Fast growth of the pervasive computing and handheld/communication industry generates exploding demand for high capacity nonvolatile solid-state data storage devices. It is believed that nonvolatile memories, especially flash memory, will replace DRAM to occupy the biggest share of memory market. However, flash memory has several drawbacks such as slow access speed (˜ms write and ˜50-100 ns read), limited endurance (˜103-104 programming cycles), and the integration difficulty in system-on-chip (SoC). Flash memory (NAND or NOR) also faces significant scaling problems at 32 nm node and beyond.
Magneto-resistive Random Access Memory (MRAM) is a promising candidate for future nonvolatile and universal memory. MRAM features non-volatility, fast writing/reading speed (<10 ns), almost unlimited programming endurance (>1015 cycles) and zero standby power. The basic component of MRAM is a magnetic tunneling junction (MTJ). Data storage is realized by switching the resistance of MTJ between a high-resistance state and a low-resistance state. MRAM switches the MTJ resistance by using a current induced magnetic field to switch the magnetization of MTJ. As the MTJ size shrinks, the switching magnetic field amplitude increases and the switching variation becomes severer. Hence, the incurred high power consumption limits the scaling of conventional MRAM.
Recently, a new write mechanism, which is based upon spin polarization current induced magnetization switching, was introduced to the MRAM design. This new MRAM design, called Spin-Transfer Torque RAM (STRAM), uses a (bidirectional) current through the MTJ to realize the resistance switching. Therefore, the switching mechanism of STRAM is constrained locally and STRAM is believed to have a better scaling property than the conventional MRAM.
However, a number of yield-limiting factors must be overcome before STRAM enters the production stage. One challenge is that the barrier layer of the MTJ needs to be thick enough to accurately read the MTJ but thin enough to pass enough current to write to the MTJ without damaging the barrier layer. Thus there is a tradeoff in read verses write performance based on the particular barrier thickness.
The present disclosure relates to spin-transfer torque memory. In particular, the present disclosure relates to memory that includes a separate read and write path. A write current sets the magnetization orientation of a giant magnetoresistance (GMR) cell free layer. A free layer magnetization orientation of an adjacent magnetic tunnel junction data (MTJ) cell is then set by magnetostatic coupling, for example, with the magnetization orientation of a giant magnetoresistance (GMR) cell free layer. The resistance or data state of the memory unit can then be read out by passing a read current through the magnetic tunnel junction data cell.
One illustrative memory unit includes a giant magnetoresistance cell electrically coupled between a write bit line and a write source line. The giant magnetoresistance cell includes a free magnetic layer separated from a first pinned magnetic layer by a first non-magnetic electrically conducting layer. A magnetic tunnel junction data cell is electrically coupled between a read bit line and a read source line. The magnetic tunnel junction data cell includes the free magnetic layer separated from a second pinned magnetic layer by an oxide barrier layer. A write current passes through the giant magnetoresistance cell to switch the giant magnetoresistance cell between a high resistance state and a low resistance state. The magnetic tunnel junction data cell is configured to switch between a high resistance state and a low resistance state by magnetostatic coupling with the giant magnetoresistance cell, and be read by a read current passing though the magnetic tunnel junction data cell.
Another illustrative memory unit includes a giant magnetoresistance cell electrically coupled between a write bit line and a write source line. A write current passing through the giant magnetoresistance cell switches the giant magnetoresistance cell between a high resistance state and a low resistance state. The giant magnetoresistance cell includes a free magnetic layer separated from a pinned magnetic layer by a non-magnetic electrically conducting layer. A magnetic tunnel junction data cell is electrically coupled between a read bit line and a read source line. The magnetic tunnel junction data cell is configured to switch between a high resistance state and a low resistance state, and be read by a read current passing though the magnetic tunnel junction data cell. The magnetic tunnel junction data cell includes a free magnetic layer separated from a pinned magnetic layer by an oxide barrier layer. The free magnetic layer of the magnetic tunnel junction data cell is coextensive with the free magnetic layer of the giant magnetoresistance cell.
An illustrative method includes passing a write current thorough a giant magnetoresistance cell to switch a free magnetic layer between a high resistance state and a low resistance state. The free layer is common to both the giant magnetoresistance cell and a magnetic tunnel junction data cell. Then the method includes reading the resistance state of the magnetic tunnel junction data cell by passing a reading current through the magnetic tunnel junction data cell.
The disclosure may be more completely understood in consideration of the following detailed description of various embodiments of the disclosure in connection with the accompanying drawings, in which:
The figures are not necessarily to scale. Like numbers used in the figures refer to like components. However, it will be understood that the use of a number to refer to a component in a given figure is not intended to limit the component in another figure labeled with the same number.
In the following description, reference is made to the accompanying set of drawings that form a part hereof and in which are shown by way of illustration several specific embodiments. It is to be understood that other embodiments are contemplated and may be made without departing from the scope or spirit of the present disclosure. The following detailed description, therefore, is not to be taken in a limiting sense. The definitions provided herein are to facilitate understanding of certain terms used frequently herein and are not meant to limit the scope of the present disclosure.
Unless otherwise indicated, all numbers expressing feature sizes, amounts, and physical properties used in the specification and claims are to be understood as being modified in all instances by the term “about.” Accordingly, unless indicated to the contrary, the numerical parameters set forth in the foregoing specification and attached claims are approximations that can vary depending upon the desired properties sought to be obtained by those skilled in the art utilizing the teachings disclosed herein.
The recitation of numerical ranges by endpoints includes all numbers subsumed within that range (e.g. 1 to 5 includes 1, 1.5, 2, 2.75, 3, 3.80, 4, and 5) and any range within that range.
As used in this specification and the appended claims, the singular forms “a”, “an”, and “the” encompass embodiments having plural referents, unless the content clearly dictates otherwise. As used in this specification and the appended claims, the term “or” is generally employed in its sense including “and/or” unless the content clearly dictates otherwise.
The present disclosure relates to spin-transfer torque memory. In particular, the present disclosure relates to memory that includes a separate read and write path. A write current sets the magnetization orientation of a giant magnetoresistance (GMR) cell free layer while isolating the write current path to the GMR cell (by for example, floating the MTJ cell during the write operation). A free layer magnetization orientation of an adjacent magnetic tunnel junction data (MTJ) cell is then set by magnetostatic coupling with the magnetization orientation of a giant magnetoresistance (GMR) cell free layer. The resistance or data state of the memory unit can then be read out by passing a read current through the magnetic tunnel junction data cell. Isolating the writing current path to the GMR cell and isolating the read current path to the MTJ cell (by for example, floating the GMR cell during the read operation). This allows each cell to be tailored to the specific read or write conditions and thus improve performance of each cell and the memory unit. While the present disclosure is not so limited, an appreciation of various aspects of the disclosure will be gained through a discussion of the examples provided below.
The giant magnetoresistance cell 20 and the magnetic tunnel junction data cell 30 can be isolated from each other and adjacent each (sufficiently close to each other) other to allow for magnetostatic coupling (i.e., magnetic dipolar interaction) between the giant magnetoresistance cell 20 and the magnetic tunnel junction data cell 30. The coupling strength is inversely proportional to the separation of the elements. Thus, in many embodiments, it is desirable to have the giant magnetoresistance cell 20 and the magnetic tunnel junction data cell 30 as close as possible, for example in a range from 20 to 100 nm.
A transistor 14 is electrically couples the source line SL to both the giant magnetoresistance cell 20 and the magnetic tunnel junction data cell 30. The transistor 14 has a gate that is electrically coupled to a word line WL to activate the transistor 14 and allow current to pass between the source line SL and the write bit line WBL and/or read bit line RBL. The transistor 14 can be any useful transistor such as, for example, a PMOS or NMOS semiconductor device. The illustrated semiconductor transistor device is formed on a substrate 12 and includes a doped source region S and a doped drain region D. In some embodiments (as illustrated), an electrically conductive plug element 16 electrically connects the transistor 14 with both the giant magnetoresistance cell 20 and the magnetic tunnel junction data cell 30. To avoid current sneak paths, a diode may be included between the giant magnetoresistance cell 20 and the write bit line WBL or between the magnetic tunnel junction data cell 30 and the read bit line RBL, as desired.
The giant magnetoresistance cell 20 includes a ferromagnetic free layer (double headed arrow layer) and a ferromagnetic reference (i.e., pinned) layer (single headed arrow layer). The ferromagnetic free layer and a ferromagnetic reference layer are separated by a non-magnetic electrically conducting layer 25. The ferromagnetic layers (free and pinned layers) may be made of any useful ferromagnetic (FM) alloys such as, for example, Fe, Co, Ni and the non-magnetic electrically conducting layer 25 may be made of any non-magnetic electrically conducting such as, for example a non-magnetic metal (e.g., Cu, Ru, Au or Ag). Other suitable materials may also be used.
The write current passes through the giant magnetoresistance cell 20 and alters the relative orientation of the magnetization vectors or magnetization orientations of the ferromagnetic layers (free and pinned layers). The giant magnetoresistance cell 20 is in the low resistance state where the magnetization orientation of the ferromagnetic free layer is parallel and in the same direction of the magnetization orientation of the ferromagnetic reference or pinned layer. The giant magnetoresistance cell 20 is in the high resistance state where the magnetization orientation of the ferromagnetic free layer is anti-parallel and in the opposite direction of the magnetization orientation of the ferromagnetic reference or pinned layer. For example, sufficient current flowing in a first direction through the giant magnetoresistance cell 20 places the giant magnetoresistance cell 20 in a low resistance state and sufficient current flowing in a second direction (opposing the first direction) through the giant magnetoresistance cell 20 places the giant magnetoresistance cell 20 in a high resistance state.
The magnetic tunnel junction data cell 30 includes a ferromagnetic free layer (double headed arrow layer) and a ferromagnetic reference (i.e., pinned) layer (single headed arrow layer). The ferromagnetic free layer and a ferromagnetic reference layer are separated by an oxide barrier layer 35 or tunnel barrier. The ferromagnetic layers (free and pinned layers) may be made of any useful ferromagnetic (FM) alloys such as, for example, Fe, Co, Ni and the insulating barrier layer 35 may be made of any electrically insulating material such as, for example an oxide material (e.g., Al2O3 or MgO). Other suitable materials may also be used.
The read current resistance across the magnetic tunnel junction data cell 30 is determined by the relative orientation of the magnetization vectors or magnetization orientations of the ferromagnetic layers (free and pinned layers). The magnetic tunnel junction data cell 30 is in the low resistance state where the magnetization orientation of the ferromagnetic free layer is parallel and in the same direction of the magnetization orientation of the ferromagnetic reference or pinned layer. This is termed the low resistance state or “0” data state. The magnetic tunnel junction data cell 30 is in the high resistance state where the magnetization orientation of the ferromagnetic free layer is anti-parallel and in the opposite direction of the magnetization orientation of the ferromagnetic reference or pinned layer. This is termed the high resistance state or “1” data state.
The magnetization direction of the ferromagnetic reference layer is pinned in a predetermined direction while the magnetization direction of the ferromagnetic free layer is free to rotate under the influence of magnetostatic coupling with the free layer of the giant magnetoresistance cell 20. The magnetic tunnel junction data cell 30 is configured to switch between a high resistance state and a low resistance state by magnetostatic coupling with the giant magnetoresistance cell. Pinning of the ferromagnetic reference layer may be achieved through, e.g., the use of exchange bias with an antiferromagnetically ordered material such as PtMn, IrMn and others.
An alternate method of switching the resistance state (not utilized here) and hence the data state of the magnetic tunnel junction data cell is via spin-transfer occurs when a current, passing through a magnetic layer of the magnetic tunnel junction data cell, becomes spin polarized and imparts a spin torque on the free layer of the magnetic tunnel junction data cell. When a sufficient spin torque is applied to the free layer, the magnetization orientation of the free layer can be switched between two opposite directions and accordingly the magnetic tunnel junction data cell can be switched between the parallel state (i.e., low resistance state or “0” data state) and anti-parallel state (i.e., high resistance state or “1” data state) depending on the direction of the current. However, in some instances the oxide barrier can be degraded with the large write current density utilized to switch the magnetic tunnel junction data cell. Thus, the present disclosure eliminates passing the write through the magnetic tunnel junction data cell and thus the magnetic tunnel junction data cell can be tailored to maximize the reading operation on the magnetic tunnel junction data cell.
The illustrative memory unit 10 may be used to construct a memory device that includes multiple memory units (see
The giant magnetoresistance cell 60 and the magnetic tunnel junction data cell 70 can isolated from each other and adjacent each (sufficiently close to each other) other to allow for magnetostatic coupling (i.e., magnetic dipolar interaction) between the giant magnetoresistance cell 60 and the magnetic tunnel junction data cell 70, as described above.
A write transistor 64 is electrically couples the source line SL to giant magnetoresistance cell 60. The write transistor 64 has a gate that is electrically coupled to a write word line WWL to activate the write transistor 64 and allow current to pass between the source line SL and the write bit line WBL. The write transistor 64 can be any useful transistor, as described above. The illustrated semiconductor transistor device 64 is formed on a substrate 62 and includes a doped source region S and a doped drain region D. In some embodiments (as illustrated), an electrically conductive plug element 66 electrically connects the write transistor 64 with the giant magnetoresistance cell 60.
A read transistor 63 electrically couples the source line SL to the magnetic tunnel junction data cell 70. The read transistor 63 has a gate that is electrically coupled to a read word line RWL to activate the read transistor 63 and allow current to pass between the source line SL and the read bit line RBL. The read transistor 63 can be any useful transistor, as described above. The illustrated semiconductor transistor device 63 is formed on a substrate 62 and includes a doped source region S and a doped drain region D. In some embodiments (as illustrated), an electrically conductive plug element 67 electrically connects the read transistor 63 with the magnetic tunnel junction data cell 70.
The giant magnetoresistance cell 60 includes a ferromagnetic free layer (double headed arrow layer) and a ferromagnetic reference (i.e., pinned) layer (single headed arrow layer). The ferromagnetic free layer and a ferromagnetic reference layer are separated by a non-magnetic electrically conducting layer 65, as described above. The magnetic tunnel junction data cell 70 includes a ferromagnetic free layer (double headed arrow layer) and a ferromagnetic reference (i.e., pinned) layer (single headed arrow layer). The ferromagnetic free layer and a ferromagnetic reference layer are separated by an oxide barrier layer 75 or tunnel barrier, as described above.
The write current passes through the giant magnetoresistance cell 60 and alters the relative orientation of the magnetization vectors or magnetization orientations of the ferromagnetic layers (free and pinned layers), as described above. The read current resistance across the magnetic tunnel junction data cell 70 is determined by the relative orientation of the magnetization vectors or magnetization orientations of the ferromagnetic layers (free and pinned layers), as described above.
The magnetization direction of the ferromagnetic reference layer is pinned in a predetermined direction while the magnetization direction of the ferromagnetic free layer is free to rotate under the influence of magnetostatic coupling with the free layer of the giant magnetoresistance cell 60. The magnetic tunnel junction data cell 70 is configured to switch between a high resistance state and a low resistance state by magnetostatic coupling with the giant magnetoresistance cell. Pinning of the ferromagnetic reference layer may be achieved through, e.g., the use of exchange bias with an antiferromagnetically ordered material such as PtMn, IrMn and others.
The illustrative memory unit 50 may be used to construct a memory device that includes multiple memory units (see
The giant magnetoresistance cell 120 and the magnetic tunnel junction data cell 130 can isolated from each other and adjacent each (sufficiently close to each other) other to allow for magnetostatic coupling (i.e., magnetic dipolar interaction) between the giant magnetoresistance cell 120 and the magnetic tunnel junction data cell 130, as described above.
A write transistor 114 is electrically couples a write source line WSL to the giant magnetoresistance cell 120. The write transistor 114 has a gate that is electrically coupled to a write word line WWL to activate the write transistor 114 and allow current to pass between the write source line WSL and the write bit line BL. The write transistor 114 can be any useful transistor, as described above.
A read transistor 113 electrically couples the read source line RSL to the magnetic tunnel junction data cell 130. The read transistor 113 has a gate that is electrically coupled to a read word line RWL to activate the read transistor 113 and allow current to pass between the read source line RSL and the read bit line BL. The read transistor 113 can be any useful transistor, as described above.
The giant magnetoresistance cell 120 and the magnetic tunnel junction data cell 130 are described above. In the illustrated embodiment, a pinning layer (multiple small single headed arrow layer) can be present to assist in pinning the pinned layer. The write current passes through the giant magnetoresistance cell 120 and alters the relative orientation of the magnetization vectors or magnetization orientations of the ferromagnetic layers (free and pinned layers), as described above. The read current resistance across the magnetic tunnel junction data cell 130 is determined by the relative orientation of the magnetization vectors or magnetization orientations of the ferromagnetic layers (free and pinned layers), as described above.
The magnetization direction of the ferromagnetic reference layer is pinned in a predetermined direction while the magnetization direction of the ferromagnetic free layer is free to rotate under the influence of magnetostatic coupling with the free layer of the giant magnetoresistance cell 120. The magnetic tunnel junction data cell 130 is configured to switch between a high resistance state and a low resistance state by magnetostatic coupling with the giant magnetoresistance cell. Pinning of the ferromagnetic reference layer may be achieved through, e.g., the use of exchange bias with an antiferromagnetically ordered material such as PtMn, IrMn and others.
The illustrative memory unit 100 may be used to construct a memory device that includes multiple memory units (see
The giant magnetoresistance cell 220 and the magnetic tunnel junction data cell 230 can isolated from each other and adjacent each (sufficiently close to each other) other to allow for magnetostatic coupling (i.e., magnetic dipolar interaction) between the giant magnetoresistance cell 220 free layer and the magnetic tunnel junction data cell 230 free layer, as described above.
The giant magnetoresistance cell 220 includes a ferromagnetic free layer (double headed arrow layer) and a ferromagnetic reference (i.e., pinned) layer (single headed arrow layer) and a pinning layer (multiple single headed arrows layer). The ferromagnetic free layer and a ferromagnetic reference layer are separated by a non-magnetic electrically conducting layer 225, as described above. The magnetic tunnel junction data cell 230 includes a ferromagnetic free layer (double headed arrow layer) and a ferromagnetic reference (i.e., pinned) layer (single headed arrow layer) and a pinning layer (multiple single headed arrows layer). The ferromagnetic free layer and a ferromagnetic reference layer are separated by an oxide barrier layer 235 or tunnel barrier, as described above.
In the illustrated embodiment, a non-magnetic electrically conducting element 201 electrically couples the common bit line BL to the giant magnetoresistance cell 220 free layer and the magnetic tunnel junction data cell 230 free layer. The non-magnetic electrically conducting element 201 can also be described as a spacer layer, separating the giant magnetoresistance cell 220 free layer and the magnetic tunnel junction data cell 230 free layer by any useful distance that allows for magnetostatic coupling between the giant magnetoresistance cell 220 free layer and the magnetic tunnel junction data cell 230 free layer. In many embodiments, this distance is less than 100 nm or in a range from 10 to 80 nm, or in a range from 20 nm to 50 nm.
In the illustrated embodiment, the giant magnetoresistance cell 220 and the magnetic tunnel junction data cell 230 formed as separate stacks where the giant magnetoresistance cell 220 free layer and the magnetic tunnel junction data cell 230 free layer are adjacent to one another to allow for magnetostatic coupling. However, the pinned layers for both the giant magnetoresistance cell 220 and the magnetic tunnel junction data cell 230 are not adjacent to each other or co-planar, as illustrated. As illustrated, the giant magnetoresistance cell 220 free layer and the magnetic tunnel junction data cell 230 free layer a disposed between or separating the giant magnetoresistance cell 220 pinned layer and the magnetic tunnel junction data cell 230 pinned layer. This construction allows for formation of the giant magnetoresistance cell 220 and the magnetic tunnel junction data cell 230 separately as the layers of the memory unit 200 are formed. This can improve the manufacture of the memory unit 200.
A write transistor 214 is electrically couples a write source line WSL to the giant magnetoresistance cell 220. The write transistor 214 has a gate that is electrically coupled to a write word line WWL to activate the write transistor 214 and allow current to pass between the write source line WSL and the write bit line BL. The write transistor 214 can be any useful transistor, as described above.
A read transistor 213 electrically couples the read source line RSL to the magnetic tunnel junction data cell 230. The read transistor 213 has a gate that is electrically coupled to a read word line RWL to activate the read transistor 213 and allow current to pass between the read source line RSL and the read bit line BL. The read transistor 213 can be any useful transistor, as described above.
The giant magnetoresistance cell 220 and the magnetic tunnel junction data cell 230 are described above. In the illustrated embodiment, a pinning layer (multiple small single headed arrow layer) can be present to assist in pinning the pinned layer. The write current passes through the giant magnetoresistance cell 220 and alters the relative orientation of the magnetization vectors or magnetization orientations of the ferromagnetic layers (free and pinned layers), as described above. The read current resistance across the magnetic tunnel junction data cell 230 is determined by the relative orientation of the magnetization vectors or magnetization orientations of the ferromagnetic layers (free and pinned layers), as described above.
The magnetization direction of the ferromagnetic reference layer is pinned in a predetermined direction while the magnetization direction of the ferromagnetic free layer is free to rotate under the influence of magnetostatic coupling with the free layer of the giant magnetoresistance cell 220. The magnetic tunnel junction data cell 230 is configured to switch between a high resistance state and a low resistance state by magnetostatic coupling with the giant magnetoresistance cell. Pinning of the ferromagnetic reference layer may be achieved through, e.g., the use of exchange bias with an antiferromagnetically ordered material such as PtMn, IrMn and others.
The illustrative memory unit 200 may be used to construct a memory device that includes multiple memory units (as illustrated in
The giant magnetoresistance cell 320 and the magnetic tunnel junction data cell 330 can isolated from each other and adjacent each (sufficiently close to each other) other to allow for magnetostatic coupling (i.e., magnetic dipolar interaction) between the giant magnetoresistance cell 320 free layer and the magnetic tunnel junction data cell 330 free layer, as described above.
In the illustrated embodiment, the giant magnetoresistance cell 320 and the magnetic tunnel junction data cell 330 formed as separate stacks where the giant magnetoresistance cell 320 free layer and the magnetic tunnel junction data cell 330 free layer are adjacent to one another to allow for magnetostatic coupling. However, the pinned layers for both the giant magnetoresistance cell 320 and the magnetic tunnel junction data cell 330 are not adjacent to each other or co-planar, as illustrated. This construction allows for formation of the giant magnetoresistance cell 320 and the magnetic tunnel junction data cell 330 separately as the layers of the memory unit 300 are formed. This can improve the manufacture of the memory unit 300.
A write transistor 314 is electrically couples a write source line WSL to the giant magnetoresistance cell 320. The write transistor 314 has a gate that is electrically coupled to a write word line WWL to activate the write transistor 314 and allow current to pass between the write source line WSL and the write bit line BL. The write transistor 314 can be any useful transistor, as described above.
A read transistor 313 electrically couples the read source line RSL to the magnetic tunnel junction data cell 330. The read transistor 313 has a gate that is electrically coupled to a read word line RWL to activate the read transistor 313 and allow current to pass between the read source line RSL and the read bit line BL. The read transistor 313 can be any useful transistor, as described above.
The giant magnetoresistance cell 320 and the magnetic tunnel junction data cell 330 are described above. In the illustrated embodiment, a pinning layer (multiple small single headed arrow layer) can be present to assist in pinning the pinned layer. The write current passes through the giant magnetoresistance cell 320 and alters the relative orientation of the magnetization vectors or magnetization orientations of the ferromagnetic layers (free and pinned layers), as described above. The read current resistance across the magnetic tunnel junction data cell 330 is determined by the relative orientation of the magnetization vectors or magnetization orientations of the ferromagnetic layers (free and pinned layers), as described above.
The magnetization direction of the ferromagnetic reference layer is pinned in a predetermined direction while the magnetization direction of the ferromagnetic free layer is free to rotate under the influence of magnetostatic coupling with the free layer of the giant magnetoresistance cell 320. The magnetic tunnel junction data cell 330 is configured to switch between a high resistance state and a low resistance state by magnetostatic coupling with the giant magnetoresistance cell. Pinning of the ferromagnetic reference layer may be achieved through, e.g., the use of exchange bias with an antiferromagnetically ordered material such as PtMn, IrMn and others.
The illustrative memory unit 300 may be used to construct a memory device that includes multiple memory units (as illustrated in
The giant magnetoresistance cell 420 and the magnetic tunnel junction data cell 430 can isolated from each other and spaced apart form one another a distance that does not allow for magnetostatic coupling (i.e., magnetic dipolar interaction) between the giant magnetoresistance cell 420 free layer and the magnetic tunnel junction data cell 430 free layer. In many embodiments, this distance is greater than 100 nm or greater than 150 nm or greater than 200 nm, depending on the relative magnetic field strength of the giant magnetoresistance cell 420 free layer and the relative size and coercively of the magnetic tunnel junction data cell 430 free layer.
The giant magnetoresistance cell 420 includes a ferromagnetic free layer (double headed arrow layer) and a ferromagnetic reference (i.e., pinned) layer (single headed arrow layer) and a pinning layer (multiple single headed arrows layer). The ferromagnetic free layer and a ferromagnetic reference layer are separated by a non-magnetic electrically conducting layer 425, as described above. The magnetic tunnel junction data cell 430 includes a ferromagnetic free layer (double headed arrow layer) and a ferromagnetic reference (i.e., pinned) layer (single headed arrow layer) and a pinning layer (multiple single headed arrows layer). The ferromagnetic free layer and a ferromagnetic reference layer are separated by an oxide barrier layer 435 or tunnel barrier, as described above.
In the illustrated embodiment, the giant magnetoresistance cell 420 and the magnetic tunnel junction data cell 430 formed as separate stacks where the giant magnetoresistance cell 420 free layer and the magnetic tunnel junction data cell 430 free layer are generally coplanar to allow a bridge 450 of magnetic dots (of any shape) to at least partially extend between the giant magnetoresistance cell 420 free layer and the magnetic tunnel junction data cell 430 free layer. In the illustrated embodiment, an electrically insulating material 451, 452 couples the bridge 450 of magnetic dots to the giant magnetoresistance cell 420 and the magnetic tunnel junction data cell 430, respectively. This electrically insulating material 451, 452 can be any useful electrically insulating material such as, for example, an oxide material. The electrically insulating material 451, 452 can be utilized to prevent or mitigate any current leakage across the bridge 450 of magnetic dots.
The bridge 450 of magnetic dots can utilize the phenomena known as magnetic quantum cellular automata. The magnetic dots can be single domain magnetic dots that couple to their nearest neighboring dot or free layer via magnetostatic coupling. The magnetic dots can be disposed on the bridge element 450 in any useful size or period. In one example, the magnetic dots had a diameter of about 100 nm and placed on a pitch of about 135 nm and having a thickness of about 10 nm. These magnetic dots can be formed from any useful magnetic material such as, for example, magnetic alloys (e.g., supermally Ni80Fe14Mo5X where X is other metals) and placed on a single-crystal silicon substrate bridge 450. The bridge 450 of magnetic dots provides magnetostatic coupling of the giant magnetoresistance cell 420 free layer and the magnetic tunnel junction data cell 430 free layer.
In the illustrated embodiment, the pinned layers for both the giant magnetoresistance cell 420 and the magnetic tunnel junction data cell 430 are not adjacent to each other or co-planar, as illustrated (however this is not required). This construction allows for formation of the giant magnetoresistance cell 420 and the magnetic tunnel junction data cell 430 separately as the layers of the memory unit 400 are formed. This can improve the manufacture of the memory unit 400.
A write transistor 414 is electrically couples a write source line WSL to the giant magnetoresistance cell 420. The write transistor 414 has a gate that is electrically coupled to a write word line WWL to activate the write transistor 414 and allow current to pass between the write source line WSL and the write bit line WBL. The write transistor 414 can be any useful transistor, as described above.
A read transistor 413 electrically couples the read source line RSL to the magnetic tunnel junction data cell 430. The read transistor 413 has a gate that is electrically coupled to a read word line RWL to activate the read transistor 413 and allow current to pass between the read source line RSL and the read bit line RBL. The read transistor 413 can be any useful transistor, as described above.
The giant magnetoresistance cell 420 and the magnetic tunnel junction data cell 430 are described above. In the illustrated embodiment, a pinning layer (multiple small single headed arrow layer) can be present to assist in pinning the pinned layer. The write current passes through the giant magnetoresistance cell 420 and alters the relative orientation of the magnetization vectors or magnetization orientations of the ferromagnetic layers (free and pinned layers), as described above. The read current resistance across the magnetic tunnel junction data cell 430 is determined by the relative orientation of the magnetization vectors or magnetization orientations of the ferromagnetic layers (free and pinned layers), as described above.
The magnetization direction of the ferromagnetic reference layer is pinned in a predetermined direction while the magnetization direction of the ferromagnetic free layer is free to rotate under the influence of magnetostatic coupling with the free layer of the giant magnetoresistance cell 420 via the bridge 450 of magnetic dots, described above. The magnetic tunnel junction data cell 430 is configured to switch between a high resistance state and a low resistance state by magnetostatic coupling with the giant magnetoresistance cell. Pinning of the ferromagnetic reference layer may be achieved through, e.g., the use of exchange bias with an antiferromagnetically ordered material such as PtMn, IrMn and others.
The illustrative memory unit 400 may be used to construct a memory device that includes multiple memory units (as illustrated in
The giant magnetoresistance cell 520 includes a ferromagnetic free layer 501 (double headed arrow layer) and a ferromagnetic reference (i.e., pinned) layer (single headed arrow layer) and a pinning layer (multiple single headed arrows layer). The ferromagnetic free layer 501 and a ferromagnetic reference layer are separated by a non-magnetic electrically conducting layer 525, as described above. The magnetic tunnel junction data cell 530 includes the ferromagnetic free layer 501 (double headed arrow layer) and a ferromagnetic reference (i.e., pinned) layer (single headed arrow layer) and a pinning layer (multiple single headed arrows layer). The ferromagnetic free layer 501 and a ferromagnetic reference layer are separated by an oxide barrier layer 535 or tunnel barrier, as described above.
The giant magnetoresistance cell 520 and the magnetic tunnel junction data cell 530 are electrically coupled to one another and share a common free layer 501. In the illustrated embodiment, the giant magnetoresistance cell 520 and the magnetic tunnel junction data cell 530 formed as separate stacks where the giant magnetoresistance cell 520 free layer 501 and the magnetic tunnel junction data cell 230 free layer 501 are coextensive. The pinned layers for both the giant magnetoresistance cell 520 and the magnetic tunnel junction data cell 530 are not adjacent to each other or co-planar, as illustrated. As illustrated, the giant magnetoresistance cell 520 free layer 501 and the magnetic tunnel junction data cell 530 free layer 501 separates the giant magnetoresistance cell 520 non-magnetic electrically conducting layer 525 (described above) and the magnetic tunnel junction data cell 530 oxide barrier layer 535 (described above). This construction allows for formation of the giant magnetoresistance cell 520 and the magnetic tunnel junction data cell 530 separately as the layers of the memory unit 500 are formed. This can improve the manufacture of the memory unit 500.
A write transistor 514 is electrically couples a write source line WSL to the giant magnetoresistance cell 520. The write transistor 514 has a gate that is electrically coupled to a write word line WWL to activate the write transistor 514 and allow current to pass between the write source line WSL and the write bit line BL. The write transistor 514 can be any useful transistor, as described above.
A read transistor 513 electrically couples the read source line RSL to the magnetic tunnel junction data cell 530. The read transistor 513 has a gate that is electrically coupled to a read word line RWL to activate the read transistor 513 and allow current to pass between the read source line RSL and the read bit line BL. The read transistor 513 can be any useful transistor, as described above.
The giant magnetoresistance cell 520 and the magnetic tunnel junction data cell 530 are described above. In the illustrated embodiment, a pinning layer (multiple small arrow layer) can be present to assist in pinning the pinned layer. The write current passes through the giant magnetoresistance cell 520 and alters the relative orientation of the magnetization vectors or magnetization orientations of the ferromagnetic layers (free and pinned layers), as described above. The read current resistance across the magnetic tunnel junction data cell 530 is determined by the relative orientation of the magnetization vectors or magnetization orientations of the ferromagnetic layers (free and pinned layers), as described above.
The magnetization direction of the ferromagnetic reference layer is pinned in a predetermined direction while the magnetization direction of the ferromagnetic free layer 501 is free to rotate under the influence of the write current. The free layer 501 is configured to switch between a high resistance state and a low resistance state upon application of the desired write current. Pinning of the ferromagnetic reference layer may be achieved through, e.g., the use of exchange bias with an antiferromagnetically ordered material such as PtMn, IrMn and others.
The illustrative memory unit 500 may be used to construct a memory device that includes multiple memory units (as illustrated in
In many of the embodiments described herein, the MTJ cell can be made smaller than the GMR cell so that the MTJ cell can be easily written to. In many of these embodiments, the giant magnetoresistance cell has a first free magnetic layer volume and the magnetic tunnel junction data cell has a second free magnetic layer volume, and the second free magnetic layer volume is less than the first free magnetic layer volume. In some embodiments, the second free layer volume is 90% or less the first free layer volume, or 80% or less or 70% or less, as desired.
Thus, embodiments of the MEMORY WITH SEPARATE READ AND WRITE PATHS are disclosed. The implementations described above and other implementations are within the scope of the following claims. One skilled in the art will appreciate that the present disclosure can be practiced with embodiments other than those disclosed. The disclosed embodiments are presented for purposes of illustration and not limitation, and the present invention is limited only by the claims that follow.
This application is a continuation of application Ser. No. 12/974,679, filed Dec. 21, 2010, which is a continuation of application Ser. No. 12/774,016 filed May 5, 2010, which is a divisional of application Ser. No. 12/198,416, filed Aug. 26, 2008, now U.S. Pat. No. 7,881,098 issued Feb. 1, 2011, the contents of each is hereby incorporated by reference in its entirety.
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