This application claims the benefit of Japanese Patent Application No. 2020-167192, filed on Oct. 1, 2020, in the Japanese Patent Office and Korean Patent Application No. 10-2021-0084162, filed on Jun. 28, 2021, in the Korean Intellectual Property Office, the disclosures of each of which are incorporated herein in their entireties by reference.
Inventive concepts relate to a magnetic memory device and a magnetic memory apparatus.
In large capacity non-volatile memory represented by NAND flash memory, due to development of three-dimensional technology, recording capacity is increasing. However, because semiconductor memory records information, for example by by the presence of or absence of charges in a memory cell, time to physically move electrons is used/required.
On the other hand, magnetic memory may essentially implement short time record, for example within dozens of picoseconds. Limited to recording time, magnetic memory may have a speed 10 to 20 times higher than that of other semiconductor memory. Alternatively or additionally, recently, in a one-dimensional structure referred to as a magnetic fine wire obtained by processing a magnetic material to a straight line of hundreds of nanometers, a phenomenon in which a magnetic domain wall is driven by applying a current (a magnetic domain wall current driving phenomenon) has been observed. Electric access to magnetization information by using the phenomenon is tried.
Race track memory may be an original memory wherein a U-shaped three dimensional structure is obtained by extending a magnetic fine wire in a vertical direction. In the memory, information is moved to a read head by generating a magnetic domain by a record head in the magnetic fine wire and applying a pulse current from side to side. When information to be read is provided at an end, a function of random access may be implemented although it takes some time. Data is read by a magnetic tunnel junction (MTJ) device.
Inventive concepts relate to a magnetic memory device and/or a magnetic memory apparatus with high density, high capacity, and/or high reliability.
According to some example embodiments of inventive concepts, there is provided a magnetic memory device including a spin orbit torque (SOT) source configured to generate SOT, and a magnetic fine wire having an end contacting a main surface of the SOT source. A direction of SOT generated by the SOT source is perpendicular to a direction in which the magnetic fine wire extends, and a magnetic domain in the magnetic fine wire is parallel to the direction in which the magnetic fine wire extends.
According to some example embodiments of inventive concepts, there is provided a magnetic memory apparatus including a spin orbit torque (SOT) source extending in a horizontal direction, a first electrode at one end of the SOT source and a second electrode at another end of the SOT source, a magnetic fine wire extending on the SOT source in a direction perpendicular to the horizontal direction, at least one of an insulating layer or a non-magnetic metal layer, the insulating layer or the non-magnetic metal layer on an upper end of the magnetic fine wire, a fixed layer on the insulating layer or the non-magnetic metal layer, a third electrode on the fixed layer, and controller circuitry electrically connected to the first electrode, the second electrode, and the third electrode.
According to some example embodiments of inventive concepts, there is provided a magnetic memory apparatus including a spin orbit torque (SOT) source configured to generate SOT, a magnetic fine wire on the SOT source, a first electrode and a second electrode, the first electrode and the second electrode configured to flow a current to the SOT source in a direction perpendicular to a direction of the SOT, a third electrode configured to flow a current to the magnetic fine wire in a direction parallel to a direction in which the magnetic fine wire extends, and controller circuitry connected to the first electrode, the second electrode, and the third electrode.
Some example embodiments of inventive concepts will be more clearly understood from the following detailed description taken in conjunction with the accompanying drawings in which:
Hereinafter, some example embodiments of inventive concepts will be described with reference to the accompanying drawings.
Referring to
The SOT source 111 is an electrode generating SOT. The magnetic fine wire 114 contacts (e.g. directly contacts) a main surface of the SOT source 111, such as approximately in the z direction. In addition, the SOT source 111 generates the SOT in a direction approximately perpendicular to the main surface of the SOT source 111, e.g. perpendicular to the direction in which an x direction and a y direction extend. Then, the SOT source 111 generates the SOT in a lower portion 114b of the magnetic fine wire 114. Directions of magnetization recorded in the magnetic fine wire 114 by the SOT generated by the SOT source 111 in the lower portion 114b of the magnetic fine wire 114 and a current flowing through the magnetic fine wire 114 correspond to stored information. In
The SOT source 111 may generate the SOT by flowing a current between the first electrode 112 and the second electrode 113, e.g. in a horizontal direction such as in the x direction. The SOT source 111 may commonly be a non-magnetic metal. For example, the SOT source 111 may include a topological insulator. The topological insulator is or includes a material of which the inside is an insulator and a surface is conductive. For example, the topological insulator may include semimetal bismuth and/or a bismuth compound. In particular, BiTeSb and/or BiSb may be a suitable or a very suitable material for the topological insulator. An inside of the topological insulator may have conductivity type, such as P-type or N-type, by changing a composition. Alternatively or additionally, the SOT source 111 may include at least one metal among rhodium (Rh), platinum (Pt), tungsten (W), and tantalum (Ta).
Alternatively or additionally, the SOT source 111 may include a combination of a magnetic material such as NiFe or CoFeB as a ferromagnetic body and titanium (Ti).
The first electrode 112 contacts (e.g. directly contacts) one end of the SOT source 111. The second electrode 113 contacts (e.g. directly contacts) another end of the SOT source 111. In addition, the first electrode 112 and the second electrode 113 are connected to the controller 102, for example by electric wiring lines. Although
The magnetic fine wire 114 is or includes a magnetic body having magnetic anisotropy. One end of the magnetic fine wire 114 contacts or directly contacts the SOT source 111, and another end of the magnetic fine wire 114 contacts or directly contacts the insulating layer 115. In
The magnetic fine wire 114 may be or correspond to a pillar-type magnetic fine wire. The magnetic fine wire 114 may include a ferromagnetic metal. The magnetic fine wire 114 may be made of a slender magnetic body. A current may flow in the magnetic fine wire 114, and the magnetic fine wire 114 may function as magnetic domain wall movable memory in which a magnetic domain wall (a boundary between sections of constant magnetization directions) moves. For example, a current may flow in the magnetic fine wire 114 so that spin transfer torque (STT) is generated. A current may flow to the SOT source 111 arranged under an end of the magnetic fine wire 114 so that the SOT is generated in the lower portion 114b of the magnetic fine wire 114. By using the STT and the SOT together, a magnetic domain wall and/or a magnetic domain is recorded in the magnetic fine wire 114.
For example, the magnetic fine wire 114 may include at least one of a cobalt (Co)/nickel (Ni) multilayer, a CoNi-based alloy, a Co/palladium (Pd) multilayer, a CoPd alloy, a Co/Pt multilayer, a CoPt alloy, a terbium (Tb)/iron (Fe)Co multilayer, a TbFeCo alloy, a CoFe alloy, a CoFeB alloy, a Fe/Ni multilayer, or a FeNi alloy.
The magnetic fine wire 114 may have various shapes. The magnetic fine wire 114 illustrated in
One end of the insulating layer 115 structurally contacts (e.g. directly contacts) the magnetic fine wire 114. In addition, the insulating layer 115 is a non-magnetic insulator. For example, a main component of the insulating layer 115 may be or may include an insulating material. The insulating layer 115 includes an insulating layer such as magnesium oxide (MgO). A material of the insulating layer 115 may be oxide having a sodium chloride (NaCl) structure, e.g. may have a cubic unit cell. The material of the insulating layer 115 may be at least one of calcium oxide (CaO), strontium oxide (SrO), titanium oxide (TiO), vanadium oxide (VO), or niobium oxide (NbO) in addition to or alternatively to MgO. However, the material of the insulating layer 115 is not limited thereto, for example unless a function thereof deteriorates. For example, spinel-type MgAl2O4 may alternatively or additionally be used as the material of the insulating layer 115. In some example embodiments as in
The fixed layer 116 is or includes a ferromagnetic body having perpendicular magnetic anisotropy. For example, the fixed layer 116 is parallel with the extension direction of the magnetic fine wire 114 and has magnetic anisotropy. One end of the fixed layer 116 structurally contacts (e.g. directly contacts) the insulating layer 115. Another end of the fixed layer 116 contacts (e.g. directly contacts) the third electrode 117. The fixed layer 116 is a ferromagnetic metal layer with a fixed direction of magnetization. For example, the fixed layer 116 may include a Fe-based material such as CoFeB or CoFe, the Co/Pt multilayer, or a combination of the Fe-based material and the Co/Pt multilayer. The magnetic fine wire 114, the insulating layer 115, and the fixed layer 116 form the TMR device.
The third electrode 117 contacts (e.g. directly contacts) the fixed layer 116. In addition, the third electrode 117 is connected to the controller 102, for example by an electric wiring line.
The controller 102 records and/or reads information into and/or from the magnetic memory device 101. The controller 102 moves information in the magnetic fine wire 114. Such operations are performed by the controller 102 applying a voltage and/or flowing current among the first electrode 112, the second electrode 113, and the third electrode 117.
The controller 102 may include a current source and/or a voltage source and/or a current meter or ammeter and/or a voltage meter or voltmeter and/or a voltammeter. Additionally or alternatively, the controller 102 may be implemented in processing circuitry such as hardware including logic circuits; a hardware/software combination such as a processor executing software; or a combination thereof. For example, the processing circuitry more specifically may include, but is not limited to, a central processing unit (CPU) , an arithmetic logic unit (ALU), a digital signal processor, a microcomputer, a field programmable gate array (FPGA), a System-on-Chip (SoC), a programmable logic unit, a microprocessor, application-specific integrated circuit (ASIC), etc. The controller 102 may be connected to other components such as to a host (not shown); the host may request reading of and/or writing to the magnetic memory device 101.
The controller 102 may cause a change a direction of the current flowing between the first electrode 112 and the second electrode 113 in accordance with information to be recorded/stored. For example, when binary ‘0’ is to be recorded in the magnetic memory device 101, the controller 102 may flow the current from the first electrode 112 to the second electrode 113. When binary ‘1’ is to be recorded in the magnetic memory device 101, the controller 102 flows the current from the second electrode 113 to the first electrode 112. Alternatively, when the binary ‘1’ is to be recorded in the magnetic memory device 101, the controller 102 flows the current from the first electrode 112 to the second electrode 113. When the binary ‘0’ is to be recorded in the magnetic memory device 101, the controller 102 flows the current from the second electrode 113 to the first electrode 112.
Alternatively or additionally, the controller 102 may read the direction of the magnetization (for example, a value of the recorded information) of the magnetic fine wire 114 by applying a constant voltage (a DC voltage) between the first electrode 112 and the third electrode 117 and measuring a value of the current flowing between the third electrode 117 and the first electrode 112.
Additionally or alternatively, the controller 102 may read the direction of the magnetization (for example, the value of the recorded information) of the magnetic fine wire 114 by flowing a constant current (a sensing current) between the first electrode 112 and the third electrode 117 and measuring the voltage (a potential difference) between the first electrode 112 and the third electrode 117.
Referring to
The generated magnetic domain wall may move, e.g. may move upward along the magnetic fine wire 114 by the controller 102 flowing a current J1 from the third electrode 117 to the first electrode 112. Referring to
Next, referring to
When the controller 102 flows the current J1 from the third electrode 117 to the first electrode 112, the magnetization M1 corresponding to the information on the first bit moves closer to the third electrode 117, and the magnetic domain wall generated in the lower portion 114b of the magnetic fine wire 114 moves to the magnetic fine wire 114. Referring to
Referring to
Referring to
Alternatively or additionally, the controller 102 reads the direction of the magnetization at an upper end of the magnetic fine wire 114 (for example, a value of information/bits recorded at the uppermost side 115 of the magnetic fine wire 114) by flowing a constant current (a DC current) between the first electrode 112 and the third electrode 117, and measuring the voltage (or the potential difference) between the first electrode 112 and the third electrode 117.
The controller 102 reads second information by moving the magnetization of the magnetic fine wire 114 upward (e.g. in the vertical z-direction) with a constant current, and moving the second information closer to the third electrode 117. As described above, third and fourth information items may be sequentially read.
In addition, when the third and fourth information items (e.g. the third and fourth bits) are sequentially read, the controller 102 does not flow a current (and/or does not apply a voltage) between the first electrode 112 and the second electrode 113.
As described above, the magnetic memory apparatus 100 may move the magnetic domain wall (the boundary between the sections in the constant magnetization directions) by using the STT and the SOT together. The magnetic fine wire 114 may function as magnetic domain wall movable memory.
Next, the probability in which recording capacity of a magnetic device according to inventive concepts is equal to or greater than that of next generation vertical NAND (V-NAND) memory is investigated. In micro-magnetics simulation based on the Landau-Lifshitz-Gilbert (LLG) equation, a length of the magnetic fine wire is set as 200 nm, a width of the magnetic fine wire is set as 10 nm, and a stripe-shaped magnetic domain structure obtained by magnetizing information of 10 bits is written as an initial state. As a result of performing micro-magnetics simulation with magnetic parameters such as saturation magnetization Ms: 300 kA/m, an exchange stiffness integer: 1.0 pJ/m, vertical magnetic anisotropy: 100 kJ/m3, and a DMI integer: 0.015 mJ/m2, a state is stable with the number of bits in the initial state maintained. Therefore, information of, for example, up to 500 bits may be stored in the magnetic fine wire with a length of 10 μm. The memory capacity is one to two times the recording capacity of V-NAND memory with a height of 10 μm, a diameter of 150 nm, and 96 layers.
A calculator experiment may be performed on an operation of the magnetic memory device 101 illustrated in
Referring to
By using conventional race track structure and magnetic fine wire, it is or may be necessary to provide an electrode for moving data, a recording fine wire for recording data, and a magnetic tunnel junction (MTJ) device for reading data. However, in the magnetic memory apparatus according to some example embodiments of inventive concepts, data may be recorded, moved, and read by a three-terminal structure.
Alternatively or additionally in the magnetic memory apparatus according to some example embodiments of inventive concepts, by recording information using the SOT wiring lines and the pillar-type magnetic fine wire and moving the information by a current, a magnetic device with high density, large capacity, and high reliability, which functions as large capacity non-volatile memory represented by a shift register reading information by using an MTJ or NAND flash memory or next generation V-NAND memory, may be provided.
In addition, inventive concepts are not limited to example embodiments illustrated in
Alternatively or additionally, in
While inventive concepts has been particularly shown and described with reference to some example embodiments thereof, it will be understood that various changes in form and details may be made therein without departing from the spirit and scope of the following claims.
Number | Date | Country | Kind |
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2020-167192 | Oct 2020 | JP | national |
10-2021-0084162 | Jun 2021 | KR | national |