BRIEF DESCRIPTION OF THE DRAWINGS
The objectives and advantages of the present invention will become apparent upon reading the following description and upon reference to the accompanying drawings in which:
FIG. 1 and FIG. 2 illustrate a probe card used for testing electrical properties of an integrated circuit device according to the prior art;
FIG. 3 and FIG. 4 illustrate an integrated circuit probing apparatus according to the first embodiment of the present invention;
FIG. 5 illustrates an integrated circuit probing apparatus according to the second embodiment of the present invention;
FIG. 6 and FIG. 7 illustrate an integrated circuit probing apparatus according the third embodiment of the present invention
FIG. 8 illustrates an integrated circuit probing apparatus according to the fourth embodiment of the present invention;
FIG. 9 illustrates an integrated circuit probing apparatus according to the fifth embodiment of the present invention; and
FIG. 10 illustrates an integrated circuit probing apparatus according to the sixth embodiment of the present invention.
DETAILED DESCRIPTION OF THE INVENTION
FIG. 3 and FIG. 4 illustrate an integrated circuit probing apparatus 50 according to the first embodiment of the present invention. The integrated circuit probing apparatus 50 comprises a probe card 10, a temperature-adjusting mechanism 66 configured to adjust the temperature of the test environment, a holder 64 configured to support the probe card 10, and a test head 60. The probe card 10 includes a circuit board 12 and a plurality of probes 16 positioned on the circuit board 12. The circuit board has a first surface 12A and a second surface 12B, and the probe 16 can form an electrical connection with an integrated circuit device 30 facing a first surface 12A of the circuit board 12. The test head 60 includes a plurality of pogo pins, connection pins, test interfaces and test measurement units 62 capable of forming electrical connections and measurements with a plurality of connecting sites 28 on the second surface 12B of the circuit board 12.
The temperature-adjusting mechanism 66 comprises a support 52 such as a cover positioned on the second surface 12B of the circuit board 12 and a flow line 54 positioned on the supporter 52. Preferably, the flow line can be a guiding tube having at least one fluid inlet and a plurality of fluid outlets facing the outer edge of the circuit board 12. The flow line permits a fluid to flow therein, and the fluid can be gas, liquid or the combination thereof. For example, the fluid can be cooled dry air, nitrogen or the combination of cooled dry air and nitrogen for cooling the test environment. In addition, the fluid can be heated air for increasing the temperature of cold temperature environment to prevent condensation on the test head 60 and pogo pins 62.
The temperature-adjusting mechanism 66 permits a pressurized fluid to flow therein via the fluid inlet 58 in a controlled manner such that the temperature of the test environment can be kept within a predetermined range in which the material of the integrated circuit probing apparatus 50 can optimally perform. Variations in the physical or material properties of the integrated circuit probing apparatus 50 can be reduced to a minimum by controlling the temperature of the pressurized fluid and the flow rate of the pressurized fluid in order to decrease the temperature variation of the test environment.
The accuracy of the test data of the integrated circuit are determined by the test equipment operating under pre-specified range of working temperature. The temperature-adjusting mechanism 66 is also used to ensure that the test head 60 and pogo pins 62 are performing the electrical measurements of integrated circuit under the specified operation temperature.
FIG. 5 illustrates an integrated circuit probing apparatus 50′ according to the second embodiment of the present invention. Compared to the integrated circuit probing apparatus 50 in FIG. 4 having the flow line 54 on the supporter 52 on the second surface 12B, the integrated circuit probing apparatus 50′ in FIG. 5 positions its flow line 54′, serving as the temperature-adjusting mechanism, on the second surface 12B. The flow line 54′ has a plurality of fluid outlets 56 facing the outer edge of the circuit board 12, and the fluid outlets 56 are preferably facing the pins 62 of the test head.
FIG. 6 and FIG. 7 illustrate an integrated circuit probing apparatus 70 according to the third embodiment of the present invention. Compared to the integrated circuit probing apparatus 50 and 50′ in FIG. 4 and FIG. 5 having the flow line 54 and 54′ substantially on the second surface 12B, the integrated circuit probing apparatus 70 in FIG. 7 positions its flow line 80, serving as the temperature-adjusting mechanism, inside the circuit board 12. The circuit board 12 includes a plurality of laminates 72, 74 and 76, and the flow line 80 is positioned in one of the laminates 72, 74 and 76, for example the laminate 74. The flow line 80 includes a plurality of openings 82 facing the second surface 12B of the circuit board 12, and the openings 82 can serve as fluid inlets or fluid outlets.
FIG. 8 illustrates an integrated circuit probing apparatus 90 according to the fourth embodiment of the present invention. Compared to the integrated circuit probing apparatus 50, 50′ and 70 in FIG. 4, FIG. 5 and FIG. 7 having the flow line 54, 54′ and 80 on the second surface 12B or inside the circuit board 12, the integrated circuit probing apparatus 90 in FIG. 8 positions its flow line 92, serving as the temperature-adjusting mechanism, inside the holder 64. The flow line 92 has a fluid inlet 96 and a plurality of fluid outlets 94, and the fluid outlets 94 may face the pins 62 of the test head 60 or the first surface 12A of the circuit board 12.
FIG. 9 illustrates an integrated circuit probing apparatus 100 according to the fifth embodiment of the present invention. Compared to the integrated circuit probing apparatus 90 in FIG. 8 having the flow line 92 in the holder 64, the integrated circuit probing apparatus 100 in FIG. 9 positions its flow line 102, serving as the temperature-adjusting mechanism, on the holder 64. The flow line 102 has a plurality of openings 104, which can be used as fluid inlets or fluid outlets.
FIG. 10 illustrates an integrated circuit probing apparatus 110 according to the sixth embodiment of the present invention. Compared to the aforementioned integrated circuit probing apparatus having the flow line on the circuit board 12 or the holder 64, the integrated circuit probing apparatus 110 in FIG. 10 positions its flow line 112, serving as the temperature-adjusting mechanism, outside the test head 60. The flow line 112 has a plurality of openings 114, which can be used as fluid inlets or fluid outlets. In addition, the flow line 112 can also be positioned inside the test head 60.
Compared to the prior art, the present invention allows the flowing of the pressurized fluid in the flow line to adjust the temperature of the test environment. Consequently, the temperature of the test environment where the integrated circuit probing apparatus is positioned can be kept within the range in which the material of the integrated circuit probing apparatus and the test units of test head can optimally perform. In addition, variations in the physical or material properties of the integrated circuit probing apparatus can be reduced to the minimum by controlling the temperature of the pressurized fluid and the flow rate of the pressurized fluid to decrease the temperature variation of the test environment.
The above-described embodiments of the present invention are intended to be illustrative only. Numerous alternative embodiments may be devised by those skilled in the art without departing from the scope of the following claims.
Patent Application
20080048700
