Patent Application
20130009202
1. Field of the Invention
The present invention relates to a group-III nitride semiconductor device and a method of fabricating a group-III nitride semiconductor device.
2. Related Background Art
Patent Literature 1 discloses technology related to light emitting devices that can be driven by a decreased voltage.
Non-Patent Literatures 1 and 2 disclose calculations concerning piezoelectric fields.
Patent Literature 1: Japanese Unexamined Patent Application Publication No. 08-97471
Non-Patent Literature 1: Japanese Journal of Applied Physics, Vol. 39 (2000) pp. 413
Non-Patent Literature 2: Journal of Applied Physics, Vol. 91 No. 12 (2002) pp. 9904
Patent Literature 1 discloses that the following layers are grown on a sapphire substrate: a 500-angstrom thick AlN buffer layer; a high-level carrier concentration n+ layer of Si-doped GaN having an electron, concentration of 2×1018 cm3 and a thickness of approximately 2.0 μm, a high-level carrier n+layer of Si-doped (Alx2Ga1-x2)y2In1-y2N having a thickness of approximately 2.0 μm and an electron concentration of 2×1018 cm3, a p-type conductivity light emitting layer of Mg-, Mn-, and Si-doped (Alx1Ga1-x1)y1In1-y1N having a thickness of approximately 0.5 μm, a p-layer Mg-doped (Alx2Ga1-x2)y2In1-y2N having a thickness of approximately 1.0 μm and a hole concentration of 2×1017 cm3, a second contact layer of Mg-doped GaN having a thickness of approximately 0.2 μm and a hole concentration of 5×1017 cm3, and a first contact layer of Mg-doped GaN having a thickness of approximately 500 angstrom, a hole concentration of 2×1017 cm3, and a Mg concentration of 2×1020 cm3. Additionally, two electrodes of nickel are formed such that the two electrodes are connected to the p-layer and the high-level carrier n+ layer, respectively.
The light emitting device in Patent Literature 1, in particular, includes a p-type first contact layer of a high Mg concentration provided on the outermost surface formed above the c-plane sapphire substrate and a p-type second contact layer of a low Mg concentration located under the first contact layer. The Mg concentration of the first contact layer is in the range of 1×1020 and 1×1021 cm−3, whereas the Mg concentration of the second contact layer is in the range of 1×1019 and 5×1020 cm−3. Thickness values, 50 and 200 nm, for the first and second contact layers are disclosed.
The contact resistance of the Mg-doped p-type gallium nitride contact layer varies depending on the Mg concentration. The contact resistance is relatively lower at an Mg concentration of approximately 1×1020 cm−3. Such a high Mg concentration impairs the crystallinity, causing a decrease in the p-type carrier concentration. Hence, what is needed is a group-III nitride semiconductor device having a p-type contact layer of low contact resistance, high crystallinity, and an appropriate carrier concentration of which are satisfactory.
It is an object of a first aspect of the present invention to provide a group-III nitride semiconductor device having a p-type contact layer that has a relatively low contact resistance and a relatively high carrier concentration without reducing its crystallinity. It is an object of a second aspect of the present invention to provide a method of fabricating the group-III nitride semiconductor device.
A group-III nitride semiconductor device according to the first aspect of the present invention includes a gallium nitride-based semiconductor light emitting layer; a first contact layer provided over the light emitting layer; a second contact layer provided over the first contact layer and in direct contact with the first contact layer; and a metal electrode provided over the second contact layer and in direct contact with the second contact layer. The p-type gallium nitride-based semiconductor of the first contact layer is the same as that of the second contact layer; the p-type dopant concentration of the first contact layer is lower than the p-type dopant concentration of the second contact layer; the interface between the first contact layer and the second contact layer is inclined at an angle larger than or equal to 50 degrees and smaller than 130 degrees with respect to a plane orthogonal to the reference axis that extends along a c-axis thereof; the wavelength of light emitted from the light emitting layer is within the range of 480 to 600 nm; the second contact layer has a thickness within the range of 1 to 50 nm, and the second contact layer has a thickness within the range of 1 to 20 nm.
In the second contact layer, the relatively higher p-type dopant concentration leads to a decrease in the contact resistance to the metal electrode, and the relatively smaller thickness thereof makes the crystallinity relatively higher. In the first contact layer, the relatively lower p-type dopant concentration makes the crystallinity better and is effective in making the carrier concentration relatively higher. This achieves low contact resistance between the second contact layer and the metal electrode and enables the carrier concentration to become high without reducing the crystallinity. The piezoelectric field is relatively small or zero, and its direction is opposite to the direction in the case of a tilt angle of smaller than 50 degrees or larger than or equal to 130 degrees at the interface between the first contact layer and the second contact layer. Thus, the aspect of the present invention can improve the external quantum efficiency and other factors of the light emitting layer, when compared with the case of an interface tilting at an angle of smaller than 50 degrees or not less than 130 degrees.
It is preferred that the group-III nitride semiconductor device according to the first aspect of the present invention further include a p-type gallium nitride-based semiconductor cladding layer, wherein the cladding layer is provided between the light emitting layer and the first contact layer, the bandgap of the cladding layer is larger than the bandgap of the first contact layer, and the first contact layer is in direct contact with the cladding layer.
It is preferred that the group-III nitride semiconductor device according to the first aspect of the present invention further include a substrate comprising a gallium nitride-based semiconductor. The light emitting layer, the cladding layer, the first contact layer, the second contact layer, and the metal electrode are arranged in sequence over a primary surface of the substrate, and the primary surface tilts at an angle in the range of larger than or equal to 50 degrees and smaller than 130 degrees from the plane that is orthogonal to the reference axis. Since a substrate composed of a gallium nitride semiconductor can be used, gallium nitride-based semiconductor layers are grown over the primary surface, which is inclined at an angle in the range of larger than or equal to 50 degrees and smaller than 130 degrees from a surface orthogonal to the reference axis, and the interface between the first contact layer and the second contact layer is also inclined at the same angle as that of the primary surface.
It is preferred that, in the group-III nitride semiconductor device according to the first aspect of the present invention, the concentration of p-type dopant of the first contact layer be 5×1020 cm−3 or lower, and the concentration of the p-type dopant of the second contact layer be within the range of 1×1020 to 1×1021 cm−3. Such a relatively higher p-type dopant concentration of the second contact layer, which is in direct contact with the metal electrode, makes the contact resistance to the metal electrode relatively lower.
It is preferred that, in the group-III nitride semiconductor device according to the first aspect of the present invention, the concentration of the p-type dopant of the first contact layer be within the range of 5×1018 to 5×1019 cm−3. Such a relatively lower p-type dopant concentration of the first contact layer, which is not in direct contact with the metal electrode, makes the crystallinity relatively higher, leading to a relatively higher carrier concentration.
In the group-III nitride semiconductor device according to the first aspect of the present invention, the p-type dopant preferably comprises magnesium, enabling the efficient supply of the p-type dopant. Magnesium forms a relatively shallow acceptor level in a nitride semiconductor, which makes the activation rate, (the hole concentration)/(the dopant concentration), high, thereby achieving a relatively higher hole concentration at a relatively lower dopant concentration.
In the group-III nitride semiconductor device according to the first aspect of the present invention, the first contact layer and the second contact layer are preferably composed of gallium nitride. GaN is a gallium nitride-based semiconductor of binary compounds, and can provide the first and second contact layers with excellent crystallinity.
In the group-III nitride semiconductor device according to the first aspect of the present invention, the first contact layer and the second contact layer are preferably composed of InxAlyGa1-x-yN (0≦x≦1, 0≦y≦1, 0≦1-x-y). Thus, the first and second contact layers can be composed of a gallium nitride-based semiconductor other than GaN. Since use of the gallium nitride-based semiconductor other than GaN changes the lattice mismatch degree to the substrate and the amount of strain incorporated in the contact layers depending thereupon, the carrier concentration of the first contact layer can be increased, and the contact resistance between the second contact layer and the metal electrode can be decreased.
In the group-III nitride semiconductor device according to the first aspect of the present invention, the light emitting layer is preferably composed of InxGa1-xN (0.15≦x<0.50). This enables the emission of light having a wavelength within the range of 480 to 600 nm. This indium-containing region increases strain incorporated in the light emitting layer, resulting in a large reduction in the piezoelectric field when the primary surface of the substrate is provided with an inclination angle in the above-mentioned range. Thus, the present aspect of the invention provides a light emitting device that has satisfactorily high external quantum efficiency in the indium-containing region.
In the group-III nitride semiconductor device according to the first aspect of the present invention, the metal electrode is preferably composed of palladium, gold, or an alloy of nickel and gold. A metal electrode composed of such a material achieves excellent contact with the second contact layer. A more satisfactory ohmic junction can be achieved with such metals.
A method of fabricating a group-III nitride semiconductor device according to the second aspect of the present invention the steps of: growing a light emitting layer, the light emitting layer comprising a gallium nitride-based semiconductor; growing a first contact layer on the light emitting layer, the first contact layer comprising a p-type gallium nitride-based semiconductor; after changing amount of p-type dopant supplied in the growth of the first contact layer, growing a second contact layer on the first contact layer, the second contact layer comprising a p-type gallium nitride-based semiconductor; and forming a metal electrode on the second contact layer. A p-type gallium nitride-based semiconductor of the first contact layer is the same as a p-type gallium nitride-based semiconductor of the second contact layer; the amount of p-type dopant supplied to a growth reactor in the growth of the second contact layer is larger than amount of p-type dopant supplied to a growth reactor in the growth of the first contact layer; a growth temperature for the first contact layer and the second contact layer is higher than a growth temperature of an active layer in the light emitting layer; a difference between the growth temperature for the first contact layer and the second contact layer and the growth temperature for the active layer is in a range of 100 degrees Celsius to 350 degrees Celsius; the second contact layer is in direct contact with the metal electrode; the first contact layer is in direct contact with the second layer; an interface between the first contact layer and the second contact layer tilts at an angle of not less than 50 degrees and smaller than 130 degrees from a plane orthogonal to a reference axis extending along a c-axis thereof; the light emitting layer emits light of a wavelength in a range of 480 to 600 nm; and the second contact layer has a thickness in a range of 1 to 50 nm.
The relatively higher p-type dopant concentration of the second contact layer can decrease the contact resistance to the metal electrode, and the relatively smaller thickness leads to relatively higher crystallinity. The relatively lower p-type dopant concentration of the first contact layer leads to the relatively higher crystallinity, which is effective in making the carrier concentration of the first contact layer relatively higher. Accordingly, the contact resistance between the second contact layer and the metal electrode becomes reduced and the carrier concentration becomes increased without deteriorating the crystallinity. The piezoelectric field is small or zero and its direction is inverted as compared with the case of a tilt angle in the range of smaller than 50 degrees or not less than 130 degrees at the interface between the first contact layer and the second contact layer. Hence, the external quantum efficiency and other factors of the light emitting layer can be improved as compared with the case of a tilting interface at an angle smaller than 50 degrees or not less than 130 degrees. The growth temperature of the first and second contact layers is higher than the growth temperature of the light emitting layer. The difference between the growth temperature of the light emitting layer and the growth temperature of the first and second contact layers is in the range of 150 degrees Celsius to 300 degrees Celsius. If the difference in growth temperature is smaller than such a temperature range, the growth temperature of the first and second contact layers is also made low, thereby making the electrical properties worse. If the difference in growth temperature is greater than such a temperature range, the amount of thermal damage that the active layer receives becomes large, thereby making the light emitting efficiency reduced.
It is preferred that the method of fabricating a group-III nitride semiconductor device according to the second aspect of the present invention further include the step of growing a p-type gallium nitride-based semiconductor cladding layer, wherein the cladding layer is grown after the light emitting layer has been grown, the first contact layer and the second contact layer are grown after the cladding layer has been grown, the cladding layer is provided between the light emitting layer and the first contact layer, the bandgap of the cladding layer is greater than the bandgap of the first contact layer, and the first contact layer is in direct contact with the cladding layer.
It is preferred that the method of fabricating a group-III nitride semiconductor device according to the second aspect of the present invention further include the step of preparing a substrate comprising a gallium nitride-based semiconductor, wherein the cladding layer is grown on the substrate; the light emitting layer, the cladding layer, the first contact layer, the second contact layer, and the metal electrode are arranged in sequence over a primary surface of the substrate, and the primary surface is inclined from the plane orthogonal to the reference axis at an angle of larger than or equal to 50 degrees and smaller than 130 degrees. Since the substrate of a gallium nitride semiconductor can be used and the gallium nitride-based semiconductor layers are grown over the primary surface, which tilts by an angle larger than or equal to 50 degrees and smaller than 130 degrees from a surface orthogonal to the reference axis, the interface between the first contact layer and the second contact layer is also inclined at the same angle as the primary surface.
In the method of fabricating a group-III nitride semiconductor device according to the second aspect of the present invention, the p-type dopant concentration of the first contact layer is preferably 5×1020 cm−3 or lower, and the p-type dopant concentration of the second contact layer is preferably within the range of 1×1020 to 1×1021 cm−3. The relatively higher p-type dopant concentration of the second contact layer, which is in direct contact with the metal electrode, can be low the contact resistance to the metal electrode.
In the method of fabricating a group-III nitride semiconductor device according to the second aspect of the present invention, the p-type dopant concentration of the first contact layer is preferably within the range of 5×1018 to 5×1019 cm−3. The relatively lower p-type dopant concentration of the first contact layer, which is not in direct contact with the metal electrode, is effective in making the crystallinity of the first contact layer relatively higher, leading to the relatively higher carrier concentration.
In the method of fabricating a group-III nitride semiconductor device according to the second aspect of the present invention, the p-type dopant preferably comprises magnesium, which allows efficient supply of the p-type dopant. Magnesium forms a relatively shallow acceptor level in a nitride semiconductor, and is effective in making the activation rate, (the hole concentration)/(the dopant concentration), higher, thereby achieving a relatively high hole concentration at a relatively low dopant concentration.
In the method of fabricating a group-III nitride semiconductor device according to the second aspect of the present invention, the first contact layer and the second contact layer are preferably composed of gallium nitride. GaN is a gallium nitride semiconductor of a binary compound, and can provide the first and second contact layers of GaN with excellent crystallinity.
In the method of fabricating a group-III nitride semiconductor device according to the second aspect of the present invention, the first contact layer and the second contact layer are preferably composed of InxAlyGa1-x-yN (0≦x≦1, 0≦y≦1, 0≦1-x-y). Thus, the first and second contact layers can be composed of a gallium nitride-based semiconductor other than GaN. Use of the gallium nitride-based semiconductor other than GaN changes the lattice mismatch degree to the substrate, which changes the amount of strain incorporated in the contact layers, so that the carrier concentration of the first contact layer can be made high, and the contact resistance between the second contact layer and the metal electrode can be made low.
In the method of fabricating a group-III nitride semiconductor device according to the second aspect of the present invention, the light emitting layer is preferably composed of InxGa1-xN (0.15≦x<0.50). This light emitting layer enables the emission of light having a wavelength within the range of 480 to 600 nm. This indium-containing region increases strain incorporated in the light emitting layer, allowing a large reduction in the piezoelectric field when the primary surface of the substrate is provided with an inclination angle in the above-mentioned range. Thus, the present aspect of the invention provides a light emitting device that has satisfactorily high external quantum efficiency in the indium-containing region.
In the group-III nitride semiconductor device according to the first aspect of the present invention, the carbon impurity concentration of the first contact layer is preferably 1×1017 cm−3 or lower. The relatively lower concentration of the carbon impurity satisfactorily reduces the contact resistance and the operating voltage of the device.
In the group-III nitride semiconductor device according to the first aspect of the present invention, preferably, the primary surface of the substrate is inclined from a plane orthogonal to the reference axis at an angle of larger than or equal to 70 degrees and smaller than 80 degrees. The use of a substrate having such an angle range reduces the variation in the In content in the light emitting layer and enables the production of a light emitting device having satisfactorily high external quantum efficiency.
In the group-III nitride semiconductor device according to the first aspect of the present invention, the primary surface of the substrate tilts preferably at an angle of larger than or equal to 100 degrees and smaller than 110 degrees from the plane that is orthogonal to the reference axis. The use of a tilting substrate by such an angle range reduces a fluctuation in the In content in the light emitting layer and enables the production of a light emitting device having satisfactorily high external quantum efficiency.
In the method of fabricating a group-III nitride semiconductor device according to the second aspect, the growth rate of the first contact layer is preferably 1 μm/hour or lower, the growth rate of the second contact layer is preferably 0.1 μm/hour or lower, the growth rate of the second contact layer is preferably lower than the growth rate of the first contact layer, and the first and second contact layers are preferably grown in an atmosphere having a hydrogen content of 20% or more. Since hydrogen is used as atmosphere gas in growth of the first and second contact layers, and the growth rates of the first and second contact layers are relatively low, the ratio of the number of group-V atoms to the number of group-III atoms can be made higher in the growth of the first and second contact layers. Thus, the carbon impurity concentration of the first and second contact layers can be made relatively lower and the relatively lower carbon impurity concentration satisfactorily reduces the contact resistance and the operating voltage of the device.
In the method of fabricating a group-III nitride semiconductor device according to a second aspect of the present invention, the carbon impurity concentration of the first contact layer is preferably 1×1017 cm−3 or lower. The relatively lower concentration of carbon satisfactorily reduces the contact resistance and the operating voltage of the device.
In the method of fabricating a group-III nitride semiconductor device according to the second aspect of the present invention, the difference between the growth temperature of the first contact layer and second contact layer and the growth temperature of the active layer is preferably in the range of 100 degrees Celsius to 250 degrees Celsius, A growth temperature in such a temperature range can make the crystallinity of the contact layers better, and reduce the damage applied to the active layer during growth of the contact layers.
In the method of fabricating a group-III nitride semiconductor device according to the second aspect of the present invention, the primary surface of the substrate tilts preferably at an angle larger than or equal to 70 degrees and smaller than 80 degrees with respect to a plane orthogonal to the reference axis. The use of the tilting substrate in such an angle range reduces a fluctuation in the In content in the light emitting layer and enables the production of a light emitting device having satisfactorily high external quantum efficiency.
In the method of fabricating a group-III nitride semiconductor device according to the second aspect of the present invention, the primary surface of the substrate tilts preferably at an angle of larger than or equal to 100 degrees and smaller than 110 degrees from the plane that is orthogonal to the reference axis. The use of the tilting substrate in such an angle range reduces the fluctuation in the In content in the light emitting layer and enables the production of a light emitting device having satisfactorily high external quantum efficiency.
In the method of fabricating a group-III nitride semiconductor device according to the second aspect of the present invention, the growth temperature of the active layer is preferably higher than or equal to 650 degrees Celsius and lower than 800 degrees Celsius. This allows for the production of the active layer that emits light in the above-mentioned wavelength range (i.e., in the range of 480 to 600 nm).
In the method of fabricating a group-III nitride semiconductor device according to the second aspect of the present invention, the metal electrode preferably comprises palladium, gold, or an alloy of nickel and gold. A metal electrode composed of such a material achieves excellent contact with the second contact layer. A more satisfactory ohmic junction can be achieved with such metals.
The above-described object and other objects, features, and advantages of the present invention will be apparent from the detailed description of the embodiments of the present invention with reference to the accompanying drawings.
The teaching of the invention can be easily understood through the detailed descriptions described below with reference to the accompanying exemplary drawings. A group-III nitride semiconductor device and a method of fabricating a group-III nitride semiconductor device according to embodiments will now be described in detail with reference to the accompanying drawings. The same elements will be designated by the same reference numerals, if possible.
Part (a) of
The epitaxial substrate EP has an epitaxial layer structure like that of the group-III nitride semiconductor device 11. The semiconductor layers that constitute the group-III nitride semiconductor device 11 will now be described. The epitaxial substrate EP includes semiconductor layers (semiconductor films) corresponding to the semiconductor layers of the group-III nitride semiconductor device 11. The description of the semiconductor layers of the group-III nitride semiconductor device 11 is also applied to the corresponding semiconductor layers of the epitaxial substrate EP.
The c-plane of the substrate 13 extends along a plane Sc, as illustrated in
The substrate 13 has the primary surface 13a composed of a conductive gallium nitride-based semiconductor. The primary surface 13a of the substrate 13 tilts by an angle larger than or equal to 50 degrees and smaller than 130 degrees from the plane Sc orthogonal to the reference axis Cx extending along the c-axis of the gallium nitride-based semiconductor. The substrate 13, including the primary surface 13a, may be composed of a gallium nitride-based semiconductor. The gallium nitride-based semiconductor of the substrate 13 is composed of, for example, gallium nitride (GaN), indium gallium nitride (InGaN), or aluminum gallium nitride (AlGaN). GaN, which is a binary compound, can provide excellent crystal quality and a stable substrate surface. Instead, the substrate 13 may be composed of AlN.
The n-type group-III nitride semiconductor region 15 is composed of an n-type gallium nitride-based semiconductor. The n-type group-III nitride semiconductor region 15 is provided over the substrate 13. The n-type group-III nitride semiconductor region 15 is in direct contact with the primary surface 13a of the substrate 13. The n-type group-III nitride semiconductor region 15 includes at least one n-type gallium nitride-based semiconductor layer. This n-type gallium nitride-based semiconductor layer is provided over the primary surface 13a. The n-type group-III nitride semiconductor region 15 includes, for example, an n-type buffer layer, an n-type cladding layer, and an n-type optical guiding layer. The n-type group-III nitride semiconductor region 15 is composed of, for example, n-type GaN, InGaN, AlGaN, or InAlGaN.
The light emitting layer 17 is composed of, for example, a gallium nitride-based semiconductor containing indium (In). The light emitting layer 17 is provided over the substrate 13 and the n-type group-III nitride semiconductor region 15. The light emitting layer 17 is in direct contact with the n-type group-III nitride semiconductor region 15. The light emitting layer 17 includes the active layer 27 and, if required, may include the n-side optical guiding layer 29 and the p-side optical guiding layer 31. The active layer 27 includes at least one well layer 33 and plural barrier layers 35. Each of the barrier layers 35 has a bandgap greater than that of the well layer 33. The active layer 27 may have a single or multiple quantum well structure. The well layer 33 and the barrier layers 35 are arranged over the n-type group-III nitride semiconductor region 15 and the n-side optical guiding layer 29. The well layer 33 and the barrier layers 35 are composed of, for example, AlGaN, GaN, InGaN, or InAlGaN. The wavelength of the light that is emitted from the light emitting layer 17 (active layer 27) is, for example, in the range of 480 to 600 nm. The electrical property of the p-type gallium nitride-based semiconductor can be improved in the light emitting device that generates light in such a wavelength range. The property of the p-type gallium nitride-based semiconductor can be also improved in the light emitting device generating long-wavelength light.
The light emitting layer 17 is composed of a gallium nitride-based semiconductor containing indium (In) and has an indium content larger than or equal to 15% and smaller than 50%. Accordingly, the light emitting layer 17 can generate light having wavelength within the range of 480 to 600 nm. For example, the light emitting layer 17 is composed of InxGa1-xN (0.15≦x<0.50).
The p-type group-III nitride semiconductor region 19 is composed of a p-type gallium nitride-based semiconductor. The p-type dopant of the p-type group-III nitride semiconductor region 19 is magnesium (Mg), which allows smooth supply of the p-type dopant. Instead, the p-type dopant can comprise zinc (Zn). The p-type group-III nitride semiconductor region 19 is provided on the substrate 13, the n-type group-III nitride semiconductor region 15, and the light emitting layer 17. The p-type group-III nitride semiconductor region 19 is in direct contact with the light emitting layer 17. The p-type group-III nitride semiconductor region 19 includes one or more p-type gallium nitride-based semiconductor layers. The p-type nitride semiconductor region 19 includes, for example, the p-type gallium nitride-based semiconductor layer 21. The p-type gallium nitride-based semiconductor layer 21 is provided on the light emitting layer 17 and is in direct contact with the light emitting layer 17. The p-type gallium nitride-based semiconductor layer 21 may include a p-type electron-blocking layer and a p-type optical guiding layer. The p-type group-III nitride semiconductor region 19 further includes, for example, the p-type cladding layer 23. The p-type cladding layer 23 is provided over the p-type gallium nitride-based semiconductor layer 21 and is in direct contact with the p-type gallium nitride-based semiconductor layer 21. The p-type gallium nitride-based semiconductor layer 21 and the p-type cladding layer 23 are composed of, for example, p-type GaN, InGaN, AlGaN, or InAlGaN.
The p-type group-III nitride semiconductor region 19 includes, for example, the contact layer 25a (first contact layer). The contact layer 25a is provided over the p-type cladding layer 23 and is in direct contact with the p-type cladding layer 23. The p-type group-III nitride semiconductor region 19 includes, for example, the contact layer 25b (second contact layer). The contact layer 25b is provided over the contact layer 25a and is in direct contact with the contact layer 25a.
An interface J1 is formed between the contact layer 25a and the contact layer 25b. The contact layer 25a and the contact layer 25b are composed of the same p-type gallium nitride-based semiconductor, such as p-type GaN. Since GaN is a binary compound, the contact layer 25a and contact layer 25b composed of GaN have excellent crystal quality.
The p-type dopant concentration of the contact layer 25a is lower than that of the contact layer 25b. The p-type dopant concentration of the contact layer 25a is 5×1020 cm−3 or less. For example, the p-type dopant concentration of the contact layer 25a is in the range of 5×1018 to 5×1019 cm−3. The relatively lower p-type dopant concentration of the contact layer 25a, which is not in direct contact with an electrode 37, leads to relatively high crystallinity and, thus a relatively higher carrier concentration. The p-type dopant concentration of the contact layer 25b is in the range of 1×1020 to 1×1021 cm−3. The relatively higher p-type dopant concentration of the contact layer 25b, which is in direct contact with the electrode 37, leads to low contact resistance at a contact JC of the electrode 37.
The interface J1 of the contact layer 25a with the contact layer 25b tilts at an angle of larger than or equal to 50 degrees and smaller than 130 degrees with respect to the plane Sc orthogonal to the reference axis Cx that extends along the c-axis thereof. The contact layer 25b has a thickness in the range of 1 to 50 nm. For example, the contact layer 25b may have a thickness in the range of 1 to 20 nm. The bandgap of the contact layer 25a is smaller than that of the p-type cladding layer 23.
In the group-III nitride semiconductor device 11 that has the structure described above, the contact layer 25b has a relatively high p-type dopant concentration, which can cause a reduction in the contact resistance with the electrode 37, and the contact layer 25b has a relatively smaller thickness, which can provide relatively high crystallinity. The contact layer 25a has a relatively low p-type dopant concentration, which can make the crystallinity relatively higher and make the carrier concentration relatively higher. Thus, the contact resistance between the contact layer 25b and the electrode 37, and the carrier concentration are increased without reducing the crystallinity. Compared with the interface J1 between the contact layer 25a and the contact layer 25b that tilts at an angle of smaller than 50 degrees and larger than or equal to 130 degrees, the direction of the piezoelectric field is opposite thereto (the direction of the piezoelectric field component acting in the direction (direction of VN) of the layer stack is opposite to the stacking direction) and the amplitude of the piezoelectric field is relatively small or equal to zero. Thus, the external quantum efficiency and other properties of the light emitting layer 17 are improved compared with those at an angle of smaller than 50 degrees and larger than or equal to 130 degrees.
The group-III nitride semiconductor device 11 includes the substrate 13, which is composed of a gallium nitride-based semiconductor. Gallium nitride-based semiconductor layers, such as the n-type group-III nitride semiconductor region 15, the light emitting layer 17, and the p-type group-III nitride semiconductor region 19, are arranged in sequence on the primary surface 13a of the substrate 13. The primary surface 13a tilts from the plane Sc orthogonal to the reference axis Cx at an angle of larger than or equal to 50 degrees and smaller than 130 degrees. Since the substrate 13 of a gallium nitride-based semiconductor can be used, the gallium nitride-based semiconductor layers, such as the p-type group-III nitride semiconductor region 19, is grown over the primary surface 13a which tilts at an angle of larger than or equal to 50 degrees and smaller than 130 degrees from the plane Sc orthogonal to the reference axis Cx, so that the interface J1 between the contact layer 25a and the contact layer 25b also forms a tilt angle the same as that of the primary surface 13a.
The contact layer 25a and the contact layer 25b may be composed of the same gallium nitride-based semiconductor, which is a p-type InxAlyGa1-x-yN (0≦x≦1, 0≦y≦1, 0≦1-x-y). Accordingly, the contact layer 25a and the contact layer 25b may be also composed of a gallium nitride-based semiconductor other than GaN.
The group-III nitride semiconductor device 11 further includes an electrode 37 and an insulating layer 39. The electrode 37 (for example, anode) and the insulating layer 39 that covers the contact layer 25b are provided on the substrate 13, the n-type group-III nitride semiconductor region 15, the light emitting layer 17, and the p-type group-III nitride semiconductor region 19. The electrode 37 is provided over the contact layer 25b and is in direct contact with the contact layer 25b through an opening 39a of the insulating layer 39. The contact layer 25b and the electrode 37 are in contact with each other at the contact JC through the opening 39a. The electrode 37 is composed of, for example, Pd, Au, or a Ni/Au (Ni and Au). The electrode 37, which is composed of such material, establishes excellent contact with the contact layer 25b. The group-III nitride semiconductor device 11 includes an electrode 41 (for example, cathode). The electrode 41 is provided on the back surface 13b of the substrate 13 and is in direct contact with the back surface 13b. The electrode 41 is composed of, for example, Pd or Ti/Al.
As illustrated in Part (b) of
The group-III nitride semiconductor device 11 and the epitaxial substrate EP that has a structure of a light emitting device are fabricated by an organic chemical vapor deposition method through the fabrication flowchart illustrated in
In Step S101, a substrate is prepared, which has a primary surface composed of a gallium nitride-based semiconductor (substrate 51 illustrated in Part (a) of
Semiconductor layers are epitaxially grown over the substrate 51 under the following conditions. First, in Step S102, the substrate 51 is loaded into a growth reactor 10. A quartz tool, such as a quartz flow channel, is installed in the growth reactor 10. If necessary, the substrate 51 is annealed for approximately 10 minutes while thermal processing gas containing NH3 and H2 is supplied to the growth reactor 10 at approximately 1050 degrees Celsius and under the reactor pressure of approximately 27 kPa. Such annealing causes the modification of the primary surface 51a.
After the annealing, in Step S103, a group-III gallium nitride semiconductor layer is grown on the substrate 51 to form the epitaxial substrate EP. The atmosphere gas contains carrier gas and subflow gas. The atmosphere gas contains, for example, nitrogen and/or hydrogen. Step S103 includes the steps S104, S105, and S110 as below.
In Step S104, raw material gas containing n-type dopant and raw materials for group-III elements and group-V element, and atmosphere gas are supplied to the growth reactor 10 to epitaxially grow an n-type group-III nitride semiconductor region 53 (corresponding to the n-type group-III nitride semiconductor region 15). The tilting angle of the primary surface 53a of the n-type group-III nitride semiconductor region 53 is associated with that of the primary surface 51a of the substrate 51. The n-type group-III nitride semiconductor region 53 may include one or more group-III nitride semiconductor layers. In this embodiment, one example of the growth of the group-III nitride semiconductor layers is as follows. At a temperature of approximately 950 degrees Celsius, TMG, NH3, SiH4, and nitrogen and/or hydrogen are supplied to the growth reactor 10 to grow a Si-doped GaN layer 55a. Then, at a substrate temperature of approximately 870 degrees Celsius, TMG, TMI, TMA, NH3, SiH4, and nitrogen are supplied to the growth reactor 10 to grow a Si-doped InAlGaN layer 55b. Then, at approximately 1050 degrees Celsius, TMG, NH3, SiH4, and nitrogen and/or hydrogen are supplied to the growth reactor 10 to grow a Si-doped GaN layer 55c. A reducing hydrogen atmosphere allows oxygen to easily desorb from the tool and extraneous matters on the tool in the growth reactor 10.
In Step S105, a light emitting layer 57 (corresponding to the light emitting layer 17) is grown. Step S105 includes the steps S106 to S109. In Step S106, TMG, TMI, NH3, and nitrogen are supplied to the growth reactor 10 at a substrate temperature of approximately 840 degrees Celsius to grow an n-side InGaN optical guiding layer 59a. A part or whole of the InGaN optical guiding layer 59a may be undoped or doped with dopant of n-type conductivity.
Then, in Steps S107 and S108, an active layer 59b (corresponding to the active layer 27) is grown thereon. In Step S107, TMG, TMI, NH3, and nitrogen atmosphere gas are supplied to the growth reactor 10 to grow an undoped InGaN barrier layer 61a. The undoped InGaN barrier layer 61a has a thickness of approximately 15 nm. After growing the undoped InGaN barrier layer 61a, growth is interrupted to change the substrate temperature from the barrier-layer growth temperature to a well-layer growth temperature. In Step S108, after the substrate temperature has been changed, TMG, TMI, NH3, and nitrogen atmosphere gas are supplied to the growth reactor 10 to grow an undoped InGaN well layer 61b. The undoped InGaN well layer 61b has a thickness of approximately 3 nm. If necessary, the procedures for barrier layer growth, temperature change, and well layer growth may be repeated. In this embodiment, the active layer 59b has a quantum well structure of three undoped InGaN well layers 61b.
In Step S109, TMG, TMI, NH3, and nitrogen atmosphere gas are supplied to the growth reactor 10 at a substrate temperature of approximately 840 degrees Celsius to grow a p-side InGaN optical guiding layer 59c. A part and the whole of the p-side InGaN optical guiding layer 59c may be undoped or doped with dopant for p-type conductivity. The tilt angles of the primary surface 57a of the light emitting layer 57 and the primary surface 59b-1 of the active layer 59b are associated with the tilt angle of the primary surface 51a of the substrate 51.
In Step S110, material gas containing a group-III element source, a group-V element source and a p-type dopant, and atmosphere gas are supplied to the growth reactor 10 to epitaxially grow a p-type group-III nitride semiconductor region 63 (corresponding to the p-type group-III nitride semiconductor region 19). The tilt angle of the primary surface 63a of the p-type group-III nitride semiconductor region 63 is associated with the tilt angle of the primary surface 51a of the substrate 51. The p-type group-III nitride semiconductor region 63 may include one or more group-III nitride semiconductor layers. In this embodiment, the following group-III nitride semiconductor layers are grown: for example, after the light emitting layer 57 has been grown, the TMG supply is stopped and the substrate temperature is increased. TMG, NH3, Cp2Mg, and atmosphere gas are supplied to the growth reactor 10 to grow a p-type GaN electron-blocking layer 65a at a substrate temperature of approximately 900 degrees Celsius. It is desirable to supply nitrogen atmosphere gas for the growth of the p-type GaN electron-blocking layer 65a. Then, TMG, TMI, NH3, Cp2Mg, and nitrogen are supplied to the growth reactor 10 to grow a Mg-doped InGaN optical guiding layer 65b at a substrate temperature of approximately 840 degrees Celsius. Then, TMG, NH3, Cp2Mg, and atmosphere gas are supplied to the growth reactor 10 at a temperature of approximately 900 degrees Celsius to grow a Mg-doped GaN optical guiding layer 65c. It is desirable to supply nitrogen atmosphere gas for the growth of the Mg-doped GaN optical guiding layer 65c. Then, TMG, TMI, TMA, NH3, Cp2Mg, and nitrogen are supplied to the growth reactor 10 at a substrate temperature of approximately 870 degrees Celsius to grow a Mg-doped InAlGaN cladding layer 65d (corresponding to the p-type cladding layer 23).
After the Mg-doped InAlGaN cladding layer 65d has been grown, a lightly Mg-doped GaN contact layer 65e (corresponding to the contact layer 25a) and a highly Mg-doped GaN contact layer 65f (corresponding to the contact layer 25b) are grown. First, in Step S110a, TMG, NH3, Cp2Mg, and atmosphere gas are supplied to the growth reactor 10 at a temperature of approximately 900 degrees Celsius to grow the lightly Mg-doped GaN contact layer 65e. The lightly Mg-doped GaN contact layer 65e has a thickness of approximately 40 nm. The Mg concentration of the lightly Mg-doped GaN contact layer 65e is approximately 1×1019 cm−3. Then the growth of the lightly Mg-doped GaN contact layer 65e is completed, and after changing the amount of the p-type dopant (Mg) supplied in the growth of the lightly Mg-doped GaN contact layer 65e (Step S110a) (for example, the amount of the p-type dopant (Mg) is changed from 1 sccm to 500 sccm, and the growth rates of the lightly Mg-doped GaN layer and the highly Mg-doped GaN layer can be also changed to achieve a designed Mg concentration, where the flow-rate controlling tool has a limitation to the control range thereof), TMG, NH3, Cp2Mg, and atmosphere gas is supplied to the growth reactor to grow a highly Mg-doped GaN contact layer 65f in Step S110b 10 at a temperature of approximately 900 degrees Celsius. The highly Mg-doped GaN contact layer 65f has a thickness of approximately 10 nm. The Mg concentration of the highly Mg-doped GaN contact layer 65f is approximately 5 ×1020 cm−3.
The lightly Mg-doped GaN contact layer 65e and the highly Mg-doped GaN contact layer 65f are composed of the same p-type gallium nitride-based semiconductor, such as InxAlGa1-x-yN (0≦x≦1, 0≦y≦1, 0≦1-x-y) and in particular, GaN. The amount of Mg supplied in the growth of the highly Mg-doped GaN contact layer 65f is higher than the mount of Mg supplied in the growth of the lightly Mg-doped GaN contact layer 65e. Thus, the p-type dopant (Mg) concentration of the highly Mg-doped GaN contact layer 65f is larger than that of the lightly Mg-doped GaN contact layer 65e. It is desirable to supply nitrogen atmosphere gas for the growth of the lightly Mg-doped GaN contact layer 65e and the highly Mg-doped GaN contact layer 65f. The lightly Mg-doped GaN contact layer 65e and the highly Mg-doped GaN contact layer 65f form an interface (corresponding to the interface J1).
The growth temperature of the lightly Mg-doped GaN contact layer 65e and highly Mg-doped GaN contact layer 65f may be as high as approximately 1000 degrees Celsius. The growth temperature of the lightly Mg-doped GaN contact layer 65e and highly Mg-doped GaN contact layer 65f is higher than the growth temperature of the active layer 59b. The difference between the growth temperature of the lightly Mg-doped GaN contact layer 65e and highly Mg-doped GaN contact layer 65f and the growth temperature of the active layer 59b is in the range of 100 degrees Celsius to 350 degrees Celsius or, for example, preferably in the range of 150 degrees Celsius to 300 degrees Celsius. When the growth temperature difference is smaller than this temperature difference range, the limitation in the growth temperature difference range makes the growth temperature of the lightly Mg-doped GaN contact layer 65e and highly Mg-doped GaN contact layer 65f low, thereby degrading the electrical properties. But when the growth temperature difference is greater than the above temperature difference range, the amount of thermal damage that the active layer 59b receives is increased, thereby deteriorating the light emitting efficiency. Upon completion of Steps S101 to S110 described above, an epitaxial substrate EP1 has been fabricated.
In Step S111, an electrode is formed on the epitaxial substrate EP1 (over the highly Mg-doped GaN contact layer 65f, in particular). The electrode is formed as follows: for example, a metal electrode (corresponding to the electrode 37) composed of, for example, Ni/Au or Pd is formed over the highly Mg-doped GaN contact layer 65f and a metal electrode (corresponding to the electrode 41) composed of, for example, Ti/Al is formed on the back side of the epitaxial substrate EP1. Before such formation of the electrodes, a ridge may be formed in the epitaxial substrate EP1. In Step S111, the epitaxial substrate EP is formed thereon. Then, the epitaxial substrate EP is cleaved into laser bars and a reflective film composed of a dielectric multilayer (for example, SiO2/TiO2) is formed on edge surfaces for the optical cavity of each laser bar, and then the laser bars are separated into the group-III nitride semiconductor device 11.
An improvement in the quality of the light emitting layer is essential for providing the light emitting device of the gallium nitride-based semiconductor with a longer emission wavelength. The quality of the light emitting layer is affected by the piezoelectric field and the inhomogeneity of the composition of InGaN in the light emitting layer. The composition inhomogeneity of the InGaN results from segregation of In in the crystal to form a high-In-composition crystal region and a low-In-composition crystal region therein and incorporate strain in the crystal. Such inhomogeneity leads to the creation of crystal defects, lowering the light emitting efficiency. First, the reference to
As illustrated in Part (a) of
As illustrated in Part (d) of
For example, zinc, which act as a p-type dopant, is used in place of Mg, and the physicality illustrated in
A laser diode having the device structure that is illustrated in Part (a) of
The only difference condition between Examples 1 and 2 is the growth temperature of the p-GaN layer and the p+-GaN layer. A laser diode having the device structure that is illustrated in Part (a) of
Examples 3 to 5 comprise a single p+-GaN layer in place of the p-GaN layer and p+-GaN layer as in Examples 1 and 2. The growth temperature of the single p+-GaN layer in Examples 3 to 5 is approximately 900 degrees Celsius. Fabrication conditions in Examples 3 to 5 are identical to those in Examples 1 and 2, except for the layer structure of the p+-GaN layer and its growth temperature. In Example 3, the p+-GaN layer has a thickness of approximately 50 nm and a Mg concentration of approximately 1×1019 cm−3. The measured contact resistance of the anode is approximately 1×10−1 Ωcm2, and the operating voltage at an optical output of 50-mW is approximately 8.5 volts. In Example 4, the p+-GaN layer has a thickness of approximately 50 nm and a Mg concentration of approximately 1×1020 cm−3. The measured contact resistance of the anode is approximately 1×10−2 Ωcm2, and the operating voltage at an optical output of 50-mW is approximately 7.5 volts. In Example 5, the p+-GaN layer has a thickness of approximately 50 nm and a Mg concentration of approximately 1×1021 cm−3. The measured contact resistance of the anode is approximately 1×10−1 Ωcm2, and the operating voltage at an optical output of 50-mW is approximately 8.5 volts. Accordingly, the contact resistance and the operating voltage of the anode in Examples 1 and 2 are improved (i.e., the values of the contact resistance and the operating voltage both are small) compared with those in Examples 3 to 5.
Having described and illustrated the principle of the invention in a preferred embodiment thereof, it is appreciated by those having skill in the art that the invention can be modified in arrangement and detail without departing from such principles. The present invention is not limited to the specific configurations described in the embodiments. We therefore claim all modifications and variations coming within the spirit and scope of the following claims.
In the production process of the GaN-based semiconductor light emitting device that generates light in a long-wavelength range of the green band, it is especially advantageous to use a substrate having a primary surface which is semi-polar or non-polar because the piezoelectric field applied to the light emitting layer can be reduced and a high-quality InGaN light emitting layer having low In segregation can be produced, and so on.
The inventors have considered that there are at least two technical problems in using a semi-polar surface or a non-polar surface. One of the technical problems is that the contact resistance between the substrate and the p-side electrode is relatively high. Typically, the contact resistance demonstrated on a substrate having the primary surface of the c-plane is approximately 5×10−4 Ωcm2, whereas the contact resistance demonstrated on the substrate having a semi-polar or non-polar primary surface is approximately 2×10−2 Ωcm2, and the latter is an increase by approximately two orders of magnitude as compared with the former. Such an increase in the contact resistance causes an increase in voltage by approximately 2 volts when a current is applied thereto in the longitudinal direction.
The other technical problem is that the InGaN light emitting layer, which emits long-wavelength light and has a high In content, is not excellent thermal tolerance, and thus the growth temperature of the p-type layer must be decreased (typically from approximately 1100 degrees Celsius to approximately 900 degrees Celsius). This decrease in temperature may deteriorate the crystal quality of the p-type layer. Such deterioration in the crystal quality of the p-type layer adversely affects the contact resistance. Typically, the contact resistance is approximately 5×10−3 Ωcm2 on a substrate having the primary surface of the c-plane, whereas the contact resistance is approximately 5×10−2 Ωcm2 on the substrate having a primary surface of semi-polar or non-polar planes. Accordingly, the contact resistance on these planes is adversely affected, regardless of the plane orientation of the primary surface of the substrate.
The inventors have found a method of fabricating a GaN-based semiconductor light emitting device having satisfactorily low contact resistance in the p-type layer that is grown on the semi-polar or non-polar primary surface of the substrate at a low temperature. In the growth of the p-type layer for protection of the light emitting layer in a hydrogen atmosphere at a relatively low temperature (approximately 900 degrees Celsius), when the growth rate is equal to 1 μm/hour or higher, carbon acting as impurity is introduced to the p-type layer by an amount of approximately 1×1018 cm−3 over 1×1017 cm−3. Such carbon impurity concentration increases the electrical resistance of the p-type layer, thereby adversely affecting the contact resistance between the p-type layer and the electrode. In contrast, the inventors have discovered that lowering the growth rate to increase the molar ratio, i.e., (the number of group-V atoms)/(the number of group-III atoms), is effective in lowering the carbon impurity concentration of the p-type layer and have succeeded in actually lowering the contact resistance. In such a case, the growth rate for a contact layer having a surface in contact with the p-side electrode and highly doped with Mg (a p+-GaN layer corresponding to the highly Mg-doped GaN contact layer 65f) is 0.1 μm/hour or less, and the growth rate for a contact layer in contact with the above contact layer and doped with Mg at a relatively low concentration (a p-GaN layer corresponding to the lightly Mg-doped GaN contact layer 65e) is 1 μm/hour or less.
The inventors have discovered that growing a p-type layer in a nitrogen atmosphere is also an effective in lowering the carbon impurity concentration. In this case, however, a significant improvement in the contact resistance is not observed. The inventors have analyzed the cause of such a phenomenon (i.e., a p-type layer grown in a nitrogen atmosphere may have a reduced carbon impurity concentration but not makes the contact resistance significantly improved). That is, the inventors have analyzed the cause in consideration of the fact that Mg atoms displacing Ga atoms in the GaN act as acceptors and the fact that Mg atoms efficiently displace Ga atoms in a hydrogen atmosphere but do not efficiently displace Ga atoms in a nitrogen atmosphere to enter interstitial cites. In accordance with the above-described explanation, the inventors have concluded that the above aspect (i.e., a p-type layer grown in a nitrogen atmosphere may have a lowered carbon impurity concentration but not have significantly reduced contact resistance) is caused by the phenomenon that Mg atoms doped in a nitrogen atmosphere do not work as effective acceptors, although the SIMS analysis teaches that the concentration of Mg atoms doped in the nitrogen atmosphere is approximately the same as that doped in the hydrogen atmosphere.
The inventors have discovered a GaN-based semiconductor light emitting device having satisfactorily low contact resistance and a method of fabricating the GaN-based semiconductor light emitting device that enable the growth of a p-type layer over a substrate having a semi-polar or non-polar primary surface at a low temperature under the following growth condition: at a decreased growth rate; in a hydrogen atmosphere and an increased ratio (molar ratio of supplied materials), i.e., (the number of group-V atoms)/(the number of group-III atoms). The following modifications are applied to the structure of the epitaxial substrate EP1 illustrated in
The differences (modifications) between the structure and method of production of the epitaxial substrate EP11 and those of the epitaxial substrate EP1 will be listed below: Regarding the epitaxial substrate EP11, hydrogen is used for atmosphere gas in the growth of the Si-doped GaN layer 55a, the lightly Mg-doped GaN contact layer 65e, and the highly Mg-doped GaN contact layer 65f; and Regarding the epitaxial substrate EP11, nitrogen is used for atmosphere gas in the growth of other layers of the epitaxial substrate EP11. These are important items for creating the GaN-based semiconductor light emitting device having satisfactorily low contact resistance, and the method of fabricating the GaN-based semiconductor light emitting device.
Regarding the epitaxial substrate EP11, a p-type GaN electron-blocking layer 65a is not formed in the growth of the p-type group-III nitride semiconductor region 63; Regarding the epitaxial substrate EP11, the growth temperature of the Si-doped GaN layer 55c is set to approximately 840 degrees Celsius; Regarding the epitaxial substrate EP11, the growth temperatures of the lightly Mg-doped GaN contact layer 65e and the highly Mg-doped GaN contact layer 65f are both set at approximately 870 degrees Celsius; and Regarding the epitaxial substrate EP11, a Mg-doped AlGaN cladding layer, not a Mg-doped InAlGaN cladding layer, is provided at the position designated by reference characters 65d illustrated in the drawing. These are modifications not associated with the configuration of the GaN-based semiconductor light emitting device having satisfactorily low contact resistance, and the method of fabricating the GaN-based semiconductor light emitting device.
Except for the differences described above, the structures and method of fabricating the epitaxial substrate EP11 are the same as those of the epitaxial substrate EP1.
The carbon impurity concentration in the lightly Mg-doped GaN contact layer 65e of the epitaxial substrate EP11 is 1×1017 cm−3 or less. The relatively low carbon impurity concentration decreases the contact resistance and the operating voltage of the device.
The primary surface 51a of the substrate 51 in the epitaxial substrate EP11 may tilt at an angle which is larger than or equal to 70 degrees and smaller than 80 degrees from a plane (plane Sc) orthogonal to the reference axis (reference axis Cx) that extends along a c-axis of the gallium nitride-based semiconductor, or tilt at an angle which is larger than or equal to 100 degrees and smaller than 110 degrees from a plane (plane Sc) orthogonal to the reference axis (reference axis Cx) that extends along the c-axis of the gallium nitride-based semiconductor. The use of a substrate in which its primary surface tilts by such an angle range reduces the fluctuation in the In content of the light emitting layer and enables the production of a light emitting device having satisfactorily high external quantum efficiency.
In the method of fabricating the epitaxial substrate EP11, the growth rate of the lightly Mg-doped GaN contact layer 65e is 1 μm/hour or less; the growth rate of the highly Mg-doped GaN contact layer 65f is 0.1 μm/hour or less; the growth rate of the highly Mg-doped GaN contact layer 65f is lower than the growth rate of the lightly Mg-doped GaN contact layer 65e; and the lightly Mg-doped GaN contact layer 65e and the highly Mg-doped GaN contact layer 65f are grown in an atmosphere containing at least 20% hydrogen (volume percent (vol %)). Hydrogen atmosphere gas is used in the growth of the lightly Mg-doped GaN contact layer 65e and the highly Mg-doped GaN contact layer 65f, and the growth rate of the lightly Mg-doped GaN contact layer 65e and the growth rate of the highly Mg-doped GaN contact layer 65f are relatively low, so that the ratio, (the number of group-V atoms)/(the number of group-III atoms), can be relatively large in the growth of the lightly Mg-doped GaN contact layer 65e and the highly Mg-doped GaN contact layer 65f. Thus, the carbon impurity concentrations of the lightly Mg-doped GaN contact layer 65e and the highly Mg-doped GaN contact layer 65f can be made relatively low, providing satisfactorily low contact resistance to the electrode and excellent operating voltage of the device. In order to reduce the carbon impurity concentration of the lightly Mg-doped GaN contact layer 65e and the highly Mg-doped GaN contact layer 65f, the lightly Mg-doped GaN contact layer 65e and the highly Mg-doped GaN contact layer 65f can be grown in a nitrogen atmosphere, but, since it is difficult to grow crystal highly doped with Mg in a nitrogen atmosphere, the crystallinity of the lightly Mg-doped GaN contact layer 65e and the highly Mg-doped GaN contact layer 65f is not made excellent, causing an increase in the contact resistance to the electrode and the operating voltage of the device. In order to reduce the carbon impurity concentration of the lightly Mg-doped GaN contact layer 65e and the highly Mg-doped GaN contact layer 65f, the growth temperatures of the lightly Mg-doped GaN contact layer 65e and the highly Mg-doped GaN contact layer 65f can be increased, but, since the growth temperature of the active layer is made low for emission of relatively long wavelength light and its thermal tolerance to the subsequent growth of the p-layer is reduced, the active layer 59b may be damaged. Decreasing the growth rate in a hydrogen atmosphere and increasing the ratio of (the number of the group-V atoms)/(the number of group-III atoms) allow the production of a GaN-based semiconductor light emitting device having satisfactorily low contact resistance on a substrate of a semi-polar or non-polar primary surface, even if the p-type layer is grown at a low temperature for protection of the light emitting layer emitting light having a relatively long wavelength.
In the method of fabricating the epitaxial substrate EP11, the growth temperature of the active layer 59b is higher than or equal to 650 degrees Celsius and lower than 800 degrees Celsius. In the method of fabricating the epitaxial substrate EP11, the difference between the growth temperature of the active layer 59b and the growth temperature of the lightly Mg-doped GaN contact layer 65e and highly Mg-doped GaN contact layer 65f is within the range of 100 degrees Celsius to 250 degrees Celsius. Such a temperature range can reduce the damage applied to the active layer 59b during the growth of the p-type layer.
An epitaxial substrate EP11 according to Example 6 will now be described. Example 6 describes a laser diode having the device structure illustrated in Part (a) of
With reference to
Nitrogen is used as atmosphere gas during the growth of other layers; and
The growth rate of the p-GaN layer corresponding to the lightly Mg-doped GaN contact layer 65e is set at 0.43 μm/hour, and the growth rate of the p+-GaN layer corresponding to the highly Mg-doped GaN contact layer 65f is set at 0.07 μm/hour. These differences are important factors in the GaN-based semiconductor light emitting device having satisfactorily low contact resistance and the method of fabricating such a GaN-based semiconductor light emitting device.
The other differences are as follows:
The growth temperature of the p-GaN layer corresponding to the lightly Mg-doped GaN contact layer 65e and the growth temperature of the p+-GaN layer corresponding to the highly Mg-doped GaN contact layer 65f are both set at approximately 870 degrees Celsius;
The n-InGaN layer corresponding to the InGaN optical guiding layer 59a has a thickness of approximately 0.145 μm and an indium (In) content of approximately 0.05;
Instead of a p-GaN layer corresponding to the p-type GaN electron-blocking layer 65a, a p-InGaN layer corresponding to the Mg-doped InGaN optical guiding layer 65b and having a thickness of approximately 0.040 μm is grown over the ud-InGaN layer corresponding to the p-side InGaN optical guiding layer 59c; and
Instead of an InAlGaN layer corresponding to the Mg-doped InAlGaN cladding layer 65d, the p-AlGaN layer having a thickness of approximately 0.40 μm and an Al content of 0.05 is provided between the p-GaN layer corresponding to the Mg-doped GaN optical guiding layer 65c and the p-GaN layer corresponding to the lightly Mg-doped GaN contact layer 65e.
These differences are not associated with satisfactorily low contact resistance of the GaN-based semiconductor light emitting device and the method of fabricating such a GaN-based semiconductor light emitting device.
In Example 6, lasing is observed at a wavelength of approximately 525 nm and a threshold current of approximately 3 kA/cm2, where the operating voltage of a 50-mW optical output is approximately 5.5 volts. In Example 6, the contact resistance between the p+-GaN layer corresponding to the highly Mg-doped GaN contact layer 65f and the metal electrode (palladium (Pd) electrode) is measured using a transmission line method (TLM). The contact resistance between the p+-GaN layer and the metal electrode (Pd electrode) measured by the TLM is smaller than or equal to 5×10−4 Ωcm2 on the entire surface of the p+-GaN layer.
In Example 6, the growth temperature of the p-GaN layer corresponding to the lightly Mg-doped GaN contact layer 65e and the growth temperature of the p+-GaN layer corresponding to the highly Mg-doped GaN contact layer 65f are both set at approximately 870 degrees Celsius, which is a relatively lower temperature (lower when compared with Examples 1 and 2). A decrease in the growth temperature of the contact layers (p-GaN layer and p+-GaN layer) prevents heat deterioration of the active layer during the growth of the contact layers.
The curve GC1 illustrated in
Embodiments according to the present invention provide a method of fabricating a group-III nitride semiconductor device and a group-III nitride semiconductor device that has p-type contact layers with a relatively smaller contact resistance and a relatively higher carrier concentration without reducing the crystallinity.
Having described and illustrated the principle of the invention in a preferred embodiment thereof, it is appreciated by those having skill in the art that the invention can be modified in arrangement and detail without departing from such principles. We therefore claim all modifications and variations coming within the spirit and scope of the following claims.
| Number | Date | Country | Kind |
|---|---|---|---|
| 2011-144664 | Jun 2011 | JP | national |
| 2012-111478 | May 2012 | JP | national |
