Number | Name | Date | Kind |
---|---|---|---|
4591540 | Bohlen et al. | May 1986 | |
5045417 | Okamoto | Sep 1991 | |
5153083 | Garofalo et al. | Oct 1992 | |
5194344 | Cathey, Jr. et al. | Mar 1993 | |
5194345 | Rolfson | Mar 1993 | |
5194346 | Rolfson et al. | Mar 1993 |
Entry |
---|
"Improving Resolution in Photolithography with a Phase-Shifting Mask," by Levensen et al., was published in IEEE Transactions on Electron Devices, vol. ED-29, No. 12, Dec. 1982, pp. 1828-1836. |
"Sub-Quarter Micron Gate Fabrication Process Using Phase-Shifting-Mask for Microwave GaAs Devices" by Inokuchi et al., publ. in Ext. Abs. of '91 Int. Conf. on S. S. Dev. & Mat., Yoko., pp. 92-94. |