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4945068 | Sugaya | Jul 1990 | A |
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5308787 | Hong et al. | May 1994 | A |
5322810 | Ayukawa et al. | Jun 1994 | A |
5330920 | Soleimani et al. | Jul 1994 | A |
5358894 | Fazan | Oct 1994 | A |
5372951 | Anjum et al. | Dec 1994 | A |
5429960 | Hong | Jul 1995 | A |
5480828 | Hsu | Jan 1996 | A |
5516707 | Loh et al. | May 1996 | A |
5576226 | Hwang | Nov 1996 | A |
5614421 | Yang | Mar 1997 | A |
5672521 | Barsan et al. | Sep 1997 | A |
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Number | Date | Country |
---|---|---|
2140971 | May 1990 | JP |
11-330263 | Nov 1999 | JP |
Entry |
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Integration of Trench DRAM into a High Performance of 0.18 um Logic Technology with Copper BEOL by S. Crowder, R. Hannon, H. Ho, D. Sinitsky, S. Wu, K. Winstel, B. Khan, S.R. Stiffler, S.S. Iyer—believed to be for the 1998 International Electron Device Meeting, Dec. 1998. |
1987 Derwent Publication No. 87-157760/23. |