Interferometer system for monitoring an object

Abstract

In general, in one aspect, the invention features a system that includes a first object mounted relative to a second object, the first object being moveable with respect to the second object. The system includes a plurality of interferometers each configured to derive a first wavefront and a second wavefront from input radiation and to combine the first and second wavefronts to provide output radiation including information about an optical path length difference between the paths of the first and second wavefronts, each interferometer including a reflective element positioned in the path of the first wavefront, and at least one of the interferometer's reflective element is mounted on the first object. The system also includes a plurality of fiber waveguides and an electronic controller. Each fiber waveguide is configured to deliver the input radiation to a corresponding interferometer or deliver the output radiation from the corresponding interferometer to a corresponding detector. The electronic controller is configured to monitor a degree of freedom of the first object relative to the second object based on the information from at least one of the interferometers, wherein the degree of freedom is an absolute displacement between the first and second objects.

Description

DESCRIPTION OF DRAWINGS

FIG. 1 is a schematic diagram of a sensor system for monitoring the position of components in a projection objective assembly.

FIG. 2 is a schematic diagram of a sensor mounted in a projection objective assembly.

FIG. 3 is a schematic diagram an embodiment of a sensor.

FIG. 4A is a schematic diagram an embodiment of a sensor.

FIG. 4B is a schematic diagram an embodiment of a sensor.

FIG. 4C is a schematic diagram an embodiment of a sensor.

FIG. 4D is a schematic diagram an embodiment of a sensor.

FIG. 4E is a schematic diagram an embodiment of a sensor.

FIG. 5 is a schematic diagram an embodiment of a sensor.

FIG. 6 is a schematic diagram an embodiment of a sensor.

FIG. 7 is a schematic diagram an embodiment of a sensor.

FIG. 8 is a schematic diagram an embodiment of a sensor.

FIG. 9 is a schematic diagram an embodiment of a sensor.

FIG. 10 is a schematic diagram an embodiment of a sensor.

FIG. 11 is a schematic diagram an embodiment of a sensor.

FIGS. 12 and 13 are a schematic diagram and a plan view, respectively, of an embodiment of a sensor.

FIG. 14A is a schematic diagram of a sensor system.

FIG. 14B is a schematic diagram of a sensor system.

FIG. 14C is a schematic diagram of a optical fiber distribution network.

FIG. 15 is a schematic diagram of a coupled cavity system.

FIG. 16 is a schematic diagram of a sensor system.

FIG. 17A is a schematic diagram of a sensor system.

FIG. 17B is a schematic diagram of a source module.

FIG. 18 is a schematic diagram of a sensor system.

FIG. 19 is a schematic diagram of a source module.

FIG. 20A is a schematic diagram of a modulation module.

FIG. 20B is a schematic diagram of a modulation module.

FIG. 21 is a schematic diagram of a sensor system.

FIG. 22A is a schematic diagram of a sensor system

FIG. 22B is a schematic diagram of the sensor system shown in FIG. 22A including electronic components.

FIG. 22C is a circuit diagram of electronic components shown in FIG. 22B.

FIG. 23 is a schematic diagram of a wavelength monitor.

FIG. 24 is a schematic diagram of a photolithography tool.

FIG. 25A and FIG. 25B are flow charts that describe steps for making integrated circuits.

FIG. 26 is a schematic diagram of a telescope that includes adaptive optics and a sensor system.

FIG. 27 is a schematic diagram of an apparatus that includes a sensor system.

Claims

1. A system, comprising: a first object mounted relative to a second object, the first object being moveable with respect to the second object;a plurality of interferometers each configured to derive a first wavefront and a second wavefront from input radiation and to combine the first and second wavefronts to provide output radiation comprising information about an optical path length difference between the paths of the first and second wavefronts, each interferometer comprising a reflective element positioned in the path of the first wavefront, and at least one of the interferometer's reflective element is mounted on the first object;a plurality of fiber waveguides, each fiber waveguide being configured to deliver the input radiation to a corresponding interferometer or deliver the output radiation from the corresponding interferometer to a corresponding detector; andan electronic controller configured to monitor a degree of freedom of the first object relative to the second object based on the information from at least one of the interferometers,wherein the degree of freedom is an absolute displacement between the first and second objects.

2. The system of claim 1, wherein each fiber waveguide is configured to deliver the input radiation to the corresponding interferometer and deliver the output radiation from the corresponding interferometer to the corresponding detector.

3. The system of claim 1, wherein the input radiation for each interferometer has a wavelength in a range from about 900 nm to about 1,600 nm.

4. The system of claim 1, wherein the input radiation for each interferometer has a wavelength in a range from about 1,500 nm to about 1,600 nm.

5. The system of claim 1, wherein the input radiation for each interferometer has a different wavelength.

6. The system of claim 1, wherein each interferometer comprises an optical interface positioned in a path of the input radiation, where the optical interface is configured to reflect a first portion of the input radiation to form either the first or second wavefronts.

7. The system of claim 6, wherein the optical interface is a surface of a fiber waveguide.

8. The system of claim 6, wherein the optical interface is a planar optical interface.

9. The system of claim 6, wherein the optical interface is a surface of a transparent element.

10. The system of claim 6, wherein the surface is configured to transmit a second portion of the input radiation to form either the second or first wavefronts.

11. The system of claim 6, wherein each interferometer comprises a beam splitter configured to split the input radiation into the measurement and reference wavefronts.

12. The system of claim 11, wherein each beam splitter is a polarizing beam splitter.

13. The system of claim 1, wherein each interferometer is configured so that the first wavefront reflects from the object once.

14. The system of claim 1, wherein each interferometer is configured so that the first wavefront reflects from the object more than once.

15. The system of claim 1, wherein each reflective element is a retroreflector.

16. The system of claim 1, wherein each reflective element is a mirror.

17. The system of claim 1, wherein for at least one of the interferometers the first wavefront reflects from the reflective element and the reflective element includes a surface configured to receive the first wavefront where the surface has a dimension that is smaller than a cross-sectional dimension of the first wavefront prior to reflecting from the reflective element.

18. The system of claim 1, wherein for at least one of the interferometers the first wavefront reflects from the reflective element and the reflective element includes a surface configured to receive the first wavefront where the surface has a dimension that is larger than a cross-sectional dimension of the first wavefront prior to reflecting from the reflective element.

19. The system of claim 1, at least one of the interferometers further comprises an optical element configured to shape input radiation emerging from the respective fiber waveguide.

20. The system of claim 19, wherein the optical element is a lens.

21. The system of claim 20, wherein the lens is configured to collimate input radiation emerging from the respective optical fiber.

22. The system of claim 20, wherein the lens comprises a surface that reflects the first or second wavefront.

23. The system of claim 1, wherein for at least one of the interferometers the first or second wavefront has a diameter of about 0.2 mm or less at the first object.

24. The system of claim 23, wherein the lens is configured to focus light emerging from the optical fiber.

25. The system of claim 24, wherein the reflective element is positioned at or near the waist of the focused light.

26. The system of claim 1, further comprising a light source configured to produce the input radiation, the system being configured to deliver the input radiation to the interferometers via the plurality of fiber waveguides.

27. The system of claim 26, wherein the light source comprises a broadband light source.

28. The system of claim 27, further comprising a plurality of optical filters configured to transmit input radiation of differing wavelengths from the broadband light source to the interferometers.

29. The system of claim 28, wherein each optical filter corresponds to one of the plurality of interferometers.

30. The system of claim 27, wherein the broadband light source is a light emitting diode or an amplified spontaneous emission source.

31. The system of claim 30, wherein the light source comprises a laser.

32. The system of claim 31, wherein the laser is a distributed feedback laser.

33. The system of claim 26, further comprising an amplifier configured to amplify radiation from the light source and direct the amplified radiation to the interferometers.

34. The system of claim 26, wherein the light source comprises a plurality of light source elements, each element being configured to produce radiation at a different wavelength.

35. The system of claim 1, further comprising additional fiber waveguides, where the plurality of fiber waveguides and additional fiber waveguides form a fiber network configured to deliver the input radiation to the interferometers and to deliver the output radiation from the interferometers to the detectors.

36. The system of claim 1, further comprising a remote optical cavity optically coupled to the interferometers.

37. The system of claim 36, wherein the remote optical cavity comprises a first optical path and a second optical path and further comprises an element configured to vary an optical path different between first and second optical paths.

38. The system of claim 1, wherein the first object is an optical component and the second object is a frame in which the optical component is mounted.

39. The system of claim 38, wherein the first object is an optical component in an optical imaging system.

40. The system of claim 39, wherein the optical imaging system is a projection objective assembly of a microlithography tool.

41. The system of claim 39, wherein the optical imaging system is a telescope.

42. The system of claim 1, further comprising an actuator coupled to the first object, the actuator being in communication with the electronic controller and being configured to adjust the position of the first object based on the information determined by the electronic controller.

43. A method of monitoring degree of freedom of a first object with respect to a second object, the method comprising: directing radiation from a light source to a plurality of interferometers, each interferometer being configured to receive the radiation from a fiber waveguide, to derive a first wavefront and a second wavefront from the radiation and to combine the first and second wavefronts to provide output radiation comprising information about an optical path length difference between the paths of the first and second wavefronts, wherein at least one of the interferometers is configured to direct the first wavefront to reflect from an element positioned on the first object;directing the output radiation from each interferometer to a respective detector; anddetermining information about a degree of freedom of the first object relative to the second object based on the information from the output radiation from at least one of the interferometers,wherein the information comprises an absolute displacement between the first and second objects.

44. The method of claim 43, further comprising determining information about two or more degrees of freedom of the first object based on information from the output radiation from two or more interferometers.

45. The method of claim 43, further comprising determining information about a degree of freedom of the a third object relative to the first or second objects based on the information from the output radiation from at least one of the interferometers.

46. The method of claim 43, the radiation directed to each interferometer is directed through a common fiber waveguide.

47. The method of claim 43, wherein the information comprises variations of a displacement between the first object and a second object.

48. The method of claim 43, further comprising adjusting the position of the first object based on the monitored degree of freedom.

49. The method of claim 43, further comprising outputting information about the position of the first object based on the monitored degree of freedom.

50. The method of claim 43, further comprising updating the information about the degree of freedom at a rate of about 5 kHz or more.

51. The method of claim 43, wherein the output radiation is directed to the respective detector via the corresponding fiber waveguide.

52. The method of claim 43, wherein the information about the absolute displacement is determined to an accuracy of 1 nm or better.