This application relates generally to memory devices for storing data. A specific example of a memory device described in the present disclosure includes a memory with multiple memory cells associated with a given access transistor, wherein the memory cells are part of a structure such as a phase change memory device.
There is an increasing demand for more memory capability on smaller chips in the semiconductor memory industry. Manufacturers are constantly trying to reduce the size of electronic components such as transistors, flash cells, memory bit storage devices etc. on memory chips to improve density and increase capacity. Also an increase in data access speed and an increase in data write speed are desirable.
In the following detailed description of the invention, reference is made to the accompanying drawings that form a part hereof and in which is shown, by way of illustration, specific embodiments in which the invention may be practiced. In the drawings, like numerals describe substantially similar components throughout the several views. These embodiments are described in sufficient detail to enable those skilled in the art to practice the invention. Other embodiments may be utilized and structural, logical, and electrical changes may be made without departing from the scope of the present invention.
The terms “wafer” and “substrate” used in the following description include any structure having an exposed surface with which to form an integrated circuit (IC) structure of the invention. The term substrate is understood to include semiconductor wafers. The term substrate is also used to refer to semiconductor structures during processing and may include other layers, such as silicon-on-insulator (SOI), etc. that have been fabricated thereupon. Both wafer and substrate include doped and undoped semiconductors, epitaxial semiconductor layers supported by a base semiconductor or insulator, as well as other semiconductor structures well known to one skilled in the art. The term conductor is understood to include semiconductors and the term insulator or dielectric is defined to include any material that is less electrically conductive than the materials referred to as conductors.
The term “horizontal” as used in this application is defined as a plane parallel to the conventional plane or surface of a wafer or substrate, regardless of the orientation of the wafer or substrate. The term “vertical” refers to a direction perpendicular to the horizontal as defined above. Prepositions, such as “on,” “side” (as in “sidewall”), “higher,” “lower,” “over,” and “under” are defined with respect to the conventional plane or surface being on the top surface of the wafer or substrate, regardless of the orientation of the wafer or substrate.
In one embodiment, the block 102 includes a phase change memory block. A phase change structure 114 is shown comprising the first cell 118 and the second cell 120. An example of a phase change material that could be used to form the phase change structure 114 includes a chalcogenide glass, although the invention is not so limited. A number of electrode select lines 112 are shown coupled to the cells in the array 100 such as the first cell 118 and the second cell 120.
In operation, a phase of all or a portion of the phase change structure 114 is selected to correspond to a memory state, such as to provide a zero or a one designation in the logic of the memory array 100. In one embodiment, the phase of all, or a portion of a cell of the phase change structure 114 is altered between an amorphous state and a crystalline state. The respective phase states possess different electronic properties such as resistivity, therefore changing from one state to the other has the effect of programming the cell.
A dielectric 117 is shown adjacent to the phase change structure 114 to provide electrical isolation. In the example shown, the phase change structure 114 includes a ring like structure, or a structure having a perimeter, although other structures could be used, such as a cross like structure as illustrated in embodiments described below. In one example, geometry for the phase change structure 114 is selected to facilitate placement of other circuitry, such as electrode select lines, in an efficient manner to provide higher device density.
A rectifying device 116 is also shown in
In one method of operation, an access line 150 is activated to open gates of access transistors in the desired row, such as access transistor 156. In the embodiment illustrated in
In the example shown in
In one embodiment, the rectifying device 172 as used with phase change cell 170 and the similar configuration throughout the array reduce or eliminate unwanted disturbances of other adjacent cells during operation of the array. The rectifying devices in the array stop signals, charges, etc. from traveling through other paths in the circuit and causing unwanted cell programming, noise, etc.
In one embodiment, the block 202 includes a phase change memory block. A phase change structure 214 is shown comprising the four cells. As stated in previous examples, an example of a phase change material includes a chalcogenide glass, although the invention is not so limited. A number of electrode select lines 212 are shown coupled to the cells in the array 200.
A dielectric 217 is shown adjacent to the phase change structure 214 to provide electrical isolation. In the example shown, the phase change structure 214 includes a cross like structure. Although a cross like structure is shown, the invention is not so limited.
A rectifying device 216 is also shown in
The configuration shown in
In one method of operation, an access line 250 is activated to open gates of access transistors in the desired row, such as access transistor 260. In the embodiment illustrated in
Although a phase change memory device is described as an example, the invention is not so limited. Other embodiments of the present invention include multiple cell memory devices in general where more than one cell is associated with a single access transistor. Other multiple cell technologies may include examples such as magnetic storage cells, flash memory cells, etc.
In one embodiment, an electrode select line 254 is selected to select an individual cell within the block 203. The further selection of the desired access line 250 and transfer line 252 determine which block is written to or read.
In one embodiment, an electrode select line is selected according to a decode rule. In the example shown in
The operations in
In one embodiment, the block 402 includes a phase change memory block. A phase change structure 414 is shown comprising the four cells. As stated in previous examples, an example of a phase change material includes a chalcogenide glass, although the invention is not so limited. A number of electrode select lines 412 are shown coupled to the cells in the array.
A dielectric 417 is shown adjacent to the phase change structure 414 to provide electrical isolation. In the example shown, the phase change structure 414 includes a cross like structure. Although a cross like structure is shown, the invention is not so limited.
As discussed above, the first type semiconductor portion 415 and the second type semiconductor portions 416 function as a rectifying device. The rectifying device is coupled to the electrode select line 412 using a contact 413. A contact, such as contact 413, is an embodiment of an electrode as recited in the following claims. The rectifying device is in turn coupled to the phase change structure 414. As discussed above, this configuration helps to isolate phase change cells during operation of the array, providing better reading and writing characteristics with fewer errors.
The configuration shown in
In one method of operation, an access line 450 is activated to open gates of access transistors in the desired row, such as access transistor 460. In the embodiment illustrated in
Although a phase change memory device is described as an example, the invention is not so limited. Other embodiments of the present invention include multiple cell memory devices in general where more than one cell is associated with a single access transistor. Other multiple cell technologies may include examples such as magnetic storage cells, flash memory cells, etc.
In one embodiment, an electrode select line 454 is selected to select an individual cell within the block 403. The further selection of the desired access line 450 and transfer line 452 determine which block is written to or read.
In one embodiment, electrode select lines are selected according to a selection rule. In the example shown in
In one embodiment, the block 502 includes a phase change memory block. A phase change structure 514 is shown comprising the four cells. As stated in previous examples, an example of a phase change material includes a chalcogenide glass, although the invention is not so limited. A number of electrode select lines 512 are shown coupled to the cells in the array.
A dielectric 517 is shown adjacent to the phase change structure 514 to provide electrical isolation. In the example shown, the phase change structure 514 includes a cross like structure. Although a cross like structure is shown, the invention is not so limited.
As discussed above, the first type semiconductor portion 515 and the second type semiconductor portions 516 function as a rectifying device. The rectifying device is coupled to the electrode select line 512 using a contact 513. The rectifying device is in turn coupled to the phase change structure 514. As discussed above, this configuration helps to isolate phase change cells during operation of the array, providing better reading and writing characteristics with fewer errors.
The configuration shown in
In one method of operation, an access line 550 is activated to open gates of access transistors in the desired row, such as access transistor 560. In the embodiment illustrated in
Although a phase change memory device is described as an example, the invention is not so limited. Other embodiments of the present invention include multiple cell memory devices in general where more than one cell is associated with a single access transistor. Other multiple cell technologies may include examples such as magnetic storage cells, flash memory cells, etc.
In one embodiment, an electrode select line 554 is selected to select an individual cell within the block 503. The further selection of the desired access line 550 and transfer line 552 determine which block is written to or read.
In one embodiment, an electrode select line is selected according to a decode rule. In the example shown in
Although a number of examples are shown with various rectifying device architecture and associated electrode select line rules, the invention is not so limited. Additionally, although four cell per access transistor and two cell per access transistor embodiments are shown, the invention can be used with other multiple cell configurations. Using memory device configurations shown, and methods described herein, multiple cell memory devices are provided with improvements, including improved cell isolation for operations such as read and write. Further, methods and devices for addressing and accessing cells are shown that provide a simple and efficient way to manage devices with multiple cells associated with each access transistor. Using such configurations with a phase change memory provides high read and write speeds compared to other memories such as flash. Configurations as described herein further provide efficient device construction and selection of each phase change cell.
An embodiment of an information handling system such as a computer is included in subsequent figures to show an embodiment of a high-level device application for the present invention.
In this example, information handling system 600 comprises a data processing system that includes a system bus 602 to couple the various components of the system. System bus 602 provides communications links among the various components of the information handling system 600 and may be implemented as a single bus, as a combination of busses, or in any other suitable manner.
Chip assembly 604 is coupled to the system bus 602. Chip assembly 604 may include any circuit or operably compatible combination of circuits. In one embodiment, chip assembly 604 includes a processor 606 that can be of any type. As used herein, “processor” means any type of computational circuit such as, but not limited to, a microprocessor, a microcontroller, a graphics processor, a digital signal processor (DSP), or any other type of processor or processing circuit.
In one embodiment, a memory chip 607 is included in the chip assembly 604. Those skilled in the art will recognize that a wide variety of memory device configurations may be used in the chip assembly 604. Acceptable types of memory chips include, but are not limited to, Dynamic Random Access Memory (DRAMs) such as SDRAMs, SLDRAMs, RDRAMs and other DRAMs. Memory chip 607 can also include non-volatile memory such as flash memory. In one embodiment, the memory chip 607 includes a phase change random access memory (PCRAM).
In one embodiment, additional logic chips 608 other than processor chips are included in the chip assembly 604. An example of a logic chip 608 other than a processor includes an analog to digital converter. Other circuits on logic chips 608 such as custom circuits, an application-specific integrated circuit (ASIC), etc. are also included in one embodiment of the invention.
Information handling system 600 may also include an external memory 611, which in turn can include one or more memory elements suitable to the particular application, such as one or more hard drives 612, and/or one or more drives that handle removable media 613 such as floppy diskettes, compact disks (CDs), digital video disks (DVDs), and the like. A memory constructed as described in examples above is included in the information handling system 600.
Information handling system 600 may also include a display device 609 such as a monitor, additional peripheral components 610, such as speakers, etc. and a keyboard and/or controller 614, which can include a mouse, trackball, game controller, voice-recognition device, or any other device that permits a system user to input information into and receive information from the information handling system 600.
While a number of embodiments of the invention are described, the above lists are not intended to be exhaustive. Although specific embodiments have been illustrated and described herein, it will be appreciated by those of ordinary skill in the art that any arrangement that is calculated to achieve the same purpose may be substituted for the specific embodiment shown. This application is intended to cover any adaptations or variations of the present invention. It is to be understood that the above description is intended to be illustrative and not restrictive. Combinations of the above embodiments, and other embodiments, will be apparent to those of skill in the art upon reviewing the above description. The scope of the invention includes any other applications in which the above structures and methods are used. The scope of the invention should be determined with reference to the appended claims, along with the full scope of equivalents to which such claims are entitled.
This application is a divisional of U.S. application Ser. No. 12/026,195, filed Feb. 5, 2008 now U.S. Pat. No. 7,961,506, which is incorporated herein by reference in its entirety.
Number | Name | Date | Kind |
---|---|---|---|
4809044 | Pryor et al. | Feb 1989 | A |
5515317 | Wells et al. | May 1996 | A |
5574879 | Wells et al. | Nov 1996 | A |
5764588 | Nogami et al. | Jun 1998 | A |
5896340 | Wong et al. | Apr 1999 | A |
5966340 | Fujino et al. | Oct 1999 | A |
5973356 | Noble et al. | Oct 1999 | A |
6021064 | McKenny et al. | Feb 2000 | A |
6072713 | McKenny et al. | Jun 2000 | A |
6143636 | Forbes et al. | Nov 2000 | A |
6285593 | Wong | Sep 2001 | B1 |
6418049 | Kozicki et al. | Jul 2002 | B1 |
6456524 | Perner et al. | Sep 2002 | B1 |
6587372 | Blodgett | Jul 2003 | B2 |
6654280 | Blodgett | Nov 2003 | B2 |
6662263 | Wong | Dec 2003 | B1 |
6731535 | Ooishi et al. | May 2004 | B1 |
6765261 | Widdershoven | Jul 2004 | B2 |
6778445 | Ooishi et al. | Aug 2004 | B2 |
6816408 | Blodgett | Nov 2004 | B2 |
6894941 | Kurjanowicz et al. | May 2005 | B2 |
6901007 | Blodgett | May 2005 | B2 |
6937505 | Morikawa | Aug 2005 | B2 |
7026639 | Cho et al. | Apr 2006 | B2 |
7154798 | Lin et al. | Dec 2006 | B2 |
7205564 | Kajiyama | Apr 2007 | B2 |
7215568 | Liaw et al. | May 2007 | B2 |
7236393 | Cho et al. | Jun 2007 | B2 |
7307268 | Scheuerlein | Dec 2007 | B2 |
7400521 | Hoenigschmid | Jul 2008 | B1 |
7436693 | Kang et al. | Oct 2008 | B2 |
7440308 | Jeong et al. | Oct 2008 | B2 |
7545019 | Philipp et al. | Jun 2009 | B2 |
7560723 | Liu | Jul 2009 | B2 |
7675770 | Asano et al. | Mar 2010 | B2 |
7791058 | Liu | Sep 2010 | B2 |
7817454 | Liu | Oct 2010 | B2 |
7961506 | Liu | Jun 2011 | B2 |
20010050866 | Khieu | Dec 2001 | A1 |
20030043621 | Wong | Mar 2003 | A1 |
20040114428 | Morikawa | Jun 2004 | A1 |
20040179397 | Banks | Sep 2004 | A1 |
20050135146 | Taussig et al. | Jun 2005 | A1 |
20050146955 | Kajiyama | Jul 2005 | A1 |
20050243598 | Lin et al. | Nov 2005 | A1 |
20060050547 | Liaw | Mar 2006 | A1 |
20060154432 | Arai et al. | Jul 2006 | A1 |
20060176724 | Asano et al. | Aug 2006 | A1 |
20060220071 | Kang et al. | Oct 2006 | A1 |
20060221687 | Banks | Oct 2006 | A1 |
20070020849 | Hong et al. | Jan 2007 | A1 |
20070054452 | Hong et al. | Mar 2007 | A1 |
20070103963 | Kim et al. | May 2007 | A1 |
20070133270 | Jeong et al. | Jun 2007 | A1 |
20070159867 | Muraoka et al. | Jul 2007 | A1 |
20070217254 | Matsuoka et al. | Sep 2007 | A1 |
20070246766 | Liu | Oct 2007 | A1 |
20080198644 | Broms et al. | Aug 2008 | A1 |
20080296554 | Lee | Dec 2008 | A1 |
20080298113 | Liu et al. | Dec 2008 | A1 |
20090196095 | Liu | Aug 2009 | A1 |
20090267044 | Chang | Oct 2009 | A1 |
20100270529 | Lung | Oct 2010 | A1 |
20100295011 | Liu | Nov 2010 | A1 |
Number | Date | Country |
---|---|---|
2007067013 | Mar 2007 | JP |
200802362 | Jan 2008 | TW |
WO-2004027877 | Jan 2004 | WO |
WO-2008150583 | Dec 2008 | WO |
WO-2009099626 | Aug 2009 | WO |
Entry |
---|
“Micron Technical Note: Hamming Codes for NAND Flash Memory Devices”, Micron Technical Note, TN-29-08, http://download.micron.com/pdf/technotes/nand/tn2908.pdf., (2005), 7 pages. |
“Technical Note: High-Speed Programming Performance and Write Buffer Comman Sequence”, Micron Technical Note, TN-28-42, Write Buffer Command Sequence, http://download.micron.com/pdf/technotes/FT42.pdf, (2002), 3 pages. |
Mandelman, J. A., et al., “Challenges and Future Directions for the Scaling of Dynamic Random-Access Memory (DRAM)”, IBM Journal of R&D, vol. 46, No. 2/3, http://www.research.ibm.com/journal/rd/462/mandelman.html, (Mar./May 2002), 187-212. |
“Chinese Application Serial No. 200980104178.8, Office Action mailed May 4, 2012”, 9 pgs. |
“Chinese Application Serial No. 200980104178.8, Response filed Nov. 19, 2012 to Office Action mailed May 4, 2012”, 9 pgs. |
“European Application Serial No. 09708959.3, Examination Notification Art. 94(3) mailed Jul. 30, 2013”, 5 pgs. |
“European Application Serial No. 09708959.3, Extended Search Report mailed Jun. 14, 2012”, 10 pgs. |
“European Application Serial No. 09708959.3, Response filed Jan. 14, 2013 to European Search Report mailed Jun. 14, 2012”, 8 pgs. |
“Taiwanese Application Serial No. 098103716, Office Action mailed Mar. 27, 2013”, 12 pgs. |
Number | Date | Country | |
---|---|---|---|
20110255331 A1 | Oct 2011 | US |
Number | Date | Country | |
---|---|---|---|
Parent | 12026195 | Feb 2008 | US |
Child | 13158836 | US |