Number | Date | Country | Kind |
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98-45269 | Oct 1998 | KR |
Number | Name | Date | Kind |
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5283201 | Tsang | Feb 1994 | |
5567634 | Hebert et al. | Oct 1996 | |
5618751 | Golden et al. | Apr 1997 | |
5648281 | Williams et al. | Jul 1997 |
Number | Date | Country |
---|---|---|
63-131542 | Jun 1988 | JP |
Entry |
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Boron Out Diffusion From is Substrates in Various Ambients by K. Suzuki pp. 1095-1097, 1978. |
Tapered Windows in Phosphorous-Doped SiO2 by Ion Implantation by J. North pp. 809-812, 1996. |