Using supercritical fluid

Industry

CPC
B81C2201/117

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

Current Industry

B81C2201/117Using supercritical fluid

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for etching the silicon oxide layer of a semic...
- Patent number 8,889,563
- Issue date Nov 18, 2014
- Pukyong National University Industry—University Cooperation Foundation
- Kwon-Taek Lim
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for producing structural body and etchant for silicon oxide...
- Patent number 7,670,496
- Issue date Mar 2, 2010
- Sony Corporation
- Koichiro Saga
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for stripping sacrificial layer in MEMS assembly
- Patent number 7,432,572
- Issue date Oct 7, 2008
- Texas Instruments Incorporated
- Joshua Malone
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vapor phase etching MEMS devices
- Patent number 7,279,431
- Issue date Oct 9, 2007
- Semitool, Inc.
- Eric J. Bergman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Removal of MEMS sacrificial layers using supercritical fluid/chemic...
- Patent number 7,160,815
- Issue date Jan 9, 2007
- Advanced Technology Materials, Inc.
- Michael B. Korzenski
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Etching method
- Patent number 7,105,447
- Issue date Sep 12, 2006
- Sony Corporation
- Tsutomu Oosaka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for removing a sacrificial material with a compressed fluid
- Patent number 6,958,123
- Issue date Oct 25, 2005
- Reflectivity, Inc.
- Jason S. Reid
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for stripping sacrificial layer in MEMS assembly
- Patent number 6,951,769
- Issue date Oct 4, 2005
- Texas Instruments Incorporated
- Joshua Malone
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for reducing leaching in metal-coated MEMS
- Patent number 6,939,574
- Issue date Sep 6, 2005
- PTS Corporation
- Bevan Staple
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Drying resist with a solvent bath and supercritical CO2
- Patent number 6,928,746
- Issue date Aug 16, 2005
- Tokyo Electron Limited
- Chantal J. Arena-Foster
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods and apparatus for cleaning and/or treating a substrate usin...
- Patent number 6,782,900
- Issue date Aug 31, 2004
- MiCell Technologies, Inc.
- James DeYoung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of undercutting micro-mechanical device with super-critical...
- Patent number 6,737,225
- Issue date May 18, 2004
- Texas Instruments Incorporated
- Seth Andrian Miller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for the manufacture of a thin film actuated mirror array
- Patent number 6,203,715
- Issue date Mar 20, 2001
- Daewoo Electronics Co., Ltd.
- You-Kwang Kim
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated micromechanical sensor device and process for producing it
- Patent number 6,133,059
- Issue date Oct 17, 2000
- Infineon Technologies AG
- Wolfgang Werner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of cleaning and treating a semiconductor device including a...
- Patent number 6,024,801
- Issue date Feb 15, 2000
- Texas Instruments Incorporated
- Robert M. Wallace
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for preventing micromechanical structures from adhering to a...
- Patent number 5,766,367
- Issue date Jun 16, 1998
- Sandia Corporation
- James H. Smith
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated micromechanical sensor device
- Patent number 5,744,719
- Issue date Apr 28, 1998
- Siemens Aktiengesellschaft
- Wolfgang Werner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of unsticking components of micro-mechanical devices
- Patent number 5,482,564
- Issue date Jan 9, 1996
- Texas Instruments Incorporated
- Monte A. Douglas
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and product for fabricating a resonant-bridge microaccelerom...
- Patent number 4,893,509
- Issue date Jan 16, 1990
- General Motors Corporation
- Bernard A. MacIver
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR ETCHING THE SILICON OXIDE LAYER OF A SEMIC...
- Publication number 20120196445
- Publication date Aug 2, 2012
- Pukyong National University
- Kwon-Taek LIM
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Depositing an Anti-Adhesion Layer
- Publication number 20090004388
- Publication date Jan 1, 2009
- Franz Larmer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for stripping sacrificial layer in MEMS assembly
- Publication number 20060014312
- Publication date Jan 19, 2006
- Texas Instruments, Inc.
- Joshua Malone
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Process for producing structural body and etchant for silicon oxide...
- Publication number 20050205515
- Publication date Sep 22, 2005
- Koichiro Saga
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for removing a sacrificial material with a compressed fluid
- Publication number 20050164127
- Publication date Jul 28, 2005
- Jason S. Reid
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Removal of MEMS sacrificial layers using supercritical fluid/chemic...
- Publication number 20050118813
- Publication date Jun 2, 2005
- Michael B. Korzenski
- B08 - CLEANING
Information Patent Application
Removal of MEMS sacrificial layers using supercritical fluid/chemic...
- Publication number 20050118832
- Publication date Jun 2, 2005
- Michael B. Korzenski
- B08 - CLEANING
Information Patent Application
Etching process
- Publication number 20050112887
- Publication date May 26, 2005
- Junichi Muramoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Etching method
- Publication number 20050106892
- Publication date May 19, 2005
- SONY CORPORATION
- Tsutomu Oosaka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Surface treatment method, semiconductor device, method of fabricati...
- Publication number 20040259357
- Publication date Dec 23, 2004
- Koichiro Saga
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Vapor phase etching MEMS devices
- Publication number 20040259370
- Publication date Dec 23, 2004
- Semitool, Inc.
- Eric J. Bergman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for stripping sacrificial layer in MEMS assembly
- Publication number 20040248417
- Publication date Dec 9, 2004
- TEXAS INSTRUMENTS INCORPORATED
- Joshua J. Malone
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for releasing and drying moveable elements of micro-electron...
- Publication number 20040139987
- Publication date Jul 22, 2004
- David J. Mount
- B08 - CLEANING
Information Patent Application
Drying resist with a solvent bath and supercritical CO2
- Publication number 20040035021
- Publication date Feb 26, 2004
- Chantal J. Arena-Foster
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for reducing leaching in metal-coated MEMS
- Publication number 20040022931
- Publication date Feb 5, 2004
- PTS Corporation
- Bevan Staple
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Process and apparatus for contacting a precision surface with liqui...
- Publication number 20030196679
- Publication date Oct 23, 2003
- International Business Machines Corporation
- John Michael Cotte
- B08 - CLEANING
Information Patent Application
Method of undercutting micro-mechanical device with super-critical...
- Publication number 20030124462
- Publication date Jul 3, 2003
- TEXAS INSTRUMENTS INCORPORATED
- Seth Andrian Miller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Methods for formation of air gap interconnects
- Publication number 20030073302
- Publication date Apr 17, 2003
- REFLECTIVITY, INC., a California corporation
- Andrew G. Huibers
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Methods of applying coatings to micro electromechanical devices usi...
- Publication number 20030064149
- Publication date Apr 3, 2003
- Seth A. Miller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for removing a sacrificial material with a compressed fluid
- Publication number 20030047533
- Publication date Mar 13, 2003
- REFLECTIVITY, INC., a California corporation
- Jason S. Reid
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Methods and apparatus for cleaning and/or treating a substrate usin...
- Publication number 20030047195
- Publication date Mar 13, 2003
- James DeYoung
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Using supercritical fluid

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and apparatus for etching the silicon oxide layer of a semic...

Process for producing structural body and etchant for silicon oxide...

Method for stripping sacrificial layer in MEMS assembly

Vapor phase etching MEMS devices

Removal of MEMS sacrificial layers using supercritical fluid/chemic...

Etching method

Method for removing a sacrificial material with a compressed fluid

Method for stripping sacrificial layer in MEMS assembly

Method for reducing leaching in metal-coated MEMS

Drying resist with a solvent bath and supercritical CO2

Methods and apparatus for cleaning and/or treating a substrate usin...

Method of undercutting micro-mechanical device with super-critical...

Method for the manufacture of a thin film actuated mirror array

Integrated micromechanical sensor device and process for producing it

Method of cleaning and treating a semiconductor device including a...

Method for preventing micromechanical structures from adhering to a...

Integrated micromechanical sensor device

Method of unsticking components of micro-mechanical devices

Method and product for fabricating a resonant-bridge microaccelerom...

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR ETCHING THE SILICON OXIDE LAYER OF A SEMIC...

Method for Depositing an Anti-Adhesion Layer

Method for stripping sacrificial layer in MEMS assembly

Process for producing structural body and etchant for silicon oxide...

Method for removing a sacrificial material with a compressed fluid

Removal of MEMS sacrificial layers using supercritical fluid/chemic...

Removal of MEMS sacrificial layers using supercritical fluid/chemic...

Etching process

Etching method

Surface treatment method, semiconductor device, method of fabricati...

Vapor phase etching MEMS devices

Method for stripping sacrificial layer in MEMS assembly

Method for releasing and drying moveable elements of micro-electron...

Drying resist with a solvent bath and supercritical CO2

Method for reducing leaching in metal-coated MEMS

Process and apparatus for contacting a precision surface with liqui...

Method of undercutting micro-mechanical device with super-critical...

Methods for formation of air gap interconnects

Methods of applying coatings to micro electromechanical devices usi...

Method for removing a sacrificial material with a compressed fluid

Methods and apparatus for cleaning and/or treating a substrate usin...