Number | Name | Date | Kind |
---|---|---|---|
4476482 | Scott | Oct 1984 | |
4845534 | Fukuta | Jul 1989 |
Number | Date | Country |
---|---|---|
60-229374 | Nov 1985 | JPX |
63-44770 | Feb 1988 | JPX |
63-204772 | Aug 1988 | JPX |
Entry |
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Japanese J. of Appl. Physics: "Microfabrication Technique by Gas plasma Etching Method", by H. Komiya et al., vol. 15, p. 19 (1976). |