Number | Date | Country | Kind |
---|---|---|---|
2000-362300 | Nov 2000 | JP |
Number | Name | Date | Kind |
---|---|---|---|
5155064 | Mise | Oct 1992 | A |
5284801 | Page et al. | Feb 1994 | A |
5527737 | Jeng | Jun 1996 | A |
5635428 | Martin et al. | Jun 1997 | A |
5858831 | Sung | Jan 1999 | A |
5880030 | Fang et al. | Mar 1999 | A |
5981333 | Parekh et al. | Nov 1999 | A |
5990558 | Tran | Nov 1999 | A |
6077738 | Lee et al. | Jun 2000 | A |
6077770 | Hsu | Jun 2000 | A |
6124200 | Wang et al. | Sep 2000 | A |
6153490 | Xing et al. | Nov 2000 | A |
6165837 | Kawakubo et al. | Dec 2000 | A |
6187624 | Huang | Feb 2001 | B1 |
6255151 | Fukuda et al. | Jul 2001 | B1 |
6271116 | Lou | Aug 2001 | B1 |
6287961 | Liu et al. | Sep 2001 | B1 |
6365453 | Deboer et al. | Apr 2002 | B1 |
6372635 | Wang et al. | Apr 2002 | B1 |
6429116 | Wang et al. | Aug 2002 | B1 |
6562711 | Powers | May 2003 | B1 |
6627493 | Tu et al. | Sep 2003 | B2 |
Number | Date | Country |
---|---|---|
11-135620 | May 1999 | JP |
Entry |
---|
Wolf, Ph.D., Stanley, “Multilevel-Interconnect Technology for VLSI and USLI,” Silicon Processing for the VLSI Era—vol. 2: Process Integration, Lattice Press, 1990, pp. 238-239. |