Claims
- 1. An instrument for 3-dimensional atomic arrangement observation comprising an electron gun, magnetic lenses for illumination, electron deflector coils and a specimen holder, said instrument comprising:
- a specimen goniometer/tilting system having a driving means connected with said specimen holder;
- an electron detector for observing a plurality of 2-dimensional atomic-arrangement images of a specimen upon application of a scanning electron beam with an atomic-level diameter;
- means for compensating automatically a shift of specimen position induced by the specimen tilting; and
- a computer for executing control of said specimen goniometer/tilting system, said electron detector and said compensating means.
- 2. An instrument for 3-dimensional atomic arrangement observation according to claim 1, wherein said specimen goniometer/tilting system connected to said computer is capable of fine-controlling the inclination of said specimen by finding an amount of positional aberration due to said specimen inclination so that a structure of interest in said specimen is always held at the center of an observation area.
- 3. An instrument for 3-dimensional atomic arrangement observation according to claim 1, wherein said electron detector comprises a plurality of photosensitive devices arranged in a matrix configuration so that a range of scattering angles and scattering directions of scattered electrons used for formation of said 2-dimensional atomic-arrangement images being selected arbitrarily.
- 4. An instrument for 3-dimensional atomic arrangement observation according to claim 3, wherein said photosensitive device has a size of several micrometers or less.
- 5. An instrument for 3-dimensional atomic arrangement observation according to claim 1, wherein said computer comprises image-processing software for, when executed by said computer, storing said 2-dimensional atomic-arrangement images observed at each inclination angle of said specimen at an angular accuracy corresponding to the atomic distance and constructing a 3-dimensional atomic-arrangement structure using said 2-dimensional atomic-arrangement images.
- 6. An instrument for 3-dimensional atomic arrangement observation according to claim 5, wherein said image-processing software includes a program for, when executed by said computer, reconstructing an image of a 3-dimensional structure from a plurality of 2-dimensional projection images obtained by viewing said 3-dimensional structure from a variety of angles.
- 7. An instrument for 3-dimensional atomic arrangement observation according to claim 6, wherein said image-processing software includes a program for, when executed by said computer, constructing a cross-sectional image at any cross section of a 3-dimensional structure and a program for, when executed by said computer, constructing a squint view of a 3-dimensional structure as seen from any arbitrary direction.
- 8. An instrument for 3-dimensional atomic arrangement observation according to claim 1, wherein said computer comprises control software for, when executed by said computer, controlling said instrument.
Priority Claims (1)
Number |
Date |
Country |
Kind |
3-110126 |
May 1991 |
JPX |
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Parent Case Info
This is a divisional of application Ser. No. 07/882,970, filed May 14, 1992, now U.S. Pat. No. 5,278,408.
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Jan 1978 |
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4724320 |
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4866273 |
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Non-Patent Literature Citations (1)
Entry |
Philips Technical Review, "The Microprocessor-Controlled CM12/STEM Scanning-Transmission Electron Microscope", U. Gross, et al., 43 (1987) Nov., No. 10, Eindhoven, The Netherlands. |
Divisions (1)
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Number |
Date |
Country |
Parent |
882970 |
May 1992 |
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