Number | Name | Date | Kind |
---|---|---|---|
3714520 | Engeler et al. | Jan 1973 | |
3794516 | Engeler et al. | Feb 1974 | |
3879746 | Fournier | Apr 1975 |
Entry |
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"Interaction of Reactively Sputtered Titanium Carbide Thin Films with Si, SiO.sub.2 Ti, TiSi.sub.2, and Al", J. Appl. Phys., 54(6), Jun. 1983, M. Eizenberg et al, pp. 3195-3199. |