The present disclosure generally relates to extremely high frequency electromagnetic wave transmit/receive devices.
An extremely high frequency electromagnetic wave transmit/receive device may comprise an integrated circuit chip bonded to a support comprising an extremely high frequency electromagnetic wave transmit/receive antenna, the integrated circuit chip and the support being placed in a package containing a guide of extremely high frequency electromagnetic waves from/to the antenna.
It is desirable for losses during the transmission of the extremely high frequency electromagnetic waves between the antenna and the waveguide to be as small as possible. It is further desirable for the manufacturing cost of the device to be as low as possible.
An object of an embodiment is to provide an extremely high frequency wave transmit/receive device overcoming all or part of the disadvantages of existing devices.
According to an object of an embodiment, losses during the transmission of the extremely high frequency electromagnetic waves between the antenna and the waveguide of the device are decreased.
According to an object of an embodiment, the manufacturing cost of the device is decreased.
An embodiment provides an electromagnetic wave transmit/receive device comprising a multilayer organic substrate, an integrated circuit chip, flip-chip assembled on the multilayer organic substrate, a package comprising a first cavity, containing the multilayer organic substrate and the integrated circuit chip, and communicating over a channel with a second cavity forming a waveguide for electromagnetic waves.
According to an embodiment, the first cavity comprises a first recess opposite the integrated circuit chip.
According to an embodiment, the first cavity comprises a second recess coupling the channel to the first recess.
According to an embodiment, the multilayer organic substrate comprises a main portion in the first cavity and a protrusion extending from the main portion into the channel and penetrating into the second cavity.
According to an embodiment, the multilayer organic substrate comprises an antenna for transmitting/receiving the electromagnetic waves on the protrusion in the second cavity.
According to an embodiment, the multilayer organic substrate comprises an electrically-insulating support made of an organic material.
According to an embodiment, the support comprises first and second opposite surfaces, electrically-conductive tracks extending over the first surface, and an electrically-insulating layer covering the electrically-conductive tracks.
According to an embodiment, the protrusion of the multilayer organic substrate does not comprise the support in the second cavity.
According to an embodiment, the protrusion of the multilayer organic substrate does not comprise the support in the channel.
According to an embodiment, the multilayer organic substrate further comprises a coating comprising a graphene layer covering the electrically-insulating layer.
According to an embodiment, the multilayer organic substrate comprises an electrically-conductive line coupling the antenna to the integrated circuit chip, where the coating does not cover the electrically-conductive line in the first cavity.
According to an embodiment, the electromagnetic waves are in a frequency band from 30 GHz to 260 GHz.
The foregoing features and advantages, as well as others, will be described in detail in the following description of specific embodiments given by way of illustration and not limitation with reference to the accompanying drawings, in which:
Like features have been designated by like references in the various figures. In particular, the structural and/or functional features that are common among the various embodiments may have the same references and may dispose identical structural, dimensional and material properties. For the sake of clarity, only the steps and elements that are useful for an understanding of the embodiments described herein have been illustrated and described in detail. In particular, the integrated circuit chip and multilayer organic substrate manufacturing steps are not detailed, the described embodiments being compatible with usual steps.
Unless indicated otherwise, when reference is made to two elements connected together, this signifies a direct connection without any intermediate elements other than conductors, and when reference is made to two elements coupled together, this signifies that these two elements can be connected or they can be coupled via one or more other elements. Further, it is here considered that the terms “insulating” and “conductive” respectively signify “electrically insulating” and “electrically conductive”.
In the following description, when reference is made to terms qualifying absolute positions, such as terms “front,” “rear,” “top,” “bottom.” “left,” “right,” etc., or relative positions, such as terms “above,” “under,” “upper,” “lower,” etc., or to terms qualifying directions, such as terms “horizontal,” “vertical,” etc., it is referred, unless specified otherwise, to the orientation of the drawings or to a display screen in a normal position of use.
Unless specified otherwise, the expressions “around,” “approximately,” “substantially” and “in the order of” signify within 10%, and preferably within 5%. Unless specified otherwise, ordinal numerals such as “first,” “second,” etc., are only used to distinguish elements from one another. In particular, these adjectives do not limit the described embodiments to a specific order of these elements.
The present application aims at applications of emission, reception, and/or transmission of electromagnetic waves, in particular electromagnetic waves in a frequency band extending from 30 GHz to 300 GHz (extremely high frequency band or EHF band), preferably from 140 GHz to 220 GHz (G band), such electromagnetic waves being called EHF waves hereafter. For space applications, the frequency ranges of interest may more particularly range from 50 GHz to 260 GHz.
Device 100 comprises:
a package 200 delimiting at least a first cavity 202 and a second cavity 204, the first cavity 202 communicating with the second cavity 204 over a channel 206, the second cavity 204 emerging at one end 207 towards the outside of package 200;
a multilayer organic substrate 300, having an integrated circuit chip 302 bonded thereto, multilayer organic substrate 300 and integrated circuit chip 302 being housed in the first cavity 202, the cross-section plane of
an EHF waveguide 400 at least partly formed by the second cavity 204 of package 200 and communicating towards the outside of package 200; and
electric connectors 500 at least partly housed in package 200.
Package 200 comprises a surface 208 having the end 207 of the second cavity 204 emerging onto it. In the embodiment shown in
Package 200 comprises at least one housing 212 intended to receive the electric connectors 500 connected to multilayer organic substrate 300. Housing 212 is open on at least one surface 214 of package 200. Housing 212 has first cavity 202 communicate with the surface 214 of package 200. In the embodiment shown in
Package 200 may comprise a lower portion 220 bonded to an upper portion 222. Multilayer organic substrate 300 may then be located between lower portion 220 and upper portion 222. In the embodiment illustrated in
According to an embodiment, second cavity 204 comprises a first rectilinear portion 240, continued by an angled portion 242, itself possibly continued by a second rectilinear portion 244. Channel 206 emerges into the first rectilinear portion 240 of second cavity 204. In the embodiment of package 200 illustrated in
Package 200 is at least partly made of an electrically-conductive material, for example, brass or aluminum. According to an embodiment, package 200 is entirely made of an electrically-conductive material. Package 200 may be formed by machining. As a variant, package 200 may be formed by 3D printing, also called additive printing. Integrated circuit chip 302 may be based on silicon, gallium arsenide, indium phosphide, silicon-germanium, or gallium nitride.
Multilayer organic substrate 300 comprises an upper surface 304 and a lower surface 306. Integrated circuit chip 302 comprises a front surface 308 and a rear surface 310. Integrated circuit chip 302 is bonded to the upper surface 304 of multilayer organic substrate 300 by a flip-chip bonding. The front surface 308 of integrated circuit chip 302 is located in front of the upper surface 304 of multilayer organic circuit 300 and is bonded to multilayer organic substrate 300 by connection elements 312, for example, solder balls or aluminum pads. The bonding between integrated circuit chip 302 and multilayer organic substrate 300 is called flip chip since, conversely to a wire bonding where the upper surface 304 of the multilayer organic substrate 300 and the front surface 308 of the integrated circuit chip 302 receiving the connection solders (or contacts) have to be in the same direction, that it, they are not opposite, for the “flip-chip” technique, the upper surface 304 of the multilayer organic substrate 300 and the front surface 308 of integrated circuit chip 302 have to be facing each other (that is, in an opposite direction). Integrated circuit chip 302 is thus effectively flipped with respect to the configuration where it would be bonded to multilayer organic substrate 300 by wire bonding.
For each of these embodiments illustrated in
In the embodiment illustrated in
Support 320 is a layer of an organic material, for example, a polymer, in particular an epoxy resin reinforced with fibers, particularly a fiberglass reinforced bismaleimide-triazide resin. The thickness of support 320 may vary from 60 μm to 100 μm, and is for example equal to approximately 80 μm. Each insulating layer 330A, 330B, 336A, 336B, 338A, 338B may be a polymer layer protecting the conductive tracks from oxidation. The maximum thickness of each insulating layer 336A, 336B 338A, 338B may vary from 20 μm to 60 μm and is for example equal to approximately 48 μm. The thickness of each insulating layer 330A, 330B may vary from 5 μm to 25 m, and is for example equal to approximately 15 m. Each conductive track 324A, 324B, 340A, 340B, 342A, 342B may be made of copper. The thickness of each conductive track 324A, 324B, 340A, 340B may vary from 10 μm to 25 μm, and is for example equal to approximately 18 μm. The thickness of each conductive track 342A, 342B may vary from 5 μm to 15 μm, and is for example equal to approximately 8 μm. Each conductive via 344A, 344B may be made of copper. The layer 332A, 332B of coating 326A, 326B is preferably made of an electrically-conductive material, for example, of graphene. The thickness of layer 332A, 332B may vary from 0.05 mm to 0.3 mm, and is for example equal to approximately 0.12 mm.
Advantageously, the manufacturing costs of multilayer organic substrate 300 are decreased with respect to the case where the support having the integrated circuit chip bonded thereto is made of quartz.
Coating 326A and possibly insulating layers 336A and 338A comprise a through opening 346A particularly at the location of integrated circuit chip 302 exposing conductive tracks 324A, 342A, or 340A. Coating 326A and possibly insulating layers 336A, 338A may comprise at least another through opening 348A exposing conductive tracks 324A, 342A, or 340A, for example, to allow the connection of an electric connector 500 to conductive tracks 324A, 342A, or 340A. In
According to an embodiment, multilayer organic substrate 300 comprises a main portion 350, which occupies in the top view at least 90% of the total surface area of multilayer organic substrate 300, and at least one protrusion 352 which projects from an edge of main portion 350. Main portion 350 may have, in top view, a square or rectangular shape. Protrusion 352 may have, in top view, a rectangular shape. Protrusion 352 comprises an intermediate portion 354 which extends in channel 206 and an end portion 356 which extends in second cavity 204 when multilayer organic substrate 300 is placed in package 200. Multilayer organic substrate 300 comprises an EHF wave transceiver antenna 358, for example formed by a conductive track 324A, 340A, or 342A, in end portion 356. Antenna 358 is coupled to integrated circuit chip 302 by a conductive track 360, for example, rectilinear. According to an embodiment, coating 326A is not present on antenna 358 and conductive track 360.
According to an embodiment, first cavity 202 comprises a first recess 230, also shown in
The dimensions of channel 206, of first cavity 202, and of second cavity 204 particularly depend on the wavelength of the EHF waves to be transmitted by second cavity 204. According to an embodiment, the dimensions of first cavity 202 in top view substantially correspond to the dimensions, in top view, of the main portion 350 of multilayer organic substrate 300. According to an embodiment, first cavity 202 has, in top view, the shape of a square or of a rectangle, each side length of which may vary from 5 mm to 25 mm, for example, be equal to approximately 15 mm. According to an embodiment, the dimensions of the first recess 230 in top view substantially correspond to the dimensions, in top view, of integrated circuit chip 302. According to an embodiment, first recess 230 has, in top view, the shape of a square or of a rectangle, each side length of which may vary from 2 mm to 8 mm. The length of channel 206 between first cavity 202 and second cavity 204 may vary from 0.2 mm to 0.6 mm, and is for example equal to approximately 0.4 mm for the frequency range from 140 GHz to 220 Hz. The height of channel 206 may vary from 0.2 mm to 0.6 mm, and is for example equal to approximately 0.4 mm for the frequency range from 140 GHz to 220 Hz.
According to an embodiment, the cross-section area of second cavity 204 is constant all along first rectilinear portion 240, angled portion 242, and second rectilinear portion 244. Second cavity 204 may have a square or rectangular cross-section, each side length of which may vary from 0.5 mm to 1.5 mm, and for example corresponds to a rectangular cross-section having a small side length equal to approximately 0.8 mm and a large side length equal to approximately 1.3 mm. In
According to an embodiment, outside of the first and second recesses 230, 232, first cavity 202 has a height which is substantially constant and that may vary from 0.5 mm to 1 mm, and is for example equal to approximately 0.6 mm for the frequency range from 140 GHz to 220 Hz. The depth of first recess 230 may vary from 1 mm to 2 mm, and is for example equal to approximately 1.5 mm. The total height of first cavity 202 at the level of second recess 232 may vary from 0 mm to 0.3 mm. The fact for integrated circuit chip 302 to be bonded to multilayer organic substrate 300 according to a flip-chip bonding advantageously enables to decrease the depth of first recess 230 with respect to what would be necessary if integrated circuit chip 302 was bonded to multilayer organic substrate 300 by a wire bonding. An air film is advantageously provided, covering protrusion 352 in channel 206. The thickness of the air film covering protrusion 352 in channel 206 may vary from 200 μm to 400 μm, and is for example equal to 300 μm. In first cavity 202, an air film may be present between coating 226A and the upper portion of package 200.
The simulations aim at determining the EHF wave transmission properties between multilayer organic substrate 300 and waveguide 400. For the simulations, integrated circuit chip 302 is not present. Package 200 has a symmetrical structure and comprises a first cavity 202 and two second cavities 204 forming two EHF waveguides 400.
Multilayer organic substrate 300 has a symmetrical shape and comprises two protrusions 352, each comprising an EHF wave transceiver antenna 358, the two antennas 358 being connected to each other via conductive track 360. As shown in
Various embodiments and variants have been described. Those skilled in the art will understand that certain features of these various embodiments and variants may be combined, and other variants will occur to those skilled in the art. Finally, the practical implementation of the described embodiments and variants is within the abilities of those skilled in the art based on the functional indications given hereabove.
An electromagnetic wave transmit/receive device (100) may be may be summarized as including a multilayer organic substrate (300), an integrated circuit chip (302), flip-chip assembled on the multilayer organic substrate, a package (200) comprising a first cavity (202), containing the multilayer organic substrate and the integrated circuit chip, and communicating over a channel (206) with a second cavity (204) forming a waveguide (400) for electromagnetic waves.
The first cavity (202) may include a first recess (230) opposite the integrated circuit chip (302).
The first cavity (202) may include a second recess (232) coupling the channel (206) to the first recess (230).
The multilayer organic substrate (300) may include a main portion (350) in the first cavity (202) and a protrusion (352) extending from the main portion into the channel (206) and penetrating into the second cavity (204).
The multilayer organic substrate (300) may include an electromagnetic wave transmit/receive antenna (258) on the protrusion (252) in the second cavity (204).
The organic multilayer substrate (300) may include an electrically-insulating support (320) made of an organic material.
The support (320) may include first and second opposite surfaces (322A, 322B), electrically-conductive tracks (324A, 340A, 342A) extending on the first surface, and an electrically-insulating layer (326A, 336A, 338A) covering the electrically-conductive tracks.
The protrusion (252) of the multilayer organic substrate (300) may not include the support (320) in the second cavity (204).
The protrusion (252) of the multilayer organic substrate (300) may not include the support (320) in the channel (206).
The multilayer organic substrate (300) may further include a coating (326A) including a graphene layer (332A) covering the electrically-insulating layer (338A).
The multilayer organic substrate (300) may include an electrically-conductive line (360) coupling the antenna (358) to the integrated circuit chip (302), where the coating (326A) does not cover the electrically-conductive line in the first cavity (202).
The electromagnetic waves may be in a frequency band from 30 GHz to 260 GHz. The various embodiments described above can be combined to provide further embodiments. Aspects of the embodiments can be modified, if necessary to employ concepts of the various patents, applications and publications to provide yet further embodiments.
These and other changes can be made to the embodiments in light of the above-detailed description. In general, in the following claims, the terms used should not be construed to limit the claims to the specific embodiments disclosed in the specification and the claims, but should be construed to include all possible embodiments along with the full scope of equivalents to which such claims are entitled. Accordingly, the claims are not limited by the disclosure.
Number | Date | Country | Kind |
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2108397 | Aug 2021 | FR | national |