Claims
- 1. A method for releasing a workpiece from a substrate comprising the steps of:
- providing a substrate which is transparent to a predetermined wavelength of electromagnetic radiation;
- subsequently forming, on said substrate, a separation layer which ablates in response to said predetermined radiation;
- providing a workpiece on said separation layer; and
- directing said predetermined radiation at said separation layer through said transparent substrate so as to ablate said separation layer and to separate said workpiece from said substrate, without disintegrating said substrate or said workpiece.
- 2. The method as defined in claim 1, further comprising the step of forming a reflecting layer on said separation layer, and wherein said workpiece is provided on said formed reflecting layer.
- 3. The method as defined in claim 2, further comprising the step of attaching a frame on said workpiece, said attached frame supporting said workpiece after said workpiece is separated from said substrate.
- 4. The method as defined in claim 3, wherein the workpiece is a multi-layer interconnect thin film stack, and wherein said step of forming a workpiece comprises forming said multi-layer interconnect thin film stack.
- 5. The method as defined in claim 4, further comprising the step of electrically testing said thin film stack.
- 6. The method as defined in claim 5, wherein said testing step includes electrically testing said thin film stack both before and after said thin film stack is separated from said substrate.
- 7. The method as defined in claim 1, further comprising joining said separated workpiece to a substrate which is different from said transparent substrate.
Parent Case Info
This is a Continuation of Application Ser. No. 08/080,085 filed Jun. 21, 1993 abandoned, which is a Divisional of Application Ser. No. 07/695,368, filed May 3, 1991, now U.S. Pat. No. 5,258,236.
US Referenced Citations (24)
Non-Patent Literature Citations (1)
Entry |
IBM Technical Disclosure Bulletin, vol. 28, No. 5, Oct. 1985, by Donelon et al, p. 2034. |
Divisions (1)
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Number |
Date |
Country |
Parent |
695368 |
May 1991 |
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Continuations (1)
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Number |
Date |
Country |
Parent |
80085 |
Jun 1993 |
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