Number | Name | Date | Kind |
---|---|---|---|
3665888 | Bergh et al. | May 1972 | |
3960618 | Kawamura et al. | Jun 1976 | |
3975218 | Ruehrwein | Aug 1976 | |
3996891 | Isawa et al. | Dec 1976 | |
4072544 | DeWinter et al. | Feb 1978 | |
4154630 | Diguet et al. | May 1979 | |
4357897 | Leswin | Nov 1982 | |
4372791 | Hsieh | Feb 1983 |
Entry |
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"Suppression of Thermal Damage of InP by Adding Ar in H.sub.2 Atmosphere," K. Pak et al., Japanese Journal of Applied Physics, vol. 18, No. 9, 1979, pp. 1859-1860. |