Number | Date | Country | Kind |
---|---|---|---|
50-127403 | Oct 1975 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
3082124 | French et al. | Mar 1963 | |
3287243 | Ligenza | Nov 1966 | |
3674549 | Ohshita et al. | Jul 1972 | |
3984263 | Asao et al. | Oct 1976 |
Entry |
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Billings; J. Vac. Science Tech., vol. 6 (1969), p. 757. |