Claims
- 1. A uniform high-throughput dry etching process for delineating fine-line patterns in multiple workpieces simultaneously by sputter etching or reactive sputter etching in the space between a small-surface-area conductive cylindrical cathode element and a large-surface-area anode element centrally mounted within said cathode element, said process comprising the steps of
- mounting the workpieces to be etched on the inner surface of said cathode element in a symmetrical cylindrical array,
- establishing a predetermined gaseous atmosphere within said anode-to-cathode space,
- and capacitively coupling said cathode element to a source of a-c power and connecting said anode element to a point of reference potential to form a generally symmetrical annular dark space in the immediate vicinity of said workpieces and to form a generally symmetrical annular plasma between said dark space and said anode element, thereby to cause uniform etching of said multiple workpieces to occur.
- 2. A process as in claim 1 wherein during etching said workpieces are mounted in electrical contact with said cathode element.
- 3. A process as in claim 2 wherein during etching said workpieces are cooled to maintain the surfaces thereof at a substantially uniform specified temperature.
- 4. A process as in claim 1 wherein said gaseous atmosphere comprises a reactive gas, said power source operates at approximately 13.5 megahertz and the pressure within said anode-to-cathode space is established at approximately 5 microns.
Parent Case Info
This is a division of application Ser. No. 65,185, filed Aug. 9, 1979, now U.S. Pat. No. 4,268,374, issued May 19, 1981.
US Referenced Citations (10)
Non-Patent Literature Citations (3)
Entry |
Mauer et al, "Mechanism . . . Plasma", J. Vac. Sci. Technology, vol. 15 (5), Sep./Oct. 1978, pp. 1734-1738. |
George, "Cylindrical . . . Production", J. Vac. Sci. Technology, vol. 10 (2) Mar./Apr. 1973, pp. 393-399. |
Schwatz, "Competitive . . . Plasma", J. of Electrochemical Society: Solid State Tech., vol. 126(3), Mar. 1979, pp. 464-469. |
Divisions (1)
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Number |
Date |
Country |
Parent |
65185 |
Aug 1979 |
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