Number | Name | Date | Kind |
---|---|---|---|
4435896 | Parrillo et al. | Mar 1984 | |
4507847 | Sullivan | Apr 1985 | |
4753898 | Parrillo et al. | Jun 1988 | |
4764477 | Chang et al. | Aug 1988 | |
4771014 | Liou et al. | Sep 1988 | |
4906588 | Harrington, III | Mar 1990 | |
4968639 | Bergonzoni | Nov 1990 | |
4997782 | Bergonzoni | Mar 1991 | |
5006476 | De Jong et al. | Apr 1991 | |
5122474 | Harrington, III | Jun 1992 | |
5290714 | Onozawa | Mar 1994 | |
5393677 | Lien et al. | Feb 1995 | |
5405791 | Ahmad et al. | Apr 1995 | |
5484739 | Lee et al. | Jan 1996 | |
5500379 | Odake et al. | Mar 1996 | |
5532176 | Katada et al. | Jul 1996 |
Entry |
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Stanley Wolf, "Silicon Processing For The VLSI Era", 1990, vol. 2, pp. 387-389. 1990. |