Claims
- 1. A method of manufacturing a micro-head element, comprising:a first step of forming a sacrifice layer made from a resist on a flat surface of a conductive substrate in such a manner that a central portion of said sacrifice layer is formed into a trapezoidal shape in cross section; a second step of forming a metal film having a thickness of one to several μm over the entire surface of said conductive substrate in such a manner as to cover the surface of said sacrifice layer; a third step of forming a symmetrical spring pattern on a central portion of said metal film; a fourth step of forming a micro-resist film having one side less than the thickness of said metal film on a central portion of said spring pattern; a fifth step of etching said metal film directly before said micro-resist film is perfectly separated from said metal film, to form a micro-head element including a leading end having a flat portion; and a sixth step of removing said sacrifice layer and said micro-resist film, to form a spring, made from said metal film, for elastically supporting said micro-head element.
Priority Claims (1)
Number |
Date |
Country |
Kind |
9-214492 |
Aug 1997 |
JP |
|
Parent Case Info
This application is a divisional of application Ser. No. 09/130,318 filed Aug. 7, 1998 pending.
US Referenced Citations (3)
Number |
Name |
Date |
Kind |
5506829 |
Yagi et al. |
Apr 1996 |
|
5546375 |
Shimada et al. |
Aug 1996 |
|
5923637 |
Shimada et al. |
Jul 1999 |
|