The invention relates generally to memory devices. More particularly, the invention relates to memory devices with magnetic random access memory (“MRAM”) cells and associated structures for connecting the MRAM cells.
MRAM devices have become the subject of increasing interest, in view of the discovery of magnetic tunnel junctions having a strong magnetoresistance at ambient temperatures. MRAM devices offer a number of benefits, such as faster speed of writing and reading, non-volatility, and insensitivity to ionizing radiations. Consequently, MRAM devices are increasingly replacing memory devices that are based on a charge state of a capacitor, such as dynamic random access memory devices and flash memory devices.
In a conventional implementation, a MRAM device includes an array of MRAM cells, each one of which includes a magnetic tunnel junction formed of a pair of ferromagnetic layers separated by a thin insulating layer. One ferromagnetic layer, the so-called reference layer, is characterized by a magnetization with a fixed direction, and the other ferromagnetic layer, the so-called storage layer, is characterized by a magnetization with a direction that is varied upon writing of the device, such as by applying a magnetic field. When the respective magnetizations of the reference layer and the storage layer are antiparallel, a resistance of the magnetic tunnel junction is high, namely having a resistance value Rmax corresponding to a high logic state “1”. On the other hand, when the respective magnetizations are parallel, the resistance of the magnetic tunnel junction is low, namely having a resistance value Rmin corresponding to a low logic state “0”. A logic state of a MRAM cell is read by comparing its resistance value to a reference resistance value Rref, which is derived from a reference cell or a group of reference cells and represents an in-between resistance value between that of the high logic state “1” and the low logic state “0”.
In a conventional MRAM cell, a reference layer is typically exchange biased by an adjacent antiferromagnetic layer, which is characterized by a threshold temperature TBR of the antiferromagnetic layer. Below the threshold temperature TBR, a magnetization of the reference layer is pinned by the exchange bias of the antiferromagnetic layer, thereby retaining the magnetization of the reference layer in a fixed direction. Above the threshold temperature TBR, the exchange bias substantially vanishes, thereby unpinning the magnetization of the reference layer. Consequently, and in order to avoid data loss, an operation temperature window of the conventional MRAM cell has an upper bound defined by the threshold temperature TBR.
In the case of a MRAM cell that is implemented for thermally assisted switching (“TAS”), a storage layer also is typically exchange biased by another antiferromagnetic layer, which is adjacent to the storage layer and is characterized by a threshold temperature TBS that is smaller than the threshold temperature TBR. Below the threshold temperature TBS, a magnetization of the storage layer is pinned by the exchange bias, thereby inhibiting writing of the storage layer. Writing is carried out by heating the MRAM cell above the threshold temperature TBS (but below TBR), thereby unpinning the magnetization of the storage layer to allow writing, such as by applying a magnetic field. The MRAM cell is then cooled to below the threshold temperature TBS with the magnetic field applied, such that the magnetization of the storage layer is “frozen” in the written direction.
While offering a number of benefits, a conventional TAS-type MRAM device suffers from certain deficiencies. Specifically, a write operation temperature window is defined by TBR-TBS and, therefore, is bounded by the threshold temperature TBR at the upper end and the threshold temperature TBS at the lower end. Because of practical constraints on antiferromagnetic materials for exchange bias, the write operation temperature window can be rather limited, such as to a range less than 200° C. or less than 150° C. Moreover, in the case of an array of TAS-type MRAM cells, characteristics of individual cells can vary across the array due to manufacturing variability. This variability can result in a distribution of the threshold temperatures TBS and TBR for the array, which, for example, can amount up to ±30° C., thereby further reducing the write operation temperature window. In addition, this variability can impact a resistance of magnetic tunnel junctions across the array and can result in a distribution of the resistance values Rmin and Rmax for the array, thereby complicating a comparison between a measured resistance value of an individual cell and a reference resistance value Rref during reading. Consequently, a tight tolerance control can be required during manufacturing, and this tight tolerance control can translate into lower manufacturing yields and higher manufacturing costs.
It is against this background that a need arose to develop the memory devices and related methods described herein.
One aspect of the invention includes an improved apparatus including a magnetic layer including a plurality of magnetic random access memory (MRAM) cells, a first conductive layer, a first via, a layer including a first strap, and a second conductive layer. The first conductive layer includes a first conductive portion electrically connected to the plurality of MRAM cells, and a first field line configured to write data to at least one of the plurality of MRAM cells. The first strap extends from the first via to the first MRAM cell. The first via extends from the first conductive portion to the first strap. The second conductive layer includes a first conductive interconnect extending between the first MRAM cell and the second MRAM cell. The improvement comprises: (1) a second via extending from the first conductive portion to the second conductive layer, the second via to replace the first via; (2) a second conductive interconnect extending from the first MRAM cell to the second via and bypassing the strap, the second conductive interconnect to replace the first conductive interconnect; and (3) a second strap extending from the first MRAM cell to the second MRAM cell, the second strap to replace the first strap.
Another aspect of the invention relates to a memory device. In one embodiment, the memory device includes a magnetic layer including a plurality of magnetic random access memory (MRAM) cells, a first conductive layer, and a second conductive layer. The first conductive layer includes a conductive portion electrically connected to at least one of the plurality of MRAM cells, and a field line configured to write data to the at least one of the plurality of MRAM cells. The second conductive layer includes a conductive interconnect electrically connected to the at least one of the plurality of MRAM cells. The magnetic layer is disposed between the first conductive layer and the second conductive layer. At least one via extends between the first conductive layer and the second conductive layer. The magnetic layer is electrically connected to the conductive portion of the first conductive layer through the at least one via, without any via extending between the magnetic layer and the first conductive layer, and without any via extending between the magnetic layer and the second conductive layer.
In another embodiment, the memory device includes a magnetic layer including a plurality of magnetic random access memory (MRAM) cells, a first conductive layer, a layer including a strap connecting MRAM cells included in the plurality of MRAM cells, and a second conductive layer. The first conductive layer includes a conductive portion electrically connected to at least one of the plurality of MRAM cells, and a field line configured to write data to the at least one of the plurality of MRAM cells. The second conductive layer includes a conductive interconnect electrically connected to the at least one of the plurality of MRAM cells, where the magnetic layer is disposed between the first conductive layer and the second conductive layer. At least one of the plurality of MRAM cells is directly attached to the second conductive layer and the strap.
For a better understanding of the nature and objects of some embodiments of the invention, reference should be made to the following detailed description taken in conjunction with the accompanying drawings.
The following definitions apply to some of the aspects described with respect to some embodiments of the invention. These definitions may likewise be expanded upon herein.
As used herein, the singular terms “a,” “an,” and “the” include plural referents unless the context clearly dictates otherwise. Thus, for example, reference to an object can include multiple objects unless the context clearly dictates otherwise.
As used herein, the term “set” refers to a collection of one or more objects. Thus, for example, a set of objects can include a single object or multiple objects. Objects of a set also can be referred to as members of the set. Objects of a set can be the same or different. In some instances, objects of a set can share one or more common characteristics.
As used herein, the terms “substantially” and “substantial” refer to a considerable degree or extent. When used in conjunction with an event or circumstance, the terms can refer to instances in which the event or circumstance occurs precisely as well as instances in which the event or circumstance occurs to a close approximation, such as accounting for typical manufacturing tolerances or variability of the embodiments described herein.
As used herein, the term “adjacent” refers to being near or adjoining Adjacent objects can be spaced apart from one another or can be in actual or direct contact with one another. In some instances, adjacent objects can be formed integrally with one another.
As used herein, the terms “connect,” “connected,” and “connection” refer to an operational coupling or linking. Connected objects can be directly coupled to one another or can be indirectly coupled to one another, such as via another set of objects.
As used herein, the term “main group element” refers to a chemical element in any of Group IA (or Group 1), Group IIA (or Group 2), Group IIIA (or Group 13), Group IVA (or Group 14), Group VA (or Group 15), Group VIA (or Group 16), Group VIIA (or Group 17), and Group VIIIA (or Group 18). A main group element is also sometimes referred to as a s-block element or a p-block element.
As used herein, the term “transition metal” refers to a chemical element in any of Group IVB (or Group 4), Group VB (or Group 5), Group VIB (or Group 6), Group VIIB (or Group 7), Group VIIIB (or Groups 8, 9, and 10), Group IB (or Group 11), and Group IIB (or Group 12). A transition metal is also sometimes referred to as a d-block element.
As used herein, the term “rare earth element” refers to any of Sc, Y, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, and Lu.
Attention first turns to
In the illustrated embodiment, the MRAM cell 102 is implemented for self-referenced operations, in which a read operation can be carried out based on a relative alignment of magnetizations within the MRAM cell 102 and without requiring a comparison to an external resistance value of a reference cell or a group of reference cells. As further explained below, the self-referenced implementation of the MRAM cell 102 allows the omission of a reference layer with a fixed magnetization and, therefore, allows the operation of the MRAM cell 102 in the absence of, or without regard to, a threshold temperature TBR. In such manner, an operation temperature window of the MRAM device 100 can be greatly expanded, such as to allow operation under high ambient temperatures or to allow a faster speed of writing. Moreover, the MRAM device 100 can be afforded with a greater insensitivity to manufacturing variability, thereby increasing manufacturing yields and lowering manufacturing costs. Furthermore, the self-referenced implementation of the MRAM cell 102 allows the MRAM cell 102 to be interconnected with other MRAM cells that are similarly implemented in a vertical stack or a horizontal array, as further explained below.
The MRAM cell 102 is implemented as a magnetic tunnel junction, and includes a sense layer 104, a storage layer 106, and a spacer layer 108 that is disposed between the sense layer 104 and the storage layer 106. Other implementations of the MRAM cell 102 are contemplated. For example, the relative positioning of the sense layer 104 and the storage layer 106 can be reversed, with the storage layer 106 disposed above the sense layer 104.
Each of the sense layer 104 and the storage layer 106 includes, or is formed of, a magnetic material and, in particular, a magnetic material of the ferromagnetic type. A ferromagnetic material can be characterized by a substantially planar magnetization with a particular coercivity, which is indicative of a magnitude of a magnetic field to reverse the magnetization after it is driven to saturation in one direction. In general, the sense layer 104 and the storage layer 106 can include the same ferromagnetic material or different ferromagnetic materials. As illustrated in
The spacer layer 108 functions as a tunnel barrier, and includes, or is formed of, an insulating material. Suitable insulating materials include oxides, such as aluminum oxide (e.g., Al2O3) and magnesium oxide (e.g., MgO). A thickness of the spacer layer 108 can be in the nm range, such as from about 1 nm to about 10 nm.
In the illustrated embodiment, the MRAM cell 102 is implemented to store data corresponding to one of a pair of logic states. In other words, the MRAM cell 102 is a single-bit cell that stores a single-bit data value, although multi-bit implementations for storing multi-bit data values are also contemplated. In accordance with the single-bit implementation of the MRAM cell 102, the storage layer 106 has a storage magnetization that is switchable between a pair of directions corresponding to the pair of logic states.
Referring to
Still referring to
During a TAS-type write operation, the MRAM cell 102 is heated by applying a heating current through the MRAM cell 102 via the bit line 116, with the transistor 118 in a saturated mode. The MRAM cell 102 is heated to a temperature above the threshold temperature TBS of the pinning layer 110, such that a magnetization of the storage layer 106 is unpinned. Simultaneously or after a short time delay, the field line 112 is activated to induce a write magnetic field 122 to switch the storage magnetization from an initial direction to another direction. Specifically, a write current is applied through the field line 112 to induce the write magnetic field 122 to switch the storage magnetization direction accordingly. Because the storage magnetization direction can be aligned according to the write magnetic field 122, the storage magnetization direction can be switched between multiple directions according to a write encoding scheme. One possible write encoding scheme is implemented with a pair of directions that are displaced by about 180°, such that the logic state “0” is assigned to one of the pair of directions, and the logic state “1” is assigned to another one of the pair of directions.
Once the storage magnetization is switched to a written direction, the transistor 118 is switched to a blocked mode to inhibit current flow through the MRAM cell 102, thereby cooling the MRAM cell 102. The write magnetic field 122 can be maintained during cooling of the MRAM cell 102, and can be deactivated once the MRAM cell 102 has cooled below the threshold temperature TBS of the pinning layer 110. Because the storage magnetization direction is pinned by the exchange bias of the pinning layer 110, its orientation remains stable so as to retain the written data.
Other implementations of write operations are contemplated. For example, the MRAM cell 102 can be implemented with an anisotropic shape having a relatively high aspect ratio, such as about 1.5 or more. In such an anisotropic-shaped implementation of the MRAM cell 102, the storage magnetization direction can be switched and can remain stable, without requiring the pinning layer 110. As another example, a write operation can be carried out by applying a write current through the MRAM cell 102 via the bit line 116, using the so-called spin transfer torque (“STT”) effect. In such a STT-type write operation, the write current can become spin polarized by passing through a polarizing magnetic layer (not illustrated) or through the sense layer 104, and a magnetization of the storage layer 106 can be switched according to a spin-polarized orientation of the write current. Switching of the storage layer magnetization with the spin-polarized write current also can be combined with a TAS-type write operation, such as by heating the MRAM cell 102 above the threshold temperature TBS and then applying the spin-polarized write current through the MRAM cell 102.
During a read operation of the MRAM cell 102, the field line 112 is activated to induce a read magnetic field 124 to vary a magnetization of the sense layer 104. Specifically, a read current is applied through the field line 112 to induce the read magnetic field 124 to vary the sense magnetization direction accordingly. Because the sense layer 104 is subject to little or no exchange bias, the sense magnetization direction can be readily varied under low-intensity magnetic fields and at a temperature below the threshold temperature TBS, while the storage magnetization remains stable in a written direction.
For certain implementations, the read operation of the MRAM cell 102 is carried out in multiple read cycles, in which the field line 112 is activated to induce the read magnetic field 124 that is compatible with a write encoding scheme. Because the sense magnetization direction can be aligned according to the read magnetic field 124, the sense magnetization direction can be successively switched between multiple directions according to the write encoding scheme, such as one in which a pair of directions are displaced by about 180°. In such manner, the sense magnetization can be switched from an initial direction, which corresponds to one of the pair of directions of the write encoding scheme, to another direction, which corresponds to another one of the pair of directions of the write encoding scheme.
As part of each read cycle, a degree of alignment between the sense magnetization direction and the storage magnetization direction is determined by applying a sense current through the MRAM cell 102 via the bit line 116, with the transistor 118 in a saturated mode. Measuring a resulting voltage across the MRAM cell 102 when the sense current is applied yields a resistance value of the MRAM cell 102 for a particular read cycle and for a particular direction of the sense magnetization. Alternatively, a resistance value can be determined by applying a voltage across the MRAM cell 102 and measuring a resulting current. When the respective magnetizations of the sense layer 104 and the storage layer 106 are antiparallel, a resistance value of the MRAM cell 102 typically corresponds to a maximum value, namely Rmax, and, when the respective magnetizations are parallel, a resistance value of the MRAM cell 102 typically corresponds to a minimum value, namely Rmm. When the respective magnetizations are between antiparallel and parallel, a resistance value of the MRAM cell 102 is typically between Rmax and Rmin. Resistance values for multiple read cycles are processed to determine which sense magnetization direction yielded a minimum resistance value, thereby yielding a written direction of the storage layer 106 and its stored data value based on which logic state is assigned to that written direction. Processing of the resistance values can be carried out using a suitable controller in combination with, for example, a sample/hold circuit.
The read operation of the MRAM cell 102 explained above is self-referenced, since it can be carried out based on the relative alignment of magnetizations within the MRAM cell 102, without requiring a comparison to a reference cell or a group of reference cells. As a result, the read operation is less prone to complication and errors in view of manufacturing variability. The self-referenced implementation of the MRAM cell 102 also allows the omission of a reference layer with a fixed magnetization and, therefore, allows the operation of the MRAM cell 102 in the absence of, or without regard to, a threshold temperature TBR. In such manner, an operation temperature window of the MRAM cell 102 can be greatly expanded, such as to temperatures up to about 400° C. or more. Moreover, and in view of the expanded operation temperature window, a high-intensity heating current can be applied during writing, such as in the form of a pulse having a duration of less than about 10 nanoseconds, thereby allowing a faster speed of writing.
Other implementations of read operations are contemplated. For example, a faster speed of reading can be achieved with a single read cycle, albeit involving a comparison to a reference resistance value. During the single read cycle, the sense magnetization can be aligned along a predetermined read direction, such as along one of a pair of directions of a write encoding scheme, and a resulting resistance value of the MRAM cell 102 can be compared with a reference resistance value Rref, which represents an in-between resistance value between Rmax and Rmin. A written direction of the storage layer 106 and its stored data value can be determined based on whether the resistance value of the MRAM cell 102 is greater than Rref, which indicates an antiparallel alignment with respect to the predetermined read direction, or smaller than Rref, which indicates a parallel alignment with respect to the predetermined read direction. As another example, the sense magnetization can be “wiggled” with respect to a predetermined read direction and without completely reversing its direction, by applying an alternating sense current. Here, the alternating sense current can induce a varying read magnetic field, and a resistance value of the MRAM cell 102 can vary alternatively as the sense magnetization is “wiggled” by the varying read magnetic field. A written direction of the storage layer 106 and its stored data value can be determined based on whether the varying resistance value of the MRAM cell 102 is in phase, or out of phase, with respect to the alternating sense current.
Attention next turns to
Referring to
In the illustrated embodiment, the MRAM device 200 also includes a set of traces (or strip conductors) and a transistor 216 to provide write and read functionality. Specifically, a bit line 214 is electrically connected in series to the MRAM cells 202a, 202b, and 202c on the side of the MRAM cell 202a, and the transistor 216 is electrically connected in series to the MRAM cells 202a, 202b, and 202c on the side of the MRAM cell 202c. The bit line 214 serves as a common bit line that is shared by the MRAM cells 202a, 202b, and 202c, and the transistor 216 serves as a common transistor that is shared by the MRAM cells 202a, 202b, and 202c. The implementation of such shared bit line 214 and such shared transistor 216 conserves valuable footprint area and lowers manufacturing costs. Referring to
Still referring to
Other implementations of the vertical stack 204a are contemplated. For example, while the three levels of the MRAM cells 202a, 202b, and 202c and related components are illustrated in
During a TAS-type write operation, the vertical stack 204a is heated by applying a common heating current through the MRAM cells 202a, 202b, and 202c via the bit line 214, with the transistor 216 in a saturated mode. The MRAM cells 202a, 202b, and 202c are heated to a temperature above a threshold temperature TBS, such that storage magnetizations of the MRAM cells 202a, 202b, and 202c are unpinned. Simultaneously or after a short time delay, the field lines 218a, 218b, and 218c are activated to induce write magnetic fields to switch the storage magnetization directions according to a write encoding scheme, such as one with a pair of directions corresponding to the logic state “0” and the logic state “1”. For example, the storage magnetization direction of the MRAM cell 202a can be switched from the logic state “0” to the logic state “1”, the storage magnetization direction of the MRAM cell 202b can be switched from the logic state “1” to the logic state “0”, and the storage magnetization direction of the MRAM cell 202c can be switched from the logic state “0” to the logic state “1”. Once the storage magnetizations are switched to their written directions, the transistor 216 is switched to a blocked mode to inhibit current flow through the vertical stack 204a, thereby cooling the MRAM cells 202a, 202b, and 202c below the threshold temperature TBS and retaining the storage magnetizations along their written directions. In such manner, a multi-bit data value, such as “101”, can be written into the MRAM cells 202a, 202b, and 202c in a single write cycle, with each one of the MRAM cells 202a, 202b, and 202c storing a respective portion of the multi-bit data value.
During a read operation, an individual one of the MRAM cells 202a, 202b, and 202c is selectively addressed to determine a respective portion of a multi-bit data value stored by that MRAM cell. In the case that the MRAM cell 202a is read, for example, the field line 218a is activated to induce a read magnetic field to vary a sense magnetization direction of the MRAM cell 202a. During the read operation of the MRAM cell 202a, the field lines 218b and 218c can remain deactivated to reduce power consumption, and sense magnetization directions of the MRAM cells 202b and 202c can remain substantially unchanged, other than possible variations resulting from thermal agitation and possible interactions with the read magnetic field induced by the field line 218a.
In the illustrated embodiment, the read operation of the MRAM cell 202a is carried out in multiple read cycles, in which the sense magnetization direction of the MRAM cell 202a is successively switched according to a write encoding scheme, such as between a pair of directions corresponding to the logic state “0” and the logic state “1”. As part of each read cycle, a degree of alignment between the sense magnetization direction and the storage magnetization direction of the MRAM cell 202a is determined by applying a sense current through the vertical stack 204a via the bit line 214, with the transistor 216 in a saturated mode. Measuring a resulting voltage (or a resulting current) across the vertical stack 204a yields a resistance value of the vertical stack 204a for a particular read cycle and for a particular sense magnetization direction of the MRAM cell 202a. The resistance value of the vertical stack 204a includes a series resistance contribution of the MRAM cells 202a, 202b, and 202c, in which the sense magnetization direction of the MRAM cell 202a is switched, while the sense magnetization directions of the MRAM cells 202b and 202c remain substantially unchanged. When the sense magnetization and the storage magnetization of the MRAM cell 202a are antiparallel, the series resistance contribution of the MRAM cells 202a, 202b, and 202c typically has a maximum value, such as a local maximum value, and, when the magnetizations of the MRAM cell 202a are parallel, the series resistance contribution of the MRAM cells 202a, 202b, and 202c typically has a minimum value, such as a local minimum value. Resistance values for multiple read cycles are processed to determine which sense magnetization direction yielded a minimum resistance value, thereby yielding a written direction of the MRAM cell 202a and its stored portion of a multi-bit data value. By operating in a similar fashion, the MRAM cells 202b and 202c can be addressed to determine respective portions of the multi-bit data value stored by the MRAM cells 202b and 202c, thereby allowing the multi-bit data value to be read from the vertical stack 204a on a level-by-level basis or a cell-by-cell basis.
Other implementations of read operations are contemplated. For example, during a read operation of the MRAM cell 202a, the sense magnetization direction of the MRAM cell 202a can be varied, with the field lines 218b and 218c activated to align the sense magnetization directions of the MRAM cells 202b and 202c along a predetermined read direction, such as along one of a pair of directions of a write encoding scheme. In such manner, the MRAM cell 202a can be read, while reducing the impact of variations of the sense magnetization directions of the remaining MRAM cells 202b and 202c. As another example, a multi-bit data value can be written into multiple vertical stacks in parallel, with each one of the vertical stacks storing a respective portion of the multi-bit data value. During a read operation, the multi-bit data value can be read from the vertical stacks in parallel, resulting in a faster speed of reading.
In the illustrated embodiment, the MRAM device 300 also includes a bit line 314, which is shared by and electrically connected in series to the MRAM cells 302a, 302b, 302c, and 302d on the side of the MRAM cell 302a, and a transistor 316, which is shared by and electrically connected in series to the MRAM cells 302a, 302b, 302c, and 302d on the side of the MRAM cell 302d. Referring to
Other implementations of the MRAM device 300 are contemplated. For example, while the four MRAM cells 302a, 302b, 302c, and 302d are illustrated in
In the embodiment of
In one embodiment, the MRAM device 400 can be built with standard CMOS layers plus only two additional non-CMOS layers. In this paragraph, the standard CMOS layers included in the horizontal array 404 of the MRAM device 400 are described. The bit line 414 is included in conductive layer 444, so a mask (photolithographic mask or photomask) for selective etching of the conductive layer 444 can be used to form the bit line 414. The conductive layer 444 may be a CMOS metal layer (denoted as Metal(N)). The metal interconnects 412 and the metal island 426 are included in conductive layer 442, so a mask for selective etching of the conductive layer 442 can be used to form the metal interconnects 412 and the metal island 426. The conductive layer 442 may be a CMOS metal layer (denoted as Metal(N-1)), and may be connected to the conductive layer 444 (which may be a CMOS metal layer denoted as Metal(N)) by the via 422 (which may be CMOS VIA(N-1)). The field lines 318 and the metal island 428 are included in conductive layer 440, so a mask for selective etching of the conductive layer 440 can be used to form the field lines 318 and the metal island 428. The conductive layer 440 may be a CMOS layer (denoted as Metal(N-2)), and may be connected to the conductive layer 442 (which may a CMOS layer denoted as Metal(N-1)) by the via 424 (which may be CMOS VIA(N-2)). The via 422 extending from the metal island 426 to the bit line 414 can be formed with a mask for selective etching of vias extending between the conductive layer 442 and the conductive layer 444. The via 424 extending from the metal island 428 to the metal interconnect 412b can be formed with a mask for selective etching of vias extending between the conductive layer 440 and the conductive layer 442. In addition, the via 310e, the metal island 320, and the transistor 316 can also be formed with existing masking layers. The metal island 320 may be included in conductive layer 441, which may be a CMOS metal layer denoted as Metal(N-3).
In one embodiment, the horizontal array 404 of the MRAM device 400 can be formed with the above-described standard CMOS layers plus only two additional non-CMOS layers 450 and 452. A first additional masking layer can be used to form the shared straps 406, which are included in the layer 450. The layer 450 may be a magnetic layer, or may be a non-magnetic conductive layer. A second additional masking layer can be used to form the MRAM cells 302, which are included in the magnetic layer 452. The magnetic layer 452 may be electrically connected to the metal island 428 through the via 424, without any via extending between the magnetic layer 452 and the conductive layer 440, and without any via extending between the magnetic layer 452 and the conductive layer 442. Also, the magnetic layer 452 may be electrically connected to the metal island 428 through the via 424, without any via extending from the magnetic layer 452 to the conductive layer 440, and without any via extending from the magnetic layer 452 to the conductive layer 442. Each of the MRAM cells 302 may be connected to the conductive layer 442 without formation of any vias. Each of the MRAM cells 302 may be connected to the layer 450 without formation of any vias.
Referring to
In one embodiment, the horizontal array 304 of the MRAM device 300 can be formed with the above-described standard CMOS layers plus three additional non-CMOS layers 350, 352, and 354. The shared straps 306 are included in the layer 352. The shared straps 306 may be formed from a magnetic material. Alternatively or in addition, the shared straps 306 may be a thermal barrier, or may be a resistive layer formed from materials such as rubidium or tantalum. The layer 352 may be a magnetic layer, or may be a non-magnetic conductive layer. The MRAM cells 302 are included in the magnetic layer 354. However, the third additional layer 350 (not needed in the MRAM device 400 of
Referring to
Referring to
Referring to
Other implementations of the horizontal array 404 are contemplated. For example, while the four MRAM cells 302a, 302b, 302c, and 302d are illustrated in
Referring to
While the invention has been described with reference to the specific embodiments thereof, it should be understood by those skilled in the art that various changes may be made and equivalents may be substituted without departing from the true spirit and scope of the invention as defined by the appended claims. In addition, many modifications may be made to adapt a particular situation, material, composition of matter, method, or process to the objective, spirit and scope of the invention. All such modifications are intended to be within the scope of the claims appended hereto. In particular, while the methods disclosed herein have been described with reference to particular operations performed in a particular order, it will be understood that these operations may be combined, sub-divided, or re-ordered to form an equivalent method without departing from the teachings of the invention. Accordingly, unless specifically indicated herein, the order and grouping of the operations are not limitations of the invention.
This application is a divisional of U.S. patent application Ser. No. 13/657,708 filed Oct. 22, 2012, the contents of which are incorporated herein by reference.
Number | Date | Country | |
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Parent | 13657708 | Oct 2012 | US |
Child | 14468234 | US |