Number | Name | Date | Kind |
---|---|---|---|
3648125 | Peltzer | Mar 1972 | |
4095330 | Kim | Jun 1978 | |
4104086 | Bondur et al. | Aug 1978 | |
4104090 | Pogge | Aug 1978 | |
4211582 | Horng et al. | Jul 1980 | |
4400865 | Goth et al. | Aug 1983 | |
4430791 | Dockerty | Feb 1984 | |
4444605 | Slawinski | Apr 1984 | |
4502913 | Lechaton et al. | Mar 1985 | |
4508579 | Goth et al. | Apr 1985 | |
4510016 | Chi et al. | Apr 1985 | |
4549927 | Goth et al. | Oct 1985 | |
4561932 | Gris et al. | Dec 1985 | |
4572765 | Berry | Feb 1986 |
Entry |
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S. D. Malaviya, "High Speed Bipolar Process", IBM Technical Disclosure Bulletin vol. 27, No. 7B, Dec. 1984, pp. 4510-4514. |
S. D. Malaviya, "Metal Lift-Off Process for Submicron Spacings", IBM Technical Disclosure Bulletin, vol. 26, No. 3A, Aug. 1983, pp. 1063-1065. |