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3516914 | Hall, Jr. | Jun 1970 | |
4390394 | Mathuni et al. | Jun 1983 | |
4628588 | McDavod | Dec 1986 | |
4634395 | Gobrecht et al. | Jan 1987 | |
4745089 | Orban | May 1988 | |
5053105 | Fox, III | Oct 1991 | |
5545588 | Yoo | Aug 1996 | |
5670423 | Yoo | Sep 1997 |
Entry |
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PCT Notification of Transmittal of the International Search Report or the Declaration, mailed Apr. 27, 1999, for PCT Application No. PCT/US99/00073; Attorney Docket No. TEGL 1082 (WO). |
Chemistry of titanium dry etching in fluorinated and chlorinated gases, Pure & Appl. Chem., vol. 64, No. 5, pp. 703-707, 1992; Printed in Great Britain, © 1992 IUPAC; Francesco Fracassi and Riccardo d'Agostino. |