Number | Name | Date | Kind |
---|---|---|---|
4732647 | Aine | Mar 1988 | |
4783237 | Aine et al. | Nov 1988 |
Entry |
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Albert, William C., "Vibrating Quartz Crystal Beam Accelerometer," pp. 33-44. |
Howe, Roger T. et al., "Integrated Resonant-Microbridge Vapor Sensor," IEEE Transactions on Electron Devices, vol. ED-33, no. 4, Apr. 1986, pp. 499-506. |
Schmidt, Martin A. et al., "Silicon Resonant Microsensors," Ceramic Engineering and Science Proceedings, Automotive Materials Conference, Nov. 19, 1986, pp. 1019-1034. |