FILM FORMING METHOD AND APPARATUS

Abstract

According to one embodiment, a film forming method includes alternately performing a first process including at least two times of a first sequence and a second process including at least one time of a second sequence. The first sequence includes supplying a film forming gas into a film forming chamber, supplying a first purge gas into the film forming chamber, supplying a first reduction gas into the film forming chamber, and supplying a second purge gas into the film forming chamber, in order, and the second sequence includes supplying a second reduction gas into the film forming chamber, and supplying a third purge gas into the film forming chamber, in order.

Description

Claims

1. A film forming method comprising alternately performing a first process including at least two times of a first sequence and a second process including at least one time of a second sequence, wherein the first sequence includes supplying a film forming gas into a film forming chamber in which a film formation object is set, supplying a first purge gas into the film forming chamber in which the film formation object is set, supplying a first reduction gas into the film forming chamber in which the film formation object is set, and supplying a second purge gas into the film forming chamber in which the film formation object is set, in order, andthe second sequence includes supplying a second reduction gas into the film forming chamber in which the film formation object is set, and supplying a third purge gas into the film forming chamber in which the film formation object is set, in order.

2. The method of claim 1, wherein when “p” refers to a desired positive integer larger than or equal to 1 and when “a” refers to a desired positive integer larger than or equal to 1, number of times of the second sequence in (p+a)-th second process is larger than number of times of the second sequence in p-th second process.

3. The method of claim 1, wherein when “q” refers to a desired positive integer larger than or equal to 1 and when “b” refers to a desired positive integer larger than or equal to 1, number of times of the first sequence in (q+b)-th first process is smaller than number of times of the first sequence in q-th first process.

4. The method of claim 1, wherein the film forming gas is supplied into the film forming chamber through a gas tank, andthe film forming gas is not supplied into the gas tank during a period when the second process is performed.

5. The method of claim 1, wherein the first and second processes are controlled based on an amount of a byproduct produced in the film forming chamber.

6. The method of claim 1, wherein the film forming method is a film forming method using atomic layer deposition (ALD).

7. The method of claim 1, wherein number of times of the first sequence included in each of the first processes is smaller than twice number of times of the first sequence required to form one atomic layer on a surface of the film formation object.

8. The method of claim 1, wherein the film forming gas contains a metallic element.

9. The method of claim 1, wherein the first reduction gas and the second reduction gas are the same reduction gas.

10. The method of claim 1, wherein the first purge gas, the second purge gas and the third purge gas are the same purge gas.

11. The method of claim 1, wherein the film formation object has a structure in which a plurality of insulating layers and a plurality of spaces are alternately arranged, anda plurality of conductive layers are formed in the plurality of spaces by alternately performing the first process and the second process.

12. A film forming apparatus comprising: a film forming chamber;a gas supply unit supplying a gas into the film forming chamber; anda control unit controlling the gas supply unit, wherein the control unit controls the gas supply unit to alternately perform a first process including at least two times of a first sequence and a second process including at least one time of a second sequence,the first sequence includes supplying a film forming gas into the film forming chamber in which a film formation object is set, supplying a first purge gas into the film forming chamber in which the film formation object is set, supplying a first reduction gas into the film forming chamber in which the film formation object is set, and supplying a second purge gas into the film forming chamber in which the film formation object is set, in order, andthe second sequence includes supplying a second reduction gas into the film forming chamber in which the film formation object is set, and supplying a third purge gas into the film forming chamber in which the film formation object is set, in order.

13. The apparatus of claim 12, wherein when “p” refers to a desired positive integer larger than or equal to 1 and when “a” refers to a desired positive integer larger than or equal to 1, the control unit controls the gas supply unit such that number of times of the second sequence in (p+a)-th second process is larger than number of times of the second sequence in p-th second process.

14. The apparatus of claim 12, wherein when “q” refers to a desired positive integer larger than or equal to 1 and when “b” refers to a desired positive integer larger than or equal to 1, the control unit controls the gas supply unit such that number of times of the first sequence in (q+b)-th first process is smaller than number of times of the first sequence in q-th first process.

15. The apparatus of claim 12, wherein the film forming gas is supplied into the film forming chamber through a gas tank included in the gas supply unit, andthe control unit controls the gas supply unit such that the film forming gas is not supplied into the gas tank during a period when the second process is performed.

16. The apparatus of claim 12, wherein the control unit controls the gas supply unit such that the first and second processes are performed based on an amount of a byproduct produced in the film forming chamber.

17. The apparatus of claim 12, wherein the film forming apparatus is a film forming apparatus using atomic layer deposition (ALD).

18. The apparatus of claim 12, wherein number of times of the first sequence included in each of the first processes is smaller than twice number of times of the first sequence required to form one atomic layer on a surface of the film formation object.

19. The apparatus of claim 12, wherein the film forming gas contains a metallic element.

20. The apparatus of claim 12, wherein the first reduction gas and the second reduction gas are the same reduction gas.

21. The apparatus of claim 12, wherein the first purge gas, the second purge gas and the third purge gas are the same purge gas.

22. The apparatus of claim 12, wherein the film formation object has a structure in which a plurality of insulating layers and a plurality of spaces are alternately arranged.