs 114 is typically less than the resting, i.e. non-contacting height of the probe springs 61,412, such that the probe springs 61,412 are allowed to flex and provide a compliant connection to one or more devices 44 on a wafer 92. As seen in
As seen in
The intermediate connector 306 shown in
The upper interface 308 may comprise a variety of interfaces, such as an upper interposer 344 (
The lower interface 312 may also comprise a variety of interfaces, such as an interposer 348 (
The lower interface 312 can be a fixed or permanent connection in some embodiments, such as a solderball interface, if the vertical translation block VTB 342 (
Alternate embodiments of the vertical translation block VTB 342 comprise a plurality of non-fixed connections, such as an interposer or springs 64a-64n (
The staged interface probe card assembly 300 shown in
Some embodiments of the stiffener plate incorporate handles 837,839 (
As seen in
The compliant member 326 holds the probe chip 310 in position on the X-Y axis 80,82 while allowing it to move or ride in the Z-Direction 84. The compliant member 326 retains the interposer 150 in a compressed position, through a controlled flexion in the compliant member or decal 326, which is caused by any Z plane 84 delta between the bottom surface 305a of the interposer 150 and the mounted position of the compliant member 326.
The compliant member 326 also provides compliance for differences in thermal coefficients of expansion (TCE) between the probe chip 16,310 and the decal ring 328. For example, for decal probe assembly 300 in which a decal ring 328 which has a higher coefficient of expansion than a probe chip 16,310, the compliant member 326 readily flexes, i.e. stretches, at elevated temperatures, between the probe chip 12,300 and the decal ring 328.
The compliant member 326 holds the probe chip 310 in position on the X-Y axis 80,82 while allowing it to move or ride in the Z-Direction 84, as the Z-Block 342 expands due to thermal variation. The compliant member 326 retains the bottom interposer 348 in a compressed position, through a controlled flexion in the compliant member or decal 326, which is caused by any Z plane 84 delta between the bottom surface 349a of the bottom interposer 348 and the mounted position of the compliant member 326. The compliant member 326 also provides compliance for differences in thermal coefficients of expansion (TCE) between the probe chip 16,310 and the decal ring 328.
As seen in
Z-Block retaining clip assemblies 352 hold the Z-block 342 to the bottom stiffener ring 346, and allow the Z-block to expand in the Z-direction at elevated temperatures. The bottom stiffener ring 346 holds and supports the Z-block 342 toward the motherboard 304, typically with an intermediate upper interposer 344.
Planarity adjustment 326 is preferably provided between the motherboard 304 and the probe chip wafer 16, such as by one or more planarity adjustment screws and/or shims.
In some embodiments of the decal interposer assembly 300, means for providing planarity 324 comprises a plurality of differential screw assemblies 824 (
In some embodiments of the Z-Block decal interposer assembly 300b, the bottom stiffener ring 346 further comprises means for planarity adjustment, such as by one or more planarity adjustment screws 324, 824 (
As seen in
The compliant membrane or mesh 326 retains the probe chip 310,16 in position on the X axis 80 and Y-axis 82, while allowing the probe chip 310,16 to ride in the Z-Direction 84 as the Z-Block 342 expands due to thermal variation. The compliant membrane or mesh 326 keeps the bottom interposer 348 fully compressed at all times, by a controlled flex in the decal 326 caused by a Z plane delta between the bottom of the bottom interposer 348 and the mounted position of the decal ring 328, which provides compliance for TCE differences between the probe chip 310 and the decal ring 328.
Enhanced Probe Chip.
In some embodiments, such composite layers are formed by electrodeposition technique also. In the probe chip structure 310 shown in
The connection structure 393 is comprised of a stack of one or more metal layers 376,394,396, which typically includes an outer layer 396 comprising gold, for reliable contact to interposer contacts or springs. In some embodiments of the probe chip 310, the connection structure 393 comprises a first titanium metal layer 376, a second nickel layer 394, and a third gold metal layer 396. In other embodiments of the probe chip 310, the connection structure 393 comprises a first Cr layer and Cu metal layer 376, a second nickel layer 394, and a third gold metal layer 396. The thickness of the layers 376,394,396 is typically controlled to reduce electrical sheet resistance. In some embodiments of the connection structure, the first Cr/Cu layer 374 comprises a thickness 1-4 um, and/or the outer gold layer comprises a thickness of 1-4 μm.
In some embodiments, a dielectric layer such as polyimide, photoresist, epoxy, or kapton, can be added on top of the stacked structure 393, such as to serve as a solder mask 398 for soldering components, e.g. bypass capacitors to the supper surface 396, or to serve as insulation against shorting to undesired locations in the interposer 348.
As seen in
In alternate embodiments of the probe spring 61,412, the spring tip may further comprise a secondary contact tip detail, i.e. a spring tip button contact, typically comprising rhodium, palladium or cobalt, as disclosed in Provisional Application Ser. No. 60/365625, Filed 18 Mar. 2002, Nanospring with Increased Resistance to Failure, the disclosure of which is incorporated herein by reference.
Probe Chip Component Functions.
On the probe side 62a of the probe chip substrate 372, the probe chip 16,310 supports the probe springs, such as photo-lithographically defined springs 61, for contact to a wafer under test 92. The probe chip 16,310 provides signal and power fan-out to a grid achievable by the thick motherboard PWB 304, such as seen in
The probe chip 16,310 also preferably provides controlled impedance to the fan-out traces 307 (
Some preferred embodiments of the probe chip 16,310 comprise two or more electrically conducting vias 374 per electrical path, so as to increase manufacturing yield through redundancy. Similarly, some preferred embodiments of the probe chip comprise two or more probe springs 61 per electrical path (
Probe Card Assembly Sequence.
As seen in
In an exemplary assembly process, as seen in
A second sub-assembly 361b is typically formed by pushing alignment pins 330,350 into the Z-block PWB 342, and by attaching the Z-block 342 into the bottom stiffener ring 346, such as by alignment pins 350, Z-block retaining clip rings 352, and screws 353.
The second sub-assembly 361b is then typically placed on a temporary support structure, such that the top interposer 344 is controllably placed onto the Z-block 342, and aligned with the interposer alignment pins 333. Small blind holes (not shown) are provided in the motherboard PWB 304, corresponding to the pins 333, to make room for the insertion of the exposed sections of the pins.
The first sub-assembly 361a is then placed over the second sub-assembly 361b, while aligning the stiffener ring alignment pins 354 on the top surface 347b (
The third sub-assembly 361c is then typically turned over and placed onto a second temporary support structure, such that the bottom interposer 348 is controllably placed onto the lower surface 343a of the Z-block 342, and aligned with the interposer alignment pins 330. The decal subassembly 361 d is then positioned onto the bottom interposer 348, which in some embodiments is guided by the alignment pins 354. The use of a temporary assembly support fixture ensures alignment between the sub-assemblies 361c,361d, and allows the decal assembly 361d to be lowered gently onto the interposer 348, such that the outer ring 328 is then further compressed, to contact the bottom stiffener 346, while stretching the membrane 326. The assembly fixture holds the ring 328 in place, while fasteners 356 are tightened.
It should be appreciated that the descriptions for the assembly given above is for a typical embodiment. Some variations in the assembly fixture and process, which are based on the basic conception outlined above are within the scope of this invention. For example, the interposers 348 or 344 may not be required to have any holes as shown in
Probe Chip Structure Details.
Vias 414 extend through the probe chip substrate 372, from the spring side surface 311a to the connector, i.e. interposer, side surface 311b. The vias are preferably arranged in redundant via pairs 416, such as to increase the manufacturing yield of the probe chip 16, 310, and/or to promote electrical conduction, particularly for power traces. The via pairs 416 shown in
An adhesive region 437 is located along the outer periphery of the interposer side surface 311b of the probe chip 16,310, whereby an adhesive 329 is attached or applied between the probe chip 16,310 and a compliant member or decal 326.
As seen in
Probe Chip Assembly Structure.
One or more lamination plate and stencil alignment pins 472 are typically located on the decal ring cavity 470, to accurately receive either a top lamination plate 474, having matching plate alignment holes 476, or a decal excise stencil 478, having stencil alignment holes 479. As described below, the top lamination plate 474 is used during lamination of the compliant member 326 to the probe chip 16,310, such as with an adhesive 329.
The decal excise stencil 478 further comprises a stencil template opening 480. When the decal excise stencil 478 is positioned on the fixture base 462 over an assembly comprising a probe chip 310 adhesively mounted to a compliant member or decal 326, the stencil template opening 480 is generally aligned about the outer adhesive region of the probe chip 310, such that cutting and removal of the inner region of the decal 326 provides access to the surface of the probe chip 16,310.
Decal Assembly Sequence.
An adhesive sheet 329 (
A compliant member or decal 326, which has been pre-strung to a specified tension and attached on the decal ring 328, is then placed 496 on the fixture 462 over the adhesive 329. In some embodiments of the lamination fixture 460, the ring side of the decal 326 is placed side up within the fixture 460. In alternate embodiments of the lamination fixture 460, the ring side of the decal 326 is placed side down within the fixture 460. The decal ring 328 is aligned to the fixture 462 using the alignment pins 472.
The fixture top plate 474 is then placed 498 over the decal 326, which compresses the decal 326 against the adhesive sheet 329, while held in place via the alignment pins 472 to the fixture base 462.
The assembly fixture 460 is then used to cure the adhesive 329, which typically comprises the steps of placing 500 the assembly 460 into an oven, placing 502 a weight or other compressive force on the fixture top plate 474, baking 504 to cure the adhesive 329, and removing 506 the weight and assembly 460 from the oven.
Removal of the inner portion of the compliant decal 326 comprises the placement 508 of the decal excise template 478 over decal 326. The decal excise template 478 is aligned to alignment pins 472 on the fixture bottom plate. The inner portion of the decal 326, i.e. inside the adhesive area 319, is then separated or excised 510 with a knife.
Interposer Structures.
Interposer springs 521, such as photolithographically formed probe springs 521, are generally arranged within an interposer grid array, to provide a plurality of standardized connections. For example, in the top interposer 344 shown in
Interposer vias 524 extend through the interposer substrate 522, from the first surface 523a to the second surface 523b. The interposer vias 524 are preferably arranged in redundant via pairs, such as to increase the manufacturing yield of the interposer 520,344,348, and/or to promote electrical conduction, particularly for power traces.
The opposing surfaces 523a,523b are typically comprised of a release layer 526, such as comprising titanium, and a composite layer 530,532, typically comprising a plurality of conductive layers having different inherent levels of stress. Interposer vias 524, e.g. such as CuW or gold filled, extend through the central substrate 522, typically ceramic, and provide an electrically conductive connection between the release layers 526. The composite layer 530,532 typically comprises MoCr, in which the interposer probe springs 521 are patterned and subsequently to be later released within a release region 528.
A seed layer 534, such as a 0.5 to 1 um thick gold layer, is preferably formed over the composite layers 530,532. A tip coating 540, such as rhodium or palladium alloy, is controllably formed at least over the tips of spring fingers 532, such as to provide wear durability and/or contact reliability. Traces 536, typically comprising copper, are selectably formed by plating over the structure 520, as shown, such as to provide reduced resistance. As well polyimide PMID layers 538 are typically formed over the structure 520, as shown, to define the spring finger lift regions. A thick gold layer 534 remains on the lifted fingers 521, so as to reduce sheet resistance of the fingers 521.
Some embodiments of the interposer 520 comprise integrated capacitors 576, which are typically smaller in thickness than the thickness of the interposer substrate 522.
Before finger lift, an adhesive tape is applied to one side 523 of the interposer substrate 522. The capacitors 576 are picked and placed into the cavities 574 from the opposite side 523, e.g. 523b, of the substrate 522, and are temporarily held in place by the adhesive tape. Epoxy is then dispensed to either end, to complete contact between the capacitors 576 and the dog bone vias 582. The epoxy is then cured, after which the adhesive tape is removed. The fingers 521 are then lifted from the substrate 522.
Alternate Interposer Structures & Processes.
The alternate decal interposer structure 520b comprises pairs of oppositely pointing springs 521 that are joined at the base, and are attached to the edge of an opening in a membrane 602 which in turn is supported like a drum inside a support frame 610. The spring pair 521 extends away from the plane of the membrane 602 protruding through the hole in the membrane 602. The membrane 602 is preferably held under tension inside the frame 610, such that the locations of the spring pairs 521 are held constant.
This interposer structure 520b has the advantage that it does not require a substrate with vias and also that fingers 520 from both sides can be patterned with a singe photolithographic step, thus greatly lowering the fabrication cost. In addition, in embodiments where the alternate interposer 520 is used to interface between the connector side 62b of a probe chip 310 and a PWB board 304 where there are passive components, such as bypass capacitors, mounted on the connector side 62b of the probe chip 310, openings for the components to protrude through the interposer 520 can be easily provided in the photolithographic steps to pattern the membrane 602 and not requiring an expensive laser step to drill holes in the interposer substrate 602.
Being suspended on a flexible membrane 602, the alternate interposer 520b can also can be used in applications where the interfacing surfaces are not flat. Also, the thickness of an alternate interposer 520b as a connector can be as small as several microns. The alternate interposer 520b can also have a much smaller connector pitch, since the alternate interposer 520b is not confined by the via pitch of the probe chip substrate 310. The pitch can be as small as the photolithographic process can pattern the springs. Unreleased portions of the metal can also be patterned on the membrane 602 to form interconnect as well. The support frame 610 can also be bent if it is made of a ductile material such as metal. This allows the membrane interposer 520b to be shaped into infinite topological shapes.
A second layer 598, typically comprising titanium, is formed on top of the first stress sandwich, comprising a pattern which defines the region of the fingers that will lift away from each other. Note that there is a region 597 of the finger where this release layer is removed. This region 597 forms the contact region between the top and bottom finger 521. The second release layer 598, typically having an approximate thickness of 1,000 angstroms, is sputter formed 636 and patterned 638, with connection regions 597 that generally define the end of the finger lift regions 528. A second MoCr layer 600 is sputter formed 640 on the second release layer 598, comprising a plurality of stress layers 17a-17n, such as seen in
Photoresist is then spun 642 to define the finger layout for the springs 521, and the second MoCr layer 600 is etched 644, such as by either a wet or dry etch process, to open regions where the springs 521 will lift, as well as any other regions where a hole is desired in the membrane, such as for mating components to protrude through. The second release layer 598 is then etched 646, and the first MoCr tensile stress layer 596 is etched 648, such as to allow the fingers 521 in the first MoCr layer 596 to be more undercut, while the first release layer 594 is left to overhang.
A polyimide layer 602, of an exemplary thickness of 18 μm to 25 μm, is spun and patterned 650 by a wet etch process, to open the lift window and the flat base region in the fingers 521. A seed layer 604, typically comprising gold, is then sputtered and patterned 652, to provide shorts between all fingers 521, but not to impede lift.
A plating mask 606, such as anodized aluminum, is then patterned 654 over the seed layer 604, so that only the fingers 521 are plated. The plating mask 606 is comprised of a material that can withstand being flexed after the substrate 592 has been removed and also that is easily removed, without attacking the fingers 521.
A support ring 610, typically comprising stainless steel, is attached 656 to the outside of the wafer substrate 592, such as by an epoxy adhesive 608, to serve as a decal support ring. The attached region of the substrate does not include either the seed layer 604 or the plating mask 606. Stainless steel is a preferred material for the support ring, where the probe springs are to contact a printed wiring board. In some embodiments requiring the pins to contact silicon devices, the support ring is comprised of a material, such as molybdenum, with a relatively low thermal coefficient of expansion that is relatively close to that of silicon.
The assembly is then finger lift etched 658, causing the entire membrane to delaminate from the substrate 592, as the fingers 521a,521b defined layers 596,600 lift in opposing directions. The finger lift etching step 658 may require a longer time period in regions located under the support ring 610.
Alternately, the substrate 592 can be made of a material such as aluminum, which can be removed by mechanical or chemical means.
As seen in
In alternate embodiments of the decal interposer assembly 300, such as an ISOCON™ Connector, available through Circuit Components, Inc., of Tempe Ariz., is used as the upper interposer 344. While a ISOCON™ Connector typically requires a higher force to establish electrical contacts, ISOCON™ Connectors often provide a suitable cost-effective interconnection for the upper interposer 344, since the required force can be achieved between the Z-Block and the motherboard PWB 304. Interposers which require relatively low contact forces are typically chosen for connection between the Z-Block 342 and the probe chip 16,310.
Z-Block Architecture.
Alternate Enhanced Probe Assemblies.
In contrast to the Z-block decal interposer assembly 300b, as seen in
In some embodiments of the Z-block decal interposer assembly 300c, planarity adjustment is provided by shims 827 (
In some embodiments of the Z-block decal interposer assembly 300d, the spring connections 64a-64n on the upper surface 311b of the probe chip 16,310 are redundant springs 64a-64n. The Z-block 342 shown in
In a similar manner to the Z-block decal interposer assembly 300c, the Z-block decal interposer assembly 300d provides planarity adjustment 324, either by shims 827 located between the motherboard 304 and the probe ring 346, or by other planarity adjustment mechanisms, such as differential screw assemblies 824 (
The pin block 742 comprises a plurality of dielectric holes 746, through which the array 745 of pin connectors 744 extend. Pin templates 748,752, typically comprised of KAPTON®, are located on opposing surfaces of the pin block 742. Ground contacts 758 within holes 746 provide ground connections between one or more pins 744 and the pin block 742. The pin grid array 745 electrically contacts a pin socket array 755 in the motherboard 304.
As seen in
Planarity Adjustment Mechanisms for Compliant Carrier Probe Card Assemblies.
As described above, many embodiments of the decal interposer assemblies 300 comprise planarity adjustment mechanisms 324.
As seen in
As seen in
High Performance Spring Contact Packages.
As seen in
The high performance spring package 902 comprises a structure for building a package utilizing springs 61 on a substrate 903, such as for a single IC or MCM package. The probe tips 61 are fabricated on the substrate 903 using thin film or IC or MEMS based processing methods to achieve low manufacturing cost and well-controlled uniformity, as well as to fabricate arrays of highly miniaturized probe springs with ultra-small pitch, e.g. 10 to 50 microns.
The probe springs 61 are fabricated on either the first surface 906a of the first substrate 904 (
A single substrate wafer, which may contain multiple high performance spring packages 902 can be built on the first substrate wafer 904, providing cost-effective fabrication. For spring probe substrates 904 having a small surface area, several spring probe contactor packages may typically be fabricated from a single wafer 92 (
As seen in
For embodiments in which the substrate 903 is composed of electrically conducting or semiconducting materials, such as doped silicon, the fabrication process is modified similar to the modification of the probe chip, as explained earlier with respect to
As stated above, the structure of the probe card packages 902 provides very short electrical distances between the probe tips 61 and the controlled impedance environment. This allows the high performance spring packages 902 to be used for high frequency applications. As shown in
For embodiments wherein the traces on one or both surfaces of the substrate 903 are required to be impedance controlled, one of more conductive reference planes may be added within the substrate, either on top of the traces, below the traces, or both above and below the traces. The substrate 903 may also contain alternating ground reference traces, which are connected to the one or two reference planes, effectively providing a shielded coaxial transmission line environment. While the first substrate 904 typically comprises a ceramic material, the layered substrate 922 comprises conductive traces within a dielectric material, such as an organic or inorganic material. For some other embodiments controlled impedance environment in electrically conducting vias or through holes within the substrate 903 can be provided by constructing the via as shown in
Advantages of High Performance Spring Packages.
As described above, MEMS or IC processing methods can be used to fabricate the springs 61,412. The high performance spring package 902 has all of the benefits of “chips-first” and/or BBUL packages, while also allowing the replacement of any defective IC 44. The high performance spring package 902 can be tested prior to attaching the ICs 44, which significantly lowers the cost and risk of placing single or multiple ICs 44 in one package 902.
The substrate structure, with through holes 908, preferably comprises a plurality of electrical routing layers built on top of it to provide the functions of the HDI. These functions include: 1) much higher density of I/O connections than attainable in flip-chip or wire bonded packages, 2) higher interconnect performance can be achieved on an IC and 3) thinner packages.
This spring-based package 902 maintains low power and signal inductance by pushing the spring nearly flat to the multi-layer routing traces. The routing, directly under the spring, can be constructed to maintain controlled impedance as described in W0/09623. The distances through the substrate can be kept very short and a ceramic substrate 904 supports RF frequency operations.
The high performance spring package 902 can be used as a “test package”, such as to test expensive ICs 44 before committing them to the package 902. Some embodiments of the high performance spring package 902 comprise similar decoupling and impedance control features, as describe above for probe card embodiments. If permanent connection is desired between the probe springs 61 and the electrical contact pads on the IC 44, following the testing and identification of good chips, it can be done using conventional joining techniques used in packaging, such as by reflowing the solder at the contact or by adhesive.
As seen in
High performance spring packages 902 are an effective debugging tool for testing individual ICs 44 at RF frequencies, where the load of the package 902 affects the final packaged IC performance. The use of high performance spring packages 902 therefore helps to reduce the time-to-market characterization for new high-performance devices used in MCM packages, since integrated circuit devices 44 are not required to be committed to the final package 902 until the testing under load is verified. The test package also provides means to mix one or more RF signals with hundreds or thousands of digital signals. At high testing and/or manufacturing volumes, high performance spring packaging 902 significantly lowers package cost, as compared to a BBUL approach comprising similar frequency capabilities.
Quick-Turn Probe Assemblies.
The probe assembly 60,300 shown in
As seen in
The quick turn process 960 shown in
The probe chip substrate 310 is then produced, at step 974, based on both the standardized information 968 and the received, i.e. customized, information 970, wherein the probe chip substrate comprises a plurality of spring probe contact tips 412, such as seen in
Applied Forces Associated with Interposers & Springs.
Forces and Deflection in Compliant Carrier Assemblies.
As seen in
Compliant Carrier with Stiffening Ring.
Assembly Details of Enhanced Carrier Assembly.
The enhanced compliant assembly 1060 can be constructed by several means, such as but not limited to one or more adhesive and/or mechanical means for fixedly attaching componentry.
In some embodiments of the enhanced complaint carrier assembly 1060, adhesive attachments 437 and/or 1072 are preferably a conformable epoxy, which conforms to differences in planarity between the probe wafer 310, the stiffening ring 1062, and/or the carrier 326.
Probe Assemblies having Enhanced Compliant Carrier Assembly.
After assembly, the added stiffness from the stiffening ring 1062 reduces the bow caused by membrane tension 1032 and/or IPS force 1052. The stiffening ring 1062, typically comprising ceramic, reduces non-planarity of the probe substrate 310, and minimizes deflection, i.e. probe chip bow 1072, which would otherwise be caused by interposer (IPS) force 1052 and/or membrane tension 1032. Through the enhanced planarity of the probe substrate 310, the enhanced compliant carrier assembly 300j promotes uniform probe height 32 (e.g.
The stiffening ring 1062 may be comprised of a wide variety of materials, such as but not limited to metals, ceramics, polymers, reinforced polymers, or composites, including composites of polymers, metals, or ceramics with nano particles, e.g. such as carbon nanotubes.
As seen in
Deflection Comparison and Analysis.
Preliminary work in the addition of a stiffening ring 1062 to a compliant carrier assembly 361d (e.g.
The addition of a ceramic stiffening ring 1062 to the backside of the probe-chip 310 was found to significantly reduce the bow 1072. In testing, a 0.5-mm (20-mil) thick ring 1062 reduced deflection by approximately one-half. However, multiple 20 mil assemblies showed inconsistent results, in which the maximum bow 1045 varied by approximately +/−25 μm.
As seen in
Stiffening Ring for Mosaic Probe Assemblies.
While the exemplary stiffening rings 1062 described above are associated with a single probe substrate 310 attached to a compliant carrier 326, a stiffening ring 1062 can alternately be integrated with other probe assemblies.
In some embodiments of the enhanced mosaic probe carrier assembly 1060, the probe chip mosaic segments 1210 are attached to an attachment frame 1223 through a polymeric membrane or adhesive 437, or by other means to decouple TCE differences between the attachment frame 1223 and probe chip 310. In some embodiments of the enhanced mosaic probe carrier assembly 1060, the attachment frame is comprised of molybdenum, which has a good TCE match to the silicon wafer (DUT) 44 (
While some embodiments of the enhanced mosaic probe carrier assembly 1060 may alternately comprise a single ring which provides both attachment 1223 and stiffening 1062 functionality, the use of a separate attachment ring 1223 and stiffening ring 1062 provides a wide variety of carrier embodiments 1060 for attachment, bow correction, and/or thermal performance.
The enhanced mosaic probe carrier assembly 1060 comprises a plurality i.e. a mosaic 1230, of probe chips 1210, which are assembled together and suspended from a compliant carrier 326. In some mosaic assembly embodiments 300 the individual probe chips 1210 are fixedly attached to the attachment ring 1223, and then the attachment ring 1223 is fixedly attached to the compliant carrier 326. In other mosaic assembly embodiments 300, such as shown in
The assembly 300k may also comprise one or more ports 1229 on the side of the attachment ring 1223, and/or ports 1225 on the side of the stiffening ring 1062, whereby a vacuum 1227 may be applied.
The stiffening ring 1062 may be comprised of a wide variety of materials, such as but not limited to metals, ceramics, polymers, reinforced polymers, or composites, including composites of polymers, metals, or ceramics with nano particles, e.g. such as carbon nanotubes.
The mosaic decal probe assemblies, in which a mosaic 1230 of probe chips 1260 is assembled as a decal into a thin membrane that is suspended in a ring 1222, which is preferably made of a material that has a thermal coefficient of expansion (TCE) matching that of silicon. The membrane 1224 is mounted on the 1222 ring in tension, such as it stays in tension 1032 (
One important function of the above-mentioned thin membrane 1224 and the ring 1222 is to facilitate maintenance of tight positional accuracy of the contact probe springs on the terminal contact pads on the integrated circuits (IC) of the wafer during temperature excursion. For example, if the TCE of the probe chip 1262 and ring materials is exactly or substantially the same as that of the wafer substrate, the relative movement of the probe springs and the IC terminal pads during temperature excursion is minimized. For semiconducting silicon integrated circuits, examples of such materials for the probe chip 1262 and ring 1222 are silicon or glass-ceramics. Another example for the ring 1222 is molybdenum which being a metal cannot be used as probe chip material unless it is properly insulated for isolation. For other solid state devices, comprising semiconducting III-V compounds, II-IV compounds, arrays of surface acoustic wave devices, or arrays of display elements comprised of inorganic or organic materials, or arrays of micro-electromechanical (MEMS) devices, the probe chip 1262 and ring 1222 materials are similarly selected so that TCE of these materials are substantially similar to that of the device substrates.
The probe chips 1262 typically comprise a substrate with electrically conducting vias that connect pads and traces from one surface to the other surface. On the side contacting the wafer under test, contact springs are fabricated to match the contact pads on the wafer. Similarly, on the side facing the PWB, contact springs are fabricated to match the pad and associated plated through holes on the PWB. Interconnect traces comprising patterned metalization on one or both sides of the substrate provides redistribution of the signals so that the pitch of the spring contacts can be translated from the typically narrow die pad pitch to a wider one producible by standard PWB technology. The substrates may also have multi-layer metallization (more than two layers—one on each surface), similar to those currently used in the industry for high performance packaging.
Typically, in wafer level burn in and testing, a number of die sites share common input signals to reduce to total number of signals from the test system. To avoid a defective die site from shorting out a signal causing all the sites connected to the same signal to be untestable, a resistor is typically inserted in the trace to each input thus isolating it from the shared signal trace. This can be incorporated into the substrate, which leads to further simplification of the PWB. This can be fabricated by methods such as conventional thin or thick film deposition techniques on the substrate.
The enhanced mosaic compliant carrier assembles 1060, which preferably include a stiffener ring 1062, are readily applied to probe substrates 1262 which include various types of contact springs. For example, these springs include, but not limited to: (i) arrays of springs fabricated using integrated circuit fabrication techniques comprising thin films, photolithographic patterning and selective etching; (ii) stress metal springs that are fabricated utilizing the inherent stress gradients present in a deposited film; (iii) discreet springs fabricated individually or as a group and subsequently mounted onto a substrate. For the stress metal springs, these films are deposited by conventional physical vapor deposition, chemical vapor deposition or electro-deposition techniques onto other films, which act as a release layer and an anchor layer. Typically the film is comprised of a plurality of layers with different stress levels that are introduced by varying the deposition parameters during sputtering or electroplating. Upon patterning the spring finger a portion of the finger (free portion of the spring) is released from the substrate by etching the release layer, resulting in lifting of spring fingers, which lift and extend away from the substrate forming a three dimensional structure, while the other portion (base of the spring) remains anchored to the substrate. The discreet springs are typically fabricated using wire bonding techniques that form and attach a core to a substrate which is subsequently coated with at least one film. Typically these coated core springs, composite springs, are subsequently mounted onto other substrates, which are used in probe card assemblies. Further details about these various types of springs are available in the cited references.
Two preferred embodiments are currently contemplated. A first embodiment of the invention uses a low-count mosaic comprised of a few probe chips, for example four probe chips. The probe chips have the same TCE as the wafer under test, e.g. silicon. In this embodiment, the probe chip is peripherally attached to the membrane.
A second embodiment of the invention provides a high-count mosaic, using a high number of probe chips, for example nine or more probe chips. In this embodiment, the probe chips are smaller and can have a slight TCE difference from that of the test wafer, e.g. silicon. For example, the probe chips may be made out of a ceramic material. This embodiment of the invention uses a center attachment to secure the probe chips to the membrane.
Other embodiments with different TCE matching characteristics and probe chip sizes could benefit from attaching at both the central and peripheral areas to the membrane.
The contacts on each surface of each of the die site regions are typically configured such that at least one contact on the first side of each die is electrically connected to at least one contact on the other surface of the die. Various types of contacts are known that are suitable for use in connection with the invention disclosed herein. See, for example, Massively Parallel Interface for Electronic Circuits, U.S. patent application Ser. No. 09/979,551 filed Nov. 20, 2001; Construction Structures and Manufacturing Processes for Integrated Circuit Wafer Probe Card Assemblies, U.S. patent application Ser. No. 09/980,040 filed Nov. 27, 2001; Construction Structures and Manufacturing Processes for Integrated Circuit Wafer Probe Card Assemblies, U.S. patent application Ser. No. 10/094,370 filed Mar. 8, 2002; and Systems for Testing and Packaging Integrated Circuits, U.S. patent application Ser. No. 10/069,902 filed Feb. 20, 2002, which are incorporated herein by reference.
In
In other embodiments, the membrane may be pre-cut such that the contacts are exposed upon initial assembly of the probe chips and the membrane. In the presently preferred environment of the invention, the spring contacts that are exposed by cutting away the membrane are those which contact the printed wiring board, although in other embodiments of the invention the spring contacts which contact the wafer under test could be exposed by cutting away the membrane appropriately. The membrane itself may be made of a film, such as a polyimide or other material, for example, such as KAPTON™ , manufactured by DuPont, Inc. Other examples of the membrane are given in co-pending application CONSTRUCTION STRUCTURES AND MANUFACTURING PROCESSES FOR PROBE CARD ASSEMBLIES AND PACKAGES HAVING WAFER LEVEL SPRINGS, U.S. patent application Ser. No. 10/178,103, filed 24 Jun. 2002. These include, but not limited to, flexible and compliant sheet, mesh or screen.
Additionally, the spring contacts on the probe chips 1210 which are used to contact the printed wiring board or interposer provide a sliding contact, such that stretching of the film 1224 as a result of expansion and contraction of the ring 1222 which results in moving of the probe chips 1210 does not interrupt a connection between the spring contacts and the printed wiring board or interposer 348. Thus, the spring contacts 61 slide across the interconnect pads of the printed wiring board or interposer, as the probe chips expand and contract due to change in temperature, and yet they remain in electrical contact with the printed wiring board or interposer. The use of spring contacts also addresses any lack of planarity in the printed wiring board or interposer.
In reference to
For both the low count and high count embodiments, the thickness of the membrane 1224 plus adhesive 1292 adds to the height of the spring needed to make contact through the openings in the membrane 1224. This can be mitigated by milling a recess in the printed wiring board 1302, in regions matching the membrane 1224, to allow the membrane 1224 and/or adhesive 1292 to protrude into the printed wiring board 1302.
The thickness of the adhesive and depth of the milling can be adjusted to provide a stop or stand-off to prevent the spring from bottoming out on the pad. A stand-off on the side of the wafer side of the probe chip can be used to keep the probe from bottoming out on the IC wafer (see, for example, CONSTRUCTION STRUCTURES AND MANUFACTURING PROCESSES FOR PROBE CARD ASSEMBLIES AND PACKAGES HAVING WAFER LEVEL SPRINGS, U.S. patent application Ser. No. 10/178,103, filed Jun. 24, 2002.
System Advantages.
As described above, the probe card assemblies 60, enhanced probe card assemblies 300, interposer structures 520,520b, enhanced compliant probe carrier assemblies 1060, and high performance packages 902 provide several advantages over conventional probe and package technologies.
For example, many embodiments of the probe card assemblies 60, enhanced probe card assemblies 300, interposer structures 520,520b, and high performance packages 902 comprise photolithography-patterned springs 61,412,521, and are typically formed by stress metal film batch processing, which is inherently lower in cost then either mechanical or MEMS based processing. The springs are formed through the use of two dimensional processing methods, through which three dimensional structures are formed. In contrast, other conventional spring processes require additional processing steps to create three dimensional springs. In alternate processing embodiments, the springs are formed through the use of two dimensional plating processing methods to form a differential stress gradient between plating layers, through which three dimensional structures are formed.
The assembly techniques described in this document use components or substrates comprising stress metal probe elements, i.e. springs, which are all batch-fabricated on each of the substrates by IC processing techniques including photolithography. As a result the process allows fabrication of probe card assemblies and packages using arrays of very short, e.g. 100-200 micron long and 10-20 micron wide, probe elements with ultra-small pitch, e.g. 10-50 micron, that is not manufacturable by any currently used technology. It should also be understood that the application of the assembly and packaging techniques disclosed in this document are also applicable to substrates or components comprising arrays of probe elements with larger dimensions and greater pitch that can be fabricated using the technology presented in this document or by any other method available today.
Furthermore, the probe architecture typically comprises a substrate having through holes for direct connection to the other side, in which photolithographic methods define both the placement of the springs and the route connections from the holes to the springs, which enables the use of simpler starting material and shorter processing times.
As well, the disclosed probe and package architectures 60,300,902 preferably comprise reusable components, i.e. standards, through the use of standardized master slices 962, such that the majority of a probe card 60,300 and/or or package assembly 902 can be implemented for a variety of connected devices 44 and wafers 92. The master slice 962 is readily matched to a particular interconnection specification 972, thereby reducing the “cost of ownership” needs for a particular customer.
As described above, the probe card assemblies 60, enhanced probe card assemblies 300, interposer structures 520,520b, and high performance packages 902 comprise one or more substrates, which can be built using a variety of starting materials, such as ceramic, glass or quartz, silicon, organic board, and/or multi-layer ceramic, depending on the requirements. The assembly substrate may further comprise multi-layer metal layers, such as to improve routing and performance.
Furthermore, the probe card assemblies 60, enhanced probe card assemblies 300, interposer structures 520,520b, and high performance packages 902 may further comprise stand offs on any of the substrates, such as to protect the probes 61,412, protect the devices 44 and/or wafer 92, or to control the amount of pad scrub in a clamped wafer level cartridge or cassette application. The stand offs can also be applied to connector side 62b of the Probe chip 16, 310, such as to protect springs that interface from an interposer 520,520b.
As well, the analysis of probe substrate deflection within compliant probe assemblies, and the associated development of enhanced structures which provide improved planarity in compliant probe structures 300, 1100 has provided significant improvements to a wide variety probe and mosaic probe assemblies.
Although the disclosed probe card assembly systems and improved non-planar spring probes and methods for production are described herein in connection with integrated circuit test probes, probe cards, and/or packages, the system and techniques can be implemented with other devices, such as interconnections between integrated circuits and substrates within electronic components or devices, burn-in devices and MEMS devices, or any combination thereof, as desired.
In addition, it is within the scope of this invention that assembly structures and methods disclosed in this document can be used to test, burn-in or package various miniaturized integrated solid state circuits, including both silicon and III-V semiconductor devices, as well as liquid crystal display panels, solid state sensor arrays, such as biosensors, environmental sensors and surface acoustic wave device sensors.
Accordingly, although the invention has been described in detail with reference to a particular preferred embodiment, persons possessing ordinary skill in the art to which this invention pertains will appreciate that various modifications and enhancements may be made without departing from the spirit and scope of the claims that follow.
This Application is a Continuation In Part of U.S. patent application Ser. No. 10/178,103 (NNEX0001CIP), entitled Construction Structures and Manufacturing Processes for Probe Card Assemblies and Packages Having Wafer Level Springs, U.S. Filing Date 24 Jun. 2002, now U.S. Pat. No. 6,917,525, which is a Continuation in Part of U.S. patent application Ser. No. 09/980,040 (nnex0003), entitled Construction Structures and Manufacturing Processes for Integrated Circuit Wafer Probe Card Assemblies, U.S. Filing Date 27 Nov. 2001, now U.S. Pat. No. 6,799,976, which claims priority from PCT Patent Application Ser. No. PCT/US00/21012 (NNEX0003P), filed Jul. 27, 2000; and from PCT Patent Application Ser. No. PCT/US00/14164 (NNEX0001P), entitled Construction Structures and Manufacturing Processes for Integrated Circuit Wafer Probe Card Assemblies, U.S. Filing Date 23 May 2000. This Application is also a Continuation In Part of U.S. patent application Ser. No. 10/196,494 (NNEX0012), entitled Mosaic Decal Probe, U.S. Filing Date 15 Jul. 2002, now U.S. Pat. No. 6,710,609.
| Number | Name | Date | Kind |
|---|---|---|---|
| 3806800 | Bove et al. | Apr 1974 | A |
| 3806801 | Bove | Apr 1974 | A |
| 3810017 | Wiesler et al. | May 1974 | A |
| 3835381 | Garretson et al. | Sep 1974 | A |
| 3842189 | Southgate | Oct 1974 | A |
| 3939414 | Roch | Feb 1976 | A |
| 3856647 | Blachman | Dec 1976 | A |
| 4035046 | Kloth | Jul 1977 | A |
| 4038599 | Bove et al. | Jul 1977 | A |
| 4177425 | Lenz | Dec 1979 | A |
| 4195259 | Reid et al. | Mar 1980 | A |
| 4201939 | Lee et al. | May 1980 | A |
| 4214201 | Kern | Jul 1980 | A |
| 4320438 | Ibrahim et al. | Mar 1982 | A |
| 4362991 | Carbine | Dec 1982 | A |
| 4416759 | Harra | Nov 1983 | A |
| 4423376 | Byrnes et al. | Dec 1983 | A |
| 4423401 | Mueller | Dec 1983 | A |
| 4436602 | Harra | Mar 1984 | A |
| 4480223 | Aigo | Oct 1984 | A |
| 4508612 | Blackwell et al. | Apr 1985 | A |
| 4518910 | Hottenrott et al. | May 1985 | A |
| 4522893 | Bohlen et al. | Jun 1985 | A |
| 4548451 | Benarr et al. | Oct 1985 | A |
| 4567432 | Boul et al. | Jan 1986 | A |
| 4599559 | Evans | Jul 1986 | A |
| 4622514 | Lewis | Nov 1986 | A |
| 4636722 | Ardezzone | Jan 1987 | A |
| 4647852 | Smith et al. | Mar 1987 | A |
| 4661233 | Glasser | Apr 1987 | A |
| 4667154 | Allerton et al. | May 1987 | A |
| 4686464 | Elsasser et al. | Aug 1987 | A |
| 4716500 | Payne | Dec 1987 | A |
| 4719417 | Evans | Jan 1988 | A |
| 4724377 | Maelzer et al. | Feb 1988 | A |
| 4758927 | Berg | Jul 1988 | A |
| 4764723 | Strid | Aug 1988 | A |
| 4816754 | Buechele et al. | Mar 1989 | A |
| 4834855 | Bloomquist et al. | May 1989 | A |
| 4837622 | Whann et al. | Jun 1989 | A |
| 4908571 | Stoehr | Mar 1990 | A |
| 4924589 | Leedy | May 1990 | A |
| 4933045 | DiStefano et al. | Jun 1990 | A |
| 4942076 | Panicker et al. | Jul 1990 | A |
| 4956923 | Pettingell et al. | Sep 1990 | A |
| 4965865 | Trenary | Oct 1990 | A |
| 4970106 | DiStefano et al. | Nov 1990 | A |
| 4973903 | Schemmel | Nov 1990 | A |
| 4975638 | Evans et al. | Dec 1990 | A |
| 5032896 | Little et al. | Jul 1991 | A |
| 5055778 | Okubo et al. | Oct 1991 | A |
| 5070297 | Kwon et al. | Dec 1991 | A |
| 5084672 | Ikeuchi et al. | Jan 1992 | A |
| 5103557 | Leedy | Apr 1992 | A |
| 5109596 | Driller et al. | May 1992 | A |
| 5121298 | Sarma et al. | Jun 1992 | A |
| 5144228 | Sorna et al. | Sep 1992 | A |
| 5148103 | Pasiecznik, Jr. | Sep 1992 | A |
| 5148265 | Khandros et al. | Sep 1992 | A |
| 5148266 | Khandros et al. | Sep 1992 | A |
| 5152695 | Grabbe et al. | Oct 1992 | A |
| 5154810 | Kamerling et al. | Oct 1992 | A |
| 5166774 | Benerji et al. | Nov 1992 | A |
| 5189363 | Bregman et al. | Feb 1993 | A |
| 5191708 | Kasukabe et al. | Mar 1993 | A |
| 5208531 | Aton | May 1993 | A |
| 5210485 | Kreiger et al. | May 1993 | A |
| 5214375 | Ikeuchi et al. | May 1993 | A |
| 5225037 | Elder et al. | Jul 1993 | A |
| 5227718 | Stowers et al. | Jul 1993 | A |
| 5240583 | Ahonen | Aug 1993 | A |
| 5255079 | Kageyama | Oct 1993 | A |
| 5258648 | Lin | Nov 1993 | A |
| 5278442 | Prinz et al. | Jan 1994 | A |
| 5280139 | Suppelsa et al. | Jan 1994 | A |
| 5313157 | Pasiecznik | May 1994 | A |
| 5326428 | Farnworth et al. | Jul 1994 | A |
| 5347159 | Khandros et al. | Sep 1994 | A |
| 5352266 | Erb et al. | Oct 1994 | A |
| 5354205 | Feigenbaum | Oct 1994 | A |
| 5367764 | DiStefano et al. | Nov 1994 | A |
| 5373627 | Grebe | Dec 1994 | A |
| 5385477 | Vaynkof et al. | Jan 1995 | A |
| 5395253 | Crumly | Mar 1995 | A |
| 5412866 | Woith et al. | May 1995 | A |
| 5416429 | McQuade et al. | May 1995 | A |
| 5433797 | Erb et al. | Jul 1995 | A |
| 5440241 | King et al. | Aug 1995 | A |
| 5473254 | Asar | Dec 1995 | A |
| 5476211 | Khandros | Dec 1995 | A |
| 5489852 | Gomez | Feb 1996 | A |
| 5521518 | Higgins | May 1996 | A |
| 5521523 | Kimura et al. | May 1996 | A |
| 5523697 | Farnworth et al. | Jun 1996 | A |
| 5530371 | Perry et al. | Jun 1996 | A |
| 5532612 | Liang | Jul 1996 | A |
| 5534784 | Lum et al. | Jul 1996 | A |
| 5546012 | Perry et al. | Aug 1996 | A |
| 5558928 | DiStefano et al. | Sep 1996 | A |
| 5563521 | Crumbly | Oct 1996 | A |
| 5568054 | Iino et al. | Oct 1996 | A |
| 5570032 | Atkins et al. | Oct 1996 | A |
| 5600257 | Leas et al. | Feb 1997 | A |
| 5613861 | Smith et al. | Mar 1997 | A |
| 5621333 | Long et al. | Apr 1997 | A |
| 5621373 | McCormick | Apr 1997 | A |
| 5629631 | Perry et al. | May 1997 | A |
| 5635846 | Beaman et al. | Jun 1997 | A |
| 5656138 | Scobey et al. | Aug 1997 | A |
| 5657394 | Schwartz et al. | Aug 1997 | A |
| 5663596 | Little | Sep 1997 | A |
| 5665648 | Little | Sep 1997 | A |
| 5694050 | Noguchi | Dec 1997 | A |
| 5703494 | Sano | Dec 1997 | A |
| 5707575 | Litt et al. | Jan 1998 | A |
| 5744283 | Spierings et al. | Apr 1998 | A |
| 5756021 | Hedrick et al. | May 1998 | A |
| 5763941 | Fjelstad | Jun 1998 | A |
| 5764070 | Pedder | Jun 1998 | A |
| 5772451 | Dozier, II et al. | Jun 1998 | A |
| 5786701 | Pedder | Jul 1998 | A |
| 5798027 | Lefebvre et al. | Aug 1998 | A |
| 5800184 | Lopergolo et al. | Sep 1998 | A |
| 5801441 | Smith et al. | Sep 1998 | A |
| 5806181 | Khandros et al. | Sep 1998 | A |
| 5820014 | Dozier, II et al. | Oct 1998 | A |
| 5821763 | Meaman et al. | Oct 1998 | A |
| 5821764 | Slocum et al. | Oct 1998 | A |
| 5828226 | Higgins et al. | Oct 1998 | A |
| D401250 | Tudhope | Nov 1998 | S |
| D401251 | Tudhope | Nov 1998 | S |
| D401252 | Tudhope | Nov 1998 | S |
| 5829128 | Eldridge et al. | Nov 1998 | A |
| 5830327 | Kolenkow | Nov 1998 | A |
| 5832598 | Greenman et al. | Nov 1998 | A |
| 5832601 | Eldridge et al. | Nov 1998 | A |
| D403002 | Tudhope | Dec 1998 | S |
| D403334 | Tudhope | Dec 1998 | S |
| 5844421 | Lee et al. | Dec 1998 | A |
| 5847572 | Iwasaki et al. | Dec 1998 | A |
| 5848685 | Smith et al. | Dec 1998 | A |
| 5852871 | Khandros | Dec 1998 | A |
| 5864946 | Eldridge et al. | Feb 1999 | A |
| 5869974 | Akram et al. | Feb 1999 | A |
| 5878486 | Eldridge et al. | Mar 1999 | A |
| 5884395 | Dabrowiecki et al. | Mar 1999 | A |
| 5884398 | Eldridge et al. | Mar 1999 | A |
| 5886535 | Budnatis et al. | Mar 1999 | A |
| 5896038 | Budnatis et al. | Apr 1999 | A |
| 5897326 | Eldridge et al. | Apr 1999 | A |
| 5900738 | Khandros et al. | May 1999 | A |
| 5905305 | Fogal et al. | May 1999 | A |
| 5912046 | Eldridge et al. | Jun 1999 | A |
| 5914218 | Smith et al. | Jun 1999 | A |
| 5917707 | Khandros et al. | Jun 1999 | A |
| 5926951 | Khandros et al. | Jul 1999 | A |
| 5944537 | Smith et al. | Aug 1999 | A |
| 5968327 | Kobayashi | Oct 1999 | A |
| 5973504 | Chong et al. | Oct 1999 | A |
| 5974662 | Eldridge et al. | Nov 1999 | A |
| 5977787 | Das et al. | Nov 1999 | A |
| 5983493 | Eldridge et al. | Nov 1999 | A |
| 5993616 | Suwabe et al. | Nov 1999 | A |
| 5994152 | Khandros et al. | Nov 1999 | A |
| 5994222 | Smith et al. | Nov 1999 | A |
| 5994781 | Smith | Nov 1999 | A |
| 5998228 | Eldridge et al. | Dec 1999 | A |
| 5998864 | Khandros et al. | Dec 1999 | A |
| 6001671 | Fjelstad | Dec 1999 | A |
| 6002168 | Bellaar et al. | Dec 1999 | A |
| 6007349 | Distefano et al. | Dec 1999 | A |
| 6012224 | DiStefano et al. | Jan 2000 | A |
| 6014032 | Maddix et al. | Jan 2000 | A |
| 6020220 | Gilleo et al. | Feb 2000 | A |
| 6023103 | Chang et al. | Feb 2000 | A |
| 6028437 | Potter | Feb 2000 | A |
| 6029344 | Khandros et al. | Feb 2000 | A |
| 6030856 | DiStefano et al. | Feb 2000 | A |
| 6032356 | Eldridge et al. | Mar 2000 | A |
| 6033935 | Dozier, II et al. | Mar 2000 | A |
| 6042712 | Mathieu | Mar 2000 | A |
| 6043563 | Eldridge et al. | Mar 2000 | A |
| 6044548 | Distefano et al. | Apr 2000 | A |
| 6045395 | Saito | Apr 2000 | A |
| 6045396 | Tighe | Apr 2000 | A |
| 6045655 | DiStefano et al. | Apr 2000 | A |
| 6046076 | Mitchell et al. | Apr 2000 | A |
| 6049972 | Link et al. | Apr 2000 | A |
| 6049976 | Khandros | Apr 2000 | A |
| 6050829 | Eldridge et al. | Apr 2000 | A |
| 6054337 | Solberg | Apr 2000 | A |
| 6054756 | DiStefano et al. | Apr 2000 | A |
| 6060891 | Hembree et al. | May 2000 | A |
| 6063648 | Beroz et al. | May 2000 | A |
| 6064213 | Khandros et al. | May 2000 | A |
| 6075289 | Distefano | Jun 2000 | A |
| 6078186 | Hembree et al. | Jun 2000 | A |
| 6078189 | Noel | Jun 2000 | A |
| 6080603 | Distefano et al. | Jun 2000 | A |
| 6080605 | Distefano et al. | Jun 2000 | A |
| 6080932 | Smith et al. | Jun 2000 | A |
| 6081035 | Warner et al. | Jun 2000 | A |
| 6090261 | Mathieu | Jul 2000 | A |
| 6091256 | Long et al. | Jul 2000 | A |
| 6110823 | Eldridge et al. | Aug 2000 | A |
| 6114864 | Soejima et al. | Sep 2000 | A |
| 6117694 | Smith et al. | Sep 2000 | A |
| 6118894 | Schwartz et al. | Sep 2000 | A |
| 6137297 | McNair et al. | Oct 2000 | A |
| 6147876 | Yamaguchi et al. | Nov 2000 | A |
| 6150186 | Chen et al. | Nov 2000 | A |
| 6169411 | Johnson | Jan 2001 | B1 |
| 6184053 | Eldridge et al. | Feb 2001 | B1 |
| 6184065 | Smith et al. | Feb 2001 | B1 |
| 6184699 | Smith et al. | Feb 2001 | B1 |
| 6190513 | Forster | Feb 2001 | B1 |
| 6192982 | Divis et al. | Feb 2001 | B1 |
| 6204674 | Dabrowiecki et al. | Mar 2001 | B1 |
| 6213789 | Chua et al. | Apr 2001 | B1 |
| 6215320 | Parrish | Apr 2001 | B1 |
| 6215321 | Nakata | Apr 2001 | B1 |
| 6218033 | Cao et al. | Apr 2001 | B1 |
| 6218910 | Miller | Apr 2001 | B1 |
| 6232143 | Maddix et al. | May 2001 | B1 |
| 6246247 | Eldridge et al. | Jun 2001 | B1 |
| 6255126 | Mathieu et al. | Jul 2001 | B1 |
| 6264477 | Smith et al. | Jul 2001 | B1 |
| 6265888 | Hsu | Jul 2001 | B1 |
| 6274823 | Khandros et al. | Aug 2001 | B1 |
| 6277249 | Gopalraja et al. | Aug 2001 | B1 |
| 6288560 | Wohlfarth | Sep 2001 | B1 |
| 6290510 | Fork et al. | Sep 2001 | B1 |
| 6292003 | Fredrickson et al. | Sep 2001 | B1 |
| 6292007 | Potter | Sep 2001 | B1 |
| 6300783 | Okubo et al. | Oct 2001 | B1 |
| 6306265 | Fu et al. | Oct 2001 | B1 |
| 6336269 | Eldridge et al. | Jan 2002 | B1 |
| 6340320 | Ogawa | Jan 2002 | B1 |
| 6351133 | Jones et al. | Feb 2002 | B1 |
| 6352454 | Kim et al. | Mar 2002 | B1 |
| 6356098 | Akram et al. | Mar 2002 | B1 |
| 6358376 | Wang et al. | Mar 2002 | B1 |
| 6361331 | Fork et al. | Mar 2002 | B2 |
| 6396677 | Chua et al. | May 2002 | B1 |
| 6398929 | Chiang et al. | Jun 2002 | B1 |
| 6419500 | Kister | Jul 2002 | B1 |
| 6424166 | Henry et al. | Jul 2002 | B1 |
| 6425988 | Montcalm et al. | Jul 2002 | B1 |
| 6426686 | Douriet et al. | Jul 2002 | B1 |
| 6429671 | Duckworth et al. | Aug 2002 | B1 |
| 6439898 | Chua et al. | Aug 2002 | B2 |
| 6476626 | Aldaz et al. | Nov 2002 | B2 |
| 6483328 | Eldridge et al. | Nov 2002 | B1 |
| 6489795 | Klete et al. | Dec 2002 | B1 |
| 6497799 | McLeod | Dec 2002 | B1 |
| 6501343 | Miller | Dec 2002 | B2 |
| 6509751 | Mathieu et al. | Jan 2003 | B1 |
| 6520778 | Eldridge et al. | Feb 2003 | B1 |
| 6525555 | Khandros et al. | Feb 2003 | B1 |
| 6528350 | Fork | Mar 2003 | B2 |
| 6528984 | Beaman et al. | Mar 2003 | B2 |
| 6534856 | Dozier, II et al. | Mar 2003 | B1 |
| 6544814 | Yasunaga et al. | Apr 2003 | B1 |
| 6600334 | Hembree et al. | Jul 2003 | B1 |
| 6616966 | Mathieu et al. | Sep 2003 | B2 |
| 6624648 | Eldridge et al. | Sep 2003 | B2 |
| 6640415 | Eslamy et al. | Nov 2003 | B2 |
| 6645257 | Schacht | Nov 2003 | B1 |
| 6651325 | Lee et al. | Nov 2003 | B2 |
| 6684499 | Romano et al. | Feb 2004 | B2 |
| 6734688 | Castellano et al. | May 2004 | B1 |
| 6751850 | Hu | Jun 2004 | B2 |
| 6791171 | Mok et al. | Sep 2004 | B2 |
| 6799976 | Mok | Oct 2004 | B1 |
| 6812718 | Chong et al. | Nov 2004 | B1 |
| 6815961 | Mok et al. | Nov 2004 | B2 |
| 6827584 | Mathieu et al. | Dec 2004 | B2 |
| 6844214 | Mei et al. | Jan 2005 | B1 |
| 6847218 | Nulty et al. | Jan 2005 | B1 |
| 6856150 | Sporck et al. | Feb 2005 | B2 |
| 6856225 | Chua et al. | Feb 2005 | B1 |
| 6888362 | Eldridge et al. | May 2005 | B2 |
| 6920689 | Khandros et al. | Jul 2005 | B2 |
| 7048548 | Mathieu et al. | May 2006 | B2 |
| 7116119 | Sporck et al. | Oct 2006 | B2 |
| 20010009305 | Fjelstad | Jul 2001 | A1 |
| 20010009724 | Chen et al. | Jul 2001 | A1 |
| 20010021483 | Mathieu et al. | Sep 2001 | A1 |
| 20020000013 | Sugaya et al. | Jan 2002 | A1 |
| 20020000016 | Hsieh | Jan 2002 | A1 |
| 20020013070 | Fork et al. | Jan 2002 | A1 |
| 20020016095 | Fork et al. | Feb 2002 | A1 |
| 20020055282 | Eldridge et al. | May 2002 | A1 |
| 20020075105 | Douriet et al. | Jun 2002 | A1 |
| 20020132501 | Eldridge et al. | Sep 2002 | A1 |
| 20020164893 | Mathieu et al. | Nov 2002 | A1 |
| 20020171133 | Mok et al. | Nov 2002 | A1 |
| 20030000010 | Shimizu | Jan 2003 | A1 |
| 20030010615 | Fork et al. | Jan 2003 | A1 |
| 20030071348 | Eguchi et al. | Apr 2003 | A1 |
| 20030075795 | Hashimoto | Apr 2003 | A1 |
| 20030197285 | Strandberg et al. | Oct 2003 | A1 |
| 20040058487 | Eslamy et al. | Mar 2004 | A1 |
| 20040102064 | Mathieu | May 2004 | A1 |
| 20040155337 | Strandberg et al. | Aug 2004 | A1 |
| 20050012513 | Cheng et al. | Jan 2005 | A1 |
| 20050212540 | Nulty et al. | Sep 2005 | A1 |
| Number | Date | Country |
|---|---|---|
| 5964196 | Dec 1996 | AU |
| 6028796 | Dec 1996 | AU |
| 6377796 | Dec 1996 | AU |
| 6635296 | Dec 1996 | AU |
| 1171167 | Jan 1998 | CN |
| 1191500 | Aug 1998 | CN |
| 1208368 | Feb 1999 | CN |
| 3630548 | Mar 1988 | DE |
| 69431565 | Jun 2003 | DE |
| 69633334 | Feb 2005 | DE |
| 0369112 | Jul 1989 | EP |
| 0623826 | Nov 1994 | EP |
| 0 681 186 | Nov 1995 | EP |
| 0731369 | Sep 1996 | EP |
| 0792462 | Sep 1997 | EP |
| 0792463 | Sep 1997 | EP |
| 0792517 | Sep 1997 | EP |
| 0792519 | Sep 1997 | EP |
| 0795200 | Sep 1997 | EP |
| 0 802 419 | Oct 1997 | EP |
| 0828582 | Mar 1998 | EP |
| 0837750 | Apr 1998 | EP |
| 0859686 | Aug 1998 | EP |
| 0886894 | Dec 1998 | EP |
| 792519 | Mar 2003 | EP |
| 792517 | Oct 2003 | EP |
| 2 518 358 | Oct 1981 | FR |
| 2 518 358 | Jun 1983 | FR |
| 3267763 | Nov 1991 | JP |
| 5335746 | Dec 1993 | JP |
| 7301642 | Nov 1995 | JP |
| 9512139 | Feb 1997 | JP |
| 1995-292471 | May 1997 | JP |
| 9508241 | Aug 1997 | JP |
| 9281144 | Oct 1997 | JP |
| 10506197 | Jun 1998 | JP |
| 10506238 | Jun 1998 | JP |
| 10510107 | Sep 1998 | JP |
| 11064386 | Mar 1999 | JP |
| 2892505 | May 1999 | JP |
| 11126800 | May 1999 | JP |
| 11506829 | Jun 1999 | JP |
| 11508407 | Jul 1999 | JP |
| 2968051 | Oct 1999 | JP |
| 11514493 | Dec 1999 | JP |
| 3022312 | Mar 2000 | JP |
| 2000067953 | Mar 2000 | JP |
| 3058919 | Jul 2000 | JP |
| 2000513499 | Oct 2000 | JP |
| 2001020067 | Aug 2002 | JP |
| 252457 | Apr 2000 | KR |
| 55303 | Dec 1998 | SG |
| WO9514314 | May 1995 | WO |
| PCTUS9608018 | May 1996 | WO |
| WO9615458 | May 1996 | WO |
| WO9615459 | May 1996 | WO |
| WO9615459 | May 1996 | WO |
| WO9615551 | May 1996 | WO |
| WO9616440 | May 1996 | WO |
| WO9617378 | Jun 1996 | WO |
| WO9637331 | Nov 1996 | WO |
| WO9637332 | Nov 1996 | WO |
| WO9638858 | Dec 1996 | WO |
| WO9641506 | Dec 1996 | WO |
| WO9744676 | Nov 1997 | WO |
| WO9801906 | Jan 1998 | WO |
| WO9852224 | Nov 1998 | WO |
| WO9914404 | Mar 1999 | WO |
| WO9918445 | Apr 1999 | WO |
| WO0052487 | Sep 2000 | WO |
| WO0052488 | Sep 2000 | WO |
| WO0052703 | Sep 2000 | WO |
| WO0073905 | Dec 2000 | WO |
| WO0074110 | Dec 2000 | WO |
| WO0075677 | Dec 2000 | WO |
| WO 0109623 | Feb 2001 | WO |
| WO 0109952 | Feb 2001 | WO |
| WO0113130 | Feb 2001 | WO |
| WO 0148818 | Jul 2001 | WO |
| WO 01 48870 | Jul 2001 | WO |
| WO0148818 | Jul 2001 | WO |
| WO 0198793 | Dec 2001 | WO |
| WO03018865 | Mar 2003 | WO |
| WO03081725 | Oct 2003 | WO |
| Number | Date | Country | |
|---|---|---|---|
| 20040223309 A1 | Nov 2004 | US |
| Number | Date | Country | |
|---|---|---|---|
| Parent | 10196494 | Jul 2002 | US |
| Child | 10870095 | US | |
| Parent | 10178103 | Jun 2002 | US |
| Child | 10196494 | US | |
| Parent | 09980040 | Nov 2001 | US |
| Child | 10178103 | US |
